CN105652812A - System for pre-scheduling special-batch cargos, and method - Google Patents
System for pre-scheduling special-batch cargos, and method Download PDFInfo
- Publication number
- CN105652812A CN105652812A CN201410635860.2A CN201410635860A CN105652812A CN 105652812 A CN105652812 A CN 105652812A CN 201410635860 A CN201410635860 A CN 201410635860A CN 105652812 A CN105652812 A CN 105652812A
- Authority
- CN
- China
- Prior art keywords
- batch
- scheduling
- data
- time
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/80—Management or planning
Landscapes
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
- General Factory Administration (AREA)
Abstract
The invention provides a system for pre-scheduling special-batch cargos. The system comprises a data source module, a special-batch data module, a processing module and an output module. The invention further discloses a method for pre-scheduling high-priority new-product-batch cargos. The method is characterized by comprising the following steps: S1, calculating operation time, and carrying out storage; S2, calculating predicted production steps, and writing the production steps into a programming plan; S3, carrying out batch scheduling and detecting process obstructions; and S4, carrying out machine prediction and reticle prediction. According to various online influence factors, the process time/the predicted production step data are calculated in real time, reticles and machines are predicted, and reasonable pre-scheduling is provided for a special batch.
Description
Technical field
The present invention relates to the goods scheduling field in semiconducter device preparation, it is specifically related to a kind of system and the method thereof that carry out pre-scheduling for special batch of goods.
Background technology
In semiconductor manufacturing industry, scheduling is a very complicated problem, need to pay close attention to multiple factors such as processing procedure, output, loading, good rate, machine mesa-shaped condition, light cover, queue, reservation batch, especially for some special batch, namely, high preference product innovation batch (NTO/BulletLot), due to the reason of processing procedure and priority, it is contemplated that factor can be more. These information are scattered in multiple system, and producing supervisor needs each systematic collection data, and judges with this and scheduling. Due to experience, individual's judging rules and likely produce different results for the familiarity difference of flow process itself of operator. In addition, owing to desired data is scattered in each system, data query needs to expend manufacture colleague quite a lot of time.
Produce at present supervisor need to WaferStart system queries unload goods arrangements, inquire about real-time batch data, EAP system queries machine station information in MES system, in RTMS system queries mask (Reticle) information, load (MoveLoading) system queries loading (Loading) mobile. And then high right of priority product innovation batch is carried out pre-scheduling. Visible, this process wastes time and energy, and the experience of heavy dependence individual.
Summary of the invention
The present invention provides a kind of system carrying out pre-scheduling for special batch of goods, and wherein, described system comprises: data source modules, special lot data module, processing module and output module;
Described data source modules comprises data cell relevant to pre-scheduling operation in current manufacturing;
Described special lot data module stores the attribute information of described special batch of goods;
Described processing module respectively with described data source modules, described special lot data model calling, to transfer the data information in corresponding described data cell according to described attribute information, exported the pre-schedule information of described special batch of goods after treatment by described output module.
The above-mentioned system carrying out pre-scheduling for special batch of goods, wherein, described pre-schedule information mask data, device data and subsequent operations director data, described subsequent operations director data comprises and keeps instruction, renewal/clear instruction, revision instruction and step skip instruction.
The above-mentioned system carrying out pre-scheduling for special batch of goods, wherein, described device data comprises PM device data, ECS device data, monitoring device data, device attribute data,
Described processing module comprises PM and plans module, monitoring block of state, device state module, mask block of state and subsequent operations module; Described PM device data is planned module from described PM and is extracted, described ECS device data, described device attribute data are extracted from described device state module, described monitoring device data extracts from described monitoring block of state, described mask data extracts from described mask block of state, and described subsequent operations director data extracts from described subsequent operations module.
The above-mentioned system carrying out pre-scheduling for special batch of goods, wherein, the attribute information of described special batch of goods comprises: batch ID, product parts ID, operation, amount of capacity and sequence of steps number.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, comprises the following steps:
The data calculated are stored by S1: calculation process time;
S2: calculate the production stage estimated, and the production stage of expectation is write into programming plan;
S3: carry out batch scheduling and detect processing procedure hindering;
S4: carry out the prediction of machine platform and mask prediction, to detect the situation of following machine platform and potential abnormal simultaneously to estimate the duration of service of mask.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, the step of described calculation process time is: calculating the activity time required for all batches of steps in history batch, then calculating mean value is as activity time, and generates the activity time table for scheduling.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, described activity time comprises the activity time based on technique and the activity time based on product.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, calculates the production stage estimated as follows:
S21: the plan title searched batch and revision plan;
S22: the production stage searching standard according to plan title and revision plan;
S23: search according to Mission Number and whether have relevant work flow production work order;
S24: judge whether batch products exists flow process of doing over again according to current number of steps;
S25: specify the related manufacturing steps skipped according to user.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, finds relevant work flow production work order then after corresponding step, adds work flow production work order step.
According to existing number of steps, the above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, judges that a batch existence is done over again flow process, then searches the step of flow process of doing over again from sheet of doing over again.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, described batch of scheduling and detect processing procedure hinder comprise: carry out estimate the residence time, waiting time, activity time, the pre-estimation set aside some time in position.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, described pre-estimation comprises the steps:
P1: search batch state, judges batch stage being in step;
P2: according to batch residing for stage judge batch in remaining time of current step;
Each time in stage of P3: the described P1 of calculated for subsequent.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, the prediction of described machine platform comprises: definition preferred (Golden)/general (Single) machine platform also searches qualified machine platform, comprises the steps:
S41: search the machine platform likely used;
S42: search each machine platform PM information, and whether have PM to plan in calculation procedure predicted time interval;
S43: search each machine platform EM information, and whether have EM to plan in calculation procedure predicted time interval;
S44: according to a batch ID, product, operation, technique, whether the restriction system machines platform of the block of information inquiry machine platforms such as step can be used;
S45: whether inquiry rmc system has has been deposited arrange accordingly.
S46: that inquires about machine desk calendar history has efficiency, and adds corresponding field to.
The above-mentioned method carrying out pre-scheduling for high right of priority product innovation batch goods, wherein, in described mask (Reticle) is predicted, system is according to the following production stage estimated, search the information needing to use described mask (Reticle), it is integrated in the statistic curve of batch sequential.
Owing to present invention employs above technical scheme, by the calculation process time. Every day calculates once, it may be considered that morning or front and back of relieving calculate the data produced and are saved in the LDM of data warehouse. Calculate the production stage estimated. Under some Special Circumstances, produce batch inside FAB may can not in strict accordance with set flow performing, for these Special Circumstances, system can regularly search whether batch flow process exists change, and correct flow process is write into scheduling plan. Batch scheduling and detect processing procedure and hinder. System is temporarily set as that each hour performs once. Calculate the data produced to be kept in the LDM of data warehouse. Machine platform is predicted. Utilizing these information, system can detect the situation of following machine platform and potential exception in time, helps producers on line find in advance and deal with problems. Reticle predicts. System, according to the following production stage estimated, is searched and is needed the information using Reticle, is integrated in batch schedule curve. Like this, producers can estimate the duration of service of Reticle, finds potential exception early. According to the influence factor on various line, accurate calculation process in real time time/the production stage data of expectations, prediction Reticle and machine platform are that high right of priority product innovation batch provides reasonably scheduling in advance. And can help shorten C/T, guarantee the friendship phase, save monitoring manpower.
Accompanying drawing explanation
By reading with reference to the detailed description that non-limiting example is done by the following drawings, the present invention and feature, profile and advantage will become more obvious. Mark identical in whole accompanying drawing indicates identical part. Deliberately proportionally do not draw accompanying drawing, focus on illustrating the purport of the present invention.
Fig. 1 is the schematic flow sheet of the method for the present invention
Fig. 2 is the structural representation of the system of the present invention;
Fig. 3 is the schematic flow sheet of the production stage estimated in the inventive method;
Fig. 4 is the schematic flow sheet of the production stage estimated in the inventive method;
Fig. 5 is the schematic diagram of the method calculating scheduling;
Fig. 6 is the structural representation of the architectural framework of the inventive method.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described:
The present invention provides a kind of pre-program system of method carrying out pre-scheduling for special batch of goods and integrates relevant data, timing automatic produces the group financial statements of each processing procedure, by the present situation of batch timely information, exception, machine mesa-shaped condition, upstream and downstream processing procedure, estimate scheduling, and the ability directly having access to, following the trail of thin portion data online is provided, a large amount of manpowers, time and resource will be saved. Pre-program system provides 48 hours timely information, and provides prediction and alert news, and operator can assist the progress getting rid of or coordinating upstream and downstream processing procedure of problem in time, accelerates or the processing procedure of the our station that slows down. Pre-program system can arrange according to machine platform running present situation or maintenance, can predict for single batch.
As shown in Figure 2, and with reference to, shown in composition graphs 1 and Fig. 6, the present invention provides a kind of system carrying out pre-scheduling for special batch of goods, and wherein, described system comprises: data source modules, special lot data module, processing module and output module; Described data source modules comprises data cell relevant to pre-scheduling operation in current manufacturing; Described special lot data module stores the attribute information of described special batch of goods; Described processing module respectively with described data source modules, described special lot data model calling, to transfer the data information in corresponding described data cell according to described attribute information, exported the pre-schedule information of described special batch of goods after treatment by described output module. The above-mentioned system carrying out pre-scheduling for special batch of goods, wherein, described pre-schedule information mask data, device data and subsequent operations director data, described subsequent operations director data comprises and keeps instruction, renewal/clear instruction, revision instruction and step skip instruction. The above-mentioned system carrying out pre-scheduling for special batch of goods, wherein, described device data comprises PM device data, ECS device data, monitoring device data, device attribute data (Single device data and Down device data), and described processing module comprises PM and plans module, monitoring block of state, device state module, mask block of state and subsequent operations module; Described PM device data is planned module from described PM and is extracted, described ECS device data, device attribute data (described Single device data and described Down device data) are extracted from described device state module, described monitoring device data extracts from described monitoring block of state, described mask data extracts from described mask block of state, and described subsequent operations director data extracts from described subsequent operations module. The above-mentioned system carrying out pre-scheduling for special batch of goods, wherein, the attribute information of described special batch of goods comprises: batch ID, product parts ID, operation, amount of capacity and sequence of steps number.
Such as figure, shown in 1, and shown in composition graphs 2 and Fig. 6, the present invention mainly comprises the steps: the calculation process time from framework aspect, it may be considered that morning or relieve front and back calculating every day once; Calculating the data produced is saved in local data management device (LDM) of data warehouse; Calculate the production stage estimated, under some Special Circumstances, produce batch inside FAB may in strict accordance with set flow performing, for these Special Circumstances, system can regularly search whether batch flow process exists change, and correct flow process is write into scheduling plan; Batch scheduling and detect processing procedure and hinder, system is temporarily set as that each hour performs once, calculates the data produced and is kept in the LDM of data warehouse; Machine platform is predicted. Utilize these information, system can detect the situation of following machine platform and potential exception in time, producers on line are helped to find in advance and deal with problems, by the relevant data of computer integrated, timing automatic produces the group financial statements of each processing procedure, by the present situation of batch timely information, exception, machine mesa-shaped condition, upstream and downstream processing procedure, following scheduling, and provide the ability directly having access to, following the trail of thin portion data online, a large amount of manpowers, time and resource will be saved. Owing to computer provides 48 hours timely information, and providing prediction and alert news, responsible colleague can assist the progress getting rid of or coordinating upstream and downstream processing procedure of problem in time, accelerates or the processing procedure of the our station that slows down. Machine platform running present situation or maintenance scheduling can be estimated for single batch.
Preferably, the calculation process time is one of indispensable factor of scheduling, and it represents a batch manufacturing time real on production stage. For already present product, we can search Track-In and the Track-Out time batch on machine platform from batch historic records and calculate. For new some products gone into operation, system there is no relevant historic records, so needing user manually to upload activity time at interface. No matter user uploads or automatically calculates, system all can produce the activity time of two kinds of standards: a kind of activity time based on technique and another kind activity time based on product, system can produce the activity time table for scheduling. Wherein, system calculates based on technique with based on the average activity time of product by being divided into two working stages in morning of every day or time of relieving, its rule calculated is: calculate all batches of production stage activity times in batch historic records, namely, the time that operation derives to the time (TrackOutTime TrackInTime) of importing, then for based on product or based on the activity time calculating mean value of technique.
Preferably, as shown in Figure 3 and Figure 4, for the production stage estimated, under some Special Circumstances, produce batch inside FAB and in strict accordance with set flow performing, such as, may have RunCard and skip the situation of step, in this case, if or according to set flow process scheduling, scheduling result and actual variance are relatively big, also producers on line can be caused puzzlement. For these Special Circumstances, system can regularly search whether batch flow process exists change, and correct flow process is write into scheduling plan. Step1: searching batch plan title and a revision plan, we can draw the operationpiston of standard; Step2: the production stage searching standard according to plan title and revision plan; Step3: search according to Mission Number and whether have relevant work flow production work order. If had, then after corresponding step, add work flow production work order (RunCard) step. And search work flow production work order end step, calculate and whether standard procedure has the elliptical step because of work flow production work order (RunCard). If had, then remove this section of step; Step4: judge in batch flow process that whether there is flow process of doing over again according to existing number of steps. If, then from sheet of doing over again, search the step of flow process of doing over again.
In addition, according to the data of above-mentioned generation, the concrete schedule that we can obtain batch. First as shown below, production stage all time that can estimate can be divided into such as four kinds: HT: estimates retention time (FutureHoldTime), after setting estimates to retain (FutureHold) batch on Step, when batch entering this step, batch can automatically be retained the time of (Hold). QT: queue time (QueueTime), when batch in time of not step transfer and wait. PT: activity time (ProcessTime), the time of batch reality Process on machine platform. POST_HT: (PostFutureHoldTime) is reserved in position, after batch setting PostFutureHold in step, when batch preparing to exit this step, batch is retained the time of (Hold) automatically.
Such as Fig. 5, being the schematic diagram of method calculating scheduling, which Step1: search batch state, judge batch to be in step in stage. If batch being in the non-reservation (Hold) estimated, then calculating batch is in the stage 2. Such as, batch be in Step3, Step2 represent according to batch residing for stage judge batch the remaining time in current step. Special instruction, if when the real time of last stage has exceeded target (Target) setting, then calculate according to zero remaining time, such as, if the activity time when the last stage has exceeded target (Target) setting, but still it is in operation, then calculates according to zero remaining time, be also exactly that the end time is according to current time. Such as, operation end time (ProcessEndTime)=Now+ [CurrentPTTarget-(Now-ProcessStart)], PostHTStart=ProcessEndTime, PostHTEND=PostHTStart+PostHTTarget; Step3: each time in stage calculating following Step1, such as, FutureHoldStart=PostHTEND2:FutureHoldEnd=FutureHoldStart+FutureHoldTarget; Step1QueueStart=FutureHoldEnd; Step1QueueEnd=Step1QueueStart+StepQTTarget. Need to calculate whether have Max/MinStepQueueTime when calculating QueueTime again; Step1ProcessStart=QueueEnd; Step1ProcessEnd=Step1EngineeringStart+Step1PTTarget; Step1PostHoldStart=Step1ProcessEnd; Step1PostHoldEnd=Step1PostHoldStart+Step1PostHoldTarget (IfNo, Targetis0). According to calculating as above, it is as follows that we can obtain lining up table:
| FAB_NAME | S1 |
| LOT_ID | BL2482 |
| SEQUENCE | 20 |
| TECH | 18ULG |
| PRODUCT | 2567C |
| STAGE | AA-PHOTO |
| STAGEORDER | 110 |
| STEP | APAAPH3 |
| STEPNO | 01250 |
| LOCATION | PHOTO |
| QUEUE_START | 7/8/20119:10 |
| QUEUE_TARGET | 15 |
| POST_HOLD_START | |
| POST_HOLD_TARGET | |
| 7/8/20119:25 | |
| 25 | |
| 7/8/20119:10 | |
| 7/8/20119:50 | |
| 002100-115AA-1DA | |
| Active |
Form 1
Preferably, carry out the prediction System integration of machine platform about the various information of machine platform, utilize these information, system can detect the situation of following machine platform and potential exception in time, help producers on line find in advance and deal with problems, it is ensured that batch normal procedure, reduce abnormal stoppage time. Meanwhile, system can add up the feasibility of finishing rolls desk calendar history, activity time, whether it is the information such as Golden, provides the rational sorting of optional machine platform. In addition, definition Golden/Single machine platform, the machine platform that in Goldentool:FAB, every performance is best, generally as the first-selected machine platform of high right of priority product innovation batch. SingleTool: specifying, by client or production department, the machine platform running goods, this is a unique selection. Searching subsequently and meet machine platform, system can go each system queries machine platform relevant information, detects the situation of following machine platform and potential exception in time, helps producers on line find in advance and deal with problems, it is ensured that operation, reduces abnormal stoppage time.
For the definition of SingleTool or GoldenTool, system provides interface for users to select. First from data warehouse, the schedule calculated is displayed on interface, in each step, selects available machine platform list simultaneously. The method is in the plan target of execution in each hour, and its method steps comprises: Step1: first search, according to a batch EQP_TYPE for upper definition, the machine platform likely used; Step2: search each machine platform PM information, and calculate in Step predicted time interval, whether have PM to plan. If had, then it is infeasible for recording this machine platform PM state; Step3: search each machine platform EM information, and calculate in Step predicted time interval, whether have EM to plan. If had, then it is infeasible for recording this machine platform E/M state. Step4: according to a batch ID, product, operation, technique, the restriction system (ConstraintSystem) of the block of information inquiry machine platforms such as step, whether machines platform can be used, if unavailable, then ECS state (ECS_Status) is set to infeasible; Step5: according to batch on Recipe definition, go inside rmc system inquire about, whether having and there is corresponding setting, if do not had, then machine platform RMS state being set to False; Step6: that inquires about machine desk calendar history has efficiency (AvailableRatio), and adds corresponding field to. According to calculating as above, we can obtain following schedule:
| Batch ID | H7E934 |
| STEPNO | 65950 |
| PROCESS_START | 7/8/201210:10 |
| PROCESS_END | 7/8/201210:20 |
| EQP_ID | HDWSV02 |
| EQPSTATUS | Normal |
| PM_STATUS | N |
| EM_STATUS | N |
| CON_STATUS | N |
| PERFORMANCE | 90 |
| SMIF_COUNT | 1 |
Form 2
Preferably, carrying out Reticle prediction, system, according to the following production stage estimated, is searched and is needed the information using Reticle, is integrated in batch time table curve. Like this, producers can estimate the duration of service of Reticle, obtains more specific location information, finds potential exception early. Selecting certain batch, system can go the Reticle information that system queries batch will use at each website following, marks batch lining up above curve, and different states represents by distinct colors. Batch ID that user can exist in selective system; Clicking and start button, system can go to the top searching the associated note interface of schedule in database to have two curves, and curve 1 represents batch scheduling, and point represents Reticle state. Reticle curve has some special states. Wherein, it is possible to use it is normal that different shapes color characteristic represents Reticle information respectively, Reticle abnormal state, and Reticle itself, using number of times to approach the threshold value (Threshold) of the definition with Reticle objective definition, transverse axis is the time, and the longitudinal axis is the stage.
In sum, the present invention comprises: the calculation process time. Every day calculates once, it may be considered that morning or front and back of relieving calculate the data produced and are saved in the LDM of data warehouse. Calculate the production stage estimated. Under some Special Circumstances, produce batch inside FAB may can not in strict accordance with set flow performing, for these Special Circumstances, system can regularly search whether batch flow process exists change, and correct flow process is write into scheduling plan. Batch scheduling and detect processing procedure and hinder. System is temporarily set as that each hour performs once. Calculate the data produced to be kept in the LDM of data warehouse. Machine platform is predicted. Utilizing these information, system can detect the situation of following machine platform and potential exception in time, helps producers on line find in advance and deal with problems. Mask (Reticle) is predicted. System, according to the following production stage estimated, is searched and is needed the information using Reticle, is integrated in batch schedule curve. Like this, producers can estimate the duration of service of Reticle, finds potential exception early. According to the influence factor on various line, accurate calculation process in real time time/the production stage data of expectations, prediction Reticle and machine platform are that high right of priority product innovation batch provides reasonably scheduling in advance. And can help shorten C/T, guarantee the friendship phase, save monitoring manpower.
Above the better embodiment of the present invention is described. It is understood that the present invention is not limited to above-mentioned particular implementation, the equipment wherein not described to the greatest extent in detail and structure are construed as to be implemented with the usual manner in this area; Any those of ordinary skill in the art, do not departing from technical solution of the present invention scope situation, all can utilize the Method and Technology content of above-mentioned announcement that technical solution of the present invention is made many possible variations and modification, or it being revised as the equivalent embodiment of equivalent variations, this does not affect the flesh and blood of the present invention. Therefore, every content not departing from technical solution of the present invention, the technical spirit of foundation the present invention, to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (14)
1. one kind carries out the system of pre-scheduling for special batch of goods, it is characterised in that, described system comprises: data source modules, special lot data module, processing module and output module;
Described data source modules comprises data cell relevant to pre-scheduling operation in current manufacturing;
Described special lot data module stores the attribute information of described special batch of goods;
Described processing module respectively with described data source modules, described special lot data model calling, to transfer the data information in corresponding described data cell according to described attribute information, exported the pre-schedule information of described special batch of goods after treatment by described output module.
2. the system carrying out pre-scheduling for special batch of goods according to claim 1, it is characterized in that, described pre-schedule information mask data, device data and subsequent operations director data, described subsequent operations director data comprises and keeps instruction, renewal/clear instruction, revision instruction and step skip instruction.
3. the system carrying out pre-scheduling for special batch of goods according to claim 2, it is characterized in that, described device data comprises PM device data, ECS device data, monitoring device data and device attribute data, and described processing module comprises PM and plans module, monitoring block of state, device state module, mask block of state and subsequent operations module; Described PM device data is planned module from described PM and is extracted, described ECS device data, described device attribute data are extracted from described device state module, described monitoring device data extracts from described monitoring block of state, described mask data extracts from described mask block of state, and described subsequent operations director data extracts from described subsequent operations module.
4. the system carrying out pre-scheduling for special batch of goods according to claim 3, it is characterised in that, the attribute information of described special batch of goods comprises: batch ID, product parts ID, operation, amount of capacity and sequence of steps number.
5. one kind carries out the method for pre-scheduling for high right of priority product innovation batch goods, it is characterised in that, comprise the following steps:
The data calculated are stored by S1: calculation process time;
S2: calculate the production stage estimated, and the production stage of expectation is write into programming plan;
S3: carry out batch scheduling and detect processing procedure hindering;
S4: carry out the prediction of machine platform and mask prediction, to detect the situation of following machine platform and potential abnormal simultaneously to estimate the duration of service of mask.
6. the method carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 5, it is characterized in that, the step of described calculation process time is: calculate the activity time required for all batches of steps in history batch, then calculating mean value is as activity time, and generates the activity time table for scheduling.
7. the method carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 6, it is characterised in that, described activity time comprises the activity time based on technique and the activity time based on product.
8. the method carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 7, calculates the production stage estimated as follows:
S21: the plan title searched batch and revision plan;
S22: the production stage searching standard according to plan title and revision plan;
S23: search according to Mission Number and whether have relevant work flow production work order;
S24: judge whether batch products exists flow process of doing over again according to current number of steps;
S25: specify the related manufacturing steps skipped according to user.
9. the method carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 8, it is characterised in that, find relevant work flow production work order then after corresponding step, add work flow production work order step.
10. the method carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 9, it is characterised in that, judge that a batch existence is done over again flow process according to existing number of steps, then from sheet of doing over again, search the step of flow process of doing over again.
11. methods carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 10, it is characterized in that, described batch of scheduling and detect processing procedure hinder comprise: carry out estimate the residence time, the waiting time, activity time, the pre-estimation set aside some time in position.
12. methods carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 11, it is characterised in that, described pre-estimation comprises the steps:
P1: search batch state, judges batch stage being in step;
P2: according to batch residing for stage judge batch in remaining time of current step;
Each time in stage of P3: the described P1 of calculated for subsequent.
13. methods carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 12, it is characterised in that, the prediction of described machine platform comprises: preferred/general machine platform of definition also searches qualified machine platform, comprises the steps:
S41: search the machine platform likely used;
S42: search each machine platform PM information, and whether have PM to plan in calculation procedure predicted time interval;
S43: search each machine platform EM information, and whether have EM to plan in calculation procedure predicted time interval;
S44: whether the restriction system machines platform of inquiry machine platform can be used;
S45: whether inquiry rmc system has has been deposited arrange accordingly.
S46: that inquires about machine desk calendar history has efficiency, and adds corresponding field to.
14. methods carrying out pre-scheduling for high right of priority product innovation batch goods according to claim 13, it is characterized in that, in described mask is predicted, system is according to the following production stage estimated, search the information needing to use described mask, it is integrated in the statistic curve of batch sequential.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410635860.2A CN105652812B (en) | 2014-11-12 | 2014-11-12 | A kind of system and method carrying out pre- scheduling for special batch cargo |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410635860.2A CN105652812B (en) | 2014-11-12 | 2014-11-12 | A kind of system and method carrying out pre- scheduling for special batch cargo |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105652812A true CN105652812A (en) | 2016-06-08 |
| CN105652812B CN105652812B (en) | 2018-11-16 |
Family
ID=56483165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410635860.2A Active CN105652812B (en) | 2014-11-12 | 2014-11-12 | A kind of system and method carrying out pre- scheduling for special batch cargo |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105652812B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108008707A (en) * | 2017-11-28 | 2018-05-08 | 上海华力微电子有限公司 | A kind of method that automatic monitoring product runs goods situation |
| TWI656416B (en) * | 2017-11-03 | 2019-04-11 | 迅得機械股份有限公司 | Production schedule monitoring method |
| CN110622078A (en) * | 2017-05-10 | 2019-12-27 | 霍尼韦尔国际公司 | Apparatus and method for predictive time-based control of batch or sequential operations |
| CN111045397A (en) * | 2018-10-12 | 2020-04-21 | 华孚精密科技(马鞍山)有限公司 | Standard time monitoring system and method |
| CN111125166A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | Online product information acquisition method and device |
| CN112926757A (en) * | 2021-03-30 | 2021-06-08 | 上海华力微电子有限公司 | Method and system for realizing scheduling of key batch products |
| CN114493066A (en) * | 2020-11-11 | 2022-05-13 | 中核核电运行管理有限公司 | Automatic scheduling method based on overhaul of nuclear power plant |
| CN111539648B (en) * | 2020-05-11 | 2023-08-18 | 上海华力集成电路制造有限公司 | Automatic distribution device and method for dynamic capacity among equipment groups |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1499570A (en) * | 2002-11-07 | 2004-05-26 | 台湾积体电路制造股份有限公司 | Control method for dispatching working flows and method for making module of semiconductor |
| CN1770182A (en) * | 2004-11-04 | 2006-05-10 | 中芯国际集成电路制造(上海)有限公司 | Real-time work allocation prediction system for key machine in semiconductor manufacturing factory |
| US20070016318A1 (en) * | 2005-07-15 | 2007-01-18 | Wei-Yao Lin | Systems and methods for determining production availability |
| US20070083281A1 (en) * | 2005-10-07 | 2007-04-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for production planning |
| CN101170542A (en) * | 2006-10-27 | 2008-04-30 | 鸿富锦精密工业（深圳）有限公司 | Scheduling system and method for electronic bulletin |
| CN101206728A (en) * | 2006-12-18 | 2008-06-25 | 中芯国际集成电路制造(上海)有限公司 | Work management system and method for manufacturing semiconductor |
| CN101334869A (en) * | 2007-06-28 | 2008-12-31 | 鸿富锦精密工业（深圳）有限公司 | Order form planning scheduling system and method |
-
2014
- 2014-11-12 CN CN201410635860.2A patent/CN105652812B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1499570A (en) * | 2002-11-07 | 2004-05-26 | 台湾积体电路制造股份有限公司 | Control method for dispatching working flows and method for making module of semiconductor |
| CN1770182A (en) * | 2004-11-04 | 2006-05-10 | 中芯国际集成电路制造(上海)有限公司 | Real-time work allocation prediction system for key machine in semiconductor manufacturing factory |
| US20070016318A1 (en) * | 2005-07-15 | 2007-01-18 | Wei-Yao Lin | Systems and methods for determining production availability |
| US20070083281A1 (en) * | 2005-10-07 | 2007-04-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for production planning |
| CN101170542A (en) * | 2006-10-27 | 2008-04-30 | 鸿富锦精密工业（深圳）有限公司 | Scheduling system and method for electronic bulletin |
| CN101206728A (en) * | 2006-12-18 | 2008-06-25 | 中芯国际集成电路制造(上海)有限公司 | Work management system and method for manufacturing semiconductor |
| CN101334869A (en) * | 2007-06-28 | 2008-12-31 | 鸿富锦精密工业（深圳）有限公司 | Order form planning scheduling system and method |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110622078A (en) * | 2017-05-10 | 2019-12-27 | 霍尼韦尔国际公司 | Apparatus and method for predictive time-based control of batch or sequential operations |
| CN110622078B (en) * | 2017-05-10 | 2023-03-28 | 霍尼韦尔国际公司 | Apparatus and method for predictive time-based control of batch or sequential operations |
| TWI656416B (en) * | 2017-11-03 | 2019-04-11 | 迅得機械股份有限公司 | Production schedule monitoring method |
| CN108008707A (en) * | 2017-11-28 | 2018-05-08 | 上海华力微电子有限公司 | A kind of method that automatic monitoring product runs goods situation |
| CN108008707B (en) * | 2017-11-28 | 2020-02-18 | 上海华力微电子有限公司 | Method for automatically monitoring product running condition |
| CN111045397A (en) * | 2018-10-12 | 2020-04-21 | 华孚精密科技(马鞍山)有限公司 | Standard time monitoring system and method |
| CN111125166A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | Online product information acquisition method and device |
| CN111539648B (en) * | 2020-05-11 | 2023-08-18 | 上海华力集成电路制造有限公司 | Automatic distribution device and method for dynamic capacity among equipment groups |
| CN114493066A (en) * | 2020-11-11 | 2022-05-13 | 中核核电运行管理有限公司 | Automatic scheduling method based on overhaul of nuclear power plant |
| CN114493066B (en) * | 2020-11-11 | 2024-08-09 | 中核核电运行管理有限公司 | Automatic scheduling method based on overhaul of nuclear power plant |
| CN112926757A (en) * | 2021-03-30 | 2021-06-08 | 上海华力微电子有限公司 | Method and system for realizing scheduling of key batch products |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105652812B (en) | 2018-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105652812A (en) | System for pre-scheduling special-batch cargos, and method | |
| CN107256443B (en) | Line loss real-time computing technique based on business and data integration | |
| CN105893531B (en) | PostgreSQL database mass data management method and system | |
| Guo et al. | Decomposition-based classified ant colony optimization algorithm for scheduling semiconductor wafer fabrication system | |
| CN101639687B (en) | Integrated technology quality control system and realization method thereof | |
| Lois et al. | Online algorithm for dynamic dial a ride problem and its metrics | |
| US20190347593A1 (en) | Method for improving semiconductor back-end factories | |
| Chawla et al. | A clonal selection algorithm for minimizing distance travel and back tracking of automatic guided vehicles in flexible manufacturing system | |
| Crist et al. | Prioritising production and engineering lots in wafer fabrication facilities: a simulation study | |
| CN112541720A (en) | Electric power material storage management system and method | |
| Qiao et al. | A Petri net and extended genetic algorithm combined scheduling method for wafer fabrication | |
| CN101364107A (en) | Dynamic dispatching method with prediction in complex large system environment | |
| CN117236680A (en) | Beam factory management optimization system and method based on particle swarm optimization | |
| CN105446812A (en) | Multitask scheduling configuration method | |
| Chien et al. | An integrated framework of Industry 3.5 and an empirical study of simulation-based automated material handling system for semiconductor manufacturing | |
| Rabbani et al. | A new AATP model with considering supply chain lead-times and resources and scheduling of the orders in flowshop production systems: A graph-theoretic view | |
| US6711450B1 (en) | Integration of business rule parameters in priority setting of wafer processing | |
| US6615093B1 (en) | Adaptive control algorithm for improving AMHS push lot accuracy | |
| CN115169658B (en) | Inventory consumption prediction method, system and storage medium based on NPL and knowledge graph | |
| CN104636610B (en) | A kind of manufacture system being applied under dynamic environment sends work Information revision method | |
| Kao et al. | Setting daily production targets with novel approximation of target tracking operations for semiconductor manufacturing | |
| Chua et al. | An intelligent multi-constraint finite capacity-based lot release system for semiconductor backend assembly environment | |
| Chen et al. | A two-phase dynamic dispatching approach to semiconductor wafer testing | |
| US9443215B2 (en) | Next generation sequencing management | |
| CN101794417A (en) | Work flow dispatching and business flow modeling method based on sequence number |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |