575895 A7 B7 經濟部智慈財產局員工消費合作社印製 五、發明說明（） 發明領^ 本發明是有關於一種縮短產品製程間隔時間之方法， 且特別是關於一種縮短具有優先進貨權的產品（Supa H〇t Lot)之等待製程時間方法。 發明背i 乂一個半導體廠通常需要生產多種不同的產品，尤其是 強调服矛力‘向的+導體代工廠。然、而，標準化的半導體代 工交期已無法滿足客戶的要求。在許多情況下，縮短=期 (Cycle time)遂比任何事來的重要，比如客戶願意付三 倍標準報價來換取較短交期。半導體代工廢為了滿足客戶 的而求’便定出终多進貨優先權的規則，來決定每種貨的 優推，然後再以優先權先後決定每種貨的在製程設備的 進貝順序’用以減少具有高優先權的產品之製程等待時 間，進而縮短具有高優先權的產品之交期。例如二種貨的 優先權分別為Pl和u的優先權大於的P2優先權，具 有P!優先權的貨就有製程設備的進貨的優先權利，減少/了 製程等待時間。 …在決定優先權之後，還得在每個設備徹底執行 權而產生的進貨順序。在半導體廠還沒完全自動化前，執 :丁因優先權而產生的進貨順序之成效有賴於生產技 紀律。，然而，當晶圓的尺寸由6忖、8忖到12叶，製程的 本紙張尺度適财關家標準(CNS)A4規格(21^7公變）_ ,(請先閲讀背面之注意事項再填寫本頁} ，裝· 、一 15 %- 575895 A7 ____ B7 五、發明説明（） ·(請先閱讀背面之注意事項再填寫本頁) 取小技術由0.25、0.18到〇·ΐ5，一片晶圓上的元件數目越 來越夕也就疋5兒’ 一片晶圓的價值越來越大。同樣地， 時間對每片晶圓成本也同樣升高。因此，便由自動化搬運 系統逐漸取代人工搬運。 在半導體廠逐漸自動化後，雖然各設備供應商都能提 供符合共同制定標準的設備，但是和即時派工決策系統 (Real Time Dispatcher)及設備控制系統（丁ool control575895 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention () Invention Field ^ The present invention relates to a method for shortening the interval between product manufacturing processes, and in particular, to a product that has the priority to purchase goods ( Supa Hot Lot method). Inventions 乂 A semiconductor factory usually needs to produce a variety of different products, especially a + conductor foundry that emphasizes the direction of service. However, the standard semiconductor foundry delivery date has been unable to meet customer requirements. In many cases, cycle time is more important than anything, such as customers willing to pay three times the standard quote in exchange for a shorter delivery time. In order to meet customers' requirements, semiconductor foundry wastes will 'set the final multiple purchase priority rules to determine the priority promotion of each kind of goods, and then determine the priority of each goods in the processing equipment order by priority' It is used to reduce the process waiting time of products with high priority, thereby shortening the delivery time of products with high priority. For example, the priority of the two types of goods is that the priority of Pl and u is greater than the priority of P2. The goods with P! Priority have the right to purchase process equipment, which reduces / reduces the waiting time of the process. … After deciding on the priority, you have to repurchase the order in which each device is fully executed. Prior to the semiconductor factory's full automation, the effectiveness of the procurement order due to priority depends on production technology discipline. However, when the size of the wafer is from 6 忖, 8 忖 to 12 leaves, the paper size of the process is suitable for the Financial Standards (CNS) A4 specification (21 ^ 7 public variable) _ (Please read the precautions on the back first Fill out this page again}, install ·, 15%-575895 A7 ____ B7 V. Description of the invention () · (Please read the precautions on the back before filling out this page) Take small technology from 0.25, 0.18 to 0 · ΐ5, one piece The number of components on the wafer is getting smaller and smaller. The value of a wafer is getting larger and larger. Similarly, time also increases the cost of each wafer. Therefore, it is gradually replaced by automated handling systems. Manual handling. After the semiconductor factory is gradually automated, although each equipment supplier can provide equipment that meets the common development standards, it is compatible with the Real Time Dispatcher and equipment control system (丁 ool control).
System )結合所提供的功能通常是很共通或不能滿足半導 體廠需求，尤其在執行因優先權而產生的進貨順序。 以第三圖為例，圖中為具有暫時貨批儲藏室（Internal buffer )之設備，此類設備通常是在需要批次進貨（多批 貨一起執行製程）的製程設備上設計的，例如爐管和酸槽。 如第三圖中步驟10，貨批A正在進行製程中，貨批B、 貨批c在暫時貨批儲藏室中等待製程，已知貨批B的優先 榷大於貨批C (貨批b應該比貨批c具有優先進貨的權 利）。然而，此類設備的派工機制（Dispatch Mechanism) 疋先進先出（First in，First out)，也就是先進設備先執行 製权’顯然在優先權的執行上尚有改善的空間。 經濟部智慈財產局員工消費合作社印製 本發明的重點正是要克服在自動化的半導體廠中，優 先權執行上所面臨的問題。在以下的說明書中，將會透過 貫施例來說明如何的應用本發明解決優先權執行上的問 題0 3 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 575895 Α7 _ Β7 經濟部智慧財產局員工消費合作社印製 五、發明説明（） iLgQLjL與概述 曰鑑於上述發明背景中所述，因此本發明的目的就是在 提供一種縮短產品製程間隔時間之方法，“適用於縮短=有 優先進貨權的產品（SuperHotLot)之等待製程時間^ 根據本發明之上述目的，提出第一種派工機制：為具 有最高優先權的產品預留下一道製程之設備。 /、 依據上述第一種派工機制，本實施例需配合即時派工 決策系統和設備控制系統，且兩者互相接收或傳送製程參 數。此外，還需要第一設備和第二設備，第二設備為第一 設備之下一道製程設備，而且第一設備和第二設備和設備 控制乐統可互相接收或傳送製程參數。實施例說明如下： 將第一種派工機制，經程式化成設備控制系統之進貨步 驟 ^具有優先進貨權批貨在第一設備開始該進貨步驟 守第5又備會碩取該批貨之參數，且傳送參數給設備控 制系統，接著即時派工決策系統讀取設備控制系統傳送之 參數’並為此參數預留該第二設備。 根據本發明之上述目的，提出第二種派工機制：比對 等待的製程設備和前一道製程設備的所有產品中，選出具 有最高優先權的產品，而且預留現在製程設備。 依據上述第二種派工機制，本實施例需配合即時派工 決策$統和設備控制系統，且兩者互相接收或傳送製程參 數。此外’還需要第一設備和第二設備，第二設備為第一 設備上一道製程設備，而且第一設備和第二設備和設備控 4 /請先閲讀背面之注意事項再場寫本頁) ，裝· ’訂· %- 本纸張尺度適用中國國家標準(CNS)A4規格(210Χ 297公釐) 575895 A7 B7 五、發明説明（ 制系統可互相接收或傳送製程參數。將第二種派工機制， 經私式化成設備控制系統之進貨步驟，可搜尋在正在等待 Γ設備和在第二設備進行製程中，具有優先進貨權批 貝’亚為具有優先進貨權批貨之參數預留第一設備。 根據本發明之上述目的’提出第三種派工機制：在且 有一暫時貨批儲藏室的設備，比對在該暫時貨批儲藏室内 所有批次產品之優先權，然後挑選出_具有最高優先㈣ 產品批次最先執行製程。 ^依據上述第三種派工機制，需配合即時派工決策系統 和設備控m且兩者互相接收或傳送製程參數。此外， 還需要具有暫時貨批儲藏室的設備，而且此設備和設備控 制系統可互相接收或傳送製程參數，將第三種派工機制， 經程式化成設備控制系統之進貨步驟，可比對在設備之暫 日”批儲藏室内複數批次產品之優先權，然後挑選出具； 最高優先權的產品批次最先執行製程。 幕上述之，本發明的優點就是藉由自動化的派工機 制，來減少具高優先權產品的製程等待時間，並得以缩短 交期。 圖式之簡覃說明 為讓本發明之上述和其他目的、特徵、和優點 顯易懂，下文特舉-較佳實施例，並配合所附圖式，作詳 細說明如下： 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) …：：......1裝： ,(請先閲讀背面之注意事項再填寫本頁) 、v'tr 經濟部智慧財產局員工消費合作社印製 575895 Λ7 B7The functions provided by System) are usually very common or cannot meet the needs of semiconductor factories, especially in the implementation of the purchase order due to priority. Take the third picture as an example. The picture shows equipment with a temporary batch storage room (Internal buffer). Such equipment is usually designed on process equipment that requires batch purchase (multiple batches of goods are processed together), such as furnaces. Tube and acid tank. As shown in step 10 in the third figure, lot A is in the process of being processed. Lot B and lot c are waiting in the temporary lot storage room. It is known that lot B has priority over lot C (lot b should be Priority to purchase c has the right to prior purchase). However, the Dispatch Mechanism First First in, First out of this type of equipment, that is, the advanced equipment first executes the right of control, obviously there is still room for improvement in the implementation of priority. Printed by the Consumer Cooperatives of the Intellectual Property Office of the Ministry of Economic Affairs The focus of the present invention is to overcome the problems faced by the implementation of priority rights in automated semiconductor factories. In the following description, examples will be used to explain how to apply the present invention to solve the problem of priority implementation. 0 3 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 575895 Α7 _ Β7 Economy Printed by the Consumers ’Cooperative of the Ministry of Intellectual Property Bureau. 5. Description of Invention () iLgQLjL and Overview In view of the above background of the invention, the purpose of the present invention is to provide a method for shortening the time between product processes. The waiting process time of the product with the right of priority purchase (SuperHotLot) ^ According to the above purpose of the present invention, a first dispatch mechanism is proposed: equipment for the next process is reserved for the product with the highest priority. The dispatch mechanism, this embodiment needs to cooperate with the instant dispatch decision system and equipment control system, and both of them receive or transmit process parameters. In addition, a first device and a second device are needed, and the second device is under the first device A process equipment, and the first equipment and the second equipment and equipment control system can receive or transmit process parameters to each other. The description of the example is as follows: The first dispatch mechanism is programmed into the purchase step of the equipment control system. ^ The shipment with the priority purchase right is started at the first device. The purchase step is 5th and the parameters of the batch will be obtained. And transmitting the parameter to the equipment control system, and then the dispatching decision system reads the parameter 'transmitted by the equipment control system' and reserves the second device for this parameter. According to the above purpose of the present invention, a second dispatching mechanism is proposed: For the waiting process equipment and all products of the previous process equipment, the product with the highest priority is selected and the current process equipment is reserved. According to the second dispatch mechanism described above, this embodiment needs to cooperate with the immediate dispatch decision. And device control system, and both receive or transmit process parameters. In addition, 'the first device and the second device are needed, the second device is a process device on the first device, and the first device and the second device and the device control 4 / Please read the precautions on the back before writing this page), binding · 'Order ·%-This paper size applies to China National Standard (CNS) A4 specifications (210χ 29 7mm) 575895 A7 B7 V. Description of the invention (The manufacturing system can receive or transmit process parameters to each other. The second dispatch mechanism is converted into the purchase procedure of the equipment control system through private mode. In the process of the second device, the first batch of shipments with priority purchase right is reserved for the parameters of the first batch of shipments. According to the above purpose of the present invention, a third dispatch mechanism is proposed: there is a temporary shipment The equipment in the batch storage room compares the priority of all batches of products in the temporary batch storage room, and then selects _ with the highest priority ㈣ The product batch is the first to execute the process. ^ According to the third dispatch mechanism described above, Cooperate with the real-time dispatching decision-making system and equipment control, and both receive or transmit process parameters. In addition, it also needs equipment with a temporary cargo storage room, and this equipment and equipment control system can receive or transmit process parameters to each other, and the third dispatch mechanism can be programmed into the equipment control system's purchase steps, which can be compared with the equipment. The "priority day" batch storage room has the priority of multiple batches of products, and then selected and issued; the highest priority product batch is the first to execute the process. As mentioned above, the advantage of the present invention is to reduce the use of automated dispatch mechanism to reduce The process waiting time of high-priority products can shorten the delivery time. Brief description of the drawings To make the above and other objects, features, and advantages of the present invention easy to understand, the following specific examples-preferred embodiments, and In accordance with the attached drawings, the detailed description is as follows: This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm)… :: ...... 1 pack:, (Please read the precautions on the back before (Fill in this page), v'tr Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 575895 Λ7 B7
、發明説明（） 第1圖係依照本發明第一實施例的示意圖； 第2圖係依照本發明第二實施例的示意圖； 第3圖係依照本發明第三實施例的示意圖；以及 第4圖係依照本發明第三實施例的 意圖。 3代方式的示 屬^式之標記說明 EQ1 :半導體製程設備 EQ2 : EQ1下一道製程之半導體設備 EQ4 :半導體製程設備 EQ5 : EQ4上一道製程之半導體設備 _(請先閲讀背面之注意事項再場寫本頁) 裝- -訂 曼jg之詳細說明 本發明將藉由以下的3個較佳實施例來說明如何縮短 具有優先進貨權的產品之等待製程時間，其中2個實施例 適用於所有自動化設備，另一個則適用於具有暫時貨批儲 藏室的設備。為了便於說明起見，實施例中的產品的優先 權只分成兩種，分別是高優先權和低優先權，具有高優先 權的產品比低優先權的產品享有優先執行製程權利，但這 不表示本發明的應用只侷限在此。另可將優先權分成數個 等級，亦可依本發明所揭露之方法實施運作。 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) % 經濟部智慧財產局員工消費合作社印製 575895 A7 _____B7___ 五、發明説明（） 實施例1 明參照弟1圖’其纟會示依照本發明第一個較佳實施例 的一種示意圖。圖中即時派工決策系統（Real Time Dispatcher，下文中均稱為RTD )為負責分配產品給製程 口又備’並與没備控制糸統（Tool Control System，下文中 均稱為TCS )互相傳遞和接收參數，如產品名、產品序號、 產品優先權等級、程式名、程式序號、製造流程、製程代 號、製程時間、製程設備以及類似參數用來代表產品、程 式、製造流程及設備。TCS的功能則是控制設備的進貨到 出貨的步驟，也就是從產品放到設備的進貨位置（L〇ad Port)直到產品完成製程送出設備都是由tcs控制。TCS 在設備的控制步驟依序為：驗證產品製程參數（Verify )、 驗也日日片插槽位置（Slot map )、形成批次（Batch )、進貨 (Track-in )、工作開始（j〇b start )、等待製程（j〇b queue )、 製程中（Process)。 請參照第1圖，具有高優先權的產品pi即將要放置 到製程設備EQ1的進貨位置，為了讓產品ρι完成在設備 EQ1的製程後馬上可以傳送到下一道製程設備Eq2。所以， ▲產〇口 P 1在5又備EQ 1進行到進貨（Track-in )步驟時，TCS 會將產品P1的製程參數傳遞給RTD。RTD會根據接收產 扣P1的製程參數選定適當的製程設備eq]，並預留進貨 位置給產品Ρ1。 7 本紙張尺;1適財關緖準(CNS)A4規格⑽χ29 ) •(請先閱讀背面之注意事項再塡寫本頁) 裝· Ρ 經濟部智慧財產局員工消費合作社印製 575895 Λ7 B7 五、發明説明（） 夂請先閱讀背面之注意事項再填寫本頁) 因為設備EQ2的選擇可能不只一個，為了節省更多時 間’本發明提供以下原則，作為選擇EQ2的先後順序。設 備EQ2的第一選擇條件為距離設備eq 1最近且不需更改 製程參數之設備，第二選擇條件為不需更改製程參數之設 備’最後的選擇條件為距離設備EQ1最近之設備。此外， 也為了預防因設備EQ1當機造成設備EQ2產能的浪費。 所以當設備EQ 1當機時，RTD會取消產品P1預留的進貨 位置。 以上所述之本發明第一個較佳實施例，也就是派工機 制，权式化為TCS中的進貨（Track-in)步驟，用來縮短 具有高優先權的產品之製程等待時間。 本發明第一個實施例的另一種方式是為了更進一步增 加設備EQ2產能利用率。換句話說，除了縮短具有高優先 權的產品之製程等待時間外，還要減少設備EQ2產能利用 率的浪費。本方式適用於設備Eq丨製程時間較長，以致於 設備EQ2預留的時間過長。 經濟部智慧財產局員工消費合作社印製 為了更精準控制時間，本方式計算產品p 1的製程時 間和產品P 1在設備間的傳送的總和時間τρ，當產品Η 在設備EQ1進行到進貨（Track.in)步驟之時間二加:τρ 後的時間點TEQ2，作為選擇設備卿的條件。所以，設 備EQ2的第-選擇條件為距離設備抑最近、設備即將 完成製程時間點距TEQ2最近且*需更改製程參數之設 備，弟二選擇條件為距離設備EQ1最近且不 數之設備’第三選擇條件為不需更改製程參數之設備，最 8 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公楚) 575895 A7 B7 經濟部智慧財產局員工消費合作社印霉 五、發明説明（） 後的選擇條件為距離設備EQ1最近之設備。除此之外，其 餘的方法均與原實施例相同。 實施例2 本發明的第二個實施例’同樣需配合rTD和tcS系 統，w參照第2圖，習知的自動化系統原本就具有挑選在 等待製彺没備EQ4中具有高優先權的產品，並先預留設備 EQ4的進貨位置。本發明的方式則是擴大挑選的範圍到上 返製耘设備EQ5中的產品。假設在製程設備EQ5中的 產P2具有咼優先權則預留設備HQ#的進貨位置。 本貝％例中，RTD首先搜尋在等待製程設備eq4和 製f王没備EQ5中產品的參數是否具有高優先權，假設產品 P2具有高優先權，下一個步驟就是傳遞產品p2的參數給 TCS，再由TCS控制設備EQ4空出進貨位置。 以上所述之本發明第二個較佳實施例，也就是派工機 制，程式化為tcs中的驗證產品製程參數（Verify)步驟， 用來縮短具有高優先權的產品之製程等待時間。 在本發明第一和第二個實施例中，〔預留設備的進貨位 置，對縮短具有高優先權產品《等待製程的時間有很大的 優點;。參照第i圖，因為在全自動化傳動系統中（04— Hoist TransportaUon，下文中均稱為〇HT)，‘果產品沒有 預留設備的進貨位置，它會就會被放置到貨批暫時存放 區，而增加產品的運送時間及OHT工作負栽、' 9 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) •(請先閲讀背面之注意事項再填寫本頁) 裝· **?!·Explanation of the invention (1) FIG. 1 is a schematic diagram according to the first embodiment of the present invention; FIG. 2 is a schematic diagram according to the second embodiment of the present invention; FIG. 3 is a schematic diagram according to the third embodiment of the present invention; The diagram is according to the third embodiment of the present invention. The 3 generation method shows the ^ -type mark description EQ1: semiconductor process equipment EQ2: EQ1 semiconductor process of the next process EQ4: semiconductor process equipment EQ5: EQ4 semiconductor process of the previous process_ (Please read the precautions on the back first (Write this page)-Detailed description of the book-ordering jg The present invention will use the following 3 preferred embodiments to explain how to shorten the waiting process time of products with priority purchase rights, of which 2 embodiments are applicable to all automation Equipment, the other is suitable for equipment with temporary cargo storage room. For the convenience of explanation, the products in the embodiment have only two types of priority, namely high priority and low priority. Products with high priority enjoy the right to execute the process preferentially than products with low priority. The application of the present invention is limited to this. In addition, the priority can be divided into several levels, and the operation can also be implemented according to the method disclosed in the present invention. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm)% Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 575895 A7 _____B7___ V. Description of the invention (Example 1) A schematic diagram according to the first preferred embodiment of the present invention. In the figure, the Real Time Dispatcher (hereinafter referred to as RTD) is responsible for distributing products to the process port, and communicates with the Tool Control System (hereinafter referred to as TCS). And receiving parameters, such as product name, product serial number, product priority level, program name, program serial number, manufacturing process, process code, process time, process equipment, and similar parameters are used to represent the product, program, manufacturing process and equipment. The function of TCS is to control the steps from the purchase to the shipment of the equipment, that is, from the product to the equipment's purchase location (Lod Port) until the product completes the process and the equipment is sent out by the tcs control. The control steps of TCS in the equipment are: verification of product process parameters (Verify), inspection of Japanese and Japanese film slot positions (Slot map), formation of batches (Batch), purchase (Track-in), work start (j〇). b start), a waiting process (j〇b queue), and a process (Process). Please refer to Figure 1. The product pi with high priority is about to be placed in the purchase position of the process equipment EQ1. In order for the product to be completed immediately after the process of the equipment EQ1 can be transferred to the next process equipment Eq2. Therefore, ▲ When the production port P 1 is at 5 and EQ 1 is ready for the Track-in step, TCS will pass the process parameters of product P1 to the RTD. The RTD will select the appropriate process equipment eq] according to the process parameters of the received product P1, and reserve the purchase position for the product P1. 7 paper rulers; 1 Applicable Financial Standards (CNS) A4 Specification ⑽χ29) • (Please read the precautions on the back before writing this page) 装 · 普 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 575895 Λ7 B7 5 、 Explanation of invention () 夂 Please read the notes on the back before filling out this page) Because there may be more than one EQ2 choice, in order to save more time, the present invention provides the following principles as the order of selecting EQ2. The first selection condition of the device EQ2 is the device closest to the device eq 1 without the need to change the process parameters, and the second selection condition is the device that does not need to change the process parameters. The final selection condition is the device closest to the device EQ1. In addition, in order to prevent the wastage of equipment EQ2 caused by equipment EQ1 crash. Therefore, when the equipment EQ 1 is down, the RTD will cancel the purchase position reserved for the product P1. The first preferred embodiment of the present invention described above, that is, the dispatch mechanism, is converted into the Track-in step in TCS to shorten the process waiting time of products with high priority. Another way of the first embodiment of the present invention is to further increase the capacity utilization rate of the equipment EQ2. In other words, in addition to shortening the process waiting time of products with high priority, it is also necessary to reduce the waste of equipment EQ2 capacity utilization. This method is suitable for the equipment Eq 丨 process time is too long, so that the time reserved for equipment EQ2 is too long. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In order to control time more accurately, this method calculates the total processing time of product p 1 and the transmission time of product P 1 between devices τρ. When product Η arrives at the equipment EQ1 (Track .in) Step time two plus: τρ, the time point TEQ2, as a condition for selecting equipment. Therefore, the first-selection condition of the device EQ2 is the device closest to the device, the device is about to complete the process, and the device is closest to the TEQ2 and * needs to change the process parameters. The second selection condition is the device that is closest to the device EQ1 and not counted. The selection conditions are equipment that does not need to change process parameters. The maximum 8 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210X297). 575895 A7 B7 The employee ’s cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, India, India. The selection condition is the device closest to the device EQ1. Except for this, the other methods are the same as the original embodiment. Embodiment 2 The second embodiment of the present invention also needs to cooperate with the rTD and tcS systems. Referring to FIG. 2, the conventional automation system originally has products selected with high priority in waiting for the obsolete preparation EQ4. And reserve the purchase position of equipment EQ4 first. The method of the present invention is to expand the selection range to the products in the top-down processing equipment EQ5. Assuming that the product P2 in the process equipment EQ5 has priority, the purchase position of the equipment HQ # is reserved. In this example, the RTD first searches whether the parameters of the product in the waiting process equipment eq4 and the system f Wang Wubei EQ5 have high priority. Assuming that the product P2 has high priority, the next step is to pass the parameters of the product p2 to TCS. Then TCS control equipment EQ4 vacates the loading position. The second preferred embodiment of the present invention described above, that is, a dispatch mechanism, is programmed into the verify product process parameter (Verify) step in tcs, which is used to shorten the process waiting time of products with high priority. In the first and second embodiments of the present invention, [reserving the purchase position of the equipment has a great advantage in shortening the time of waiting for a process with a high priority product; Refer to Figure i, because in a fully automated transmission system (04—Hoist TransportaUon, hereinafter referred to as OHT), 'If the product has no reserved place for the equipment, it will be placed in the temporary storage area of the batch. , And increase product delivery time and OHT work load, '9 This paper size applies Chinese National Standard (CNS) A4 specifications (210X297 mm) ?! ·
575895 A7 B7 五、發明説明（ 貫施例3 本發明的第三個實施例是應用於具有暫時貨批儲藏室 (Internal buffer)的設備，例如爐管和酸槽。這種設備通 常是以批次執行製程’也就是說，同時可以執行至少兩批 的產品。同樣地，本實施例需要配合rtd和Tcs系統。 茶照第二圖’本貫％例疋利用調整暫時貨批儲藏室内 產品的執行製程順序，來縮短具有高優先權產品的製程等 待時間丨。如步驟10 ’批次A正在進行製程中，批次Bc 等待製程中。下一步驟20，批次a已完成製程，因為批 次C具有高優先權，所以暫緩執行批次B。再下一步驟3〇， 批次C送入執行製程。 經濟部智慧財產局員工消費合作社印製 ---------W裝： Λ請先閱讀背面之注意事項再填寫本頁) 特別說明的是，此設備原來在暫時貨批儲藏室内的派 工機制是先進先出，也就是說，不管任何批次的優先權， 先進貨批儲藏室的批次先執行製程。f本實施例的功能就是 去搜寻在暫時貨批儲藏室内是否存在具有高優先權的批 次，如果有高優先權的批次’本派工機制就會讓它最優先 執行製程。如果沒有高優先權的批次，本派工機制就會依 先進先出的派工機制來處理產品批次:。 以上所述之本發明第三個較佳實施例，也就是派工機 制，程式化為TCS中的等待製程（Job queue)步驟，用 來縮短具有高優先權的產品之製程等待時間。 本發明第三個實施例的另一種方式是將本實施例應用 本紙張尺度適用中國國家標準(CNS)A4規格(21〇χ 297公爱) 575895 A7575895 A7 B7 V. Description of the Invention (Exemplary Embodiment 3 The third embodiment of the present invention is applied to equipment having a temporary cargo storage room (Internal buffer), such as furnace tubes and acid tanks. This equipment is usually batch The second execution process' that is, at least two batches of products can be executed at the same time. Similarly, this embodiment needs to cooperate with the rtd and Tcs systems. Execute the process sequence to shorten the process waiting time for high-priority products. For example, step 10 'Batch A is in the process and batch Bc is waiting for the process. Next step 20, batch a has completed the process because the batch Sub-C has high priority, so the execution of batch B is postponed. The next step is 30, and batch C is sent to the execution process. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs --------- W Pack : Λ Please read the notes on the back before filling out this page) It is specifically stated that the original dispatch mechanism of this equipment in the temporary cargo storage room is first in, first out, that is, regardless of the priority of any batch, the advanced Consignment Tibetan batch process chamber is performed first. f The function of this embodiment is to search whether there is a batch with high priority in the temporary cargo storage room. If there is a batch with high priority, the dispatch mechanism will give it the highest priority to execute the process. If there is no high-priority batch, the dispatch mechanism will process the product batch according to the FIFO dispatch mechanism :. The third preferred embodiment of the present invention described above, that is, a dispatch mechanism, is programmed into a job queue step in the TCS to shorten the process waiting time of products with high priority. Another way of the third embodiment of the present invention is to apply this embodiment. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇χ 297 public love) 575895 A7
五、發明説明（） 在制TCS中的形成批次（Batch)中，可以比本實施例的等 待製程（Job queue)步驟更早一步搜尋等待製裎的產品， 疋否具有高優先權的產品，可以形成批次。特別說明的是， 本方式同樣適用於具有暫時貨批儲藏室的設傭。 第四圖為本方式的示意圖，圖中一個批次最多可容納 4批製程參數相同的產品，產品p3、產品p4已被指定為 等待製程的批次，產品P5、產品P6為具有高優先權。假 設產品P5、產品P6和產品p3、產品P4製程參數相同， 則將他們加入批次中；假設產品P5、產品p6和產品、 產品P4製程參數不相同，則產品p5、產品p6將取代產 品P3、產品p4形成等待製程的批次。 本方式的派工方式除了可以應用在Tcs中的形成批次 (Batch)步驟外，也可以用在RTD中。其目的和方式均 與本方式相同，只是用在不同的系統。 經濟部智慈財產局員工消費合作社印製 ·(請先閲讀背面之注意事項再填寫本頁} 由上述本發明較佳實施例可知，應用本發明具有下列 優點：對具有高優先權的產品而言，可以因為減少等待製 程時間，而得以縮短交期滿足客戶需求。對全自動化傳= 系統（OHT )而言，因為預留設備的進貨位置的原因，可 減少產品的運送時間及0HT工作負載。對半導體廠的生 產管理而言，自動化的派工機制可提升管理的效率。 雖然本發明已以一較佳實施例揭露如上，然其並非用 以限定本發明，任何熟習此技藝者，在不脫離本發明之精 神和範圍内，當可作各種之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。 本紙張尺度適用中國國家標準(CNS)A4規格(210X 297公釐)V. Description of the invention () In the formation of batches in the TCS, you can search for products waiting to be processed one step earlier than the job queue step of this embodiment, and do not have products with high priority. , Can form batches. In particular, this method is also applicable to setting up a commission with a temporary cargo storage room. The fourth figure is a schematic diagram of the method. In the figure, a batch can accommodate a maximum of 4 batches of products with the same process parameters. Product p3 and product p4 have been designated as batches waiting for processing. Product P5 and product P6 have high priority. . Assuming product P5, product P6 and product p3, and product P4 process parameters are the same, they are added to the batch; assuming product P5, product p6, and product, product P4 process parameters are not the same, product p5 and product p6 will replace product P3 The product p4 forms a batch waiting for processing. In addition to the batch method in Tcs, the dispatch method of this method can also be used in RTD. Its purpose and method are the same as this method, but it is used in different systems. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs · (Please read the notes on the back before filling out this page} From the above-mentioned preferred embodiment of the present invention, it can be seen that the application of the present invention has the following advantages: For products with high priority, In other words, it can shorten the delivery time to meet customer needs by reducing the waiting process time. For the fully automated transmission system (OHT), because of the reserved location of the equipment, it can reduce the product delivery time and the 0HT workload For the production management of a semiconductor factory, the automated dispatch mechanism can improve the management efficiency. Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Anyone skilled in this art, in Various changes and modifications can be made without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope of the attached patent application. This paper standard applies to Chinese National Standard (CNS) A4 Specifications (210X 297 mm)