CN104977903A - Real time dispatch system-based method and system for wafer batch dispatch under machine set - Google Patents
Real time dispatch system-based method and system for wafer batch dispatch under machine set Download PDFInfo
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- 238000012545 processing Methods 0.000 claims description 58
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000012544 monitoring process Methods 0.000 claims description 7
- 238000012423 maintenance Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 137
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
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Abstract
The invention provides a real time dispatch system-based method and system for wafer batch dispatch under a machine set. The method comprises steps of setting the number of load ports of each machine under a machine set, the real time dispatch rule of each machine, and the preset time specification of each wafer batch dispatched to a corresponding machine according to effective machine information and online wafer batch data; timely obtaining information of a wafer batch which is currently processed by each machine, and calculating an idle sequence of the machines within a follow-up period of estimated time according to the number of the load ports of each machine and the information of the wafer batch which is currently processed by each machine; and sequentially updating the real time dispatch rule of each machine according to the idle sequence, and obtaining a dispatch result of each machine according to the update real time dispatch rule. According to the invention, a phenomenon that machines under the same machine set preorder the same wafer batch during preordering of wafer batches can be prevented.
Description
Technical field
The present invention relates to semiconductor production field, particularly relate to a kind of based on the wafer batch work dispatching method under the board group of Real Time Dispatching system and system.
Background technology
In semiconductor manufacturing is produced, because production technology and process thereof are very complicated, board for carrying out manufacturing process is also not quite similar, different platform or board group can carry out the processing procedure processing of multiple different attribute wafer batch, and the different platform under same board group can send the wafer of work batch also different.
At present, most wafer manufacturing works all have employed and have implemented send work system (Real Time Dispatch, abbreviation: RTD) come responsible line sends work.Implement to send work system can comparatively reasonably send work result by built-in algorithm to batch formulation of the wafer on line, produce assistant (MA) only to need to send the wafer lot sequence of work system recommendation to send work according to enforcement, compare like this and manually send work can greatly improve the efficiency of sending work.
But current Real Time Dispatching system is performed by selected board and sends work, namely produce assistant and send goods result by regular acquisition of work of sending of single board.In actual production process; often there is following situation; board below a board group can receive the wafer batch got off upstream simultaneously; consider iff the angle from single board when carrying out sending work; often can cause the problem of robbing mutually goods under same unit between different platform; at this moment be because the production assistant of the board had first have selected a collection of wafer batch, but the production assistant of board also have selected this collection of wafer lot time just in addition.So just greatly waste the production capacity of overhead traveling crane and manufacturing plant (FAB) and produce the productive capacity of assistant.
Summary of the invention
In view of the above problems, the invention provides a kind of based on the wafer batch work dispatching method under the board group of Real Time Dispatching system and system.
The technical scheme that technical solution problem of the present invention adopts is:
Based on the wafer batch work dispatching method under the board group of Real Time Dispatching system, wherein, described method comprises:
Based on wafer lot secondary data on effective machine station information and line, set the quantity of load port of each board under a board group, the real-time of each board send goods rule, and each board is sent goods to the schedule time specification of each wafer batch of this board;
The wafer batch information that each board of Real-time Obtaining is processing, and according to the wafer batch information that quantity and each board of the load port of each board are processing, calculate the idle order of each board in follow-up one period of estimated time;
Upgrade the real-time of each board successively according to described idle order and send goods rule, and according to send in real time after upgrading goods regular obtain each board send goods result;
Wherein, after sending goods rule to upgrade to arbitrary described board real-time, all discharge and sent goods to this board and the wafer batch exceeding described schedule time specification, and the wafer of release batch is incorporated in the wafer batch of goods to be sent, and then upgrade the real-time goods rule of sending of board described in follow-up based on this goods wafer to be sent batch, and synchronization wafer batch can only send goods to one board.
Described work dispatching method, wherein, sets the wafer batch information of processing corresponding to each board according to process requirements.
Described work dispatching method, wherein, the schedule time specification of the predetermined wafer of each board batch is all greater than the described estimated time.
Described work dispatching method, wherein, the wafer batch packets of information that each board is processing is drawn together: wafer Mission Number, TIT, FPT, T
nand T
e;
Wherein, TIT represents the time of wafer batch ingress engine platform, and FPT represents that expectation wafer batch completes the time needed for processing procedure, T
nrepresent current time, T
erepresent the described estimated time.
Described work dispatching method, wherein, the idle order of each board described is determined in such a way:
T
n+ T
ethe result of-TIT-FTP is larger, represent that the load port of the board corresponding to it is more idle, different according to the time of the free time of each load port, obtain the idle order of each load port, and load port idle at first in each board is as the free time at first of this board, to obtain the idle order of each board, thus obtain described idle order;
Wherein, T is worked as
n+ T
eduring-TIT-FTP>0, represent that board is at follow-up T
ein can terminate processing procedure to current wafer batch, thus make load port corresponding in board idle;
Work as T
n+ T
eduring-TIT-FTP<0, represent that board is at follow-up T
ein can not terminate processing procedure to current wafer batch, thus board is not idle.
Described work dispatching method, wherein, described T
eset according to the actual needs in production run.
Send a work system based on the wafer batch under the board group of Real Time Dispatching system, wherein, described system comprises:
Effective board maintenance module under board group, for based on wafer lot secondary data on effective machine station information and line, set the quantity of load port of each board under a board group, the real-time of each board send goods rule, and each board is sent goods to the schedule time specification of each wafer batch of this board;
The idle computing module of board, be communicatively coupled to described effective board maintenance module, for the wafer batch information that each board of Real-time Obtaining is processing, according to the wafer batch information that quantity and each board of the load port of each board are processing, calculate the idle order of each board in follow-up one period of estimated time;
Work monitoring module is sent under board group, be communicatively coupled to the idle computing module of described board, after obtaining described idle order, upgrade the real-time of each board successively according to described idle order and send goods rule, and according to send in real time after upgrading goods regular obtain each board send goods result;
Board group send work result display module, be communicatively coupled to and send work monitoring module under described board group, with obtain described send goods result after described goods result of sending is shown;
Wherein, after sending goods rule to upgrade to arbitrary described board real-time, all discharge and sent goods to this board and the wafer batch exceeding described schedule time specification, and the wafer of release batch is incorporated in the wafer batch of goods to be sent, and then upgrade the real-time goods rule of sending of board described in follow-up based on this goods wafer to be sent batch, and synchronization wafer batch can only send goods to one board.
Described sends work system, and wherein, the idle computing module of described board also comprises:
First computing unit, enter the moment of corresponding board according to each batch of wafer and estimate that this wafer batch time of carrying out needed for processing procedure determines whether this wafer batch can terminate processing procedure within the described estimated time, thus making the board load port corresponding to this wafer batch idle;
Second computing unit, according to the idle condition of load port each under board group, calculates the idle order of each board.
Described sends work system, and wherein, the wafer batch packets of information that each board is processing is drawn together: wafer Mission Number, TIT, FPT, T
nand T
e;
Wherein, TIT represents the time of wafer batch ingress engine platform, and FPT represents that expectation wafer batch completes the time needed for processing procedure, T
nrepresent current time, T
erepresent the described estimated time.
Described sends work system, wherein,
Described first computing unit obtains T
n, T
e, after TIT, FTP, calculate T
n+ T
ethe value of-TIT-FTP, if be greater than zero, then judges that board is at follow-up T
ein can terminate processing procedure to current wafer batch, thus make load port corresponding in board idle, if be less than zero, then judge that board is at follow-up T
ein can not terminate processing procedure to current wafer batch, thus board is not idle;
Described second computing unit calculates T to described first computing module
n+ T
eobtain being worth after-TIT-FTP and sort from big to small, thus determine the idle order of each load port, and load port idle at first in each board is as the free time at first of this board, to obtain the idle order of each board.
Technique scheme tool has the following advantages or beneficial effect:
The present invention is by sending goods optimization to the board under board group, under avoiding same board group there is the predetermined situation with a collection of wafer simultaneously in board when predetermined wafer batch, the production efficiency of factory can be improved to a great extent, greatly reduce the occurrence probability of sending goods mistake.
Accompanying drawing explanation
With reference to appended accompanying drawing, to describe embodiments of the invention more fully.But, appended accompanying drawing only for illustration of and elaboration, do not form limitation of the scope of the invention.
Fig. 1 is the steps flow chart schematic diagram of the wafer batch work dispatching method under the board group that the present invention is based on Real Time Dispatching system;
Fig. 2 generates the logic diagram of sending work result about board group in the embodiment of the present invention.
Embodiment
The invention provides a kind of based on the wafer batch work dispatching method under the board group of Real Time Dispatching system.
As shown in Figure 1, the inventive method mainly comprises the following steps:
Step 1, based on wafer lot secondary data on effective machine station information and line, set the quantity of load port of each board under a board group, the real-time of each board send goods rule, and each board is sent goods to the schedule time specification of each wafer batch of this board;
The wafer batch information that each board of step 2, Real-time Obtaining is processing, and according to the wafer batch information that quantity and each board of the load port of each board are processing, calculate the idle order of each board in follow-up one period of estimated time;
Step 3, upgrade the real-time of each board successively according to described idle order and send goods rule, and according to send in real time after upgrading goods regular obtain each board send goods result;
Wherein, after sending goods rule to upgrade to arbitrary described board real-time, all discharge and sent goods to this board and the wafer batch exceeding described schedule time specification, and the wafer of release batch is incorporated in the wafer batch of goods to be sent, and then upgrade the real-time goods rule of sending of board described in follow-up based on this goods wafer to be sent batch, and synchronization wafer batch can only send goods to one board.
Specific embodiment below in conjunction with accompanying drawing is described in detail to the inventive method.
In the present embodiment, first based on wafer lot secondary data on effective machine station information and line, set the quantity of load port of each board under a board group, the real-time of each board send goods rule, and each board is sent goods to the schedule time specification of each wafer batch of this board, from above-mentioned set some information, choose the load port quantity of each board and above-mentioned schedule time specification, and the numbering corresponding to each board can obtain following table one:
| Board is numbered | Wafer batch size specification | Schedule time specification (minute) |
| Board 1 | 3 | 30 |
| Board 2 | 3 | 30 |
| Board 3 | 4 | 20 |
| Board 4 | 5 | 40 |
| Board 5 | 5 | 40 |
Table one
Wafer batch size specification in upper table one represents to the maximum predetermined lot number of board predistribution lot, i.e. LoadPort(load port in board) number; (ReserveTime Spec, is called for short: RTS) represent that single makes a reservation for born results effective time schedule time specification, if exceed this effective time, lot will by the predetermined relationship removed with board.
Then, the wafer batch information that under the board group that Real-time Obtaining is current, each board is processing, according to the wafer batch information that predetermined wafer batch size specification and each board of each board are processing, calculate the idle order of load port in each board in follow-up one period of estimated time; Concrete, the wafer batch information that each board under the current board group of Real-time Obtaining is processing comprises: the time TIT(trackin time of wafer Mission Number, wafer batch ingress engine platform), estimate that wafer batch completes the time FPT(forecastprocess time needed for processing procedure), current time T
n, estimated time T
e, wherein, T
ecan set according to the actual needs in production run, and T
etime should be less than the schedule time specification of the predetermined wafer of board batch.By to calculate in each load port in each board carry out the T of the wafer of processing procedure
n+ T
ethe value of-TIT-FTP determines the idle condition of load unit.If work as T
n+ T
eduring-TIT-FTP>0, then represent at follow-up T
eprocessing procedure can be terminated to current wafer batch in time, thus make load port corresponding in board idle, as worked as T
n+ T
eduring-TIT-FTP<0, then represent at follow-up T
ecan not terminate processing procedure to current wafer batch in time, thus board is not idle.By above-mentioned result of calculation is numbered with board and the information such as board load port quantity corresponding after, in one embodiment, can obtain as following table two
Table two
As shown in Table 2, at following T
etime in, No. 1 board can terminate the procedure for processing of the wafer of No. 1 batch, namely the load port in No. 1 board shared by the wafer of No. 1 batch can be idle, No. 1 board then can not terminate the procedure for processing of the wafer of No. 2 batches, namely the load port in No. 1 board shared by the wafer of No. 2 batches can not be idle, No. 2 boards can not terminate the procedure for processing of the wafer of No. 3 batches, namely the load port in No. 2 boards shared by the wafer of No. 3 batches can not be idle, No. 2 boards then can terminate the procedure for processing of the wafer of No. 4 batches, namely the load port in No. 2 boards shared by the wafer of No. 4 batches can be idle, No. 3 boards can not terminate the procedure for processing of the wafer of No. 5 batches, namely the load port in No. 3 boards shared by the wafer of No. 5 batches can not be idle, No. 4 boards can terminate the procedure for processing of No. 6 batches of wafers, namely the load port in No. 4 boards shared by No. 6 batches of wafers can be idle, No. 5 boards can terminate the procedure for processing of No. 7 batches of wafers, namely the load port in No. 5 boards shared by No. 7 batches of wafers can be idle.
Can obtain according to the above-mentioned result of calculation corresponding to each board calculated the load port free time which board understands some within the estimated time, then according to the idle condition of each load port, obtain the idle order of each load port.Concrete, by the above-mentioned T calculated
n+ T
ethe value of-TIT-FTP judges the idle order determining load port, T
n+ T
ethe value of-TIT-FTP is larger, shows this load port more first free time.To illustrate in following table three in the above-described embodiments to the result that the idle order of each load port sorts.
Table three
According to table three, wafer batch specification number amount that at most can be predetermined due to board 1 is 3, and only had this batch of Lot2 being processed in following 5 minutes, therefore can determine that board 1 needs predetermined wafer batch size to be 2, similar, board 2 needs predetermined wafer batch size to be 2, board 3 needs predetermined wafer batch size to be 4, board 4 needs predetermined wafer batch size to be 5, and board 5 needs predetermined wafer batch size to be 5, then according to the T drawn before in each board
n+ T
ethe size of-TIT-FTP, can determine the idle order of board load port.
Then, as shown in Figure 2, according to the idle order of each above-mentioned board load port, each board is upgraded send goods rule in real time successively, and according to send in real time after upgrading goods regular obtain each board send goods result; Wherein, after sending goods rule to upgrade to arbitrary described board real-time, all discharge and sent goods to this board and the wafer batch exceeding described schedule time specification, and the wafer of release batch is incorporated in the wafer batch of goods to be sent, and then upgrade the real-time goods rule of sending of board described in follow-up based on this goods wafer to be sent batch, and synchronization wafer batch can only send goods to one board.Concrete, in the above-described embodiment, according to shown in table three, idle order due to obtained board load port is that the load port in board 1 is first idle, next is the load port in board 2, the load port in board 3 again, then be the load port in board 4, it is finally the load port in board 5, so according to the idle order of each board load port, first board 1 is formulated and send goods rule in real time, formulated real-time send in goods rule be included in wafer that board can carry out processing batch filter out before by wafer batch that other boards are predetermined, discharge the wafer batch still having exceeded schedule time specification after being made a reservation for by this board simultaneously, similar, secondly board 2 is formulated and send goods rule in real time, formulated real-time send in goods rule be included in equally in wafer that board can carry out processing batch filter out before by wafer batch that other boards are predetermined, to discharge after being made a reservation for by this board simultaneously but to have exceeded the wafer batch of schedule time specification, due to before formulating board 2 and in real time sending goods rule, first real-time goods of sending is formulated to board 1 regular, so send in goods rule in real time what formulate board 2, need to remove by the predetermined wafer batch of previous board (comprising board 1) in board 2 can carry out the wafer processed batch, predetermined for previous board but the wafer batch being above the schedule time specification of its correspondence is increased in board 2 wafer to be processed batch simultaneously, simultaneously by predetermined by oneself but be above the wafer batch release of schedule time specification, successively follow-up board is sent in real time to the formulation of goods rule according to the method described above, in above-described embodiment, to all boards all carried out real-time send the formulation of goods rule after can obtain each board send goods result, as shown in following table four:
Table four
As shown in Table 4, sending in work result of finally being formed can reflect wafer Mission Number predetermined required for each board and the order corresponding to it, and wafer predetermined required for each board is batch all identical, namely there is not two or more board and fight for situation with a collection of wafer simultaneously.
Above-mentioned based on the wafer batch work dispatching method under the board group of Real Time Dispatching system, the robotization of its whole process is realized by one work system.
For this reason, the present invention also provides a kind of and sends work system based on the wafer batch under the board group of Real Time Dispatching system, and this sends work system to comprise:
Effective board maintenance module under board group, for based on wafer lot secondary data on effective machine station information and line, set the quantity of load port of each board under a board group, the real-time of each board send goods rule, and each board is sent goods to the schedule time specification of each wafer batch of this board;
The idle computing module of board, be communicatively coupled to described effective board maintenance module, for the wafer batch information that each board of Real-time Obtaining is processing, according to the wafer batch information that quantity and each board of the load port of each board are processing, calculate the idle order of each load port in each board in the estimated time of follow-up one end;
Send work monitoring module under board group, be communicatively coupled to the idle computing module of described board, after obtaining idle order, upgrade the real-time of each board successively and send goods rule, and according to send in real time after upgrading goods regular obtain each board send goods result;
Wherein, when under board group send work monitoring module to send goods rule to upgrade to arbitrary board real-time after, all discharge and sent goods to this board and the wafer batch exceeding schedule time specification, and the wafer of release batch is incorporated in the wafer batch of goods to be sent, and then upgrade the real-time goods rule of sending of board described in follow-up based on this goods wafer to be sent batch, and synchronization wafer batch can only send goods to one board
Board group send work result display module, being communicatively coupled to and sending work monitoring module under board group, after obtaining and sending goods result, showing sending goods result.
As preferably, in one embodiment, the idle computing module of above-mentioned board also comprises:
First computing unit, enter the moment of corresponding board according to each batch of wafer and estimate that this wafer batch time of carrying out needed for processing procedure determines whether this wafer batch can terminate processing procedure within the estimated time, thus making the board load port corresponding to this wafer batch idle;
Second computing unit, according to the idle condition of load port each under board group, calculates and there emerged a the idle order of load port.
In addition, the wafer batch packets of information that above-mentioned each board is processing is drawn together: wafer Mission Number, TIT, FPT, T
nand T
e, wherein, TIT represents the time of wafer batch ingress engine platform, and FPT represents that expectation wafer batch completes the time needed for processing procedure, T
nrepresent current time, T
erepresent the above-mentioned estimated time.
Further, the first above-mentioned computing unit obtains above-mentioned T
n, T
e, after TIT, FTP, calculate T
n+ T
ethe value of-TIT-FTP, if be greater than zero, then judges that board is at follow-up T
eprocessing procedure can be terminated to current wafer batch in time, thus make load port corresponding in board idle, if be less than zero, then judge that board is at follow-up T
ecan not terminate processing procedure to current wafer batch in time, thus board is not idle; Meanwhile, the second above-mentioned computing unit calculates T to above-mentioned by the first computing module
n+ T
eobtain being worth after-TIT-FTP and sort from big to small, thus determine the idle order of load port.
For a person skilled in the art, after reading above-mentioned explanation, various changes and modifications undoubtedly will be apparent.Therefore, appending claims should regard the whole change and correction of containing true intention of the present invention and scope as.In Claims scope, the scope of any and all equivalences and content, all should think and still belong to the intent and scope of the invention.
Claims (10)
1., based on the wafer batch work dispatching method under the board group of Real Time Dispatching system, it is characterized in that, described method comprises:
Based on wafer lot secondary data on effective machine station information and line, set the quantity of load port of each board under a board group, the real-time of each board send goods rule, and each board is sent goods to the schedule time specification of each wafer batch of this board;
The wafer batch information that each board of Real-time Obtaining is processing, and according to the wafer batch information that quantity and each board of the load port of each board are processing, calculate the idle order of each board in follow-up one period of estimated time;
Upgrade the real-time of each board successively according to described idle order and send goods rule, and according to send in real time after upgrading goods regular obtain each board send goods result;
Wherein, after sending goods rule to upgrade to arbitrary described board real-time, all discharge and sent goods to this board and the wafer batch exceeding described schedule time specification, and the wafer of release batch is incorporated in the wafer batch of goods to be sent, and then upgrade the real-time goods rule of sending of board described in follow-up based on this goods wafer to be sent batch, and synchronization wafer batch can only send goods to one board.
2. work dispatching method as claimed in claim 1, is characterized in that, set the wafer batch information of processing corresponding to each board according to process requirements.
3. work dispatching method as claimed in claim 1, is characterized in that, the schedule time specification of the predetermined wafer of each board batch is all greater than the described estimated time.
4. work dispatching method as claimed in claim 1, it is characterized in that, the wafer batch packets of information that each board is processing is drawn together: wafer Mission Number, TIT, FPT, T
nand T
e;
Wherein, TIT represents the time of wafer batch ingress engine platform, and FPT represents that expectation wafer batch completes the time needed for processing procedure, T
nrepresent current time, T
erepresent the described estimated time.
5. work dispatching method as claimed in claim 4, is characterized in that, the idle order of each board described is determined in such a way:
T
n+ T
ethe result of-TIT-FTP is larger, represent that the load port of the board corresponding to it is more idle, different according to the time of the free time of each load port, obtain the idle order of each load port, and load port idle at first in each board is as the free time at first of this board, to obtain the idle order of each board, thus obtain described idle order;
Wherein, T is worked as
n+ T
eduring-TIT-FTP>0, represent that board is at follow-up T
ein can terminate processing procedure to current wafer batch, thus make load port corresponding in board idle;
Work as T
n+ T
eduring-TIT-FTP<0, represent that board is at follow-up T
ein can not terminate processing procedure to current wafer batch, thus board is not idle.
6. work dispatching method as claimed in claim 5, is characterized in that, described T
eset according to the actual needs in production run.
7. send a work system based on the wafer batch under the board group of Real Time Dispatching system, it is characterized in that, described system comprises:
Effective board maintenance module under board group, for based on wafer lot secondary data on effective machine station information and line, set the quantity of load port of each board under a board group, the real-time of each board send goods rule, and each board is sent goods to the schedule time specification of each wafer batch of this board;
The idle computing module of board, be communicatively coupled to described effective board maintenance module, for the wafer batch information that each board of Real-time Obtaining is processing, according to the wafer batch information that quantity and each board of the load port of each board are processing, calculate the idle order of each board in follow-up one period of estimated time;
Work monitoring module is sent under board group, be communicatively coupled to the idle computing module of described board, after obtaining described idle order, upgrade the real-time of each board successively according to described idle order and send goods rule, and according to send in real time after upgrading goods regular obtain each board send goods result;
Board group send work result display module, be communicatively coupled to and send work monitoring module under described board group, with obtain described send goods result after described goods result of sending is shown;
Wherein, after sending goods rule to upgrade to arbitrary described board real-time, all discharge and sent goods to this board and the wafer batch exceeding described schedule time specification, and the wafer of release batch is incorporated in the wafer batch of goods to be sent, and then upgrade the real-time goods rule of sending of board described in follow-up based on this goods wafer to be sent batch, and synchronization wafer batch can only send goods to one board.
8. send work system as claimed in claim 7, it is characterized in that, the idle computing module of described board also comprises:
First computing unit, enter the moment of corresponding board according to each batch of wafer and estimate that this wafer batch time of carrying out needed for processing procedure determines whether this wafer batch can terminate processing procedure within the described estimated time, thus making the board load port corresponding to this wafer batch idle;
Second computing unit, according to the idle condition of load port each under board group, calculates the idle order of each board.
9. send work system as claimed in claim 10, it is characterized in that, the wafer batch packets of information that each board is processing is drawn together: wafer Mission Number, TIT, FPT, T
nand T
e;
Wherein, TIT represents the time of wafer batch ingress engine platform, and FPT represents that expectation wafer batch completes the time needed for processing procedure, T
nrepresent current time, T
erepresent the described estimated time.
10. send work system as claimed in claim 9, it is characterized in that,
Described first computing unit obtains T
n, T
e, after TIT, FTP, calculate T
n+ T
ethe value of-TIT-FTP, if be greater than zero, then judges that board is at follow-up T
ein can terminate processing procedure to current wafer batch, thus make load port corresponding in board idle, if be less than zero, then judge that board is at follow-up T
ein can not terminate processing procedure to current wafer batch, thus board is not idle;
Described second computing unit calculates T to described first computing module
n+ T
eobtain being worth after-TIT-FTP and sort from big to small, thus determine the idle order of each load port, and load port idle at first in each board is as the free time at first of this board, to obtain the idle order of each board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410133233.9A CN104977903B (en) | 2014-04-03 | 2014-04-03 | Wafer batch work dispatching method under board group based on Real Time Dispatching system and system |
Applications Claiming Priority (1)
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| CN106743326A (en) * | 2017-03-17 | 2017-05-31 | 惠科股份有限公司 | A kind of material transport method and system |
| CN108008707A (en) * | 2017-11-28 | 2018-05-08 | 上海华力微电子有限公司 | A kind of method that automatic monitoring product runs goods situation |
| CN108063101A (en) * | 2017-12-15 | 2018-05-22 | 武汉新芯集成电路制造有限公司 | A kind of methods of sampling of wafer defect test |
| CN108227508A (en) * | 2016-12-15 | 2018-06-29 | 中芯国际集成电路制造(北京)有限公司 | Wafer load port efficiency monitoring method |
| CN108646696A (en) * | 2018-07-12 | 2018-10-12 | 武汉新芯集成电路制造有限公司 | Automatically process the system and method for batch products to be detected |
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| CN108227508A (en) * | 2016-12-15 | 2018-06-29 | 中芯国际集成电路制造(北京)有限公司 | Wafer load port efficiency monitoring method |
| CN106743326A (en) * | 2017-03-17 | 2017-05-31 | 惠科股份有限公司 | A kind of material transport method and system |
| CN109543930B (en) * | 2017-09-22 | 2021-10-08 | 财团法人资讯工业策进会 | Dispatching method and system based on machine multi-level steady-state production rate |
| CN109543930A (en) * | 2017-09-22 | 2019-03-29 | 财团法人资讯工业策进会 | Dispatching method and system based on machine multi-level steady-state production rate |
| CN108008707B (en) * | 2017-11-28 | 2020-02-18 | 上海华力微电子有限公司 | Method for automatically monitoring product running condition |
| CN108008707A (en) * | 2017-11-28 | 2018-05-08 | 上海华力微电子有限公司 | A kind of method that automatic monitoring product runs goods situation |
| CN108063101B (en) * | 2017-12-15 | 2021-01-12 | 武汉新芯集成电路制造有限公司 | Sampling method for wafer defect test |
| CN108063101A (en) * | 2017-12-15 | 2018-05-22 | 武汉新芯集成电路制造有限公司 | A kind of methods of sampling of wafer defect test |
| CN108646696B (en) * | 2018-07-12 | 2020-04-10 | 武汉新芯集成电路制造有限公司 | System and method for automatically processing batch products to be detected |
| CN108646696A (en) * | 2018-07-12 | 2018-10-12 | 武汉新芯集成电路制造有限公司 | Automatically process the system and method for batch products to be detected |
| CN109657941A (en) * | 2018-12-05 | 2019-04-19 | 上海华力集成电路制造有限公司 | Row's pallet piling up method of wafer manufacturing line |
| CN112309887A (en) * | 2019-07-29 | 2021-02-02 | 华润微电子（重庆）有限公司 | Pre-dispatching method for wafer manufacturing, electronic device, computer equipment and system |
| CN112309887B (en) * | 2019-07-29 | 2023-03-21 | 华润微电子（重庆）有限公司 | Pre-dispatching method for wafer manufacturing, electronic device, computer equipment and system |
| CN111539648B (en) * | 2020-05-11 | 2023-08-18 | 上海华力集成电路制造有限公司 | Automatic distribution device and method for dynamic capacity among equipment groups |
| CN113823581A (en) * | 2020-06-19 | 2021-12-21 | 长鑫存储技术有限公司 | Semiconductor process production line goods dispatching method, storage medium and semiconductor equipment |
| CN113823581B (en) * | 2020-06-19 | 2023-09-22 | 长鑫存储技术有限公司 | Method for dispatching semiconductor process production line, storage medium and semiconductor device |
| CN112926757A (en) * | 2021-03-30 | 2021-06-08 | 上海华力微电子有限公司 | Method and system for realizing scheduling of key batch products |
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| CN113299587A (en) * | 2021-05-21 | 2021-08-24 | 无锡亚电智能装备有限公司 | Wafer cleaning process task arrangement method and device |
| CN114038772A (en) * | 2022-01-07 | 2022-02-11 | 广州粤芯半导体技术有限公司 | Feeding method of semiconductor machine |
| CN114613710A (en) * | 2022-05-11 | 2022-06-10 | 弥费实业(上海)有限公司 | Method, system and computer equipment for dispatching car in advance based on completion time |
| CN114613710B (en) * | 2022-05-11 | 2022-07-26 | 弥费实业(上海)有限公司 | Method, system and computer equipment for dispatching cars in advance based on completion time |
| CN116387196B (en) * | 2023-04-03 | 2023-12-08 | 上海赛美特软件科技股份有限公司 | Wafer processing method and device, electronic equipment and storage medium |
| CN116387196A (en) * | 2023-04-03 | 2023-07-04 | 上海赛美特软件科技有限公司 | Wafer processing method and device, electronic equipment and storage medium |
| CN116579466A (en) * | 2023-04-25 | 2023-08-11 | 上海赛美特软件科技有限公司 | Reservation method and reservation device in wafer processing process |
| CN116579466B (en) * | 2023-04-25 | 2024-05-14 | 上海赛美特软件科技股份有限公司 | Reservation method and reservation device in wafer processing process |
| CN116544152A (en) * | 2023-07-06 | 2023-08-04 | 粤芯半导体技术股份有限公司 | Method and device for controlling sheet feeding amount of semiconductor machine set |
| CN116777182B (en) * | 2023-08-15 | 2023-11-03 | 北京珂阳科技有限公司 | Task dispatch method for semiconductor wafer manufacturing |
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