CN105463377B - 真空蒸镀装置 - Google Patents

真空蒸镀装置 Download PDF

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Publication number
CN105463377B
CN105463377B CN201510607517.1A CN201510607517A CN105463377B CN 105463377 B CN105463377 B CN 105463377B CN 201510607517 A CN201510607517 A CN 201510607517A CN 105463377 B CN105463377 B CN 105463377B
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film thickness
organic material
quartz
evaporation source
evaporation
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Chinese (zh)
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CN105463377A (zh
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田村博之
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Canon Tokki Corp
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Canon Tokki Corp
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CN201510607517.1A 2014-09-30 2015-09-22 真空蒸镀装置 Active CN105463377B (zh)

Applications Claiming Priority (2)

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JP2014-200860 2014-09-30
JP2014200860A JP6448279B2 (ja) 2014-09-30 2014-09-30 真空蒸着装置

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CN105463377A CN105463377A (zh) 2016-04-06
CN105463377B true CN105463377B (zh) 2019-08-23

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JP (1) JP6448279B2 (enExample)
KR (1) KR101968798B1 (enExample)
CN (1) CN105463377B (enExample)
TW (1) TWI681066B (enExample)

Families Citing this family (10)

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Publication number Priority date Publication date Assignee Title
KR20180067463A (ko) * 2016-10-25 2018-06-20 어플라이드 머티어리얼스, 인코포레이티드 증착 레이트를 측정하기 위한 측정 조립체, 증발 소스, 증착 장치, 및 이를 위한 방법
US10763143B2 (en) * 2017-08-18 2020-09-01 Applied Materials, Inc. Processing tool having a monitoring device
KR101870581B1 (ko) * 2017-09-29 2018-06-22 캐논 톡키 가부시키가이샤 수정진동자의 수명 판정방법, 막두께 측정장치, 성막방법, 성막장치, 및 전자 디바이스 제조방법
JP7301578B2 (ja) * 2019-03-29 2023-07-03 キヤノントッキ株式会社 成膜装置及び成膜方法
CN109930112A (zh) * 2019-04-15 2019-06-25 湖畔光电科技（江苏）有限公司 一种蒸镀腔体结构
TWI701641B (zh) * 2019-10-01 2020-08-11 龍翩真空科技股份有限公司 無線傳輸薄膜厚度監控裝置
KR102615500B1 (ko) * 2019-10-21 2023-12-19 가부시키가이샤 아루박 막 형성장치
CN111829428B (zh) * 2020-06-17 2022-02-15 华中科技大学 一种双石英晶振膜厚控制仪及误差校正方法
KR20220011924A (ko) * 2020-07-22 2022-02-03 주식회사 엘지화학 실리콘계 코팅 조성물 및 이를 포함하는 실리콘계 이형필름
JP2023072407A (ja) * 2021-11-12 2023-05-24 キヤノントッキ株式会社 成膜量測定装置、成膜装置、成膜量測定方法、成膜方法、及び電子デバイスの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102465262A (zh) * 2010-11-04 2012-05-23 佳能株式会社 成膜装置
CN103305796A (zh) * 2012-03-12 2013-09-18 株式会社日立高新技术 蒸发源装置及真空蒸镀装置、以及有机el显示装置的制造方法

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
JP4233644B2 (ja) 1998-09-22 2009-03-04 株式会社アルバック 膜厚モニター用水晶振動子
JP2005325400A (ja) * 2004-05-13 2005-11-24 Seiko Epson Corp 真空蒸着装置及び薄膜形成方法
KR20120023273A (ko) * 2010-09-01 2012-03-13 (주)알파플러스 셔터를 이용하는 진공증착막의 두께 모니터링 방법 및 이 방법을 채용하는 진공증착장치
JP2014065942A (ja) * 2012-09-26 2014-04-17 Hitachi High-Technologies Corp 真空蒸着装置
JP2014070238A (ja) * 2012-09-28 2014-04-21 Hitachi High-Technologies Corp 真空蒸着装置及びその蒸着方法
CN103469172B (zh) * 2013-08-31 2015-08-05 上海膜林科技有限公司 石英晶体镀膜厚度控制方法及石英晶体镀膜装置
JP6223275B2 (ja) * 2014-05-15 2017-11-01 キヤノントッキ株式会社 水晶発振式膜厚計

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102465262A (zh) * 2010-11-04 2012-05-23 佳能株式会社 成膜装置
CN103305796A (zh) * 2012-03-12 2013-09-18 株式会社日立高新技术 蒸发源装置及真空蒸镀装置、以及有机el显示装置的制造方法

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JP6448279B2 (ja) 2019-01-09
KR101968798B1 (ko) 2019-04-12
TW201627514A (zh) 2016-08-01
TWI681066B (zh) 2020-01-01
CN105463377A (zh) 2016-04-06
JP2016069694A (ja) 2016-05-09
KR20160038746A (ko) 2016-04-07

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