CN108008707A - A kind of method that automatic monitoring product runs goods situation - Google Patents
A kind of method that automatic monitoring product runs goods situation Download PDFInfo
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- CN108008707A CN108008707A CN201711219188.9A CN201711219188A CN108008707A CN 108008707 A CN108008707 A CN 108008707A CN 201711219188 A CN201711219188 A CN 201711219188A CN 108008707 A CN108008707 A CN 108008707A
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- 238000000034 method Methods 0.000 title claims abstract description 48
- 238000012544 monitoring process Methods 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 claims abstract description 22
- 238000007599 discharging Methods 0.000 claims description 34
- 230000000694 effects Effects 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010923 batch production Methods 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 52
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Abstract
The invention discloses a kind of data that can transfer the product batches at any time to check, in time, accurately grasps the method that the automatic monitoring product of the service condition for running goods situation, DPML information and engineering time of critical product batch runs goods situation.Input product batch information in systems is only needed when in use, system can call manufacturing execution system automatically, the real time information of product batches can be fed back in the system, calculated by formula, it can automatically derive and feed back the march map of the product batches, and the information such as actual DPML, residue DPML, Practical Project time, batch production time delay main cause can be calculated and be shown automatically, so as in time, accurately grasp the race goods situation of crucial batch.
Description
Technical field
The present invention relates to semiconductor applications, more particularly to a kind of method that automatic monitoring product runs goods situation.
Background technology
The monitoring that goods situation is run to critical product batch (key lot) in semiconductor production is generally marched by product batches
Figure (lot movement chart) and every layer of photoetching consume number of days (DPML, Days Per Mask Layer) to characterize, but mesh
Preceding product batches march map (lot movement chart) is made by the method for human-edited more, is taken more and can not be reached
To the effect for monitoring (monitor) at any time, it can not meet instant, the efficient requirement in semiconductor fabrication.
The content of the invention
A kind of number that can transfer the product batches at any time that the present invention proposes for the solution above problem of the prior art
It is investigated that see, in time, accurately grasp critical product batch (key lot) race goods situation, DPML information and engineering time (ENG,
Engineering the method that the automatic monitoring product of service condition) runs goods situation.
To achieve the above object, the present invention uses following technical scheme：
A kind of method that automatic monitoring product runs goods situation, applies to semiconductor and runs goods system, it is characterised in that：Described half
Conductor, which runs goods system, to be included
More than one website；The website carries out race goods to the product of more than one batch；
More than one monitor, the monitor connect the website respectively；
One manufacturing execution system, manufacturing execution system connect multiple monitors；
One product runs goods overall monitoring system, and the manufacturing execution system runs goods overall monitoring system with product and is connected；
The method that the automatic monitoring product runs goods situation comprises the following steps：
S1 sets the product to run the preset data of goods overall monitoring system, and the preset data is including presetting light shield into factory
Time, default activity duration, preset stand-by period, default engineering time, preset out ETCD estimated time of commencing discharging；
S2 starts more than one described website and carries out race goods by batch to product, the race package include light shield into factory, operation,
Wait, engineering, shipment technique；
Monitor described in S3 monitors the real time data of the product of each website, and the real time data is produced including each batch
The real-time light shield of product into factory's time, real time job time, real-time latency, the real-time engineering time, go out ETCD estimated time of commencing discharging in real time；
Monitor described in S4 by the real-time light shield of each batch products of each website into factory's time, the real time job time,
Real-time latency, the real-time engineering time, in real time go out ETCD estimated time of commencing discharging real time data be sent to the manufacturing execution system；
Product described in S5 runs goods overall monitoring system and the real-time number monitored in S4 steps is captured from manufacturing execution system
According to；
Product described in S6 runs goods overall monitoring system by the default light shield set in S1 steps into when factory's time, default operation
Between, the default stand-by period, default engineering time, preset out ETCD estimated time of commencing discharging preset data and S4 steps in each website for monitoring
Real-time light shield into factory's time, the real time job time, real-time latency, the real-time engineering time, in real time go out ETCD estimated time of commencing discharging it is real-time
Data form march map after hind computation.
In order to further optimize above-mentioned technical proposal, the technical measures that the present invention is taken are：
Preferably, the website is carried out out in the S2 steps standing or not opening station operation.
It is furthermore preferred that the preset data, which further includes to preset, opens station information, the real time data further includes opens station letter in real time
Breath.
It is furthermore preferred that it is described it is default open station information include it is default to open station information and not preset open station information, it is described real-time
Opening station information includes opening station information in real time and does not open station information in real time.
It is furthermore preferred that the method to set up of the default stand-by period of single website is：The default stand-by period=set out in advance
ETCD estimated time of commencing discharging-preset light shield into factory's time-default activity duration-default engineering time.
It is furthermore preferred that multiple default stand-by period are averaged, its method to set up is：The averagely default stand-by period=(total pre-
Setting out ETCD estimated time of commencing discharging ,-m- total default activity duration when total default light shield is into factory-always presets engineering time) the website number of/operation.
It is furthermore preferred that single website it is described preset out ETCD estimated time of commencing discharging method to set up be：Preset out ETCD estimated time of commencing discharging=default light
Cover into factory's time+default activity duration+default stand-by period+default engineering time
It is furthermore preferred that the method to set up that always described presets out ETCD estimated time of commencing discharging is：Always preset out ETCD estimated time of commencing discharging=default light shield into
The website number of factory's time+(default activity duration+default stand-by period+default engineering time) × default operation.
It is furthermore preferred that it is described it is default to open station information and to open information of standing in real time be arranged to 1；It is described to preset not open station information
Station information is not opened in real time is arranged to 0.
The present invention uses above-mentioned technical proposal, compared with prior art, has the following technical effect that：
The present invention proposes the system that a kind of new monitoring product runs goods situation, for the critical product batch of required monitoring
It is secondary, activity duration, engineering time (ENG), light shield are set needed for each website in system database in advance into factory (Mask in)
Time etc., input product batch information (lot ID) in systems is only needed when in use, system can call manufacture to perform system automatically
Unite (MES, Manufacturing Execution System), the real time information of product batches can be fed back in the system, led to
Cross formula calculating, you can automatically derive and feed back the march map (movement chart) of the product batches, and can count automatically
Calculate and show that actual every layer of photoetching consumes number of days (DPML, Days Per Mask Layer), residue DPML, Practical Project time
The information such as (ENG time), batch production time delay (lot delay) main cause, so as in time, accurately grasp crucial
The race goods situation of batch.
Brief description of the drawings
Fig. 1 is the schematic diagram that a kind of semiconductor of preferred embodiment of the present invention runs goods system；
Fig. 2 is the flow chart that a kind of automatic monitoring product of preferred embodiment of the present invention runs the method for goods situation；
Fig. 3 is the UI interfaces that a kind of product of preferred embodiment of the present invention runs goods overall monitoring system；
Fig. 4 is the preset data Parameter Map that a kind of product of preferred embodiment of the present invention runs goods overall monitoring system；
Fig. 5 is the datagram interface that a kind of product of preferred embodiment of the present invention runs goods overall monitoring system；
Reference numeral therein is：
1 product；2 websites；3 monitors；4 manufacturing execution systems；5 products run goods overall monitoring system；6 product batches.
Embodiment
The present invention provides a kind of method that automatic monitoring product runs goods situation.
The present invention is described in more detail below by specific embodiment, for a better understanding of the present invention,
But following embodiments are not intended to limit the scope of the invention.
The invention discloses a kind of method that automatic monitoring product runs goods situation, apply to semiconductor and run goods system, such as Fig. 1
Shown, the semiconductor, which runs goods system, to be included
More than one website 2；The website 2 carries out race goods to the product 1 of more than one batch；
More than one monitor 3, the monitor 3 connect the website 2 respectively；
One manufacturing execution system 4, manufacturing execution system 4 connect multiple monitors 3；
One product runs goods overall monitoring system 5, and the manufacturing execution system 4 runs goods overall monitoring system 5 with product and is connected；
As shown in Fig. 2, the method that the automatic monitoring product 1 runs goods situation comprises the following steps：
S1 sets the product to run the preset data of goods overall monitoring system 5, the preset data include default light shield into
Factory's time, default activity duration, preset stand-by period, default engineering time, preset out ETCD estimated time of commencing discharging；
S2 starts the website 2 and carries out race goods by batch to product 1；
Monitor 3 described in S3 monitors the real time data of the product 1 of each website 2, and the real time data includes each batch
The real-time light shield of secondary product 1 is into when factory's time, real time job time, real-time latency, real-time engineering time, real-time shipment
Between；
Monitor 3 described in S4 is by the real-time light shield of each batch products 1 of each website 2 into when factory's time, real time job
Between, real-time latency, the real-time engineering time, in real time go out ETCD estimated time of commencing discharging real time data be sent to the manufacturing execution system 4；Institute
State manufacturing execution system 4 real-time data record gets off；
Product race goods overall monitoring system 5 described in S5 monitors real-time from manufacturing execution system 4 in crawl S4 steps
Data；
Product described in S6 runs goods overall monitoring system 5 by the default light shield set in S1 steps into factory's time, default operation
Time, preset each station monitored in stand-by period, the preset data and S4 steps presetting engineering time, preset out ETCD estimated time of commencing discharging
Point 2 real-time light shield into factory's time, the real time job time, real-time latency, the real-time engineering time, in real time go out ETCD estimated time of commencing discharging reality
When data after hind computation, formed march map.The march map is two-wire figure, and the two-wire figure includes preset data line and reality
When data cable, and represent in UI (User Interface) interface, the UI interfaces further include datagram interface, can be in data
The corresponding modifiable parameter of modification in the data frame at figure interface；Due to the default light shield in preset data line and real time data line into
Factory's time is consistent into factory the time with real-time light shield, and it is consistent to preset out ETCD estimated time of commencing discharging with ETCD estimated time of commencing discharging is gone out in real time, therefore can be with
It is clearly seen that time-consuming and each real time data of each website in real time data relative to each in preset data on the diagram
Time-consuming and each preset data the difference of website, therefore can be clear that it is time-consuming most long in which flow, and to consumption
When longest flow carry out engineering improvement or program adjustment, optimize whole process.
The default activity duration includes original value, and the original value is process integration engineer (PIE, Process
Integration Engineer) provided according to operating process title (process operation name) one edition it is complete
Activity duration (process time), first according to this version setting activity duration (process time) during default；Support
The activity duration of technological process (flow) setting where user (owner) exports product batches (lot), and after voluntarily changing on
Pass to system；Support with reference to (reference) other products；And support to change；
The default engineering time (ENG time)；Support to carry out item by item each website ENG time or entry is set at the same time
Put；System is supported with reference to (reference) other products；And support to change；
It is described preset out ETCD estimated time of commencing discharging (F/O date) can set needed for go out ETCD estimated time of commencing discharging；
The default light shield can be set into factory's time (Mask in time) needed for light shield into factory's time；
The default stand-by period (Waiting time) can preset the stand-by period according to ETCD estimated time of commencing discharging adjustment is preset out
(waiting time), makes to preset out ETCD estimated time of commencing discharging needed for default shipment date match (match)；Support to presetting the stand-by period
(waiting time) is adjusted；
Further, the website 2 is carried out out in a kind of preferred embodiment, in the S2 steps to stand or do not open station
Operation.It is described open station operation be product through this website carry out technological process, it is described do not open station operation be product without this
A website carries out technological process, that is, skips this website.
Further, in a kind of preferred embodiment, the preset data, which further includes to preset, opens station information, described real-time
Data further include opens station information in real time.
Further, in a kind of preferred embodiment, the default station information of opening includes the default station information and pre- of opening
If not opening station information, the station information of opening in real time includes opening station information in real time and does not open station information in real time.
It is described default to open station information and open station information in real time to be arranged to the default station information and in real time of opening both when opening station
Open station information, it is described it is default to open station information and to open information of standing in real time be disposed as 1, when not opening station, both are arranged to
Preset not open station information and do not open station information in real time, the information of standing of presetting not open is disposed as 0 with station information is not opened in real time.
Default station information (Sampling) of opening sets for sampling：
The setting that initial preset opens station information (Sampling) directly captures relevant information from MES system；Support reference
(reference) other products；Support modification；
Further, in a kind of preferred embodiment, the method to set up of the default stand-by period of single website 2
For：The default stand-by period=preset out ETCD estimated time of commencing discharging-default light shield into factory's time-default activity duration-default engineering time.
Being provided with for default stand-by period is long beneficial to the stand-by period which link is found out from figure, and calculates according to this in technological process
Time-consuming for which flow, so as to optimize.
Further, in a kind of preferred embodiment, multiple default stand-by period are averaged, its method to set up is：It is flat
The default stand-by period=(always preset out ETCD estimated time of commencing discharging-m- always default activity duration when always default light shield is into factory-and always preset engineering
Time)/preset the website number run.The setting of averagely default stand-by period is whole in order to clearly be seen from whole march map
In a technological process, which link it is time-consuming longer, the technological process more than the averagely default stand-by period can be quickly from whole
Find out on march map and learn.The website number of the default operation is the default sum that open the website that station information is 1.
Further, in a kind of preferred embodiment, the method to set up for presetting out ETCD estimated time of commencing discharging of single website 2
For：ETCD estimated time of commencing discharging=default light shield is preset out into factory's time+default activity duration+default stand-by period+default engineering time.
Further, in a kind of preferred embodiment, the method to set up for presetting out ETCD estimated time of commencing discharging of total website 2
For：ETCD estimated time of commencing discharging=default light shield is always preset out into factory's time+(the default activity duration+default stand-by period+default engineering time)
× preset the website number run.When needing always default to go out ETCD estimated time of commencing discharging, website number of its default operation is as default will to open station
Information is the sum of 1 website.
Further, it is described default to open station information and to open station information setting in real time in a kind of preferred embodiment
For 1；Station information and the real-time station information of not opening preset not open is arranged to 0.
In conclusion the present invention can be fed back in the system with the real time information of a batch of product, calculated by formula,
It can automatically derive and feed back the march map of the product batches, and Practical Project time, batch production time can be calculated automatically
Postpone the information such as main cause, so as in time, accurately grasp the race goods situation of crucial batch.
The specific embodiment of the present invention is described in detail above, but it is intended only as example, it is of the invention and unlimited
It is formed on particular embodiments described above.To those skilled in the art, it is any to the equivalent modifications that carry out of the present invention and
Substitute also all among scope of the invention.Therefore, the impartial conversion made without departing from the spirit and scope of the invention and
Modification, all should be contained within the scope of the invention.
Claims (9)
1. a kind of method that automatic monitoring product runs goods situation, applies to semiconductor and runs goods system, it is characterised in that：It is described partly to lead
Body, which runs goods system, to be included
More than one website；The website carries out race goods to the product of more than one batch；
More than one monitor, the monitor connect the website respectively；
One manufacturing execution system, manufacturing execution system connect multiple monitors；
One product runs goods overall monitoring system, and the manufacturing execution system runs goods overall monitoring system with product and is connected；
The method that the automatic monitoring product runs goods situation comprises the following steps：
S1 sets the preset data of the product race goods overall monitoring system, when the preset data includes default light shield into factory
Between, the default activity duration, the default stand-by period, default engineering time, preset out ETCD estimated time of commencing discharging；
S2 starts more than one described website and carries out race goods by batch to product, the race package include stock up, operation, wait, work
Journey, shipment technique；
Monitor described in S3 monitors the real time data of the product of each website, and the real time data includes each batch products
Real-time light shield into factory's time, real time job time, real-time latency, the real-time engineering time, go out ETCD estimated time of commencing discharging in real time；
Monitor described in S4 by the real-time light shield of each batch products of each website into factory's time, the real time job time, in real time
Stand-by period, the real-time engineering time, in real time go out ETCD estimated time of commencing discharging real time data be sent to the manufacturing execution system；
Product described in S5 runs goods overall monitoring system and the real time data monitored in S4 steps is captured from manufacturing execution system；
Product described in S6 run goods overall monitoring system by the default light shield set in S1 steps into factory's time, the default activity duration,
The each website monitored in default stand-by period, the preset data and S4 steps preset engineering time, preset out ETCD estimated time of commencing discharging
Real-time light shield is into factory's time, real time job time, real-time latency, real-time engineering time, the real-time number for going out ETCD estimated time of commencing discharging in real time
According to after hind computation, march map is formed.
2. the method that automatic monitoring product according to claim 1 runs goods situation, it is characterised in that：It is right in the S2 steps
The website carries out out standing or not opening station operation.
3. the method that automatic monitoring product according to claim 2 runs goods situation, it is characterised in that：The preset data is also
Station information is opened including default, the real time data further includes opens station information in real time.
4. the method that automatic monitoring product according to claim 3 runs goods situation, it is characterised in that：Believe at the default station of opening
Breath include it is default to open station information and not preset open station information, the station information of opening in real time includes opening station information and real-time in real time
Station information is not opened.
5. monitor the method for product race goods situation automatically according to claim 1-4 any one of them, it is characterised in that：Single station
The method to set up of the default stand-by period of point is：The default stand-by period ,=presetting out ETCD estimated time of commencing discharging-was when presetting light shield into factory
Between-default activity duration-default engineering time.
6. the method that automatic monitoring product according to claim 5 runs goods situation, it is characterised in that：By multiple default waits
Time is averaged, its method to set up is：Averagely preset the stand-by period=(always preset out ETCD estimated time of commencing discharging-it is m- total when always default light shield is into factory
The default activity duration-always presets engineering time)/the website number run.
7. monitor the method for product race goods situation automatically according to claim 1-4 any one of them, it is characterised in that：Single station
Point it is described preset out ETCD estimated time of commencing discharging method to set up be：Preset out ETCD estimated time of commencing discharging=presetting light shield into factory's time+the default activity duration+
The default stand-by period+default engineering time.
8. monitor the method for product race goods situation automatically according to claim 1-4 any one of them, it is characterised in that：Total institute
State and preset out the method to set up of ETCD estimated time of commencing discharging and be：ETCD estimated time of commencing discharging=default light shield is always preset out into factory's time+(default activity duration+pre-
If the stand-by period+default engineering time) × preset the website number of operation.
9. the method that automatic monitoring product according to claim 4 runs goods situation, it is characterised in that：Described preset will open station
Information and to open in real time station information be arranged to 1；Station information and the real-time station information of not opening preset not open is arranged to 0.
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| CN201711219188.9A CN108008707B (en) | 2017-11-28 | 2017-11-28 | Method for automatically monitoring product running condition |
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| CN201711219188.9A CN108008707B (en) | 2017-11-28 | 2017-11-28 | Method for automatically monitoring product running condition |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109740813A (en) * | 2018-12-29 | 2019-05-10 | 上海华力微电子有限公司 | Online product batches run the analyzing and predicting method of goods state in wafer manufacture |
| CN112926757A (en) * | 2021-03-30 | 2021-06-08 | 上海华力微电子有限公司 | Method and system for realizing scheduling of key batch products |
| CN113379562A (en) * | 2021-06-29 | 2021-09-10 | 上海华力微电子有限公司 | Computer storage medium, and early warning system and method for forbidden goods |
| CN113534855A (en) * | 2020-04-14 | 2021-10-22 | 长鑫存储技术有限公司 | System and method for adjusting air path flow of machine table |
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