TWI566064B - Dispatch control method for furnace process - Google Patents

Dispatch control method for furnace process Download PDF

Info

Publication number
TWI566064B
TWI566064B TW104118518A TW104118518A TWI566064B TW I566064 B TWI566064 B TW I566064B TW 104118518 A TW104118518 A TW 104118518A TW 104118518 A TW104118518 A TW 104118518A TW I566064 B TWI566064 B TW I566064B
Authority
TW
Taiwan
Prior art keywords
batch
furnace
furnace tube
condition
dispatching
Prior art date
Application number
TW104118518A
Other languages
Chinese (zh)
Other versions
TW201643576A (en
Inventor
吳俊達
蕭世宗
陳建中
Original Assignee
力晶科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 力晶科技股份有限公司 filed Critical 力晶科技股份有限公司
Priority to TW104118518A priority Critical patent/TWI566064B/en
Priority to CN201510355513.9A priority patent/CN106251029A/en
Publication of TW201643576A publication Critical patent/TW201643576A/en
Application granted granted Critical
Publication of TWI566064B publication Critical patent/TWI566064B/en

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

Description

一種爐管製程的派工控制方法 Method for dispatching control of furnace control process

本發明是有關於一種長時間批次處理製程的派工控制方法，且特別是有關於一種爐管製程的派工控制方法。 The present invention relates to a dispatch control method for a long-term batch processing process, and more particularly to a dispatch control method for a furnace control process.

在半導體製程中，爐管機台(Furnace equipment)為長時間且多批次的生產機台。若爐管機台的單次製程的批量(Batch size)無法滿足所述爐管機台的最大產量，則會造成所述爐管機台的產能損失。因此，在半導體製程中，爐管機台的派工控制方法扮演相當重要的角色。 In semiconductor manufacturing, Furnace equipment is a long-term, multi-batch production machine. If the batch size of the single-stage process of the furnace tube machine cannot meet the maximum output of the furnace tube machine, the production capacity of the furnace tube machine will be lost. Therefore, in the semiconductor manufacturing process, the dispatch control method of the furnace tube plays a very important role.

以半導體代工廠為例，同一世代下有許多不同客戶的產品。而所述產品因為設計不同，其爐管條件也隨之改變，以符合各產品的設計需求。因此，為了因應不同的爐管條件，更增加爐管機台的派工上的困難。在產品和爐管條件的組合下，如何滿足爐管機台的最大產量，以避免造成爐管機台產能的損失將成為重要的一門課題。 Take the semiconductor foundry as an example. There are many different customers' products under the same generation. Because the design of the product is different, the condition of the furnace tube also changes to meet the design requirements of each product. Therefore, in order to cope with different furnace tube conditions, it is more difficult to dispatch the furnace tube machine. Under the combination of product and furnace conditions, how to meet the maximum output of the furnace tube machine to avoid the loss of the furnace tube production capacity will become an important issue.

本發明提供一種爐管製程的派工控制方法，其可滿足爐管機台的最大產量，且避免造成爐管機台產能的損失。 The invention provides a dispatch control method for a furnace control process, which can meet the maximum output of the furnace tube machine and avoid the loss of the productivity of the furnace tube machine.

本發明提供一種爐管製程的派工控制方法，包括下列步驟。決定有效派工區間。有效派工區間定義為爐管到爐管的前N站機台之間，其中N為大於0的整數。決定進入爐管的批次形成站點。當多個批貨進入爐管的前N站機台時，依照批貨的第一批貨的優先權進行派工。第一批貨具有最高優先權以及第一爐管條件。於有效派工區間中，搜索具有第一爐管條件(recipe)的第二批貨。提高第二批貨的優先權，使得第二批貨與第一批貨在批次形成站點時為同一批次。當第一批貨進入批次形成站點時，於批次形成站點進行派工。 The invention provides a dispatch control method for a furnace control process, comprising the following steps. Decide on an effective dispatch interval. The effective dispatch interval is defined as the furnace tube to the front N station of the furnace tube, where N is an integer greater than zero. The batch formation site that decides to enter the furnace tube. When a plurality of batches enter the front N station of the furnace tube, the work is dispatched according to the priority of the first batch of the goods. The first shipment has the highest priority and the first furnace condition. In the effective dispatch interval, a second shipment having the first furnace condition is searched. The priority of the second batch is increased so that the second batch is the same batch as the first batch when the batch forms the site. When the first batch enters the batch formation site, it is dispatched at the batch formation site.

在本發明的一實施例中，決定上述有效派工區間的方法包括依據爐管的產能與生產時間來決定爐管的前N站機台的N值。 In an embodiment of the invention, the method for determining the effective dispatch interval includes determining the N value of the front N station of the furnace tube based on the capacity of the furnace tube and the production time.

在本發明的一實施例中，決定進入爐管的批次形成站點的方法如下。當第一批貨進入爐管之前有等待時間(Q-time)限制，則批次形成站點為爐管的前一站。 In an embodiment of the invention, the method of determining the batch formation site entering the furnace tube is as follows. When the first batch has a Q-time limit before entering the furnace tube, the batch formation site is the previous station of the furnace tube.

在本發明的一實施例中，決定進入爐管的批次形成站點的方法如下。當第一批貨進入爐管之前沒有等待時間限制，則批次形成站點為爐管當站。 In an embodiment of the invention, the method of determining the batch formation site entering the furnace tube is as follows. When there is no waiting time limit before the first batch enters the furnace tube, the batch forming station is the furnace tube station.

在本發明的一實施例中，於上述有效派工區間中未搜索 到具有第一爐管條件的第二批貨時，更包括以下步驟。在爐管的前N+1站機台中搜索具有第一爐管條件的第三批貨。提高第三批貨的優先權，使得第三批貨與第一批貨在批次形成站點時為同一批次。 In an embodiment of the invention, the search is not searched in the above effective dispatch interval When the second batch of goods having the first furnace condition is reached, the following steps are further included. A third batch of goods having the first furnace tube condition is searched for in the front N+1 station of the furnace tube. The priority of the third batch is increased so that the third batch is the same batch as the first batch when the batch forms the site.

在本發明的一實施例中，當第一批貨進入批次形成站點時，於批次形成站點進行派工的步驟如下。確認可生產的爐管機台。依照批貨清單進行排序並確認各批貨的爐管條件。依照批貨清單中的第一批貨的優先權進行派工。當批貨清單中的具有第一爐管條件的批貨滿足爐管的批量，則於批次形成站點開始派工，且進行生產。 In an embodiment of the invention, when the first shipment enters the batch formation site, the steps for dispatching the site at the batch formation site are as follows. Confirm the furnace tube machine that can be produced. Sort according to the bill of lading and confirm the condition of the tubes of each batch. Delivered according to the priority of the first shipment in the list of shipments. When the batch with the first furnace tube condition in the batch list satisfies the batch of the furnace tube, the batch forming station starts to dispatch and the production is carried out.

在本發明的一實施例中，當第一批貨進入批次形成站點時，於批次形成站點進行派工的步驟如下。確認可生產的爐管機台。依照批貨清單進行排序並確認各批貨的爐管條件。依照批貨清單中的第一批貨的優先權進行派工。當批貨清單中的具有第一爐管條件的批貨無法滿足爐管的批量，則於批次形成站點之前搜索具有第一爐管條件的第四批貨。提高第四批貨的優先權。 In an embodiment of the invention, when the first shipment enters the batch formation site, the steps for dispatching the site at the batch formation site are as follows. Confirm the furnace tube machine that can be produced. Sort according to the bill of lading and confirm the condition of the tubes of each batch. Delivered according to the priority of the first shipment in the list of shipments. When the batch with the first furnace tube condition in the batch list cannot satisfy the batch of the furnace tube, the fourth batch having the first furnace tube condition is searched before the batch forming station. Increase the priority of the fourth shipment.

在本發明的一實施例中，在提高第四批貨的優先權之後，更包括判斷加速第四批貨到批次形成站點的時間是否符合第一批貨的製程時間，以決定是否等待第四批貨到批次形成站點。 In an embodiment of the present invention, after the priority of the fourth shipment is increased, the method further includes determining whether the time for accelerating the fourth shipment to the batch formation site meets the processing time of the first shipment to determine whether to wait. The fourth batch of goods arrives at the batch to form a site.

在本發明的一實施例中，其中批貨清單中的具有第一爐管條件的批貨無法滿足爐管的批量包括批貨清單中的具有第一爐管條件的批貨大於或小於爐管的批量。 In an embodiment of the present invention, the batch having the first furnace tube condition in the batch list cannot satisfy the batch of the furnace tube, and the batch having the first furnace tube condition in the batch list is larger or smaller than the furnace tube. Batch.

在本發明的一實施例中，當批貨清單中的具有第一爐管條件的批貨大於爐管的批量，則將批貨進行分割。 In an embodiment of the invention, when the batch having the first furnace tube condition in the batch list is larger than the batch of the furnace tube, the batch is divided.

基於上述，在有效派工區間中，本發明可搜索具有第一爐管條件的第二批貨以及第三批貨，並提高其優先權，使得第二批貨、第三批貨以及第一批貨在批次形成站點時為同一批次，以同時進入爐管中。因此，本發明便可滿足爐管機台的最大產量，且避免造成爐管機台產能的損失，進而提升整體產能。 Based on the above, in the effective dispatching interval, the present invention can search for the second batch and the third batch having the first furnace condition, and increase the priority thereof, so that the second batch, the third batch, and the first The batch is the same batch when the batch forms the site to simultaneously enter the furnace tube. Therefore, the present invention can satisfy the maximum output of the furnace tube machine and avoid the loss of the capacity of the furnace tube machine, thereby improving the overall production capacity.

為讓本發明的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.

S100、S200、S201~S203、S300、S301~S306、S400、S401~S408‧‧‧步驟 S100, S200, S201~S203, S300, S301~S306, S400, S401~S408‧‧

圖1為本發明之一實施例的爐管製程的派工控制方法的流程圖。 1 is a flow chart of a dispatch control method of a furnace control routine according to an embodiment of the present invention.

圖2為圖1之步驟S200的流程圖。 FIG. 2 is a flow chart of step S200 of FIG. 1.

圖3為圖1之步驟S300的流程圖。 FIG. 3 is a flow chart of step S300 of FIG. 1.

圖4為圖1之步驟S400的流程圖。 4 is a flow chart of step S400 of FIG. 1.

圖1為本發明之一實施例的爐管製程的派工控制方法的流程圖。圖2為圖1之步驟S200的流程圖。圖3為圖1之步驟S300的流程圖。圖4為圖1之步驟S400的流程圖。 1 is a flow chart of a dispatch control method of a furnace control routine according to an embodiment of the present invention. FIG. 2 is a flow chart of step S200 of FIG. 1. FIG. 3 is a flow chart of step S300 of FIG. 1. 4 is a flow chart of step S400 of FIG. 1.

請參照圖1，本實施例的爐管製程的派工控制方法包括下列步驟。首先，進行步驟S100，決定有效派工區間。所述有效派工區間可定義為爐管到爐管的前N站機台之間，其中N為大於0的整數。舉例來說，當N值為3，所述有效派工區間則是從爐管到爐管的前3站機台算起，也就是總共3站機台的區間。在一實施例中，決定上述爐管的前N站機台中的N值可依據爐管的產能與生產時間以及前N站機台的各機台的產能與生產時間來決定。 具體地說，當爐管的產能與生產時間以及前N站機台的各機台的產能與生產時間較滿，則N值較小。反之，當爐管的產能與生產時間以及前N站機台的各機台的產能與生產時間較空，則N值較大。所述N值可以依據即時機台的產能與生產時間情況來進行調整，本發明不以此為限。另外，在半導體製程中，在進入爐管機台之前，批貨通常必須先移除殘餘的微粒，即進行清洗動作。因此，在一實施例中，爐管的前N站機台可例如是清洗機台，但本發明不限於此。 Referring to FIG. 1, the dispatch control method of the furnace control process of the embodiment includes the following steps. First, step S100 is performed to determine an effective dispatch interval. The effective dispatch interval may be defined as the furnace tube to the front N station of the furnace tube, where N is an integer greater than zero. For example, when the value of N is 3, the effective dispatch interval is calculated from the first three stations of the furnace tube to the furnace tube, that is, the interval of a total of three stations. In one embodiment, determining the value of N in the front station of the furnace tube may be determined based on the capacity and production time of the furnace tube and the capacity and production time of each machine of the front N station. Specifically, when the capacity and production time of the furnace tube and the capacity and production time of each machine of the former N station are full, the N value is small. On the contrary, when the capacity and production time of the furnace tube and the capacity and production time of each machine of the former N station are relatively empty, the value of N is large. The N value can be adjusted according to the capacity of the instant machine and the production time, and the invention is not limited thereto. In addition, in the semiconductor manufacturing process, before entering the furnace tube machine, the batch usually has to remove the residual particles, that is, the cleaning operation. Therefore, in an embodiment, the front N station of the furnace tube may be, for example, a washing machine, but the invention is not limited thereto.

接著，進行步驟S200，決定進入爐管的批次形成站點。 詳細地說，當多個批貨欲進入爐管之前，須將所述批貨進行分組與排序，從而得到多個批次，以進入爐管。在本實施例中，所述批次形成站點可視為進行上述動作的站點。而所述批次形成站點可依據不同情況而有所不同。具體而言，請同時參照圖1與圖2，先進行步驟S201，確認所述批貨在進入爐管之前是否有等待時間(Q-time)限制。若所述批貨沒有等待時間限制，則進行步驟 S202，以爐管當站為批次形成站點。反之，若所述批貨有等待時間限制，則進行步驟S203，以爐管的前一站為批次形成站點。本實施例可藉由上述步驟S201~S203避免因為等待時間限制而導致晶圓報廢的問題，或是避免因為超過等待時間而使得所述批貨必須重製，進而浪費製程成本。 Next, in step S200, the batch forming station entering the furnace tube is determined. In detail, when a plurality of batches are to enter the furnace tube, the batches must be grouped and sorted to obtain a plurality of batches to enter the furnace tubes. In this embodiment, the batch forming site can be regarded as a site performing the above actions. The batch formation site may vary according to different situations. Specifically, referring to FIG. 1 and FIG. 2 at the same time, step S201 is first performed to confirm whether the batch has a waiting time (Q-time) limit before entering the furnace tube. If the batch has no waiting time limit, proceed to the step S202, forming a site by using the furnace tube as a station. On the other hand, if the batch has a waiting time limit, step S203 is performed to form a station with the previous station of the furnace tube as a batch. In this embodiment, the problem of scrapping the wafer due to the waiting time limitation can be avoided by the above steps S201 to S203, or the batch must be reworked because the waiting time is exceeded, thereby wasting process cost.

請再回到圖1，進行步驟S300，當多個批貨進入爐管的前N站機台時，進行加速優先權的邏輯判斷。詳細地說，請同時參照圖1與圖3，先進行步驟S301，當多個批貨進入爐管的前N站機台時，依照所述批貨的第一批貨的優先權進行派工。第一批貨具有最高優先權。所謂優先權可例如是判斷每一批貨是否為特急批貨(Super Hot Lot)、急批貨(Hot Lot)、相應每一批貨之階段目標(Stage Target)等各種不同狀況。依據上述狀況可分別定義一權值，且每一批貨具有一加總權值，用以進行優先權的排序。在本實施例中，所述第一批貨可例如是特急批貨。 Returning to FIG. 1, proceeding to step S300, when a plurality of batches enter the front N station of the furnace tube, a logical judgment of the acceleration priority is performed. In detail, please refer to FIG. 1 and FIG. 3 at the same time, first proceeding to step S301, when a plurality of batches enter the front N station of the furnace tube, according to the priority of the first batch of the batch. . The first shipment has the highest priority. The so-called priority can be, for example, a determination of whether each shipment is a Super Hot Lot, a Hot Lot, and a corresponding Stage Target for each shipment. According to the above situation, a weight can be separately defined, and each batch has a total weight value for sorting priorities. In this embodiment, the first shipment may be, for example, an express delivery.

之後，進行步驟S302，確認第一批貨的爐管條件(以下簡稱為第一爐管條件)和所述爐管的可生產的批量。然後，進行步驟S303，確認在有效派工區間中是否有具有第一爐管條件的第二批貨。若有，則進行步驟S304，提高第二批貨的優先權，使得第二批貨與第一批貨在批次形成站點時為同一批次，以同時進入爐管。反之，則進行步驟S305，確認在爐管的前N+1站機台中是否有具有第一爐管條件的第三批貨。若有，則進行步驟S306，提高第三批貨的優先權，使得第三批貨與第一批貨在批次形成站點 時為同一批次，以同時進入爐管。在一實施例中，第二批貨與第三批貨可例如是一個或多個批貨。 Thereafter, step S302 is performed to confirm the furnace tube condition of the first batch (hereinafter referred to as the first furnace tube condition) and the usable batch of the furnace tube. Then, step S303 is performed to confirm whether there is a second shipment having the first furnace condition in the effective dispatch section. If yes, proceed to step S304 to increase the priority of the second shipment so that the second shipment and the first shipment are the same batch at the time of the batch formation site to simultaneously enter the furnace tube. Otherwise, step S305 is performed to confirm whether there is a third batch having the first furnace tube condition in the front N+1 station of the furnace tube. If yes, proceed to step S306 to increase the priority of the third batch, so that the third batch and the first batch are in the batch forming site. The same batch is used to enter the furnace tube at the same time. In an embodiment, the second and third shipments may be, for example, one or more shipments.

值得一提的是，本發明可藉由步驟S300搜索具有第一爐管條件的第二批貨以及第三批貨，並提高其優先權，以滿足爐管機台的最大產量，且避免造成爐管機台產能的損失，進而提升整體產能。 It is worth mentioning that the present invention can search for the second batch and the third batch having the first furnace condition by step S300, and increase the priority thereof to meet the maximum output of the furnace tube and avoid causing The loss of capacity of the furnace tube machine will increase the overall production capacity.

請再回到圖1，進行步驟S400，當上述批貨進入批次形成站點時，於批次形成站點進行派工。詳細地說，請同時參照圖1與圖4，先進行步驟S401，確認可生產的爐管機台。然後，進行步驟S402，依照批貨清單進行排序並確認各批貨的爐管條件。之後，進行步驟S403，依照批貨清單中的第一批貨的優先權進行派工。接著，在批貨清單中搜索具有第一爐管條件的批貨。然後，進行步驟S404，確認具有第一爐管條件的批貨是否滿足爐管的批量。所謂確認具有第一爐管條件的批貨是否滿足爐管的批量可例如是確認具有第一爐管條件的批貨是否等於爐管的批量。舉例來說，當可生產的爐管的批量為100批貨，具有第一爐管條件的批貨再加上第一批貨的數量亦為100批貨時，則可視為滿足爐管的批量。反之，則可視為無法滿足。若滿足爐管的批量，則進行步驟S406，於批次形成站點開始派工，且進行生產。 Referring back to FIG. 1, step S400 is performed to dispatch the batch to the batch forming site when the batch enters the batch forming station. In detail, please refer to FIG. 1 and FIG. 4 simultaneously, and step S401 is first performed to confirm the furnace tube table that can be produced. Then, proceeding to step S402, sorting according to the batch list and confirming the condition of the furnace tubes of each batch. Thereafter, step S403 is performed to dispatch the work according to the priority of the first shipment in the batch list. Next, search the batch list for the batch with the first furnace condition. Then, step S404 is performed to confirm whether the batch having the first furnace condition satisfies the batch of the furnace tube. It is for example to confirm whether the batch having the first furnace tube condition satisfies the batch of the furnace tube, for example, to confirm whether the batch having the first furnace tube condition is equal to the batch of the furnace tube. For example, when the quantity of the furnace tubes that can be produced is 100 batches, and the batch with the first furnace tube condition plus the quantity of the first batch of goods is also 100 batches, it can be regarded as satisfying the batch of the furnace tubes. . On the contrary, it can be regarded as unsatisfiable. If the batch size of the furnace tube is satisfied, step S406 is performed to start the dispatching of the batch forming station and to perform production.

在一實施例中，無法滿足的情況分成兩種。其一，是指具有第一爐管條件的批貨小於爐管的批量。此時進行步驟S405，於批次形成站點之前搜索具有第一爐管條件的第四批貨。接著， 提高第四批貨的優先權。其二，則是指具有第一爐管條件的批貨大於爐管的批量。此時則可將所述批貨進行分割，以符合爐管單次製程可處理的最多批貨數量。 In an embodiment, there are two cases that cannot be satisfied. First, it means that the batch with the first furnace condition is smaller than the batch of the furnace tube. At this point, step S405 is performed to search for the fourth shipment having the first furnace condition before the batch formation site. then, Increase the priority of the fourth shipment. Second, it means that the batch with the first furnace condition is larger than the batch of the furnace tube. At this point, the batch can be divided to meet the maximum number of batches that can be processed in a single process of the furnace tube.

在進行步驟S405(提高第四批貨的優先權)之後，可進行步驟S407，判斷加速第四批貨到批次形成站點的時間是否符合第一批貨的製程時間。此步驟S407可進一步減少爐管機台產能的損失，進而提升整體產能。若是加速第四批貨到批次形成站點的時間不符合第一批貨的製程時間，則不需要等待第四批貨，而直接進行步驟S406。反之，若是加速第四批貨到批次形成站點的時間符合第一批貨的製程時間，則進行步驟S408，等待第四批貨到批次形成站點之後，再開始派工，且進行生產。 After proceeding to step S405 (prioritizing the fourth batch of goods), step S407 may be performed to determine whether the time for accelerating the fourth batch of goods to the batch forming station conforms to the processing time of the first batch of goods. This step S407 can further reduce the loss of the capacity of the furnace tube, thereby increasing the overall production capacity. If the time for accelerating the fourth batch of goods to the batch forming station does not meet the processing time of the first batch of goods, then there is no need to wait for the fourth batch of goods, and step S406 is directly performed. On the other hand, if the time for accelerating the fourth batch of goods to the batch forming station conforms to the processing time of the first batch of goods, proceeding to step S408, waiting for the fourth batch of goods to reach the batch forming site, and then starting the dispatching, and proceeding produce.

綜上所述，在有效派工區間中，本發明可搜索具有第一爐管條件的第二批貨以及第三批貨，並提高其優先權，使得第二批貨、第三批貨以及第一批貨在批次形成站點時為同一批次，以同時進入爐管中。因此，本發明便可滿足爐管機台的最大產量，且避免造成爐管機台產能的損失，進而提升整體產能。 In summary, in the effective dispatching interval, the present invention can search for the second batch of goods having the first furnace condition and the third batch of goods, and increase the priority thereof, so that the second batch and the third batch of goods are The first batch of goods is the same batch at the time the batch is formed at the site to simultaneously enter the furnace tube. Therefore, the present invention can satisfy the maximum output of the furnace tube machine and avoid the loss of the capacity of the furnace tube machine, thereby improving the overall production capacity.

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明的精神和範圍內，當可作些許的更動與潤飾，故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

S100、S200、S300、S400‧‧‧步驟 S100, S200, S300, S400‧‧‧ steps

Claims (9)

一種爐管製程的派工控制方法，包括：決定一有效派工區間，該有效派工區間定義為一爐管到該爐管的前N站機台之間，其中N為大於0的整數，其中決定該有效派工區間的方法包括依據該爐管的產能與生產時間來決定該爐管的前N站機台的N值；決定進入該爐管的一批次形成站點；當多個批貨進入該爐管的前N站機台時，依照該些批貨的一第一批貨的優先權進行派工，其中該第一批貨具有最高優先權以及一第一爐管條件；於該有效派工區間中，搜索具有該第一爐管條件的一第二批貨，並提高該第二批貨的優先權，使得該第二批貨與該第一批貨在該批次形成站點時為同一批次；以及當該第一批貨進入該批次形成站點時，於該批次形成站點進行派工。 A dispatching control method for a furnace control process, comprising: determining an effective dispatching interval, the effective dispatching interval being defined as a furnace tube to a front N station of the furnace tube, wherein N is an integer greater than 0, The method for determining the effective dispatch interval includes determining the N value of the front N station of the furnace tube according to the capacity and production time of the furnace tube; determining a batch forming station entering the furnace tube; When the batch enters the front N station of the furnace tube, the work is dispatched according to the priority of the first batch of the batch, wherein the first batch has the highest priority and a first furnace condition; In the effective dispatching interval, searching for a second batch having the first furnace condition, and increasing the priority of the second batch, so that the second batch and the first batch are in the batch The same batch is formed when the site is formed; and when the first shipment enters the batch forming site, the batch forming site is dispatched. 如申請專利範圍第1項所述的爐管製程的派工控制方法，其中決定進入該爐管的該批次形成站點的方法包括：當該第一批貨進入該爐管之前有等待時間限制，則該批次形成站點為該爐管的前一站。 The method for dispatching a furnace control process as described in claim 1, wherein the method of determining the batch forming station entering the furnace tube comprises: waiting time before the first batch enters the furnace tube Limit, the batch formation site is the previous station of the furnace tube. 如申請專利範圍第1項所述的爐管製程的派工控制方法，其中決定進入該爐管的該批次形成站點的方法包括：當該第一批貨進入該爐管之前沒有等待時間限制，則該批次 形成站點為該爐管當站。 The method for dispatching a furnace control process as described in claim 1, wherein the method of determining the batch forming station entering the furnace tube comprises: waiting for the first batch of goods before entering the furnace tube Limit, then the batch The formation site is the station for the furnace tube. 如申請專利範圍第1項所述的爐管製程的派工控制方法，於該有效派工區間中未搜索到具有該第一爐管條件的該第二批貨時，更包括：在該爐管的前N+1站機台中搜索具有該第一爐管條件的一第三批貨，並提高該第三批貨的優先權，使得該第三批貨與該第一批貨在該批次形成站點時為同一批次。 For example, in the dispatch control method of the furnace control process described in claim 1, in the effective dispatching section, when the second batch having the first furnace condition is not found, the method further includes: Searching for a third batch of goods having the first furnace condition in the front N+1 station of the pipe, and increasing the priority of the third batch, so that the third batch and the first batch are in the batch The same batch is formed when the site is formed. 如申請專利範圍第1項所述的爐管製程的派工控制方法，當該第一批貨進入該批次形成站點時，於該批次形成站點進行派工的步驟包括：確認可生產的爐管機台；依照一批貨清單進行排序並確認各批貨的爐管條件；依照該批貨清單中的該第一批貨的優先權進行派工；以及當該批貨清單中的具有該第一爐管條件的該些批貨滿足該爐管的批量，則於該批次形成站點開始派工，且進行生產。 For example, in the dispatch control method of the furnace control process described in claim 1, when the first batch enters the batch forming station, the step of dispatching the site at the batch forming station includes: confirming that The furnace tube machine produced; sorting according to the batch list and confirming the condition of the furnace tube of each batch; dispatching according to the priority of the first batch in the batch list; and when the batch is in the list The batches having the conditions of the first furnace tube satisfy the batch size of the furnace tube, and then the station is started to be dispatched at the batch forming station, and production is carried out. 如申請專利範圍第1項所述的爐管製程的派工控制方法，當該第一批貨進入該批次形成站點時，於該批次形成站點進行派工的步驟包括：確認可生產的爐管機台；依照一批貨清單進行排序並確認各批貨的爐管條件；依照該批貨清單中的該第一批貨的優先權進行派工；當該批貨清單中的具有該第一爐管條件的該些批貨無法滿足 該爐管的批量，則於該批次形成站點之前搜索具有該第一爐管條件的一第四批貨；以及提高該第四批貨的優先權。 For example, in the dispatch control method of the furnace control process described in claim 1, when the first batch enters the batch forming station, the step of dispatching the site at the batch forming station includes: confirming that Production of furnace tube machine; sorting according to a batch of goods list and confirming the condition of the furnace tube of each batch; dispatching according to the priority of the first batch of goods in the list of goods; when in the list of goods The batches having the first furnace condition cannot be satisfied The batch of the tube is searched for a fourth batch having the first tube condition before the batch forming station; and the priority of the fourth batch is increased. 如申請專利範圍第6項所述的爐管製程的派工控制方法，在提高該第四批貨的優先權之後，更包括判斷加速該第四批貨到該批次形成站點的時間是否符合該第一批貨的製程時間，以決定是否等待該第四批貨到該批次形成站點。 The method for dispatching the furnace control process as described in claim 6 of the patent application, after increasing the priority of the fourth shipment, further includes determining whether the time for accelerating the fourth shipment to the batch formation site is The process time of the first shipment is met to determine whether to wait for the fourth shipment to arrive at the batch formation site. 如申請專利範圍第6項所述的爐管製程的派工控制方法，其中該批貨清單中的具有該第一爐管條件的該些批貨無法滿足該爐管的批量包括該批貨清單中的具有該第一爐管條件的該些批貨大於或小於該爐管的批量。 The method for dispatching a furnace control process as described in claim 6 of the patent application, wherein the batches having the first furnace tube condition in the batch list cannot satisfy the batch of the furnace tube, including the batch list The batches having the first furnace tube condition are larger or smaller than the batch of the furnace tubes. 如申請專利範圍第8項所述的爐管製程的派工控制方法，當該批貨清單中的具有該第一爐管條件的該些批貨大於該爐管的批量，則將該些批貨進行分割。 For the dispatch control method of the furnace control process described in claim 8 of the patent application, when the batches having the first furnace tube condition in the batch list are larger than the batch of the furnace tube, the batches are The goods are divided.
TW104118518A 2015-06-08 2015-06-08 Dispatch control method for furnace process TWI566064B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW104118518A TWI566064B (en) 2015-06-08 2015-06-08 Dispatch control method for furnace process
CN201510355513.9A CN106251029A (en) 2015-06-08 2015-06-25 Dispatching control method of furnace tube process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104118518A TWI566064B (en) 2015-06-08 2015-06-08 Dispatch control method for furnace process

Publications (2)

Publication Number Publication Date
TW201643576A TW201643576A (en) 2016-12-16
TWI566064B true TWI566064B (en) 2017-01-11

Family

ID=57626605

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104118518A TWI566064B (en) 2015-06-08 2015-06-08 Dispatch control method for furnace process

Country Status (2)

Country Link
CN (1) CN106251029A (en)
TW (1) TWI566064B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109754133B (en) * 2017-11-02 2023-09-01 华润微电子（重庆）有限公司 Semiconductor processing equipment and method and system for discharging goods in areas of FAB
CN112614795B (en) * 2020-12-16 2023-08-18 上海华力微电子有限公司 Dispatching optimization method for furnace tube process
CN116453974A (en) * 2023-04-12 2023-07-18 上海赛美特软件科技有限公司 Matching method and device for wafer furnace tube processing and electronic equipment

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696689A (en) * 1994-11-25 1997-12-09 Nippondenso Co., Ltd. Dispatch and conveyer control system for a production control system of a semiconductor substrate
US20030171972A1 (en) * 2002-01-28 2003-09-11 James Heskin Scheduling system and method
TW575895B (en) * 2002-06-25 2004-02-11 Taiwan Semiconductor Mfg A method of reducing time interval between manufacturing processes
TW200412518A (en) * 2003-01-02 2004-07-16 Taiwan Semiconductor Mfg Front end dispatching method and system for long batch processing equipment in semiconductor manufacturing
US20050071038A1 (en) * 2003-09-30 2005-03-31 Tokyo Electron Limited System and method for using first-principles simulation to control a semiconductor manufacturing process
US7337032B1 (en) * 2004-10-04 2008-02-26 Advanced Micro Devices, Inc. Scheduling ahead for various processes
CN103646301A (en) * 2013-11-08 2014-03-19 上海华力微电子有限公司 Batch dispatching system and method for furnace tube device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101996359A (en) * 2009-08-26 2011-03-30 中芯国际集成电路制造(上海)有限公司 Dispatching method of semiconductor manufacturing process
CN103064380B (en) * 2012-12-20 2016-06-08 上海华虹宏力半导体制造有限公司 There is the work dispatching method of the manufacture system of multiple stage process equipment

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696689A (en) * 1994-11-25 1997-12-09 Nippondenso Co., Ltd. Dispatch and conveyer control system for a production control system of a semiconductor substrate
US20030171972A1 (en) * 2002-01-28 2003-09-11 James Heskin Scheduling system and method
TW575895B (en) * 2002-06-25 2004-02-11 Taiwan Semiconductor Mfg A method of reducing time interval between manufacturing processes
TW200412518A (en) * 2003-01-02 2004-07-16 Taiwan Semiconductor Mfg Front end dispatching method and system for long batch processing equipment in semiconductor manufacturing
US20050071038A1 (en) * 2003-09-30 2005-03-31 Tokyo Electron Limited System and method for using first-principles simulation to control a semiconductor manufacturing process
US7337032B1 (en) * 2004-10-04 2008-02-26 Advanced Micro Devices, Inc. Scheduling ahead for various processes
CN103646301A (en) * 2013-11-08 2014-03-19 上海华力微电子有限公司 Batch dispatching system and method for furnace tube device

Also Published As

Publication number Publication date
TW201643576A (en) 2016-12-16
CN106251029A (en) 2016-12-21

Similar Documents

Publication Publication Date Title
TWI566064B (en) Dispatch control method for furnace process
KR101216836B1 (en) Vacuum processing apparatus and recording medium
CN101996359A (en) Dispatching method of semiconductor manufacturing process
CN105302078B (en) The control system and method for boiler tube board operation in a kind of semiconductor fabrication process
TWI506702B (en) Dispatch control method for furnace process
CN102768941A (en) Method and device for dispatching to batch machine
CN109857083B (en) Non-deadlock control method containing unobservable events based on Petri network
CN103215572A (en) Semiconductor equipment technology control method and semiconductor equipment technology control device
CN115685921A (en) Mixed integer linear programming model for joint scheduling of multiple AGVs (automatic guided vehicles) and multiple machines
CN112185831B (en) Sampling defect detection method, apparatus and system thereof
TW201017352A (en) Conveyance control device and conveyance control method
Zhou et al. WIP balance and due date control in a wafer fab with low and high volume products
TWI388954B (en) Method for adjusting priority of lot of wafer
CN108646696B (en) System and method for automatically processing batch products to be detected
CN109754133B (en) Semiconductor processing equipment and method and system for discharging goods in areas of FAB
Yang et al. Bottleneck Detection Framework Using Simulation in a Wafer FAB
CN108227508B (en) Wafer loading and unloading platform efficiency monitoring method
El-Khouly et al. Effective scheduling of semiconductor manufacturing using simulation
Kao et al. Near optimal furnace tool allocation with batching and waiting time constraints
TW497141B (en) Dynamic dispatching method
Lee et al. Scheduling a multi-chip package assembly line with reentrant processes and unrelated parallel machines
Wang et al. A new compound priority control strategy in semiconductor wafer fabrication
CN105575838B (en) The method and system for sending goods for measurement platform
Marton et al. One piece flow-another view on production flow in the next continuous process improvement
TW200412518A (en) Front end dispatching method and system for long batch processing equipment in semiconductor manufacturing