CN108008707B - Method for automatically monitoring product running condition - Google Patents
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- CN108008707B CN108008707B CN201711219188.9A CN201711219188A CN108008707B CN 108008707 B CN108008707 B CN 108008707B CN 201711219188 A CN201711219188 A CN 201711219188A CN 108008707 B CN108008707 B CN 108008707B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The invention discloses a method for automatically monitoring the product running state, which can call the data of the product batch at any time to check and timely and accurately master the running state of the key product batch, DPML information and the service condition of engineering time. When the system is used, only product batch information needs to be input into the system, the system can automatically call the manufacturing execution system, real-time information of the product batch can be fed back into the system, a marching diagram of the product batch can be automatically obtained and fed back through formula calculation, information such as actual DPML, residual DPML, actual engineering time, batch production time delay main reasons and the like can be automatically calculated and displayed, and therefore running conditions of key batches can be timely and accurately mastered.
Description
Technical Field
The invention relates to the field of semiconductors, in particular to a method for automatically monitoring the running condition of a product.
Background
The monitoring of the key product lot running condition in the semiconductor production is generally characterized by a product lot trend chart (lot trend chart) and Days consumed by each Layer of lithography (DPML), but the current product lot trend chart (lot trend chart) is manufactured by a manual editing method, consumes more time, cannot achieve the effect of monitoring (monitor) at any time, and cannot meet the requirements of real-time and high efficiency in the semiconductor manufacturing process.
Disclosure of Invention
The invention provides a method for automatically monitoring the product running state, which can call the data of the product batch at any time to check, timely and accurately master the running state of the key product batch (key lot), the DPML information and the use condition of engineering time (ENG) and solves the problems in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a method for automatically monitoring the product running condition is applied to a semiconductor running system, and is characterized in that: the semiconductor goods running system comprises
More than one site; the station runs more than one batch of products;
more than one monitor, the said monitor connects the said website separately;
a manufacturing execution system, the manufacturing execution system is connected with a plurality of monitors;
the product running whole-process monitoring system is connected with the manufacturing execution system;
the method for automatically monitoring the running condition of the product comprises the following steps:
s1, setting preset data of the product running whole-process monitoring system, wherein the preset data comprises preset photomask entering time, preset operation time, preset waiting time, preset engineering time and preset delivery time;
s2, starting more than one station to run products according to batches, wherein the running comprises the processes of photomask entering, operation, waiting, engineering and shipment;
s3, the monitor monitors real-time data of products at each station, and the real-time data comprises real-time photomask incoming time, real-time operation time, real-time waiting time, real-time engineering time and real-time delivery time of each batch of products;
s4, the monitor sends the real-time data of the in-factory time, the real-time working time, the real-time waiting time, the real-time engineering time and the real-time shipment time of each batch of products at each station to the manufacturing execution system;
s5, the product running whole-process monitoring system captures the real-time data monitored in the S4 step from the manufacturing execution system;
and S6, the product running whole-process monitoring system calculates the preset photomask factory entering time, the preset operation time, the preset waiting time, the preset engineering time and the preset shipment time which are set in the step S1 and the real-time photomask factory entering time, the real-time operation time, the real-time waiting time, the real-time engineering time and the real-time shipment time of each station monitored in the step S4 through a background to form a marching chart.
In order to further optimize the technical scheme, the technical measures adopted by the invention are as follows:
preferably, in the step S2, the station is opened or not opened.
More preferably, the preset data further includes preset start information, and the real-time data further includes real-time start information.
More preferably, the preset station opening information includes preset station opening information and preset station non-opening information, and the real-time station opening information includes real-time station opening information and real-time station non-opening information.
More preferably, the method for setting the preset waiting time of the single station comprises: the preset waiting time is the preset delivery time, the preset photomask entering time, the preset operation time and the preset engineering time.
More preferably, the plurality of preset waiting times are averaged by a method comprising: the average preset waiting time is (total preset delivery time-total preset light shield delivery time-total preset operation time-total preset engineering time)/the number of running stations.
More preferably, the preset shipment time of the single station is set by the following method: the preset delivery time is the preset light shield factory entering time, the preset operation time, the preset waiting time and the preset engineering time
More preferably, the total preset shipment time is set by: the total preset shipment time is the preset light shield entering time + (the preset operation time + the preset waiting time + the preset engineering time) multiplied by the number of preset operating stations.
More preferably, the preset information of leaving the station and the real-time information of leaving the station are set to be 1; and the preset non-start information and the real-time non-start information are set to be 0.
By adopting the technical scheme, compared with the prior art, the invention has the following technical effects:
the invention provides a novel system for monitoring product running condition, aiming at the key product batch to be monitored, the required operation time, engineering time (ENG), Mask in-factory time and the like of each station are set in a system database in advance, when in use, only the product batch information (lot ID) is input into the System, the System can automatically call a Manufacturing Execution System (MES), the real-time information of the product batch can be fed back into the System, and through formula calculation, the marching diagrams (move charts) of the product batch can be automatically obtained and fed back, and the information of the number of Days (DPML, Days Per Mask Layer), the residual DPML, the actual engineering time (ENG time), the main reason of the batch production time delay (lot delay) and the like of actual photoetching of each Layer can be automatically calculated and displayed, so that the running condition of the key batch can be timely and accurately mastered.
Drawings
FIG. 1 is a schematic diagram of a semiconductor run system in accordance with a preferred embodiment of the present invention;
FIG. 2 is a flow chart of a method for automatically monitoring the run status of a product in accordance with a preferred embodiment of the present invention;
FIG. 3 is a UI of a product run-through monitoring system in accordance with a preferred embodiment of the present invention;
FIG. 4 is a diagram of preset data parameters of a product run-through monitoring system in accordance with a preferred embodiment of the present invention;
FIG. 5 is a data diagram interface of a product run-through monitoring system in accordance with a preferred embodiment of the present invention;
wherein the reference numerals are:
1, preparing a product; 2, station; 3, a monitor; 4 manufacturing execution system; 5, a product running whole-process monitoring system; 6 batches of product.
Detailed Description
The invention provides a method for automatically monitoring the running condition of a product.
The present invention will be described in detail and specifically with reference to the following examples to facilitate better understanding of the present invention, but the following examples do not limit the scope of the present invention.
The invention discloses a method for automatically monitoring the product running condition, which is applied to a semiconductor running system, as shown in figure 1, the semiconductor running system comprises
More than one station 2; the station 2 runs more than one batch of products 1;
more than one monitor 3, the monitor 3 is connected with the station 2 respectively;
a manufacturing execution system 4, wherein the manufacturing execution system 4 is connected with a plurality of monitors 3;
the product running whole-process monitoring system 5 is connected with the manufacturing execution system 4 and the product running whole-process monitoring system 5;
as shown in fig. 2, the method for automatically monitoring the running condition of the product 1 includes the following steps:
s1, setting preset data of the product running whole-process monitoring system 5, wherein the preset data comprises preset photomask entering time, preset operation time, preset waiting time, preset engineering time and preset delivery time;
s2, starting the station 2 to run products 1 according to batches;
s3, the monitor 3 monitors real-time data of the products 1 at each station 2, wherein the real-time data comprises real-time photomask factory-entering time, real-time operation time, real-time waiting time, real-time engineering time and real-time shipment time of each batch of the products 1;
s4 the monitor 3 sends the real-time data of the in-factory time, the real-time working time, the real-time waiting time, the real-time engineering time, and the real-time shipment time of each lot of products 1 at each station 2 to the manufacturing execution system 4; the manufacturing execution system 4 records the real-time data;
s5 the product run-through monitoring system 5 fetches the real-time data monitored in the step S4 from the manufacturing execution system 4;
and S6, the product running whole-process monitoring system 5 calculates the preset reticle in-factory time, the preset operation time, the preset waiting time, the preset engineering time and the preset delivery time set in the step S1 and the real-time data of the real-time reticle in-factory time, the real-time operation time, the real-time waiting time, the real-time engineering time and the real-time delivery time of each station 2 monitored in the step S4 through a background to form a marching diagram. The marching diagram is a double-line diagram, the double-line diagram comprises a preset data line and a real-time data line, and is represented in a UI (user interface), the UI interface also comprises a data diagram interface, and corresponding modifiable parameters can be modified in a data frame of the data diagram interface; the preset reticle in the preset data line and the preset reticle in the real-time data line are consistent with the real-time reticle in-factory time, and the preset delivery time is consistent with the real-time delivery time, so that the time consumption of each site in the real-time data and the time consumption of each real-time data relative to each site in the preset data and the difference of each preset data can be clearly seen on a graph, the longest time consumption in which process is the process can be clearly known, engineering improvement or program adjustment is performed on the process with the longest time consumption, and the whole process is optimized.
The preset operation time includes an original value, the original value is a complete operation time (process time) of a version given by a Process Integration Engineer (PIE) according to an operation process name, and the operation time (process time) is set according to the version when the system is set; the method supports a user (owner) to export the operation time set by the process flow (flow) of the product batch (lot), and the operation time is automatically modified and uploaded to the system; reference (reference) to other products; and support modification;
the preset engineering time (ENG time); supporting simultaneous item-by-item or multi-item setting of the ENG time of each site; the system supports reference (reference) to other products; and support modification;
the preset shipment time (F/O date) can set the required shipment time;
the preset photomask entering time (Mask in time) can set the required photomask entering time;
the preset Waiting time (Waiting time) can be adjusted according to the preset delivery time, so that the preset delivery date is matched with the required preset delivery time (match); supporting adjustment of a preset waiting time (waiting time);
further, in a preferred embodiment, the step S2 is to open or not open the station 2. The operation of opening the station is that the product carries out the process flow through the station, and the operation of not opening the station is that the product carries out the process flow without passing through the station, namely, the product skips over the station.
Further, in a preferred embodiment, the preset data further includes preset start information, and the real-time data further includes real-time start information.
Further, in a preferred embodiment, the preset station opening information includes preset station opening information and preset station non-opening information, and the real-time station opening information includes real-time station opening information and real-time station non-opening information.
The method comprises the steps that when the preset station opening information and the real-time station opening information are station opening, the preset station opening information and the real-time station opening information are set to be preset station opening information and real-time station opening information, the preset station opening information and the real-time station opening information are set to be 1, when the station is not opened, the preset station non-opening information and the real-time station non-opening information are set to be 0, and the preset station non-opening information and the real-time station non-opening information are set to be 0.
The preset open station information (Sampling) is set for Sampling:
setting initial preset open-stop information (Sampling) to directly capture related information from an MES system; reference (reference) to other products; supporting modification;
further, in a preferred embodiment, the preset waiting time of the single station 2 is set by: the preset waiting time is the preset delivery time, the preset photomask entering time, the preset operation time and the preset engineering time. The setting of the preset waiting time is beneficial to seeing which link has too long waiting time from the figure and calculating which process in the process flow has long time consumption so as to carry out optimization.
Further, in a preferred embodiment, the predetermined waiting times are averaged by: the average preset waiting time is (total preset delivery time-total preset light shield delivery time-total preset operation time-total preset engineering time)/the number of stations in the preset operation. The average preset waiting time is set to clearly see which link in the whole process flow takes longer from the whole marching diagram, and the process flow which is longer than the average preset waiting time can be quickly seen and known from the whole marching diagram. The preset number of the operating stations is the total number of the stations with the preset information of opening stations as 1.
Further, in a preferred embodiment, the preset shipment time of the single station 2 is set by: the preset delivery time is the preset photomask entering time, the preset operation time, the preset waiting time and the preset engineering time.
Further, in a preferred embodiment, the preset shipment time of the total station 2 is set by: the total preset shipment time is the preset light shield entering time + (the preset operation time + the preset waiting time + the preset engineering time) multiplied by the number of preset operating stations. When the total preset delivery time is needed, the number of stations which are preset to operate is the total number of the stations of which the preset information to be opened is 1.
Further, in a preferred embodiment, the preset information to be opened and the real-time information to be opened are set to 1; and the preset non-start information and the real-time non-start information are set to be 0.
In summary, the real-time information of the products of the same batch can be fed back to the system, the marching charts of the product batch can be automatically obtained and fed back through formula calculation, and the information of the main reasons of the actual engineering time, the batch production time delay and the like can be automatically calculated, so that the running condition of the key batch can be timely and accurately mastered.
The embodiments of the present invention have been described in detail, but the embodiments are merely examples, and the present invention is not limited to the embodiments described above. Any equivalent modifications and substitutions to those skilled in the art are also within the scope of the present invention. Accordingly, equivalent changes and modifications made without departing from the spirit and scope of the present invention should be covered by the present invention.
Claims (9)
1. A method for automatically monitoring the product running condition is applied to a semiconductor running system, and is characterized in that: the semiconductor goods running system comprises
More than one site; the station runs more than one batch of products;
more than one monitor, the said monitor connects the said website separately;
a manufacturing execution system, the manufacturing execution system is connected with a plurality of monitors;
the product running whole-process monitoring system is connected with the manufacturing execution system;
the method for automatically monitoring the running condition of the product comprises the following steps:
s1, setting preset data of the product running whole-process monitoring system, wherein the preset data comprises preset photomask entering time, preset operation time, preset waiting time, preset engineering time and preset delivery time;
s2, starting more than one station to run products according to batches, wherein the running comprises the processes of feeding, working, waiting, engineering and discharging;
s3, the monitor monitors real-time data of products at each station, and the real-time data comprises real-time photomask incoming time, real-time operation time, real-time waiting time, real-time engineering time and real-time delivery time of each batch of products;
s4, the monitor sends the real-time data of the in-factory time, the real-time working time, the real-time waiting time, the real-time engineering time and the real-time shipment time of each batch of products at each station to the manufacturing execution system;
s5, the product running whole-process monitoring system captures the real-time data monitored in the S4 step from the manufacturing execution system;
and S6, the product running whole-process monitoring system calculates the preset photomask factory entering time, the preset operation time, the preset waiting time, the preset engineering time and the preset shipment time which are set in the step S1 and the real-time photomask factory entering time, the real-time operation time, the real-time waiting time, the real-time engineering time and the real-time shipment time of each station monitored in the step S4 through a background to form a marching chart.
2. The method of automatically monitoring product run conditions according to claim 1, wherein: and in the step S2, the station is opened or not opened.
3. The method of automatically monitoring product run conditions according to claim 2, wherein: the preset data further comprises preset station opening information, and the real-time data further comprises real-time station opening information.
4. The method of automatically monitoring product run conditions according to claim 3, wherein: the preset station opening information comprises preset information of opening the station and preset information of not opening the station, and the real-time station opening information comprises real-time information of opening the station and real-time information of not opening the station.
5. The method of automatically monitoring product run conditions according to any one of claims 1-4, wherein: the method for setting the preset waiting time of the single station comprises the following steps: the preset waiting time is the preset delivery time, the preset photomask entering time, the preset operation time and the preset engineering time.
6. The method of automatically monitoring product run conditions according to claim 5, wherein: averaging a plurality of preset waiting times, wherein the setting method comprises the following steps: the average preset waiting time is (total preset delivery time-total preset light shield delivery time-total preset operation time-total preset engineering time)/the number of running stations.
7. The method of automatically monitoring product run conditions according to any one of claims 1-4, wherein: the method for setting the preset delivery time of the single station comprises the following steps: the preset delivery time is the preset photomask entering time, the preset operation time, the preset waiting time and the preset engineering time.
8. The method of automatically monitoring product run conditions according to any one of claims 1-4, wherein: the total preset shipment time setting method comprises the following steps: the total preset shipment time is the preset light shield entering time + (the preset operation time + the preset waiting time + the preset engineering time) multiplied by the number of preset operating stations.
9. The method of automatically monitoring product run conditions according to claim 4, wherein: the preset information to be opened and the real-time information to be opened are set to be 1; and the preset non-start information and the real-time non-start information are set to be 0.
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| CN113534855B (en) * | 2020-04-14 | 2023-07-21 | 长鑫存储技术有限公司 | System and method for adjusting air path flow of machine |
| CN112926757A (en) * | 2021-03-30 | 2021-06-08 | 上海华力微电子有限公司 | Method and system for realizing scheduling of key batch products |
| CN113379562A (en) * | 2021-06-29 | 2021-09-10 | 上海华力微电子有限公司 | Computer storage medium, and early warning system and method for forbidden goods |
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