CN113848658A - Automatic production scheduling system and method for linkage of gate and source-drain equipment - Google Patents
Automatic production scheduling system and method for linkage of gate and source-drain equipment Download PDFInfo
- Publication number
- CN113848658A CN113848658A CN202111089057.XA CN202111089057A CN113848658A CN 113848658 A CN113848658 A CN 113848658A CN 202111089057 A CN202111089057 A CN 202111089057A CN 113848658 A CN113848658 A CN 113848658A
- Authority
- CN
- China
- Prior art keywords
- equipment
- source
- drain
- gate
- array substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 91
- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 185
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 74
- 238000004891 communication Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000002452 interceptive effect Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
Abstract
The invention discloses an automatic production scheduling system with linked gates and source-drain devices, which comprises a control system, dispatching devices, a plurality of gate devices and a plurality of source-drain devices, wherein the control system is used for setting the corresponding relation among a substrate ID, the gate devices and the source-drain devices and generating corresponding cavity combinations for each array substrate; the dispatching equipment is used for respectively conveying each array substrate to different gate equipment and source drain equipment; each grid device is used for manufacturing a grid film layer and a corresponding substrate ID on the array substrate and reporting a corresponding grid cavity to the control system; and each source-drain device is used for manufacturing a source-drain film layer on the array substrate and reporting the corresponding source-drain chamber to the control system. According to the automatic production scheduling system, the grid equipment and the source and drain equipment are linked to automatically schedule production, so that the conditions of improving the production efficiency, avoiding poor liquid crystal instillation and the like are achieved. The invention also discloses an automatic production scheduling method linked with the source drain equipment.
Description
Technical Field
The invention relates to an intelligent factory technology, in particular to an automatic production scheduling system and method for linkage of a gate and a source drain device.
Background
The liquid crystal panel comprises an array substrate and a color film substrate which are oppositely boxed, liquid crystal is dripped between the array substrate and the color film substrate, wherein a plurality of functional film layers are manufactured on the array substrate and the color film substrate in a sputtering film forming and photoetching patterning mode, and the functional film layers on the array substrate comprise a gate film layer, a source drain film layer and the like.
The principle of sputter film formation is to form an ion beam with high energy in a direct current or alternating current mode, and then the ion beam is impacted on the surface of a target so that target particles overflow from the surface of the target and are attached to the surface of a substrate to form a film layer, wherein factors such as sputtering time, DC power, substrate temperature, discharge pressure, impurity gas components, service life of the target and the like influence the sputter film formation effect, and chambers of different sputtering devices have slight differences due to the factors.
In actual production, when a gate film layer and a source drain film layer are plated on an array substrate, the array substrate with different combinations of chambers of different sputtering devices is used, the amount of liquid crystal required to be dripped in liquid crystal dripping devices is different, so that the amount of liquid crystal dripped by some array substrates is small, the problems of bubbles, yellowing and the like exist in a liquid crystal panel after the liquid crystal panel is formed, and the amount of liquid crystal dripped by some array substrates is large, so that the liquid crystal overflow problem occurs when the liquid crystal panel is formed.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides the automatic production scheduling system and the automatic production scheduling method for linkage of the gate and the source and drain devices.
The technical problem to be solved by the invention is realized by the following technical scheme:
an automatic production scheduling system with linked grid and source and drain devices comprises a control system, a dispatching device, a plurality of grid devices and a plurality of source and drain devices, wherein the dispatching device is connected with the grid devices
The control system is used for setting the corresponding relation among the substrate ID, the gate equipment and the source and drain equipment, and generating corresponding cavity combinations for each array substrate according to the gate cavity reported by the gate equipment and the source and drain cavity reported by the source and drain equipment;
the dispatching equipment is used for respectively conveying each array substrate to different gate equipment and respectively conveying each array substrate to corresponding source and drain equipment according to the corresponding relation between the substrate ID and the source and drain equipment which are arranged on the control system;
each grid device is used for manufacturing a grid film layer on the array substrate sent by the dispatching device, manufacturing a corresponding substrate ID on the sent array substrate according to the corresponding relation between the substrate ID and the grid device, and reporting a corresponding grid chamber to the control system, wherein the grid chamber comprises at least one grid chamber;
and each source-drain device is used for manufacturing a source-drain film layer on the array substrate sent by the dispatching device and reporting a corresponding source-drain chamber to the control system, and comprises at least one source-drain chamber.
Further, a plurality of liquid crystal dripping devices are also included, wherein
The control system is also used for setting the corresponding relation between the chamber combination and the liquid crystal dripping equipment;
the dispatching equipment is also used for respectively conveying each array substrate to corresponding liquid crystal dripping equipment according to the corresponding relation between the chamber combination and the liquid crystal dripping equipment arranged on the control system and the chamber combination corresponding to each array substrate generated by the control system, and one liquid crystal dripping equipment corresponds to one chamber combination;
and each liquid crystal dripping device is used for dripping a preset amount of liquid crystal on the array substrate sent by the dispatching device.
Further, the dispatching equipment comprises an identification module, a conveying module and a plurality of sorting baskets, wherein
The identification module is used for identifying the substrate ID on the array substrate in each sorting basket and reporting the substrate ID to the control system so that the control system can match the corresponding chamber combination;
and the conveying module is used for conveying the sorting basket to the corresponding liquid crystal dripping equipment when the array substrates in the same sorting basket are matched with the same chamber combination.
Further, the dispatching equipment comprises an identification module, a sorting module, a conveying module and a plurality of sorting baskets, wherein
The identification module is used for identifying the substrate ID on the array substrate in each sorting basket and reporting the substrate ID to the control system so that the control system can match the corresponding chamber combination;
the motion module is used for conveying the sorting basket to the sorting module for re-sorting when the array substrates in the same sorting basket are matched to different chamber combinations;
the sorting module is used for sorting the array substrates in the sorting basket.
Furthermore, the control system comprises an equipment automation system EAS/equipment automation program EAP, a manufacturing execution system MES and a DSP server, various production equipment is in communication connection with the equipment automation system EAS/equipment automation program EAP, and automatic production is carried out under the control of the equipment automation system EAS/equipment automation program EAP; the manufacturing execution system MES is respectively in communication connection with the automation system EAS/equipment automation program EAP and the management user terminal to perform data interactive transmission; the DSP server is used for processing and storing various panel production data and is in communication connection with the manufacturing execution system MES to perform data interactive transmission.
The control system is used for combining the chambers of the substrates on an operation interface of the management user terminal for displaying.
An automatic production scheduling method for linkage of a gate and a source drain device comprises the following steps:
step 1: setting a corresponding relation among the substrate ID, the gate device and the source and drain devices;
step 2: respectively conveying each array substrate to different gate devices;
and step 3: manufacturing a gate film layer on the sent array substrate by each gate device, manufacturing a corresponding substrate ID on the sent array substrate according to the corresponding relation between the set substrate ID and the gate device, and reporting a corresponding gate cavity to the control system;
and 4, step 4: respectively conveying each array substrate to corresponding source-drain equipment according to the set corresponding relation between the substrate ID and the source-drain equipment;
and 5: manufacturing a source drain film layer on the array substrate sent by each source drain device, and reporting the corresponding gate cavity to the upper part;
step 6: and generating corresponding cavity combinations for each array substrate according to the gate cavities reported by the gate equipment and the source-drain cavities reported by the source-drain equipment.
Further, in step 1, the method further comprises: setting a corresponding relation between the chamber combination and the liquid crystal dripping equipment; after the sixth step, the method further comprises the following steps:
and 7: according to the corresponding relation between the set chamber combination and the liquid crystal dripping equipment and the generated chamber combination corresponding to each array substrate, conveying each array substrate to the corresponding liquid crystal dripping equipment respectively, wherein one liquid crystal dripping equipment corresponds to one chamber combination;
and 8: and the liquid crystal dripping device drips a preset amount of liquid crystal on the array substrate sent by the dispatching device.
Further, step 7 comprises the steps of:
step 7.1: identifying the substrate ID on the array substrate in each sorting basket, and reporting to match the corresponding chamber combination;
step 7.2: when the array substrates in the same sorting basket are matched to the same chamber combination, the sorting basket is conveyed to the corresponding liquid crystal dripping equipment.
Further, step 7 comprises the steps of:
step 7.1: identifying the substrate ID on the array substrate in each sorting basket, and reporting to match the corresponding chamber combination;
step 7.2: when the array substrates in the same sorting basket are matched with different chambers to be combined, the sorting basket is conveyed to the sorting module to be sorted again until the array substrates in the same sorting basket are matched with the same chambers to be combined, and then the sorting basket is conveyed to the corresponding liquid crystal dripping equipment.
The invention has the following beneficial effects: the automatic production scheduling system links gate equipment and source and drain equipment in a panel production workshop, firstly, corresponding gate equipment and source and drain equipment are preset on the control system for each substrate ID, then, the dispatching equipment respectively sends each array substrate to different gate equipment to manufacture a gate film layer, each array substrate is endowed with a unique substrate ID while manufacturing the gate film layer in the gate equipment, then, the dispatching equipment sends each array substrate to the corresponding source and drain equipment to manufacture a source and drain film layer according to the corresponding relation among the substrate ID, the gate equipment and the source and drain equipment preset in the control system, finally, the control system generates corresponding cavity combinations for each array substrate after the array substrates finish manufacturing the gate film layer and the source and drain film layer, and then, the automatic production scheduling can be carried out on each array substrate according to the formed cavity combinations, the purposes of improving the production efficiency and avoiding poor liquid crystal instillation are achieved.
Drawings
FIG. 1 is a system schematic diagram of an automatic production scheduling system with gate and source drain device linkage provided by the present invention;
FIG. 2 is a schematic diagram illustrating the steps of the automatic production scheduling method for gate-source-drain device linkage provided by the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Example one
As shown in fig. 1, an automatic production scheduling system with a gate linked with a source/drain device includes a control system, a dispatching device, a plurality of gate devices, and a plurality of source/drain devices, wherein the dispatching device is connected to the source/drain devices
The control system is used for setting the corresponding relation among the substrate ID, the gate equipment and the source and drain equipment, and generating corresponding cavity combinations for each array substrate according to the gate cavity reported by the gate equipment and the source and drain cavity reported by the source and drain equipment;
the dispatching equipment is used for respectively conveying each array substrate to different gate equipment and respectively conveying each array substrate to corresponding source and drain equipment according to the corresponding relation between the substrate ID and the source and drain equipment which are arranged on the control system;
each grid device is used for manufacturing a grid film layer on the array substrate sent by the dispatching device, manufacturing a corresponding substrate ID on the sent array substrate according to the corresponding relation between the substrate ID and the grid device, and reporting a corresponding grid chamber to the control system, wherein the grid chamber comprises at least one grid chamber;
and each source-drain device is used for manufacturing a source-drain film layer on the array substrate sent by the dispatching device and reporting a corresponding source-drain chamber to the control system, and comprises at least one source-drain chamber.
The automatic production scheduling system links gate equipment and source and drain equipment in a panel production workshop, firstly, corresponding gate equipment and source and drain equipment are preset on the control system for each substrate ID, then, the dispatching equipment respectively sends each array substrate to different gate equipment to manufacture a gate film layer, each array substrate is endowed with a unique substrate ID while manufacturing the gate film layer in the gate equipment, then, the dispatching equipment sends each array substrate to the corresponding source and drain equipment to manufacture a source and drain film layer according to the corresponding relation among the substrate ID, the gate equipment and the source and drain equipment preset in the control system, finally, the control system generates corresponding cavity combinations for each array substrate after the array substrates finish manufacturing the gate film layer and the source and drain film layer, and then, the automatic production scheduling can be carried out on each array substrate according to the formed cavity combinations, the purposes of improving the production efficiency and avoiding poor liquid crystal instillation are achieved.
Because the difference between the gate device and the source and drain device is only that the used coating target materials are different, the gate device and the source and drain device are only used with different technical names for facilitating the understanding of the technical scheme, and in the actual production and manufacturing process of the panel, the gate device and the source and drain device can be coating devices with the same structure, can also be coating devices with different structures, and even can be the same coating device (namely, one coating device can be provided with a gate chamber and a source and drain chamber at the same time so as to respectively coat two films, namely a gate film layer and a source and drain film layer).
Each grid device and each source drain device are preset with unique device numbers, each grid cavity and each source drain cavity are also provided with a cavity number, and after the grid devices and the source drain devices respectively report the cavity numbers of the grid cavities and the source drain cavities, the control system reports the reported cavity numbers of the grid cavities and the source drain cavities, the preset corresponding substrate IDs and the device numbers of the grid devices and the source drain devices to form the substrate IDs; gate device number-gate chamber number; and generating a cavity combination of each array substrate in the form of source-drain equipment number-source-drain cavity number. Of course, if the gate device has only one gate chamber, or the source-drain device has only one source-drain chamber, the device number of the gate device or the source-drain device may be directly used as the chamber number of the corresponding gate chamber or the source-drain chamber.
The automatic production scheduling system further comprises a plurality of liquid crystal dripping devices, wherein
The control system is also used for setting the corresponding relation between the chamber combination and the liquid crystal dripping equipment;
the dispatching equipment is also used for respectively conveying each array substrate to corresponding liquid crystal dripping equipment according to the corresponding relation between the chamber combination and the liquid crystal dripping equipment arranged on the control system and the chamber combination corresponding to each array substrate generated by the control system, and one liquid crystal dripping equipment corresponds to one chamber combination;
and each liquid crystal dripping device is used for dripping a preset amount of liquid crystal on the array substrate sent by the dispatching device.
Control system generates corresponding cavity combination back for each array substrate, dispatch equipment transports each array substrate to the corresponding liquid crystal instillation equipment department of cavity combination with this array substrate, like this, every liquid crystal instillation equipment only is responsible for carrying out the liquid crystal instillation for the array substrate of a cavity combination, only need by the manual setting when the start or by control system issues automatic set for rather than be responsible for the liquid crystal volume of predetermineeing that the cavity combination of instillation corresponds can, both can avoid because the cavity combination is different and the liquid crystal of each array substrate that leads to drips the volume too much or too little, also need not frequently to modify liquid crystal and drip the volume according to the cavity combination of every array substrate, defective rate and work load all reduce greatly.
Preferably, the dispatching equipment comprises an identification module, a sorting module, a conveying module and a plurality of sorting baskets, wherein
The identification module is used for identifying the substrate ID on the array substrate in each sorting basket and reporting the substrate ID to the control system so that the control system can match the corresponding chamber combination;
the conveying module is used for conveying the sorting basket to corresponding liquid crystal dripping equipment when the array substrates in the same sorting basket are matched with the same chamber combination; when the array substrates in the same sorting basket are matched to different chamber combinations, conveying the sorting basket to the sorting module for re-sorting;
the sorting module is used for sorting the array substrates in the sorting basket.
When the dispatching system is in automatic production, the identification module is controlled to identify the substrate IDs of all array substrates in the sorting basket ready for shipment, if the identification module detects that the array substrates with different chamber combinations exist in the same sorting basket, the conveying module is controlled to dispatch the sorting basket to the sorting module for re-sorting, and if the identification module detects that all the array substrates in the same sorting basket have the same chamber combinations, the conveying module is controlled to dispatch the sorting basket to the corresponding liquid crystal dripping equipment.
The automatic production scheduling system further comprises a management user terminal, and the control system combines the chambers of the array substrates on an operation interface of the management user terminal for displaying.
Specifically, the control system comprises an equipment automation system EAS/equipment automation program EAP, a manufacturing execution system MES and a DSP server, various production equipment in a panel production workshop including gate equipment, source and drain equipment, liquid crystal instillation equipment, dispatching equipment and the like are in communication connection with the equipment automation system EAS/equipment automation program EAP through an HSMS protocol or a CC-Link protocol, and automatic production is carried out under the control of the equipment automation system EAS/equipment automation program EAP; the manufacturing execution system MES is respectively in communication connection with the automation system EAS/equipment automation program EAP and a management user terminal through a message cluster so as to carry out data interaction transmission; the DSP server is used for processing and storing various panel production data and is in communication connection with the manufacturing execution system MES through a network so as to perform data interaction transmission.
The gate equipment and the source drain equipment report gate chambers and source drain chambers corresponding to the array substrates to an equipment automation system EAS/equipment automation program EAP, then the equipment automation system EAS/equipment automation program EAP transmits the reported gate chambers and source drain chambers to a manufacturing execution system MES, then the manufacturing execution system MES forms chamber combinations corresponding to the array substrates, and after the chamber combinations are matched with corresponding liquid crystal instillation equipment, the liquid crystal instillation equipment corresponding to the array substrates is issued to the equipment automation system EAS/equipment automation program, and finally the equipment automation system EAS/equipment automation program EAP controls the dispatching equipment to convey the array substrates to the corresponding liquid crystal instillation equipment.
The dispatching equipment reports the substrate IDs of the array substrates in the sorting baskets to the equipment automation system EAS/equipment automation program EAP, then the equipment automation system EAS/equipment automation program EAP transmits the reported substrate IDs of the array substrates to the manufacturing execution system MES, then the manufacturing execution system MES matches the chamber combination of the array substrates and judges whether all the array substrates in the same sorting basket are in the same chamber combination, if so, the corresponding liquid crystal instillation equipment is issued to the equipment automation system EAS/equipment automation program EAP, if not, a re-sorting instruction is issued to the equipment automation system EAS/equipment automation program EAP, and finally the equipment automation system EAS/equipment automation program EAP controls the dispatching equipment to convey the corresponding sorting basket to the corresponding liquid crystal instillation equipment or re-sort the array substrates in the corresponding sorting basket.
Example two
As shown in fig. 2, an automatic production scheduling method for linkage of a gate and a source-drain device is not limited to be applied to the automatic production scheduling system described in the first embodiment, and includes the following steps:
step 1: and setting the corresponding relation among the substrate ID, the gate device, the source drain device and the chamber combination and the liquid crystal dripping device.
Step 2: and respectively conveying each array substrate to different gate devices.
And step 3: and manufacturing a gate film layer on the sent array substrate by each gate device, manufacturing a corresponding substrate ID on the sent array substrate according to the corresponding relation between the set substrate ID and the gate device, and reporting the corresponding gate chamber.
And 4, step 4: and respectively conveying each array substrate to the corresponding source-drain equipment according to the set corresponding relation between the substrate ID and the source-drain equipment.
And 5: and manufacturing a source drain film layer on the sent array substrate by each source drain device, and reporting the corresponding gate cavity to the upper part.
Step 6: and generating corresponding cavity combinations for each array substrate according to the gate cavities reported by the gate equipment and the source-drain cavities reported by the source-drain equipment.
And 7: and respectively conveying each array substrate to the corresponding liquid crystal dripping equipment according to the corresponding relation between the set chamber combination and the liquid crystal dripping equipment and the generated chamber combination corresponding to each array substrate, wherein one liquid crystal dripping equipment corresponds to one chamber combination.
Wherein, the step 7 comprises the following steps:
step 7.1: identifying the substrate ID on the array substrate in each sorting basket, and reporting to match the corresponding chamber combination;
step 7.2: when the array substrates in the same sorting basket are matched with the same chamber assembly, conveying the sorting basket to corresponding liquid crystal dripping equipment; when the array substrates in the same sorting basket are matched with different chambers to be combined, the sorting basket is conveyed to the sorting module to be sorted again until the array substrates in the same sorting basket are matched with the same chambers to be combined, and then the sorting basket is conveyed to the corresponding liquid crystal dripping equipment.
And 8: and the liquid crystal dripping device drips a preset amount of liquid crystal on the array substrate sent by the dispatching device.
The above-mentioned embodiments only express the embodiments of the present invention, and the description is more specific and detailed, but not understood as the limitation of the patent scope of the present invention, but all the technical solutions obtained by using the equivalent substitution or the equivalent transformation should fall within the protection scope of the present invention.
Claims (10)
1. The automatic production scheduling system is characterized by comprising a control system, dispatching equipment, a plurality of gate equipment and a plurality of source and drain equipment, wherein the dispatching equipment is connected with the source and drain equipment
The control system is used for setting the corresponding relation among the substrate ID, the gate equipment and the source and drain equipment, and generating corresponding cavity combinations for each array substrate according to the gate cavity reported by the gate equipment and the source and drain cavity reported by the source and drain equipment;
the dispatching equipment is used for respectively conveying each array substrate to different gate equipment and respectively conveying each array substrate to corresponding source and drain equipment according to the corresponding relation between the substrate ID and the source and drain equipment which are arranged on the control system;
each grid device is used for manufacturing a grid film layer on the array substrate sent by the dispatching device, manufacturing a corresponding substrate ID on the sent array substrate according to the corresponding relation between the substrate ID and the grid device, and reporting a corresponding grid chamber to the control system, wherein the grid chamber comprises at least one grid chamber;
and each source-drain device is used for manufacturing a source-drain film layer on the array substrate sent by the dispatching device and reporting a corresponding source-drain chamber to the control system, and comprises at least one source-drain chamber.
2. The gate and source drain device linked automatic production scheduling system of claim 1 further comprising a plurality of liquid crystal dripping devices, wherein
The control system is also used for setting the corresponding relation between the chamber combination and the liquid crystal dripping equipment;
the dispatching equipment is also used for respectively conveying each array substrate to corresponding liquid crystal dripping equipment according to the corresponding relation between the chamber combination and the liquid crystal dripping equipment arranged on the control system and the chamber combination corresponding to each array substrate generated by the control system, and one liquid crystal dripping equipment corresponds to one chamber combination;
and each liquid crystal dripping device is used for dripping a preset amount of liquid crystal on the array substrate sent by the dispatching device.
3. The gate and source drain device linked automatic production scheduling system of claim 1 or 2, wherein the dispatching device comprises an identification module, a conveying module and a plurality of sorting baskets, wherein
The identification module is used for identifying the substrate ID on the array substrate in each sorting basket and reporting the substrate ID to the control system so that the control system can match the corresponding chamber combination;
and the conveying module is used for conveying the sorting basket to the corresponding liquid crystal dripping equipment when the array substrates in the same sorting basket are matched with the same chamber combination.
4. The gate and source drain device linked automatic production scheduling system of claim 1 or 2, wherein the dispatching device comprises an identification module, a sorting module, a conveying module and a plurality of sorting baskets, wherein
The identification module is used for identifying the substrate ID on the array substrate in each sorting basket and reporting the substrate ID to the control system so that the control system can match the corresponding chamber combination;
the motion module is used for conveying the sorting basket to the sorting module for re-sorting when the array substrates in the same sorting basket are matched to different chamber combinations;
the sorting module is used for sorting the array substrates in the sorting basket.
5. The automatic production scheduling system with the linked gate and source drain equipment as claimed in claim 1, wherein the control system comprises an equipment automation system EAS/equipment automation program EAP, a manufacturing execution system MES and a DSP server, and various production equipment is in communication connection with the equipment automation system EAS/equipment automation program EAP and is automatically produced under the control of the equipment automation system EAS/equipment automation program EAP; the manufacturing execution system MES is respectively in communication connection with the automation system EAS/equipment automation program EAP and the management user terminal to perform data interactive transmission; the DSP server is used for processing and storing various panel production data and is in communication connection with the manufacturing execution system MES to perform data interactive transmission.
6. The automatic production scheduling system of gate and source drain device linkage of claim 1 or 5, further comprising a management user terminal, wherein the control system combines the chambers of each substrate to be displayed on an operation interface of the management user terminal.
7. An automatic production scheduling method for linkage of a gate and a source drain device is characterized by comprising the following steps:
step 1: setting a corresponding relation among the substrate ID, the gate device and the source and drain devices;
step 2: respectively conveying each array substrate to different gate devices;
and step 3: manufacturing a gate film layer on the sent array substrate by each gate device, manufacturing a corresponding substrate ID on the sent array substrate according to the corresponding relation between the set substrate ID and the gate device, and reporting a corresponding gate cavity to the control system;
and 4, step 4: respectively conveying each array substrate to corresponding source-drain equipment according to the set corresponding relation between the substrate ID and the source-drain equipment;
and 5: manufacturing a source drain film layer on the array substrate sent by each source drain device, and reporting the corresponding gate cavity to the upper part;
step 6: and generating corresponding cavity combinations for each array substrate according to the gate cavities reported by the gate equipment and the source-drain cavities reported by the source-drain equipment.
8. The automatic production scheduling method for the linkage of the gate and the source drain device according to claim 7, further comprising, in step 1: setting a corresponding relation between the chamber combination and the liquid crystal dripping equipment; after the sixth step, the method further comprises the following steps:
and 7: according to the corresponding relation between the set chamber combination and the liquid crystal dripping equipment and the generated chamber combination corresponding to each array substrate, conveying each array substrate to the corresponding liquid crystal dripping equipment respectively, wherein one liquid crystal dripping equipment corresponds to one chamber combination;
and 8: and the liquid crystal dripping device drips a preset amount of liquid crystal on the array substrate sent by the dispatching device.
9. The automatic production scheduling method for the linkage of the gate and the source drain device according to claim 8, wherein the step 7 comprises the following steps:
step 7.1: identifying the substrate ID on the array substrate in each sorting basket, and reporting to match the corresponding chamber combination;
step 7.2: when the array substrates in the same sorting basket are matched to the same chamber combination, the sorting basket is conveyed to the corresponding liquid crystal dripping equipment.
10. The automatic production scheduling method for the linkage of the gate and the source drain device according to claim 1, wherein the step 7 comprises the following steps:
step 7.1: identifying the substrate ID on the array substrate in each sorting basket, and reporting to match the corresponding chamber combination;
step 7.2: when the array substrates in the same sorting basket are matched with different chambers to be combined, the sorting basket is conveyed to the sorting module to be sorted again until the array substrates in the same sorting basket are matched with the same chambers to be combined, and then the sorting basket is conveyed to the corresponding liquid crystal dripping equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111089057.XA CN113848658B (en) | 2021-09-16 | 2021-09-16 | Automatic grid and source drain equipment linkage scheduling system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111089057.XA CN113848658B (en) | 2021-09-16 | 2021-09-16 | Automatic grid and source drain equipment linkage scheduling system and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113848658A true CN113848658A (en) | 2021-12-28 |
| CN113848658B CN113848658B (en) | 2023-11-14 |
Family
ID=78974411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111089057.XA Active CN113848658B (en) | 2021-09-16 | 2021-09-16 | Automatic grid and source drain equipment linkage scheduling system and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113848658B (en) |
Citations (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000338508A (en) * | 1999-05-27 | 2000-12-08 | Sakae Tanaka | Method and device for production of liquid crystal panel |
| JP2004053670A (en) * | 2002-07-16 | 2004-02-19 | Advanced Display Inc | Liquid crystal panel and liquid crystal display device using same |
| KR20040018591A (en) * | 2002-08-23 | 2004-03-04 | 엘지.필립스 엘시디 주식회사 | Structure of chamber sputtering process and methode for sputtering |
| KR20040058840A (en) * | 2002-12-27 | 2004-07-05 | 엘지.필립스 엘시디 주식회사 | An array substrate for Liquid crystal display and method for fabricating the same |
| KR20040062051A (en) * | 2002-12-31 | 2004-07-07 | 엘지.필립스 엘시디 주식회사 | apparatus for test of array circuit in LCD and the method thereof |
| KR20040107986A (en) * | 2003-06-16 | 2004-12-23 | 삼성전자주식회사 | Manufacturing method of thin film transistor array panel |
| KR20050032251A (en) * | 2003-10-01 | 2005-04-07 | 엘지.필립스 엘시디 주식회사 | Apparatus for deposition |
| KR20070008740A (en) * | 2005-07-12 | 2007-01-18 | 삼성전자주식회사 | Mother glass substrate for display apparatus and method of fabricating the same |
| JP2007133219A (en) * | 2005-11-11 | 2007-05-31 | Sharp Corp | Method for manufacturing liquid crystal display apparatus, and liquid crystal one-drop-fill device |
| KR20070060640A (en) * | 2005-12-09 | 2007-06-13 | 주식회사 테라세미콘 | Display panel manufacturing system |
| KR20080023018A (en) * | 2006-09-08 | 2008-03-12 | 삼성전자주식회사 | Apparatus of manufactureing liquid display panel |
| KR20080065442A (en) * | 2007-01-09 | 2008-07-14 | 주식회사 에이디피엔지니어링 | Pre-assembly final inspection device for lcd and inspection method using the same |
| KR20080065437A (en) * | 2007-01-09 | 2008-07-14 | 주식회사 에이디피엔지니어링 | Pre-assembly final inspection device for lcd and inspection method using the same |
| KR20080065438A (en) * | 2007-01-09 | 2008-07-14 | 주식회사 에이디피엔지니어링 | Pre-assembly final inspection device for lcd and inspection method using the same |
| US20110033957A1 (en) * | 2009-08-07 | 2011-02-10 | Applied Materials, Inc. | Integrated thin film metrology system used in a solar cell production line |
| CN101995712A (en) * | 2009-08-21 | 2011-03-30 | 北京京东方光电科技有限公司 | Array substrate and manufacturing method thereof |
| CN102650771A (en) * | 2011-11-08 | 2012-08-29 | 北京京东方光电科技有限公司 | Liquid crystal display panel and manufacturing method thereof and display |
| KR20130047899A (en) * | 2011-11-01 | 2013-05-09 | 엘지디스플레이 주식회사 | Apparatus and method for manufacturing of transistor array substrate |
| CN103454790A (en) * | 2013-08-22 | 2013-12-18 | 合肥京东方光电科技有限公司 | Detector, liquid crystal drop filling system and liquid crystal drop filling control method |
| CN103744232A (en) * | 2014-01-10 | 2014-04-23 | 北京京东方光电科技有限公司 | Liquid crystal instilling device |
| CN103956386A (en) * | 2014-04-11 | 2014-07-30 | 京东方科技集团股份有限公司 | Thin film transistor, manufacturing method of thin film transistor, array substrate, manufacturing method of array substrate and display device |
| WO2014153846A1 (en) * | 2013-03-27 | 2014-10-02 | 北京京东方光电科技有限公司 | Array substrate and manufacturing method thereof, and display device |
| CN105446024A (en) * | 2016-01-11 | 2016-03-30 | 京东方科技集团股份有限公司 | Liquid crystal instillation device and liquid crystal instillation method |
| CN206208366U (en) * | 2016-06-06 | 2017-05-31 | 重庆市环卫集团有限公司 | A kind of house refuse logistics intermodal system weighing system |
| CN110854175A (en) * | 2019-11-26 | 2020-02-28 | 京东方科技集团股份有限公司 | Array substrate, preparation method thereof and display panel |
| US20200209811A1 (en) * | 2018-12-31 | 2020-07-02 | Noodle Analytics, Inc. | Controlling production resources in a supply chain |
| CN211506121U (en) * | 2020-03-24 | 2020-09-15 | 信利(仁寿)高端显示科技有限公司 | Liquid crystal instillation device of display panel |
| KR20200120980A (en) * | 2019-04-08 | 2020-10-23 | 주식회사 컴퓨터메이트 | Smart factory operation system and method thereof |
-
2021
- 2021-09-16 CN CN202111089057.XA patent/CN113848658B/en active Active
Patent Citations (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000338508A (en) * | 1999-05-27 | 2000-12-08 | Sakae Tanaka | Method and device for production of liquid crystal panel |
| JP2004053670A (en) * | 2002-07-16 | 2004-02-19 | Advanced Display Inc | Liquid crystal panel and liquid crystal display device using same |
| KR20040018591A (en) * | 2002-08-23 | 2004-03-04 | 엘지.필립스 엘시디 주식회사 | Structure of chamber sputtering process and methode for sputtering |
| KR20040058840A (en) * | 2002-12-27 | 2004-07-05 | 엘지.필립스 엘시디 주식회사 | An array substrate for Liquid crystal display and method for fabricating the same |
| KR20040062051A (en) * | 2002-12-31 | 2004-07-07 | 엘지.필립스 엘시디 주식회사 | apparatus for test of array circuit in LCD and the method thereof |
| KR20040107986A (en) * | 2003-06-16 | 2004-12-23 | 삼성전자주식회사 | Manufacturing method of thin film transistor array panel |
| KR20050032251A (en) * | 2003-10-01 | 2005-04-07 | 엘지.필립스 엘시디 주식회사 | Apparatus for deposition |
| KR20070008740A (en) * | 2005-07-12 | 2007-01-18 | 삼성전자주식회사 | Mother glass substrate for display apparatus and method of fabricating the same |
| JP2007133219A (en) * | 2005-11-11 | 2007-05-31 | Sharp Corp | Method for manufacturing liquid crystal display apparatus, and liquid crystal one-drop-fill device |
| KR20070060640A (en) * | 2005-12-09 | 2007-06-13 | 주식회사 테라세미콘 | Display panel manufacturing system |
| KR20080023018A (en) * | 2006-09-08 | 2008-03-12 | 삼성전자주식회사 | Apparatus of manufactureing liquid display panel |
| KR20080065442A (en) * | 2007-01-09 | 2008-07-14 | 주식회사 에이디피엔지니어링 | Pre-assembly final inspection device for lcd and inspection method using the same |
| KR20080065437A (en) * | 2007-01-09 | 2008-07-14 | 주식회사 에이디피엔지니어링 | Pre-assembly final inspection device for lcd and inspection method using the same |
| KR20080065438A (en) * | 2007-01-09 | 2008-07-14 | 주식회사 에이디피엔지니어링 | Pre-assembly final inspection device for lcd and inspection method using the same |
| US20110033957A1 (en) * | 2009-08-07 | 2011-02-10 | Applied Materials, Inc. | Integrated thin film metrology system used in a solar cell production line |
| CN101995712A (en) * | 2009-08-21 | 2011-03-30 | 北京京东方光电科技有限公司 | Array substrate and manufacturing method thereof |
| KR20130047899A (en) * | 2011-11-01 | 2013-05-09 | 엘지디스플레이 주식회사 | Apparatus and method for manufacturing of transistor array substrate |
| CN102650771A (en) * | 2011-11-08 | 2012-08-29 | 北京京东方光电科技有限公司 | Liquid crystal display panel and manufacturing method thereof and display |
| WO2014153846A1 (en) * | 2013-03-27 | 2014-10-02 | 北京京东方光电科技有限公司 | Array substrate and manufacturing method thereof, and display device |
| CN103454790A (en) * | 2013-08-22 | 2013-12-18 | 合肥京东方光电科技有限公司 | Detector, liquid crystal drop filling system and liquid crystal drop filling control method |
| CN103744232A (en) * | 2014-01-10 | 2014-04-23 | 北京京东方光电科技有限公司 | Liquid crystal instilling device |
| CN103956386A (en) * | 2014-04-11 | 2014-07-30 | 京东方科技集团股份有限公司 | Thin film transistor, manufacturing method of thin film transistor, array substrate, manufacturing method of array substrate and display device |
| CN105446024A (en) * | 2016-01-11 | 2016-03-30 | 京东方科技集团股份有限公司 | Liquid crystal instillation device and liquid crystal instillation method |
| CN206208366U (en) * | 2016-06-06 | 2017-05-31 | 重庆市环卫集团有限公司 | A kind of house refuse logistics intermodal system weighing system |
| US20200209811A1 (en) * | 2018-12-31 | 2020-07-02 | Noodle Analytics, Inc. | Controlling production resources in a supply chain |
| KR20200120980A (en) * | 2019-04-08 | 2020-10-23 | 주식회사 컴퓨터메이트 | Smart factory operation system and method thereof |
| CN110854175A (en) * | 2019-11-26 | 2020-02-28 | 京东方科技集团股份有限公司 | Array substrate, preparation method thereof and display panel |
| CN211506121U (en) * | 2020-03-24 | 2020-09-15 | 信利(仁寿)高端显示科技有限公司 | Liquid crystal instillation device of display panel |
Non-Patent Citations (2)
| Title |
|---|
| HOSOKAWA A: "Low temperature polysilicon chemical vapor deposition system for thin film transistor liquid crystal diode", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, B. MICROELECTRONICS AND NANOMETER STRUCTURES: PROCESSING, MEASUREMENT AND PHENOMENA * |
| 李冰;李新贝;张方辉;: "液晶灌注工艺研究", 现代显示, no. 09 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113848658B (en) | 2023-11-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110794800B (en) | Intelligent factory information management monitoring system | |
| US8849438B2 (en) | Factory level process and final product performance control system | |
| CN104977903A (en) | Real time dispatch system-based method and system for wafer batch dispatch under machine set | |
| CN111353690B (en) | Block chain enabled production scheduling edge calculation method | |
| CN109801180A (en) | The Internet of Things intelligent information management system and control method of tricot machine | |
| CN112418540A (en) | Intelligent MES real-time data analysis system | |
| CN107168253B (en) | Computer integrated manufacturing system and its manufacturing method | |
| CN111768072B (en) | Printing and dyeing workshop scheduling system | |
| CN111263579A (en) | SMT chip mounter material verification error-proofing control method based on production informatization management system | |
| CN113848658A (en) | Automatic production scheduling system and method for linkage of gate and source-drain equipment | |
| CN114444948A (en) | Control system and method for intelligently acquiring and dispatching WPH (WPH) in wafer production line | |
| JP2002076088A (en) | Semiconductor and apparatus for manufacturing flat display | |
| CN114066308B (en) | Production work order adjusting method and device and electronic equipment | |
| CN109636208A (en) | A kind of manufacturing execution system for surface mount processing procedure | |
| TW200537351A (en) | Method and system for problem case packaging | |
| CN106449495B (en) | Substrate graduation deposit method | |
| US20020198617A1 (en) | System and method for controlling priority of lots employed in MES | |
| CN110059968A (en) | Process data monitoring method and process data monitoring system | |
| CN110429057B (en) | Wafer taking and delivering method for dry etching machine | |
| CN116845015B (en) | Automatic dispatching system and automatic dispatching method for commissioning products | |
| CN112486113B (en) | Machine program control method and device | |
| Nowlan | Development of Automated Production Line Processes for Solar Brightfield Modules: Final Report, 1 June 2003-30 November 2007 | |
| CN113359409A (en) | Multi-cavity CVD equipment distributed control system and method thereof | |
| CN116402480B (en) | Method and system for outputting inventory based on association rule self-built model | |
| CN114277354B (en) | AF continuous vacuum coating equipment and uniformity control method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |