CN105652812B - A kind of system and method carrying out pre- scheduling for special batch cargo - Google Patents
A kind of system and method carrying out pre- scheduling for special batch cargo Download PDFInfo
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- CN105652812B CN105652812B CN201410635860.2A CN201410635860A CN105652812B CN 105652812 B CN105652812 B CN 105652812B CN 201410635860 A CN201410635860 A CN 201410635860A CN 105652812 B CN105652812 B CN 105652812B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The present invention provides a kind of system for carrying out pre- scheduling for special batch cargo, the system comprises：Data source modules, special lot data module, processing module and output module；And a method of pre- scheduling is carried out for high priority new product batch cargo, which is characterized in that is included the following steps：S1：The calculation process time, and stored；S2：Estimated production stage is calculated, and writes into programming plan；S3：It carries out batch scheduling and detects processing procedure obstruction；S4：Carry out board prediction and mask plate prediction.According to the influence factor on various lines, the quasi real time production stage data of calculation process time/estimated, prediction mask version (Reticle) and board provide reasonably pre- scheduling for special batch.
Description
Technical field
The present invention relates to the cargo scheduling fields in semiconductor devices preparation, and in particular to one kind is directed to special batch cargo
Carry out the system and method for pre- scheduling.
Background technique
In semiconductor manufacturing industry, scheduling is an extremely complex project, needs to pay close attention to processing procedure, yield, loading, good
Rate, light shield, queue, retains the Multiple factors such as batch at board situation, particularly with some special batches, that is, high preference is new
Product batches (NTO/Bullet Lot), due to processing procedure and priority, Consideration can be more.These information are scattered in
In multiple systems, Production Supervisor needs each system to collect data, and is judged with this and scheduling.Due to the warp of operator
Test, personal judging rules and for process itself familiarity difference and be possible to generate different results.Further, since required
Data are scattered in each system, and inquiry data need to expend manufacture colleague's considerable time.
At present Production Supervisor need to Wafer Start system queries to unload goods arrangement, MES system inquire real-time batch number
According to, EAP system queries machine station information, in RTMS system queries exposure mask (Reticle) information, load (Move mobile
Loading) system queries load (Loading).Then pre- scheduling is carried out to high priority new product batch again.It can be seen that this
Process is time-consuming and laborious, and the experience of heavy dependence individual.
Summary of the invention
The present invention provides a kind of systems for carrying out pre- scheduling for special batch cargo, wherein the system comprises：Number
According to source module, special lot data module, processing module and output module；
The data source modules include data cell relevant to pre- scheduling operation in current manufacture；
The attribute information of the special batch cargo is stored in the special lot data module；
The processing module is connect with the data source modules, the special lot data module respectively, according to
Attribute information transfers the data information in the corresponding data cell, exports the spy by the output module after treatment
The walkthrough journey data information of different batch cargo.
The above-mentioned system for carrying out pre- scheduling for special batch cargo, wherein the walkthrough journey data information includes covering
Film data, device data and subsequent operation director data, the subsequent operation director data include keeping instruction, update/removing
Instruction, revision instruction and step skip instruction.
The above-mentioned system for carrying out pre- scheduling for special batch cargo, wherein the device data includes PM number of devices
According to, ECS device data, monitoring device data, device attribute data,
The processing module include PM schedule module, monitor state module, device state module, exposure mask block of state and after
Continuous operation module；The PM device data is extracted from the PM schedule module, the ECS device data, the device attribute number
It is extracted according to from the device state module, the monitoring device data are extracted from the monitor state module, the mask data
It is extracted from the exposure mask block of state, the subsequent operation director data is extracted from the subsequent operation module.
The above-mentioned system for carrying out pre- scheduling for special batch cargo, wherein the attribute information of the special batch cargo
Including：Batch ID, product parts ID, process, amount of capacity and sequence of steps number.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein include the following steps：
S1：The calculation process time stores the data being calculated；
S2：Estimated production stage is calculated, and estimated production stage is write into programming plan；
S3：It carries out batch scheduling and detects processing procedure obstruction；
S4：It carries out board to predict to predict with mask plate, to detect the situation of the following board with potential exception while with pre-
That estimates mask plate uses the time.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein when the calculation process
Between the step of be：Activity time required for all batch steps in history batch is calculated, then calculates average value as process
Time, and generate the activity time table for scheduling.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein the activity time packet
Include the activity time based on technique and the activity time based on product.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, calculates estimated production stage such as
Under：
S21:It searches the plan title of batch and reschedules；
S22:According to the production stage of plan title and the standard of searching of rescheduling；
S23:Relevant work flow production work order has been searched whether according to Mission Number；
S24:Judge batch products with the presence or absence of process of doing over again according to current procedures number；
S25:According to the specified related manufacturing steps skipped of user.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein find relevant work
Industry process produces work order then after corresponding step, and addition work flow produces work order step.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein compiled according to existing step
Number judge that batch has process of doing over again, then searches the step of doing over again process from flow table of doing over again.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein the batch scheduling and
Detecting processing procedure obstruction includes：It carries out the estimated residence time, the waiting time, activity time, the pre- estimation that position is set aside some time.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein the pre- estimation includes
Following steps：
P1:Batch state is searched, judges that batch is in the stage of step；
P2:The stage according to locating for batch judges batch in the remaining time of current procedures；
P3:Each phases-time of the P1 of calculated for subsequent.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein the board prediction packet
It includes：It defines preferably (Golden)/general (Single) board and searches qualified board, include the following steps：
S41:Search all boards that may be used；
S42:Each board PM information is searched, and calculates in step predicted time section whether have PM plan；
S43:Each board EM information is searched, and calculates in step predicted time section whether have EM plan；
S44:According to batch ID, product, process, technique, the limitation system detection board of board is inquired in the informations area such as step
Whether can be used；
S45:Whether inquiry rmc system, which has, has been deposited corresponding setting.
S46:The effective percentage of enquiry machine desk calendar history, and it is added to corresponding field.
The above-mentioned method for carrying out pre- scheduling for high priority new product batch cargo, wherein in the mask plate
(Reticle) in prediction, system needs to use the mask plate according to the following production stage estimated, lookup
(Reticle) information is integrated into the statistic curve of batch timing.
Since present invention employs above technical schemes, pass through the calculation process time.It calculates daily primary, it may be considered that early
Upper or front and back of relieving calculates the data generated and saves into the LDM of data warehouse.Calculate estimated production stage.Certain
In special circumstances, batch produces inside FAB to execute in strict accordance with set process, for these special circumstances, be
System can periodically search batch process with the presence or absence of variation, and correct process is write into scheduling plan.It batch scheduling and detects
Processing procedure hinders.System is temporarily set as executing for each hour primary.The data generated are calculated to be stored in the LDM of data warehouse.
Board prediction.Using these information, system can detect the situation and potential exception of the following board in time, help to produce on line
Personnel have found and solve the problems, such as in advance.Reticle prediction.System needs to use according to the following production stage estimated, lookup
To the information of Reticle, it is integrated into batch schedule curve.In this way, producers can estimate making for Reticle
With the time, potential exception is found early.According to the influence factor on various lines, the quasi real time production of calculation process time/estimated
Step data predict Reticle and board, provide reasonable pre- scheduling for high priority new product batch.And it can help to shorten
C/T, ensure the friendship phase, save monitoring manpower.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, the present invention and its feature, outer
Shape and advantage will become more apparent upon.Identical label indicates identical part in all the attached drawings.Not deliberately proportionally
Draw attached drawing, it is preferred that emphasis is show the gist of the present invention.
Fig. 1 is the flow diagram of method of the invention
Fig. 2 is the structural schematic diagram of system of the invention；
Fig. 3 is the flow diagram of production stage estimated in the method for the present invention；
Fig. 4 is the flow diagram of production stage estimated in the method for the present invention；
Fig. 5 is the schematic diagram for calculating the method for scheduling；
Fig. 6 is the structural schematic diagram of the architectural framework of the method for the present invention.
Specific embodiment
A specific embodiment of the invention is further described with reference to the accompanying drawing：
The present invention provides a kind of pre- scheduling system combination dependency numbers of the method for carrying out pre- scheduling for special batch cargo
According to periodically automatically generating the group financial statements of each processing procedure, batch timely information, exception, board situation, upstream and downstream processing procedure showed
Condition, estimated scheduling, and the ability for directly having access to, tracking online thin portion data is provided, a large amount of manpower, time and money will be saved
Source.Pre- program system provides 48 hours timely information, and provides prediction and alert news, and operator can assist the row of problem in time
The processing procedure of our station is accelerated or slowed down to the progress for removing or cooperating upstream and downstream processing procedure.Pre- program system can operate present situation according to board
Or maintenance arranges, and single batch can be predicted.
As shown in Fig. 2, and with reference to shown in Fig. 1 and Fig. 6, the present invention provide it is a kind of carried out for special batch cargo it is pre-
The system of scheduling, wherein the system comprises：Data source modules, special lot data module, processing module and output module；
The data source modules include data cell relevant to pre- scheduling operation in current manufacture；The special lot data mould
The attribute information of the special batch cargo is stored in block；The processing module respectively with the data source modules, the spy
Different lot data module connection, to transfer the data information in the corresponding data cell according to the attribute information, by place
The walkthrough journey data information of the special batch cargo is exported after reason by the output module.Above-mentioned is directed to special batch goods
The system that object carries out pre- scheduling, wherein the walkthrough journey data information includes mask data, device data and subsequent operation instruction
Data, the subsequent operation director data include keeping instruction, update/clearance order, revision instruction and step skip instruction.On
The system for carrying out pre- scheduling for special batch cargo stated, wherein the device data includes PM device data, ECS equipment
Data, monitoring device data, device attribute data (Single device data and Down device data), the processing module includes
PM schedule module, monitor state module, device state module, exposure mask block of state and subsequent operation module；The PM number of devices
It is extracted according to from the PM schedule module, the ECS device data, device attribute data (the Single device data and described
Down device data) it is extracted from the device state module, the monitoring device data are extracted from the monitor state module, institute
It states mask data to extract from the exposure mask block of state, the subsequent operation director data is extracted from the subsequent operation module.
The above-mentioned system for carrying out pre- scheduling for special batch cargo, wherein the attribute information of the special batch cargo includes：Batch
ID, product parts ID, process, amount of capacity and sequence of steps number.
Such as figure, shown in 1, and combine shown in Fig. 2 and Fig. 6, the present invention mainly includes the following steps in terms of framework：Calculate work
The sequence time, it may be considered that morning or front and back of relieving calculate once daily；The data generated are calculated to save to data warehouse
In local data manager (LDM)；Estimated production stage is calculated, in some special cases, batch produces inside FAB can
It can will not be executed in strict accordance with set process, for these special circumstances, system meeting timing lookup batch process, which whether there is, to be become
Change, and correct process is write into scheduling plan；Batch scheduling and processing procedure obstruction is detected, system is temporarily set as each hour
It executes once, the data for calculating generation are stored in the LDM of data warehouse；Board prediction.Using these information, system can and
When detect the situation of the following board and potential abnormal, help producers on line to find and solve the problems, such as in advance, by computer
Related data is integrated, the group financial statements of each processing procedure are periodically automatically generated, by the timely information of batch, exception, board situation, upstream and downstream
The present situation of processing procedure, the following scheduling, and the ability for directly having access to, tracking online thin portion data is provided, will save a large amount of manpower, when
Between and resource.Since computer provides 48 hours timely information, and prediction and alert news are provided, responsible colleague can assist in time
The exclusion of problem or the progress of cooperation upstream and downstream processing procedure, accelerate or slow down the processing procedure of our station.Board operates present situation or maintenance platoon
Journey can estimate single batch.
Preferably, the calculation process time is one of indispensable factor of scheduling, represents batch on production stage
Real manufacturing time.For already present product, we can search batch on board from batch historical record
Track-In the and Track-Out time calculates.For some products newly gone into operation, there is no relevant historical record in system,
So user is needed to upload activity time manually at interface.No matter user uploads or automatic calculating, system can all generate two kinds
The activity time of standard：A kind of activity time based on technique and another activity time based on product, system can produce
For the activity time table of scheduling.Wherein, system will be divided into two working stages in daily morning or the time relieved
Calculate the average activity time based on technique and based on product, the rule that calculates is:It calculates in batch historical record and owns
Batch production stage activity time, that is, time derived from process to the time (TrackOut Time-TrackIn imported
Time), average value then is calculated for the activity time based on product or based on technique.
Preferably, as shown in Figure 3 and Figure 4, for estimated production stage, in some special cases, batch is in FAB
Production of looking unfamiliar may not be executed in strict accordance with set process, such as have Run Card and the case where skip step, in this case,
If scheduling result and actual variance are larger also according to set process scheduling, also producers on line can be caused to perplex.It is right
In these special circumstances, system can periodically search batch process with the presence or absence of variation, and correct process is write into scheduling meter
It draws.Step1:Search and batch plan title and reschedule, we it can be concluded that standard operationpiston；Step2:According to plan
The production stage of title and the standard of searching of rescheduling；Step3:Search whether that relevant work flow is raw according to Mission Number
Produce work order.If so, then adding work flow behind corresponding step produces work order (Run Card) step.And search operation
Whether process produces work order end step, calculate to have in standard procedure and omit because of work flow production work order (Run Card)
The step of.If so, then removing this section of step；Step4:Judge batch with the presence or absence of process of doing over again according to existing number of steps
In process.If searching the step of doing over again process from flow table of doing over again.
In addition, according to the data of above-mentioned generation, a specific schedule of our available batches.First such as following figure institute
Show, a production stage all times that can be estimated are segmented into such as four kinds：HT:It is expected that retention time (Future Hold
Time), after setting estimated reservation (Future Hold) on Step when batch, when batch enters the step, batch can be automatic
It is retained the time of (Hold).QT:Queue time (Queue Time), when the time that batch is transmitted and waited in not step.
PT:Activity time (Process Time), the time of the practical Process on board of batch.POST_HT:Reserve (Post in position
Future Hold Time), after batch sets Post Future Hold in step, when batch prepares to exit the step
When, batch is retained the time of (Hold) automatically.
It is the schematic diagram for calculating the method for scheduling, Step 1 such as Fig. 5:Batch state is searched, judges that batch is in step
Which in stage.If batch is in the non-reservation (Hold) estimated, then it will calculate batch and be in the stage 2.For example, batch is in
Step 3, Step 2 indicates that the stage according to locating for batch judges batch in the remaining time of current procedures.It illustrates, if
The real time of current generation has exceeded target (Target) setting, then remaining time calculates according to zero, if for example, work as
The activity time of last stage has exceeded target (Target) setting, but remains in process, then remaining time is according to zero
It calculates, that is, the end time is according to current time.For example, process end time (Process End Time)=Now+
[Current PT Target- (Now-Process Start)], Post HT Start=Process End Time, Post
HT END=Post HT Start+Post HT Target；Step 3:Calculate each phases-time of future Step 1, example
Such as, Future Hold Start=Post HT END2:Future Hold End=Future Hold Start+Future
Hold Target；Step1Queue Start=Future Hold End；Step1Queue End=Step1Queue
Start+Step QT Target.Need calculate whether have Max/Min Step Queue when calculating Queue Time again
Time；Step1Process Start=Queue End；Step1Process End=Step1Engineering Start+
Step1PT Target；Step1Post Hold Start=Step1Process End；Step1Post Hold End=
Step1Post Hold Start+Step1Post Hold Target (If No, Target is 0).According to calculating as above,
We are available, and to line up table as follows：
| FAB_NAME | S1 |
| LOT_ID | BL2482 |
| SEQUENCE | 20 |
| TECH | 18ULG |
| PRODUCT | 2567C |
| STAGE | AA-PHOTO |
| STAGEORDER | 110 |
| STEP | APAAPH3 |
| STEPNO | 01250 |
| LOCATION | PHOTO |
| QUEUE_START | 7/8/20119:10 |
| QUEUE_TARGET | 15 |
| POST_HOLD_START | |
| POST_HOLD_TARGET | |
| 7/8/20119:25 | |
| 25 | |
| 7/8/20119:10 | |
| 7/8/20119:50 | |
| 002100-115AA-1DA | |
| Active |
Table 1
Preferably, various information of the board forecasting system integration about board are carried out, using these information, system can and
When detect the situation of the following board and potential abnormal, help producers on line to find and solve the problems, such as in advance, it is ensured that batch
Normal procedure reduces abnormal downtime.Meanwhile the feasibility of system meeting sorting-out in statistics board history, activity time, if be
The information such as Golden provide the rational sorting of optional board.In addition, defining Golden/Single board, Golden tool:
The best board of properties in FAB, generally as the preferred board of high priority new product batch.Single Tool:By visitor
The specified board for running goods in family or production division, this is a unique selection.It then looks up and meets board, system can go to each system
System inquiry board relevant information detects the situation and potential exception of the following board in time, producers on line is helped to send out in advance
Now with solve the problems, such as, it is ensured that process reduces abnormal downtime.
Definition for Single Tool or Golden Tool, system provide interface for users selection.First from number
The schedule calculated is shown on interface according in warehouse, while selection can use board list in each step.It should
In the plan target that method was executed at each hour, method and step includes：Step1:First according to the EQP_ defined in batch
TYPE searches all boards that may be used；Step2:Each board PM information is searched, and calculates Step predicted time section
It is interior, if to have PM plan.If so, it is infeasible for then recording board PM state；Step3:Each board EM information is searched, and
And calculate in Step predicted time section, if having EM plan.If so, it is infeasible for then recording the board E/M state.
Step4:According to batch ID, product, process, technique, the limitation system (Constraint of board is inquired in the informations area such as step
System), whether detection board can be used, if it is not then setting infeasible for ECS state (ECS_Status)；
Step5:According to the Recipe definition in batch, inquiry inside rmc system is gone, if having existed corresponding setting, such as
Fruit does not have, then sets False for board RMS state；Step6:Effective percentage (the Available of enquiry machine desk calendar history
Ratio), and it is added to corresponding field.According to calculating as above, our available following schedules:
| Batch ID | H7E934 |
| STEPNO | 65950 |
| PROCESS_START | 7/8/201210:10 |
| PROCESS_END | 7/8/201210:20 |
| EQP_ID | HDWSV02 |
| EQPSTATUS | Normal |
| PM_STATUS | N |
| EM_STATUS | N |
| CON_STATUS | N |
| PERFORMANCE | 90 |
| SMIF_COUNT | 1 |
Table 2
Preferably, Reticle prediction is carried out, system searches according to the following production stage estimated and needs to use
The information of Reticle is integrated into batch time table curve.In this way, when producers can estimate the use of Reticle
Between, more specific location information is obtained, finds potential exception early.Some batch is selected, system can go system queries batch in future
Each website Reticle information to be used, marks on batch lines up curve, the different color table of different states
Show.User can choose batch ID present in system；Start button is clicked, system can go in database to search the phase of schedule
Closing has two curves above record interface, curve 1 represents batch scheduling, and point represents Reticle state.Reticle curve has
Some special states.Wherein it is possible to normal, the Reticle state that respectively represents Reticle information using different shape color characteristic
Abnormal and Reticle itself, access times approach the critical value (Threshold) that the definition of target is defined with Reticle,
Horizontal axis is the time, and the longitudinal axis is the stage.
In conclusion the present invention includes：The calculation process time.It calculates daily primary, it may be considered that relieve in the morning
Front and back calculates the data generated and saves into the LDM of data warehouse.Calculate estimated production stage.In some special cases,
Batch produces inside FAB to be executed in strict accordance with set process, and for these special circumstances, system can timing lookup
Correct process is write into scheduling plan with the presence or absence of variation by batch process.Batch scheduling and detect processing procedure obstruction.System
It is temporarily set as executing for each hour primary.The data generated are calculated to be stored in the LDM of data warehouse.Board prediction.It utilizes
These information, system can detect the situation and potential exception of the following board in time, producers on line helped to find in advance
With solve the problems, such as.Mask plate (Reticle) prediction.System searches according to the following production stage estimated and needs to use
The information of Reticle is integrated into batch schedule curve.In this way, producers can estimate the use of Reticle
Time finds potential exception early.According to the influence factor on various lines, quasi real time calculation process time/estimated production is walked
Rapid data predict Reticle and board, provide reasonable pre- scheduling for high priority new product batch.And it can help to shorten C/
T, ensure the friendship phase, save monitoring manpower.
Presently preferred embodiments of the present invention is described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, devices and structures not described in detail herein should be understood as gives reality with the common mode in this field
It applies；Anyone skilled in the art, without departing from the scope of the technical proposal of the invention, all using the disclosure above
Methods and technical content many possible changes and modifications are made to technical solution of the present invention, or be revised as equivalent variations etc.
Embodiment is imitated, this is not affected the essence of the present invention.Therefore, anything that does not depart from the technical scheme of the invention, foundation
Technical spirit of the invention any simple modifications, equivalents, and modifications made to the above embodiment, still fall within the present invention
In the range of technical solution protection.
Claims (13)
1. a kind of method for carrying out pre- scheduling for special batch cargo, which is characterized in that include the following steps：
S1：The calculation process time stores the data being calculated；
S2：Estimated production stage is calculated, and estimated production stage is write into programming plan；
S3：It carries out batch scheduling and detects processing procedure obstruction；
S4：The prediction of progress board and mask plate prediction are covered simultaneously with estimating with detecting the situation of the following board with potentially abnormal
Film version uses the time；
It is as follows to calculate estimated production stage：
S21:It searches the plan title of batch and reschedules；
S22:According to the production stage of plan title and the standard of searching of rescheduling；
S23:Relevant work flow production work order has been searched whether according to Mission Number；
S24:Judge batch products with the presence or absence of process of doing over again according to current procedures number；
S25:According to the specified related manufacturing steps skipped of user.
2. the method according to claim 1 for carrying out pre- scheduling for special batch cargo, which is characterized in that the calculating
The step of activity time is：Activity time required for all batch steps in history batch is calculated, average value is then calculated and makees
For activity time, and generate the activity time table for scheduling.
3. the method according to claim 2 for carrying out pre- scheduling for special batch cargo, which is characterized in that the process
Time includes the activity time based on technique and the activity time based on product.
4. the method according to claim 1 for carrying out pre- scheduling for special batch cargo, which is characterized in that find phase
For the work flow production work order of pass then after corresponding step, addition work flow produces work order step.
5. the method according to claim 4 for carrying out pre- scheduling for special batch cargo, which is characterized in that according to existing
Number of steps judges that batch has process of doing over again, then the step of doing over again process is searched from flow table of doing over again.
6. the method according to claim 5 for carrying out pre- scheduling for special batch cargo, which is characterized in that the batch
Scheduling and detect processing procedure obstruction include：It carries out the estimated residence time, the waiting time, activity time, what position was set aside some time estimates
It calculates.
7. the method according to claim 6 for carrying out pre- scheduling for special batch cargo, which is characterized in that described to estimate
Include the following steps：
P1:Batch state is searched, judges that batch is in the stage of step；
P2:The stage according to locating for batch judges batch in the remaining time of current procedures；
P3:Each phases-time of the P1 of calculated for subsequent.
8. the method according to claim 7 for carrying out pre- scheduling for special batch cargo, which is characterized in that the board
Prediction includes：Preferred/general board of definition simultaneously searches qualified board, includes the following steps：
S41:Search all boards that may be used；
S42:Each board PM information is searched, and calculates in step predicted time section whether have PM plan；
S43:Each board EM information is searched, and calculates in step predicted time section whether have EM plan；
S44:Whether the limitation system detection board of inquiry board can be used；
S45:Whether inquiry rmc system, which has, has been deposited corresponding setting；
S46:The effective percentage of enquiry machine desk calendar history, and it is added to corresponding field.
9. the method according to claim 8 for carrying out pre- scheduling for special batch cargo, which is characterized in that covered described
In the prediction of film version, system searches the information for needing to use the mask plate according to the following production stage estimated, its is whole
In the statistic curve for closing batch timing.
10. a kind of system for carrying out pre- scheduling for special batch cargo, which is characterized in that be applied to as in claim 1-9
Any method for carrying out pre- scheduling for special batch cargo, the system comprises：Data source modules, special batch number
According to module, processing module and output module；
The data source modules include data cell relevant to pre- scheduling operation in current manufacture；
The attribute information of the special batch cargo is stored in the special lot data module；
The processing module is connect with the data source modules, the special lot data module respectively, according to the attribute
Information transfers the data information in the corresponding data cell, exports described special batch by the output module after treatment
The walkthrough journey data information of secondary cargo.
11. the system according to claim 10 for carrying out pre- scheduling for special batch cargo, which is characterized in that described pre-
Schedule information includes mask data, device data and subsequent operation director data, and the subsequent operation director data includes
Keep instruction, update/clearance order, revision instruction and step skip instruction.
12. the system according to claim 11 for carrying out pre- scheduling for special batch cargo, which is characterized in that described to set
Standby data include PM device data, ECS device data, monitoring device data and device attribute data, and the processing module includes
PM schedule module, monitor state module, device state module, exposure mask block of state and subsequent operation module；The PM number of devices
It is extracted according to from the PM schedule module, the ECS device data, the device attribute data are mentioned from the device state module
It taking, the monitoring device data are extracted from the monitor state module, and the mask data is extracted from the exposure mask block of state,
The subsequent operation director data is extracted from the subsequent operation module.
13. the system according to claim 12 for carrying out pre- scheduling for special batch cargo, which is characterized in that the spy
The attribute information of different batch cargo includes：Batch ID, product parts ID, process, amount of capacity and sequence of steps number.
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| CN108008707B (en) * | 2017-11-28 | 2020-02-18 | 上海华力微电子有限公司 | Method for automatically monitoring product running condition |
| CN111045397A (en) * | 2018-10-12 | 2020-04-21 | 华孚精密科技(马鞍山)有限公司 | Standard time monitoring system and method |
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| CN111539648B (en) * | 2020-05-11 | 2023-08-18 | 上海华力集成电路制造有限公司 | Automatic distribution device and method for dynamic capacity among equipment groups |
| CN114493066A (en) * | 2020-11-11 | 2022-05-13 | 中核核电运行管理有限公司 | Automatic scheduling method based on overhaul of nuclear power plant |
| CN112926757A (en) * | 2021-03-30 | 2021-06-08 | 上海华力微电子有限公司 | Method and system for realizing scheduling of key batch products |
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