CN104977903B - Wafer batch work dispatching method under board group based on Real Time Dispatching system and system - Google Patents
Wafer batch work dispatching method under board group based on Real Time Dispatching system and system Download PDFInfo
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- CN104977903B CN104977903B CN201410133233.9A CN201410133233A CN104977903B CN 104977903 B CN104977903 B CN 104977903B CN 201410133233 A CN201410133233 A CN 201410133233A CN 104977903 B CN104977903 B CN 104977903B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The present invention provides a kind of wafer batch work dispatching method under the board group based on Real Time Dispatching system and system, method include：Based on wafer batch data on effective machine station information and line, the quantity of the load port of each board under a board group is set, sending in real time for each board sends goods to the predetermined time specification of each wafer batch of the board on goods rule and each board；The wafer batch information that each board is being handled, and the wafer batch information handled according to the quantity of the load port of each board and each board are obtained in real time, calculate the idle sequence of each board in follow-up one section of estimated time；Send goods rule in real time according to what the idle sequence updated each board successively, and according to sending what goods rule obtained each board to send goods result after update in real time.The present invention can avoid under same board group board in predetermined wafer batch there is a situation where and meanwhile it is predetermined with a collection of wafer.
Description
Technical field
The present invention relates to the wafers under semiconductor production field more particularly to a kind of board group based on Real Time Dispatching system
Batch work dispatching method and system.
Background technology
In semiconductor manufacturing production, since production technology and its process are sufficiently complex, the machine for carrying out manufacturing process
Platform is also not quite similar, and different platform or board group can carry out the processing procedure processing of a variety of different attribute wafer batches, and same
Different platform under one board group can send the wafer batch of work also different.
Currently, most of wafer manufacturing works, which have all used, implements dispatching system (Real Time
Dispatch, referred to as：RTD) it is responsible for sending work on line.Implementing dispatching system can be by built-in algorithm to the wafer on line
Batch formulate it is relatively reasonable send work as a result, production assistant (MA) only need it is suitable according to the wafer batch that dispatching system is recommended is implemented
Sequence sends work, compares manually send work that can greatly improve the efficiency for sending work in this way.
But current Real Time Dispatching system is to send work by selected board to execute, that is, it is to pass through list to produce assistant
A board sends work rule to send goods result to obtain.In the actual production process, it often will appear following situation, a board
The following board of group can be connected to the wafer batch that upstream is got off simultaneously, when carrying out sending work if only from single board
Angle considers, is at this moment the board because having the problem of often causing to rob goods mutually between different platform under same unit
Production assistant first have selected a collection of wafer batch, but in addition the production assistant of board also has selected this collection of wafer lot just
It is secondary.It thus greatly wastes the production capacity of overhead traveling crane and manufactory (FAB) and produces the production capacity of assistant.
Invention content
In view of the above problems, the wafer batch that the present invention is provided under a kind of board group based on Real Time Dispatching system sends work side
Method and system.
The technical proposal for solving the technical problem of the invention is：
A kind of wafer batch work dispatching method under board group based on Real Time Dispatching system, wherein the method includes：
Based on wafer batch data on effective machine station information and line, the load port of each board under a board group is set
Quantity, sending in real time for each board send goods to the pre- timing of each wafer batch of the board on goods rule and each board
Between specification；
The wafer batch information that each board is being handled, and the quantity of the load port according to each board are obtained in real time
The wafer batch information handled with each board calculates the idle sequence of each board in follow-up one section of estimated time；
Updating the real-time of each board successively according to the idle sequence sends goods regular, and sends goods to be advised in real time according to after update
Then obtain each board sends goods result；
Wherein, to any board in real time send goods rule to be updated after, discharge sent goods to the board and surpass
The wafer batch of the predetermined time specification is crossed, and the wafer batch of release is incorporated in the wafer batch of goods to be sent, then again
Goods rule is sent to be updated in real time follow-up one board based on the goods wafer batch to be sent, and one wafer of synchronization
Batch can only send goods to a board.
The work dispatching method, wherein the wafer batch information processed corresponding to each board is set according to process requirements.
The work dispatching method, wherein the predetermined time specification of the predetermined wafer batch of each board is all higher than described estimate
Time.
The work dispatching method, wherein the wafer batch information that each board is being handled includes：Wafer batch number,
TIT、FPT、TNAnd TE；
Wherein, TIT indicates that wafer batch enters the time of board, and FPT indicates that estimated wafer batch is completed needed for processing procedure
Time, TNIndicate current time, TEIndicate the estimated time.
The work dispatching method, wherein the idle sequence of each board determines in the following way：
TN+TEThe result of-TIT-FTP is bigger, the load port of the board corresponding to it more early free time is indicated, according to each
The time of the free time of load port is different, obtains the idle sequence of each load port, and bear with idle at first in each board
At first free time of the load port as the board, to obtain the idle sequence of each board, to obtain the idle sequence；
Wherein, work as TN+TE-TIT-FTP>When 0, indicate board in subsequent TEIt is interior current wafer batch to be terminated
Processing procedure, to keep corresponding load port in board idle；
Work as TN+TE-TIT-FTP<When 0, indicate board in subsequent TEIt is interior that current wafer batch can not be terminated to make
Journey, to which board is not idle.
The work dispatching method, wherein the TEIt is set according to the actual needs in production process.
A kind of wafer batch dispatching system under board group based on Real Time Dispatching system, wherein the system comprises：
Effective board maintenance module under board group, for being based on wafer batch data on effective machine station information and line, if
The quantity of the load port of each board, sending in real time for each board are sent on goods rule and each board under a fixed board group
Goods to each wafer batch of the board predetermined time specification；
Board free time computing module is communicatively coupled to effective board maintenance module, for obtaining each board in real time
The wafer batch information handled, the wafer lot handled according to the quantity of the load port of each board and each board
Secondary information calculates the idle sequence of each board in follow-up one section of estimated time；
Work monitoring module is sent under board group, the board free time computing module is communicatively coupled to, for obtaining the sky
After not busy sequence, goods rule send in real time according to what the idle sequence updated each board successively, and according to sending goods in real time after update
What rule obtained each board sends goods result；
Board group sends work result display module, is communicatively coupled under the board group and sends work monitoring module, to obtain
Described send sends goods result to show after goods result by described；
Wherein, to any board in real time send goods rule to be updated after, discharge sent goods to the board and surpass
The wafer batch of the predetermined time specification is crossed, and the wafer batch of release is incorporated in the wafer batch of goods to be sent, then again
Goods rule is sent to be updated in real time follow-up one board based on the goods wafer batch to be sent, and one wafer of synchronization
Batch can only send goods to a board.
The dispatching system, wherein the board free time computing module further includes：
First computing unit, at the time of entering corresponding board according to each batch wafer and it is expected that the wafer batch system
The time of Cheng Suoxu determines whether the wafer batch can terminate processing procedure within the estimated time, to make the wafer batch
Corresponding board load port is idle；
Second computing unit, according to the idle condition of each load port under board group, the free time for calculating each board is suitable
Sequence.
The dispatching system, wherein the wafer batch information that each board is being handled includes：Wafer batch number,
TIT、FPT、TNAnd TE；
Wherein, TIT indicates that wafer batch enters the time of board, and FPT indicates that estimated wafer batch is completed needed for processing procedure
Time, TNIndicate current time, TEIndicate the estimated time.
The dispatching system, wherein
First computing unit obtains TN、TE, after TIT, FTP, calculate TN+TEThe value of-TIT-FTP, if more than zero, then
Judge board in subsequent TEIt is interior to terminate processing procedure to current wafer batch, to make corresponding load port in board
Free time judges board in subsequent T if being less than zeroEIt is interior to terminate processing procedure to current wafer batch, to board
It is not idle；
Second computing unit calculates T to first computing unitN+TEIt is acquired after-TIT-FTP to be worth from big to small
It is ranked up, so that it is determined that the idle sequence of each load port, and idle at first load port using in each board is used as this
The free time at first of board, to obtain the idle sequence of each board.
Above-mentioned technical proposal has the following advantages that or advantageous effect：
The present invention sends goods to optimize by being carried out to the board under board group, avoids board under same board group and is making a reservation for crystalline substance
There is a situation where predetermined simultaneously when circle batch with a collection of wafer, can largely improve the production efficiency of factory, significantly
Reduce the occurrence probability for sending goods mistake.
Description of the drawings
With reference to appended attached drawing, more fully to describe the embodiment of the present invention.However, appended attached drawing be merely to illustrate and
It illustrates, and is not meant to limit the scope of the invention.
Fig. 1 is the step flow signal of the wafer batch work dispatching method under the board group the present invention is based on Real Time Dispatching system
Figure；
Fig. 2 is the logic diagram for sending work result generated in the embodiment of the present invention about board group.
Specific implementation mode
The present invention provides the wafer batch work dispatching methods under a kind of board group based on Real Time Dispatching system.
As shown in Figure 1, the method for the present invention mainly includes the following steps that：
Step 1 is based on wafer batch data on effective machine station information and line, sets the load of each board under a board group
The quantity of port, sending in real time for each board send goods to each wafer batch of the board on goods rule and each board
Predetermined time specification；
Step 2 obtains the wafer batch information that each board is being handled in real time, and according to the load port of each board
Quantity and the wafer batch information that is handling of each board, calculate the free time of each board in follow-up one section of estimated time
Sequentially；
Step 3 sends goods regular according to idle the real-time of each board that sequentially update successively, and according to real-time after update
Send what goods rule obtained each board to send goods result；
Wherein, to any board in real time send goods rule to be updated after, discharge sent goods to the board and surpass
The wafer batch of the predetermined time specification is crossed, and the wafer batch of release is incorporated in the wafer batch of goods to be sent, then again
Goods rule is sent to be updated in real time follow-up one board based on the goods wafer batch to be sent, and one wafer of synchronization
Batch can only send goods to a board.
The method of the present invention is described in detail in specific embodiment below in conjunction with the accompanying drawings.
In the present embodiment, wafer batch data on effective machine station information and line are primarily based on, are set every under a board group
The quantity of the load port of a board, each board send goods regular in real time and each board on send goods to the board it is every
The predetermined time specification of a wafer batch, chosen from above-mentioned set several information each board load port quantity and
Above-mentioned predetermined time specification, and can obtain following table one corresponding to the number of each board：
| Board is numbered | Wafer batch size specification | Predetermined time specification (minute) |
| Board 1 | 3 | 30 |
| Board 2 | 3 | 30 |
| Board 3 | 4 | 20 |
| Board 4 | 5 | 40 |
| Board 5 | 5 | 40 |
Table one
Wafer batch size specification in upper table one is represented to the predetermined lot number of maximum of board predistribution lot, i.e. board
The number of middle LoadPort (load port)；Predetermined time specification (Reserve Time Spec, referred to as：RTS) indicate that single is pre-
The effective time of result produced by fixed, if being more than the effective time, lot will be released from the predetermined relationship with board.
Then, the wafer batch information that each board is being handled under current board group is obtained in real time, according to each machine
The wafer batch information that the predetermined wafer batch size specification of platform and each board are being handled, when calculating follow-up one section and estimating
The idle sequence of load port in interior each board；Specifically, each board under the current board group obtained in real time is just
Include in the wafer batch information of processing：Wafer batch number, wafer batch enter the time TIT (trackin of board
Time), estimated wafer batch completes time FPT (forecast process time), current time T needed for processing procedureN, it is pre-
Estimate time TE, wherein TEIt can be set according to the actual needs in production process, and TETime should be less than the predetermined crystalline substance of board
The predetermined time specification of circle batch.By the T for calculating the wafer of processing procedure conducted in each load port in each boardN+
TEThe value of-TIT-FTP determines the idle condition of load unit.If working as TN+TE-TIT-FTP>When 0, then it represents that in subsequent TE
It can terminate processing procedure to current wafer batch in time, to keep corresponding load port in board idle, such as work as TN+TE-
TIT-FTP<When 0, then it represents that in subsequent TEIt can not terminate processing procedure to current wafer batch in time, to which board is not empty
It is not busy.By by above-mentioned result of calculation and board number and the information such as board load port quantity it is corresponding after, in one embodiment,
Available such as following table two
Table two
As shown in Table 2, in the following TETime in, the procedure for processing of the wafer of No. 1 batch of No. 1 board pair can terminate, i.e.,
Can be idle by the occupied load port of the wafer of No. 1 batch in No. 1 board, the processing system of the wafer of No. 2 batches of No. 1 board pair
Cheng Ze will not terminate, i.e. will not be idle by the occupied load port of the wafer of No. 2 batches in No. 1 board, No. 2 boards pair 3
The procedure for processing of the wafer of batch will not terminate, i.e. will not be empty by the occupied load port of the wafer of No. 3 batches in No. 2 boards
The procedure for processing in spare time, the wafer of No. 4 batches of No. 2 boards pair can then terminate, i.e. in No. 2 boards occupied by the wafer of No. 4 batches
Load port can be idle, the procedure for processing of the wafer of No. 5 batches of No. 3 boards pair will not terminate, i.e. by No. 5 batches in No. 3 boards
The occupied load port of secondary wafer will not be idle, and the procedure for processing of No. 6 batch wafers of No. 4 boards pair can terminate, i.e. No. 4 machines
Can be idle by the occupied load port of No. 6 batch wafers in platform, the procedure for processing of No. 7 batch wafers of No. 5 boards pair can terminate,
It that is can be idle by the occupied load port of No. 7 batch wafers in No. 5 boards.
It can obtain which board is being estimated according to the above-mentioned result of calculation corresponding to each board being calculated
It is idle that the load port of some is understood in time, then according to the idle condition of each load port, obtains each load end
The idle sequence of mouth.Specifically, passing through above-mentioned calculated TN+TEThe value of-TIT-FTP come judge determine load port free time
Sequentially, TN+TEThe value of-TIT-FTP is bigger, shows the load port more first free time.It is shown in the above-described embodiments in following table three
The result that the idle sequence of each load port is ranked up.
Table three
It is 3 since board 1 is at best able to scheduled wafer batch specification quantity according to table three, and within 5 minutes futures only
There is this batch of Lot2 to be handled, thus may determine that it is 2 that board 1, which needs scheduled wafer batch size, it is similar,
It is 2 that board 2, which needs scheduled wafer batch size, and it is 4 that board 3, which needs scheduled wafer batch size, and board 4 needs scheduled
Wafer batch size is 5, and it is 5 that board 5, which needs scheduled wafer batch size, then according to the T obtained before in each boardN
+TEThe size of-TIT-FTP, it may be determined that the idle sequence of board load port.
Then, as shown in Fig. 2, according to the idle sequence of above-mentioned each board load port, successively more to each board
It is new send goods rule in real time, and according to sending what goods rule obtained each board to send goods result after update in real time；Wherein, to any described
Board in real time send goods rule to be updated after, discharge sent goods to the board and be more than the predetermined time specification wafer
Batch, and the wafer batch of release is incorporated in the wafer batch of goods to be sent, be then based on again this wait send goods wafer batch to after
A continuous board sends goods rule to be updated in real time, and one wafer batch of synchronization can only send goods to a board.
Specifically, in the above-described embodiment, according to table three, since the idle sequence of obtained board load port is machine
Load port in platform 1 is idle first, followed by the load port in board 2, is the load port in board 3 again, then
It is the load port in board 4, is finally the load port in board 5, so the free time according to each board load port is suitable
Sequence formulates board 1 send goods regular in real time first, and sending in real time for being formulated is included in what board can be processed in goods rule
By the scheduled wafer batch of other boards institute before being filtered out in wafer batch, at the same discharge by this board it is predetermined after still
It has been more than the wafer batch of predetermined time specification；Similar, secondly board 2 is formulated and sends goods regular in real time, that is formulated is real-time
Send be also included in goods rule in the wafer batch that board can be processed filter out before it is pre- by other boards institute
Fixed wafer batch, while discharging and wafer batch that is rear but being more than predetermined time specification is made a reservation for by this board, due to machine
Platform 2 is formulated send goods rule in real time before, first to board 1 formulated it is real-time send goods rule, so to the formulation of board 2
In real time send in goods rule, need in the wafer batch that board 2 can be processed remove by previous board (including board 1)
The scheduled wafer batch of institute, at the same it is previous board institute is scheduled but be more than the wafer batch of its corresponding predetermined time specification
It increases in the wafer batch to be processed of board 2, while will be by oneself scheduled but more than predetermined time specification wafer
Batch discharges, and carries out sending the formulation of goods rule in real time according to the method described above to subsequent board successively, in above-described embodiment, to institute
What some boards had all carried out can obtaining after the real-time formulation for sending goods rule each board sends goods as a result, as shown in following table four：
Table four
As shown in Table 4, sending for being ultimately formed can reflect scheduled wafer batch required for each board in work result
Number and the sequence corresponding to it, and scheduled wafer batch required for each board is all different, that is, is not present two
Or multiple boards fight for the case where same a collection of wafer simultaneously.
Wafer batch work dispatching method under the above-mentioned board group based on Real Time Dispatching system, can by a dispatching system come
Realize the automation of its whole process.
For this purpose, the present invention also provides the wafer batch dispatching system under a kind of board group based on Real Time Dispatching system, it should
Dispatching system includes：
Effective board maintenance module under board group, for being based on wafer batch data on effective machine station information and line, if
The quantity of the load port of each board, sending in real time for each board are sent on goods rule and each board under a fixed board group
Goods to each wafer batch of the board predetermined time specification；
Board free time computing module is communicatively coupled to effective board maintenance module, for obtaining each board in real time
The wafer batch information handled, the wafer lot handled according to the quantity of the load port of each board and each board
Secondary information calculates the idle sequence of each load port in each board in follow-up one end estimated time；
Work monitoring module is sent under board group, is communicatively coupled to the board free time computing module, it is idle suitable for obtaining
After sequence, update each board successively sends goods regular in real time, and sends goods rule to obtain the group of each board in real time according to after update
Goods result；
Wherein, when under board group send work monitoring module to any board in real time send goods rule to be updated after, release
The wafer batch for having sent goods to the board and more than predetermined time specification is put, and the wafer batch of release is incorporated to the crystalline substance of goods to be sent
In circle batch, then goods rule is sent to be updated in real time follow-up one board based on the goods wafer batch to be sent again, and
One wafer batch of synchronization can only send goods to a board
Board group sends work result display module, is communicatively coupled under board group and sends work monitoring module, goods is sent to obtain
As a result after, goods result will be sent to show.
Preferably, in one embodiment, above-mentioned board free time computing module further includes：
First computing unit, at the time of entering corresponding board according to each batch wafer and it is expected that the wafer batch system
The time of Cheng Suoxu determines whether the wafer batch can terminate processing procedure within the estimated time, to keep wafer batch institute right
The board load port answered is idle；
Second computing unit, according to the idle condition of each load port under board group, calculating there emerged a the load port free time
Sequentially.
In addition, the wafer batch information that above-mentioned each board is being handled includes：Wafer batch number, TIT, FPT, TN
And TE, wherein TIT indicates that wafer batch enters time of board, FPT indicate estimated wafer batch complete needed for processing procedure when
Between, TNIndicate current time, TEIndicate the above-mentioned estimated time.
Further, the first above-mentioned computing unit obtains above-mentioned TN、TE, after TIT, FTP, calculate TN+TE-TIT-FTP
Value then judge board in subsequent T if more than zeroEIt can terminate processing procedure to current wafer batch in time, to make
Corresponding load port is idle in board, if being less than zero, judges board in subsequent TEIt can not be to current in time
Wafer batch terminates processing procedure, to which board is not idle；Meanwhile the second above-mentioned computing unit to above-mentioned by the first computing unit
Calculate TN+TEAcquired value is ranked up from big to small after-TIT-FTP, so that it is determined that the idle sequence of load port.
For a person skilled in the art, after reading above description, various changes and modifications undoubtedly will be evident.
Therefore, appended claims should regard the whole variations and modifications for covering the true intention and range of the present invention as.It is weighing
The range and content of any and all equivalences within the scope of sharp claim, are all considered as still belonging to the intent and scope of the invention.
Claims (10)
1. the wafer batch work dispatching method under a kind of board group based on Real Time Dispatching system, which is characterized in that the method packet
It includes：
Based on wafer batch data on effective machine station information and line, the number of the load port of each board under a board group is set
Amount, sending in real time for each board send goods to the predetermined time of each wafer batch of the board on goods rule and each board
Specification；
The wafer batch information that each board is being handled is obtained in real time, and according to the quantity of the load port of each board and often
The wafer batch information that a board is being handled calculates the idle sequence of each board in follow-up one section of estimated time；
Updating the real-time of each board successively according to the idle sequence sends goods regular, and goods is regular to be obtained according to being sent in real time after update
Goods result is sent to each board；
Wherein, to any board send goods rule to be updated in real time after, discharge and sent goods to the board and more than institute
The wafer batch of predetermined time specification is stated, and the wafer batch of release is incorporated in the wafer batch of goods to be sent, is then based on again
The goods wafer batch to be sent sends goods rule to be updated in real time to follow-up one board, and one wafer batch of synchronization
Goods can only be sent to a board.
2. work dispatching method as described in claim 1, which is characterized in that set according to process requirements and processed corresponding to each board
Wafer batch information.
3. work dispatching method as described in claim 1, which is characterized in that the predetermined time specification of the predetermined wafer batch of each board
It is all higher than the estimated time.
4. work dispatching method as described in claim 1, which is characterized in that the wafer batch packet that each board is being handled
It includes：Wafer batch number, TIT, FPT, TNAnd TE；
Wherein, TIT indicates that wafer batch enters the time of board, and FPT indicates that estimated wafer batch completes the time needed for processing procedure,
TNIndicate current time, TEIndicate the estimated time.
5. work dispatching method as claimed in claim 4, which is characterized in that the idle sequence of each board is in the following way
It determines：
TN+TEThe result of-TIT-FTP is bigger, the load port of the board corresponding to it more early free time is indicated, according to each load
The idle time of port is different, obtains the idle sequence of each load port, and with load end idle at first in each board
At first free time of the mouth as the board, to obtain the idle sequence of each board, to obtain the idle sequence；
Wherein, work as TN+TE-TIT-FTP>When 0, indicate board in subsequent TEIt is interior to terminate processing procedure to current wafer batch,
To keep corresponding load port in board idle；
Work as TN+TE-TIT-FTP<When 0, indicate board in subsequent TEIt is interior to terminate processing procedure to current wafer batch, from
And board is not idle.
6. work dispatching method as claimed in claim 5, which is characterized in that the TEIt is carried out according to the actual needs in production process
Setting.
7. the wafer batch dispatching system under a kind of board group based on Real Time Dispatching system, which is characterized in that the system packet
It includes：
Effective board maintenance module under board group, for based on wafer batch data on effective machine station information and line, setting one
The quantity of the load port of each board, sending in real time for each board send goods extremely on goods rule and each board under board group
The predetermined time specification of each wafer batch of the board；
Board free time computing module is communicatively coupled to effective board maintenance module, for obtaining each board in real time
The wafer batch information of processing is believed according to the wafer batch that the quantity of the load port of each board and each board are being handled
Breath calculates the idle sequence of each board in follow-up one section of estimated time；
Work monitoring module is sent under board group, is communicatively coupled to the board free time computing module, it is suitable for obtaining the free time
After sequence, send goods regular in real time according to what the idle sequence updated each board successively, and according to sending goods rule after update in real time
Obtain each board sends goods result；
Board group sends work result display module, is communicatively coupled under the board group and sends work monitoring module, described in acquisition
Send sends goods result to show after goods result by described；
Wherein, to any board send goods rule to be updated in real time after, discharge and sent goods to the board and more than institute
The wafer batch of predetermined time specification is stated, and the wafer batch of release is incorporated in the wafer batch of goods to be sent, is then based on again
The goods wafer batch to be sent sends goods rule to be updated in real time to follow-up one board, and one wafer batch of synchronization
Goods can only be sent to a board.
8. dispatching system as claimed in claim 7, which is characterized in that the board free time computing module further includes：
First computing unit, at the time of entering corresponding board according to each batch wafer and it is expected that the wafer batch carries out processing procedure institute
The time needed determines whether the wafer batch can terminate processing procedure within the estimated time, to keep wafer batch institute right
The board load port answered is idle；
Second computing unit calculates the idle sequence of each board according to the idle condition of each load port under board group.
9. dispatching system as claimed in claim 8, which is characterized in that the wafer batch packet that each board is being handled
It includes：Wafer batch number, TIT, FPT, TNAnd TE；
Wherein, TIT indicates that wafer batch enters the time of board, and FPT indicates that estimated wafer batch completes the time needed for processing procedure,
TNIndicate current time, TEIndicate the estimated time.
10. dispatching system as claimed in claim 9, which is characterized in that
First computing unit obtains TN、TE, after TIT, FTP, calculate TN+TEThe value of-TIT-FTP is then judged if more than zero
Board is in subsequent TEIt is interior to terminate processing procedure to current wafer batch, to keep corresponding load port in board idle,
If being less than zero, judge board in subsequent TEIt is interior to terminate processing procedure to current wafer batch, to which board is not empty
It is not busy；
Second computing unit calculates T to first computing unitN+TEAcquired value carries out from big to small after-TIT-FTP
Sequence, so that it is determined that the idle sequence of each load port, and idle at first load port using in each board is as the board
Free time at first, to obtain the idle sequence of each board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410133233.9A CN104977903B (en) | 2014-04-03 | 2014-04-03 | Wafer batch work dispatching method under board group based on Real Time Dispatching system and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410133233.9A CN104977903B (en) | 2014-04-03 | 2014-04-03 | Wafer batch work dispatching method under board group based on Real Time Dispatching system and system |
Publications (2)
| Publication Number | Publication Date |
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| CN104977903A CN104977903A (en) | 2015-10-14 |
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| CN108227508B (en) * | 2016-12-15 | 2020-12-29 | 中芯国际集成电路制造(北京)有限公司 | Wafer loading and unloading platform efficiency monitoring method |
| CN106743326B (en) * | 2017-03-17 | 2020-09-11 | 惠科股份有限公司 | Material conveying method and system |
| TWI653587B (en) * | 2017-09-22 | 2019-03-11 | 財團法人資訊工業策進會 | Dispatching method and system based on multiple levels of steady state production rate in working benches |
| CN108008707B (en) * | 2017-11-28 | 2020-02-18 | 上海华力微电子有限公司 | Method for automatically monitoring product running condition |
| CN108063101B (en) * | 2017-12-15 | 2021-01-12 | 武汉新芯集成电路制造有限公司 | Sampling method for wafer defect test |
| CN108646696B (en) * | 2018-07-12 | 2020-04-10 | 武汉新芯集成电路制造有限公司 | System and method for automatically processing batch products to be detected |
| CN109657941B (en) * | 2018-12-05 | 2020-10-09 | 上海华力集成电路制造有限公司 | Goods arranging method for wafer manufacturing production line |
| CN112309887B (en) * | 2019-07-29 | 2023-03-21 | 华润微电子（重庆）有限公司 | Pre-dispatching method for wafer manufacturing, electronic device, computer equipment and system |
| CN111539648B (en) * | 2020-05-11 | 2023-08-18 | 上海华力集成电路制造有限公司 | Automatic distribution device and method for dynamic capacity among equipment groups |
| CN113823581B (en) * | 2020-06-19 | 2023-09-22 | 长鑫存储技术有限公司 | Method for dispatching semiconductor process production line, storage medium and semiconductor device |
| CN112926757A (en) * | 2021-03-30 | 2021-06-08 | 上海华力微电子有限公司 | Method and system for realizing scheduling of key batch products |
| CN113299587B (en) * | 2021-05-21 | 2022-04-26 | 无锡亚电智能装备有限公司 | Wafer cleaning process task arrangement method and device |
| CN114038772A (en) * | 2022-01-07 | 2022-02-11 | 广州粤芯半导体技术有限公司 | Feeding method of semiconductor machine |
| CN114613710B (en) * | 2022-05-11 | 2022-07-26 | 弥费实业(上海)有限公司 | Method, system and computer equipment for dispatching cars in advance based on completion time |
| CN116387196B (en) * | 2023-04-03 | 2023-12-08 | 上海赛美特软件科技股份有限公司 | Wafer processing method and device, electronic equipment and storage medium |
| CN116579466A (en) * | 2023-04-25 | 2023-08-11 | 上海赛美特软件科技有限公司 | Reservation method and reservation device in wafer processing process |
| CN116544152A (en) * | 2023-07-06 | 2023-08-04 | 粤芯半导体技术股份有限公司 | Method and device for controlling sheet feeding amount of semiconductor machine set |
| CN116777182B (en) * | 2023-08-15 | 2023-11-03 | 北京珂阳科技有限公司 | Task dispatch method for semiconductor wafer manufacturing |
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