CN108646696B - System and method for automatically processing batch products to be detected - Google Patents
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- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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Abstract
The invention provides a system and a method for automatically processing products to be detected in batches, which comprises the following steps: calculating the quantity T of the batch products to be detected and the quantity M of the batch products which can be detected by the machine, calculating the difference L of the quantity T and the quantity M, and returning to the first step if the difference is less than or equal to 0; if the difference is larger than 0, judging the quantity W of the batch products which need to be detected, calculating the difference C between T and W, judging the sizes of L and C, and if L is larger than or equal to C, canceling the detection of the batch products with the quantity C; if L is smaller than C, canceling the detection of the batch products with the quantity of L; the batch products which are not detected are the rest batches of products except the batch products which need to be detected in the batch products to be detected. The invention can determine whether to wait for detection completely or cancel detection of partial batches of products, and can determine the number and batch number to be cancelled, thereby reducing human errors, reasonably utilizing machine resources and saving cost.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a system and a method for automatically processing products to be detected in batches.
Background
During the semiconductor manufacturing process, each time a process is completed, a certain number of lots (Lot, a batch of wafer products) are randomly or constantly extracted for inspection to determine whether there are defects or whether the dimensions of the structures formed by the process meet the requirements.
However, when the stacking capacity of the station reaches a certain level, the cycle time (cycle time) of the on-line production (inline) is directly affected, and thus the efficiency is directly affected. When the phenomenon of stacking occurs, the reasonable utilization rate of a machine table and the working efficiency of inline are guaranteed by manually canceling the detection (skip Lot) of part of Lot.
Whether the Lot can cancel the detection or not is mainly judged by the experience of an engineer. Therefore, manually cancelling the detection of Lot (manual skip Lot) may cause a great burden (loading) to the engineer. In addition, whether skip Lot exists or not is judged by depending on experience, human errors occur, and the normal work of inline is influenced to a great extent. In addition, once an error occurs, the defect cannot be detected directly, so that the defect cannot be fed back to a production line in time, and the yield of a large batch of wafers is affected in serious cases.
Chinese patent CN104977903A discloses a method for dispatching wafer batch under a machine group based on a real-time dispatching system, which avoids the situation that the machines under the same machine group book the same batch of wafers at the same time when the machines book the wafer batch by carrying out dispatching optimization on the machines under the machine group, thereby greatly improving the production efficiency of the factory and greatly reducing the probability of dispatching errors. Although the method disclosed in the patent avoids the situation that the machines under the same machine group book the same batch of wafers at the same time when the machines book the batch of wafers, the method cannot avoid the situation that the quantity of the batch products to be detected is too large, which causes the stacking of the measuring station.
Disclosure of Invention
The invention aims to provide a system and a method for automatically processing a batch of products to be detected, which can reduce human errors, reasonably utilize machine resources and save cost.
In order to achieve the above object, the present invention provides a method for automatically processing a batch of products to be detected, comprising:
calculating the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine;
calculating the difference value between the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine station;
if the difference is less than or equal to 0, returning to the first step; if the difference is larger than 0, setting the difference as a first number, and carrying out the following steps;
judging the quantity of batch products which must be detected;
calculating the difference value between the number of the batch products to be detected and the number of the batch products which need to be detected, and setting the difference value as a second number;
judging the size of the first quantity and the second quantity;
if the first quantity is larger than or equal to the second quantity, canceling the detection of the second quantity of batch products;
if the first quantity is smaller than the second quantity, canceling the detection of the first quantity of batch products;
the batch products which are not detected are the rest batches of products except the batch products which need to be detected in the batch products to be detected.
Optionally, the method for calculating the number of batches of products that the machine can detect includes: determining the detection capability a of the tool, determining the state coefficient S of the tool, and determining the number n of the tools, the number of the batch products that can be detected by the tool is M ═ a (S1+ S2+ … … + Sn).
Optionally, when the first number is smaller than the second number, risk sorting is performed on the second number of batches of products remaining after removing the batches of products that must be detected, and the first number of batches of products are selected in order to cancel detection.
Optionally, the products are sorted from high to low according to risk level and category of the batch.
Optionally, the first number of batches of products is selected from low to high among the risk-ranked batches of products to cancel the test.
Correspondingly, the invention also provides a system for automatically processing the batch products to be detected, which comprises: a calculation module and a judgment module, wherein
The calculating module calculates the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine;
the calculation module calculates the difference value between the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine station; if the difference value is less than or equal to 0, the calculation module continues to calculate the number of the batches to be detected and the number of the batches which can be detected by the machine; if the difference is greater than 0, setting the difference as a first number;
the judging module judges the quantity of the batch products which need to be detected;
the calculation module calculates the difference value between the number of the batch products to be detected and the number of the batch products which need to be detected, and sets the difference value as a second number;
the judging module judges the sizes of the first quantity and the second quantity; if the first quantity is larger than or equal to the second quantity, canceling the detection of the second quantity of batch products; if the first quantity is smaller than the second quantity, canceling the detection of the first quantity of batch products;
the batch products which are not detected are the rest batches of products except the batch products which need to be detected in the batch products to be detected.
Optionally, the method for calculating the number of the batch products that the computer can detect by the computer comprises: determining the detection capability a of the tool, determining the state coefficient S of the tool, and determining the number n of the tools, the number of the batch products that can be detected by the tool is M ═ a (S1+ S2+ … … + Sn).
Optionally, the system further comprises an evaluation module, and when the first number is smaller than the second number, the evaluation module performs risk ranking on the second number of batches of products remaining after removing the batches of products that must be detected, and selects the first number of batches of products in order to cancel detection.
Optionally, the evaluation module sorts the products according to their risk levels and categories from high to low.
Optionally, the first number of batches of products is selected from low to high among the risk-ranked batches of products to cancel the test.
Compared with the prior art, the system and the method for automatically processing the batches to be detected calculate the number of the batches to be detected and the number of the batches which can be detected by the machine, judge the number of the batches which must be detected, determine whether to continue to wait for detection or cancel detection of partial batches, and compare the numbers to determine the number and the batch number of the batches which are canceled, thereby reducing human errors, reasonably utilizing machine resources and saving cost.
Drawings
Fig. 1 is a flowchart illustrating a method for automatically processing a batch of products to be tested according to an embodiment of the present invention.
Detailed Description
In order to make the contents of the present invention more clearly understood, the contents of the present invention will be further described with reference to the accompanying drawings. The invention is of course not limited to this particular embodiment, and general alternatives known to those skilled in the art are also covered by the scope of the invention.
It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. The present invention is described in detail with reference to the drawings, and for convenience of explanation, the drawings are not enlarged partially according to the general scale, and should not be construed as limiting the present invention.
The core idea of the invention is that the number of batches to be detected and the number of batches that can be detected by the machine are calculated, the number of batches that must be detected is judged, so as to determine whether to continue waiting or cancel detection of a part of batches, and the number and batch number of batches that are not detected can be determined by comparing the numbers, thereby reducing human errors, reasonably utilizing machine resources and saving cost.
Please refer to fig. 1, which is a flowchart illustrating a method for automatically processing a batch of products to be tested according to an embodiment of the present invention. As shown in fig. 1, the method for automatically processing a batch of products to be detected comprises the following steps:
step S01: calculating the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine;
step S02: calculating the difference value between the amount of the batch products to be detected and the amount of the batch products which can be detected by the machine, and if the difference value is less than or equal to 0, returning to the step S01; if the difference is greater than 0, setting the difference as a first number, and performing step S03;
step S03: judging the quantity of batch products which must be detected;
step S04: calculating the difference value between the number of the batch products to be detected and the number of the batch products which need to be detected, and setting the difference value as a second number;
step S05: judging the size of the first quantity and the second quantity; if the first quantity is larger than or equal to the second quantity, canceling the detection of the second quantity of batch products; if the first quantity is smaller than the second quantity, canceling the detection of the first quantity of batch products; the batch products which are not detected are the rest batches of products except the batch products which need to be detected in the batch products to be detected.
Specifically, first, in step S01, the number T of the batch products to be detected needs to be calculated, that is, the total number T of the batch products that need to be detected at the measuring station needs to be calculated. And it is required to calculate the number M of batches that can be detected by the tool, that is, the total number of batches that can be detected by the tool at the measuring station, the calculation method includes: determining the detection capability a of the tool, determining the state coefficient S of the tool, and determining the number n of the tools, the number of the batch products that can be detected by the tool is M ═ a (S1+ S2+ … … + Sn).
Then, in step S02, a difference L between the number T of the batch products to be detected and the number M of the batch products that can be detected by the machine is calculated, that is, L is T-M. If the difference L is less than or equal to 0, it indicates that the number T of the batches to be detected is less than or equal to the number M of the batches that can be detected by the machine, and the batches at the measuring station only need to be detected, that is, the steps return to step S01 (calculating the number T of the batches to be detected and the number M of the batches that can be detected by the machine). If the difference L is greater than 0, it indicates that the number T of the batches to be detected is greater than the number M of the batches that can be detected by the machine, that is, the batches to be detected exceed the batches that can be detected by the machine, that is, the load that can be borne by the machine is exceeded, then the detection of a part of the batches needs to be cancelled, that is, the following step is performed, and at this time, the difference L is set as the first number.
Then, in step S03, the number W of batch products that must be detected is determined. That is, there is a lot of products that must be detected in the lot of products to be detected, in this step, the lot of products that must be detected needs to be selected, and then when the detection of a part of the lot of products is cancelled, the selected lot of products cannot be cancelled. The judging method can comprise the following steps: judging whether the batch of products is experimental products, judging whether the batch of products is products of a special process, and the like.
Next, in step S04, the difference C between the number T of the batch products to be detected and the number of the batch products W that must be detected, i.e., C ═ T-W, is calculated, and the difference C is set to a second number.
Next, in step S05, the magnitudes of the first number and the second number, i.e., the magnitudes of the difference L and the difference C, are determined. And if the first quantity is larger than or equal to the second quantity, namely L is larger than or equal to C, canceling the detection of the second quantity (namely the quantity C) of batch products. For example, if the number T of the batches to be detected is 10, the number M of the batches that the machine can detect is 5, the number W of the batches that must be detected is 6, that is, the difference L is 5, and the difference C is 4, the number of the batches that are not detected is 4 (that is, the difference C is selected), that is, 6 batches that must be detected are removed from the 10 batches to be detected, and the rest batches can be not detected. Namely, the batch of products which are not detected are the rest batches of products except the batch of products which must be detected in the batch of products to be detected.
If the first quantity is less than the second quantity, i.e., L is less than C, the detection of the first quantity (i.e., quantity L) of batch products is cancelled. For example, if the number T of the batches to be detected is 10, the number M of the batches that the machine can detect is 6, the number W of the batches that must be detected is 5, i.e. the difference L is 4, and the difference C is 5, then the number of the batches that are not detected is 4 (i.e. the difference L is selected). Of the 10 batches to be tested, 4 batches that must be tested are removed, and the remaining 6 batches can be selected to cancel the test from the 4 batches. Similarly, the batch of products for which detection is cancelled is the rest of the batch of products to be detected except the batch of products that must be detected.
Then, how to select 4 batches of products from the remaining 6 batches of products to cancel the detection may be randomly selected or may be selected according to a certain rule. Preferably, in this embodiment, after removing the batches that must be tested, the remaining batches of the second quantity are risk-sorted, and the first quantity is selected in order to cancel the testing. According to the above example, the remaining 6 batches of products are sorted, and 4 batches of products are selected in order to cancel the detection. More preferably, the batches are sorted from high to low according to their risk levels and categories, or the batches may be sorted according to their importance, the second number of batches (i.e. the remaining batches excluding the batches that must be tested) are sorted, and the first number of batches is selected from low to high to cancel the test.
According to the method for automatically processing the batches to be detected, the number T of the batches to be detected and the number of the batches M which can be detected by the machine are calculated, the number of the batches W which need to be detected is judged, so that whether the batch is to be continuously detected or part of the batches are cancelled is determined, and the number of the batches which are cancelled can be determined by comparing the numbers, so that the human errors are reduced, the machine resources can be reasonably utilized, and the cost is saved.
Correspondingly, the invention also provides a system for automatically processing the batch products to be detected, which comprises: a calculation module and a judgment module, wherein
The calculating module calculates the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine;
the calculation module calculates the difference value between the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine station; if the difference value is less than or equal to 0, the calculation module continues to calculate the number of the batches to be detected and the number of the batches which can be detected by the machine; if the difference is greater than 0, setting the difference as a first number;
the judging module judges the quantity of the batch products which need to be detected;
the calculation module calculates the difference value between the number of the batch products to be detected and the number of the batch products which need to be detected, and sets the difference value as a second number;
the judging module judges the sizes of the first quantity and the second quantity; if the first quantity is larger than or equal to the second quantity, canceling the detection of the second quantity of batch products; if the first quantity is smaller than the second quantity, canceling the detection of the first quantity of batch products;
the batch products which are not detected are the rest batches of products except the batch products which need to be detected in the batch products to be detected.
Specifically, first, the calculating module needs to calculate the number T of the batches to be detected, that is, the total number T of the batches to be detected at the measuring station. And the calculating module is also required to calculate the number M of batch products that can be detected by the machines, namely, the number of batch products that can be detected by the machines at the measuring station in total, and the calculating method comprises the following steps: determining the detection capability a of the tool, determining the state coefficient S of the tool, and determining the number n of the tools, the number of the batch products that can be detected by the tool is M ═ a (S1+ S2+ … … + Sn).
Then, the calculating module needs to calculate a difference L between the number T of the batch products to be detected and the number M of the batch products that can be detected by the machine, that is, L is T-M. If the difference L is less than or equal to 0, it indicates that the number T of the batches to be detected is less than or equal to the number M of the batches that can be detected by the machine, and the batches at the measuring station only need to be detected, that is, the calculating module continues to calculate the number T of the batches to be detected and the number M of the batches that can be detected by the machine). If the difference L is greater than 0, it indicates that the number T of the batches to be detected is greater than the number M of the batches that can be detected by the machine, that is, the batches to be detected exceed the batches that can be detected by the machine, that is, the load that can be borne by the machine is exceeded, then the detection of a part of the batches needs to be cancelled, that is, the following step is performed, and at this time, the difference L is set as the first number.
Then, the judging module judges the number W of the batch products that must be detected. That is, there is a lot of products that must be detected in the lot of products to be detected, in this step, the lot of products that must be detected needs to be selected, and then when the detection of a part of the lot of products is cancelled, the selected lot of products cannot be cancelled. The judging method can comprise the following steps: judging whether the batch of products is experimental products, judging whether the batch of products is products of a special process, and the like.
Next, the calculation module calculates a difference C between the number T of the batch of products to be detected and the number of the batch of products W that must be detected, i.e., C ═ T-W, and sets the difference C to a second number.
Then, the determining module determines the first quantity and the second quantity, i.e. determines the difference L and the difference C. And if the first quantity is larger than or equal to the second quantity, namely L is larger than or equal to C, canceling the detection of the second quantity (namely the quantity C) of batch products. For example, if the number T of the batches to be detected is 10, the number M of the batches that the machine can detect is 5, the number W of the batches that must be detected is 6, that is, the difference L is 5, and the difference C is 4, the number of the batches that are not detected is 4 (that is, the difference C is selected), that is, 6 batches that must be detected are removed from the 10 batches to be detected, and the rest batches can be not detected. Namely, the batch of products which are not detected are the rest batches of products except the batch of products which must be detected in the batch of products to be detected.
If the first quantity is less than the second quantity, i.e., L is less than C, the detection of the first quantity (i.e., quantity L) of batch products is cancelled. For example, if the number T of the batches to be detected is 10, the number M of the batches that the machine can detect is 6, the number W of the batches that must be detected is 5, i.e. the difference L is 4, and the difference C is 5, then the number of the batches that are not detected is 4 (i.e. the difference L is selected). Of the 10 batches to be tested, 4 batches that must be tested are removed, and the remaining 6 batches can be selected to cancel the test from the 4 batches. Similarly, the batch of products for which detection is cancelled is the rest of the batch of products to be detected except the batch of products that must be detected.
Then, how to select 4 batches of products from the remaining 6 batches of products to cancel the detection may be randomly selected or may be selected according to a certain rule. Preferably, in this embodiment, the system further includes an evaluation module, and after the batch of products that must be detected is removed, the evaluation module performs risk ranking on the remaining second number of batches of products, and selects the first number of batches of products in order to cancel the detection. According to the above example, the remaining 6 batches of products are sorted, and 4 batches of products are selected in order to cancel the detection. More preferably, the evaluation module sorts the batches from high to low according to their risk levels and categories, or may sort the batches according to their importance, sorts the second number of batches (i.e. the remaining batches excluding the batches that must be tested), and then selects the first number of batches from low to high to cancel the test.
According to the system for automatically processing the batches to be detected, the number T of the batches to be detected and the number of the batches M which can be detected by the machine are calculated, the number of the batches W which need to be detected is judged, so that whether the batch is to be continuously detected or part of the batches are cancelled is determined, and the number of the batches to be cancelled and the batch number are compared, so that the human errors are reduced, the machine resources can be reasonably utilized, and the cost is saved.
In summary, the system and the method for automatically processing the batches to be detected provided by the invention calculate the number of the batches to be detected and the number of the batches that can be detected by the machine, judge the number of the batches that must be detected, and determine whether to continue to wait for detection or cancel detection of a part of the batches, and compare the numbers to determine the number and the batch number of the batches that are canceled, thereby reducing human errors, reasonably utilizing machine resources and saving cost.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (10)
1. A method for automatically processing batches to be detected comprises the steps of calculating the number of batches to be detected and the number of batches which can be detected by a machine, and is characterized by further comprising the following steps:
calculating the difference value between the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine station;
if the difference is less than or equal to 0, returning to the step of calculating the number of the batches to be detected and the number of the batches which can be detected by the machine; if the difference is larger than 0, setting the difference as a first number, and carrying out the following steps;
judging the quantity of batch products which must be detected;
calculating the difference value between the number of the batch products to be detected and the number of the batch products which need to be detected, and setting the difference value as a second number;
judging the size of the first quantity and the second quantity;
if the first quantity is larger than or equal to the second quantity, canceling the detection of the second quantity of batch products;
if the first quantity is smaller than the second quantity, canceling the detection of the first quantity of batch products;
the batch products which are not detected are the rest batches of products except the batch products which need to be detected in the batch products to be detected.
2. The method for automatically processing batches to be tested according to claim 1, wherein the method for counting the number of batches that can be tested by the machine comprises: determining the detection capability a of the tool, determining the state coefficient S of the tool, and determining the number n of the tools, the number of the batch products that can be detected by the tool is M ═ a (S1+ S2+ … … + Sn).
3. The method for automatically processing batches to be tested according to claim 1, wherein when said first number is smaller than said second number, the second number of batches remaining after the removal of the batches that must be tested is risk-sorted, and the first number of batches is selected in order to cancel the test.
4. The method for automatically processing batches to be tested according to claim 3, characterized in that the batches are sorted according to their risk class and type from high to low.
5. The method for automatically processing batches to be tested according to claim 4, characterized in that the first number of batches is selected from low to high among the risk-ranked batches to cancel the test.
6. A system for automatically processing batches of products to be detected comprises a calculation module, wherein the calculation module calculates the number of the batches of products to be detected and the number of the batches of products capable of being detected by a machine station, and the system is characterized by further comprising: a determination module, wherein,
the calculation module is also used for calculating the difference value between the number of the batches of products to be detected and the number of the batches of products which can be detected by the machine station; if the difference value is less than or equal to 0, the calculation module continues to calculate the number of the batches to be detected and the number of the batches which can be detected by the machine; if the difference is greater than 0, setting the difference as a first number;
the judging module judges the quantity of the batch products which need to be detected;
the calculation module calculates the difference value between the number of the batch products to be detected and the number of the batch products which need to be detected, and sets the difference value as a second number;
the judging module judges the sizes of the first quantity and the second quantity; if the first quantity is larger than or equal to the second quantity, canceling the detection of the second quantity of batch products; if the first quantity is smaller than the second quantity, canceling the detection of the first quantity of batch products;
the batch products which are not detected are the rest batches of products except the batch products which need to be detected in the batch products to be detected.
7. The system for automatically processing batches to be tested as claimed in claim 6, wherein the method for calculating the number of batches that can be tested by the machine through the calculation module comprises: determining the detection capability a of the tool, determining the state coefficient S of the tool, and determining the number n of the tools, the number of the batch products that can be detected by the tool is M ═ a (S1+ S2+ … … + Sn).
8. The system for automatically processing batches to be tested as claimed in claim 6, further comprising an evaluation module, when said first number is smaller than said second number, said evaluation module risk-sorts the second number of batches remaining after removing the batches that must be tested, and selects the first number of batches in order to cancel the testing.
9. The system for automatically processing batches to be tested as claimed in claim 8, wherein the evaluation module sorts the batches according to their risk level and type from high to low.
10. The system for automatically processing batches to be tested as claimed in claim 9, wherein the first number of batches is selected from low to high among the risk ranked batches to cancel the test.
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