CN116845015B - Automatic dispatching system and automatic dispatching method for commissioning products - Google Patents
Automatic dispatching system and automatic dispatching method for commissioning products Download PDFInfo
- Publication number
- CN116845015B CN116845015B CN202311121556.1A CN202311121556A CN116845015B CN 116845015 B CN116845015 B CN 116845015B CN 202311121556 A CN202311121556 A CN 202311121556A CN 116845015 B CN116845015 B CN 116845015B
- Authority
- CN
- China
- Prior art keywords
- target
- product
- program control
- control system
- manufacturing execution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- General Factory Administration (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application provides an automatic dispatching system and an automatic dispatching method of a test run product, wherein the automatic dispatching system comprises a real-time dispatching system, a manufacturing execution system and an advanced program control system which are mutually in communication connection, the advanced program control system is provided with a test run rule on a target machine, and receives automatic test run requirements, the real-time dispatching system and the advanced program control system cooperate to select the target product which can be tested, and the advanced program control system transmits instructions to the manufacturing execution system and the real-time dispatching system based on the test run rule so as to automatically dispatch a wafer boat box where the target product is positioned to the target machine, so that human intervention actions are fully automated, human errors are removed, and the dispatching actions of the product and the target machine which can accurately finish the test run are reduced, the workload of manufacturing personnel and engineering personnel is also reduced, a new system is not required to be redeveloped for the test run product dispatching, and the development cost is reduced.
Description
Technical Field
The application relates to the field of semiconductor production and manufacturing, in particular to an automatic dispatching system and an automatic dispatching method for a test run product.
Background
In the semi-conductor production process, when the machine fails to return, the machine is usually required to be stopped, so that the quality of the product produced after the machine returns is ensured to be the same as that before the machine does not stop, therefore, the test operation of a small amount of products is required, and the tested product is checked to compare the critical data before and after the stop, so that the quality of the product is verified.
Due to the continuous rising of productivity, the gradual increasing of product types, the increasing of machine number and the increasing of machine diversity, operators or engineers are usually required to manually select the products of the test run according to the states of the machines so as to finish the test run, and the process needs to manually search the test run products, batch, dispatch and batch combination of the wafer cassettes, collect the data of the test run products, and the like, so that the whole process is time-consuming and laborious, and the following problems may occur in the process of selecting the products: when selecting products, the problems of debugging and commissioning the products easily occur, dispatching the products to non-target machines and the like, so that the products are scrapped and the productivity is lost; dispatching the test run products to non-target machines, thereby causing loss of machine productivity and pollution to the machines; and dispatching the misplaced test run products to the target machine, thereby causing scrapping of the products and long-time stagnation of the target machine.
Disclosure of Invention
The application aims to provide an automatic dispatching system and an automatic dispatching method for test run products, which are used for solving various problems caused by manually selecting the test run products and dispatching.
In order to solve the above-mentioned problems, the present application provides an automatic dispatch system, which includes a real-time dispatch system, a manufacturing execution system and an advanced process control system that are communicatively connected to each other,
the advanced program control system is provided with a test operation rule on a target machine and receives automatic test operation requirements set forth by engineering units, the real-time dispatching system and the advanced program control system cooperate to select target products capable of being tested on the target machine, and the advanced program control system transmits instructions to the manufacturing execution system and the real-time dispatching system based on the test operation rule so as to automatically dispatch the wafer boat box where the target products are located to the target machine.
Optionally, the advanced program control system selects all products which can be tested on the target machine according to the automatic test operation requirement, and transmits the test operation rule to the real-time dispatching system; the real-time dispatching system picks out target products from all the products according to actual parameters of the online products, and sends reservation requirements to the manufacturing execution system; the manufacturing execution system obtains information of a target wafer cassette of the target product to be tested according to the information of the target product to complete reservation, obtains reservation information, and sends the reservation information to the advanced program control system, wherein the actual parameters are the product model number and the quantity of online products.
Further, the advanced program control system locks the target cassette according to the reservation information, and proposes a requirement for disassembling and batching the target cassette to the manufacturing execution system according to the required number of the target products; the manufacturing execution system automatically disassembles the target wafer boat boxes to obtain sub-target wafer boat boxes bearing required quantity of target products and obtain information of the sub-target wafer boat boxes needing to be tested, and the manufacturing execution system feeds the information back to the advanced program control system; the advanced program control system transmits the information to the real-time dispatching system, the real-time dispatching system reserves the transmission of the sub-target cassette for the manufacturing execution system according to the information, and the manufacturing execution system automatically dispatches target products in the sub-target cassette to the target machine station after confirming the reservation.
Furthermore, the automatic dispatch system further comprises an engineering unit, and the manufacturing execution system performs test operation on the target product and feeds back completion information to the advanced program control system after the test operation is completed.
On the other hand, the application also provides an automatic dispatching method of the test run product, which comprises the following steps:
the manufacturing unit puts forward a test operation requirement on a target machine to an engineering unit, and the engineering unit establishes a test operation rule according to the test operation requirement and puts forward an automatic test operation requirement to an advanced program control system; and
according to the automatic test operation requirement, the real-time dispatching system and the advanced program control system cooperate to select target products which can be tested on the target machine, and transmit instructions to the manufacturing execution system and the real-time dispatching system based on test operation rules so as to automatically dispatch the wafer boat boxes where the target products are located to the target machine.
Optionally, the specific method for establishing the test operation rule according to the test operation requirement and providing the automatic test operation requirement for the advanced program control system comprises the following steps:
judging whether to perform trial operation, establishing a trial operation rule in the advanced program control system according to the trial operation requirement when the trial operation is required, and providing an automatic trial operation requirement for the advanced program control system.
Further, according to the automatic commissioning requirement, the real-time dispatching system and the advanced program control system cooperate to pick a target product capable of commissioning on the target machine, and transmit an instruction to the manufacturing execution system and the real-time dispatching system based on a commissioning rule established in the advanced program control system, so as to automatically dispatch the wafer boat box where the target product is located to the target machine, wherein the specific method comprises the following steps:
according to the automatic commissioning demand, the advanced program control system selects all products which can be commissioned on the target machine, and transmits the commissioning rule to the real-time dispatching system; according to actual parameters of online products, the real-time dispatching system picks out target products from all the products and sends reservation requirements to the manufacturing execution system; the manufacturing execution system obtains information of a target wafer cassette of the target product to be tested according to the information of the target product to complete reservation, obtains reservation information, and sends the reservation information to the advanced program control system, wherein the actual parameters are the product model number and the quantity of online products.
Further, the specific method for automatically dispatching the wafer boat where the target product is located to the target machine station comprises the following steps:
the advanced program control system locks the target wafer boat boxes according to the reservation information and provides the requirement of disassembling the target wafer boat boxes for the manufacturing execution system according to the required number of the target products; the manufacturing execution system automatically disassembles the target wafer boat boxes to obtain sub-target wafer boat boxes bearing required quantity of target products and obtain information of the sub-target wafer boat boxes needing to be tested, and the manufacturing execution system feeds the information back to the advanced program control system; the advanced program control system transmits the information to the real-time dispatching system, the real-time dispatching system reserves the transmission of the sub-target cassette for the manufacturing execution system according to the information, and the manufacturing execution system automatically dispatches target products in the sub-target cassette to the target machine station after confirming the reservation.
Optionally, after the automatic operation system automatically dispatches the product capable of being tested to the target machine, the method further includes:
the manufacturing execution system performs trial operation on the target product, and feeds back the completion information to the advanced program control system and the engineering unit after the trial operation is completed, and the engineering unit verifies the trial operation product and notifies the automatic operation system of the end of the trial operation.
Compared with the prior art, the application has the following unexpected beneficial effects:
the application provides an automatic dispatching system and an automatic dispatching method of a test run product, wherein the automatic dispatching system comprises a real-time dispatching system, a manufacturing execution system and an advanced program control system which are mutually in communication connection, the advanced program control system is provided with a test run rule on a target machine and receives an automatic test run requirement put forward by a engineering unit, the real-time dispatching system and the advanced program control system cooperate to select the target product which can be tested run on the target machine, and the advanced program control system transmits instructions to the manufacturing execution system and the real-time dispatching system based on the test run rule so as to automatically dispatch a wafer boat box where the target product is positioned to the target machine.
Drawings
FIG. 1 is a simplified schematic diagram of an automatic dispatch system according to an embodiment of the present application;
FIG. 2 is a schematic flow chart of an automatic dispatch method for a commissioning product according to an embodiment of the present application;
FIG. 3 is a histogram of the time taken to produce a pilot run product in two ways.
Wherein: 10-advanced program control system; 20-a real-time dispatch system; 30-manufacturing execution system.
Detailed Description
An automatic dispatch system and an automatic dispatch method for commissioning products according to the present application will be described in further detail below. The present application will be described in more detail below with reference to the attached drawings, in which preferred embodiments of the present application are shown, it being understood that one skilled in the art can modify the present application described herein while still achieving the advantageous effects of the present application. Accordingly, the following description is to be construed as broadly known to those skilled in the art and not as limiting the application.
In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions or constructions are not described in detail since they would obscure the application in unnecessary detail. It should be appreciated that in the development of any such actual embodiment, numerous implementation details must be made to achieve the developer's specific goals, such as compliance with system-related or business-related constraints, which will vary from one implementation to another. In addition, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art.
In order to make the objects and features of the present application more comprehensible, embodiments accompanied with figures are described in detail below. It is noted that the drawings are in a very simplified form and utilize non-precise ratios, and are intended to facilitate a convenient, clear, description of the embodiments of the application.
Fig. 1 is a simplified schematic diagram of an automatic dispatch system according to the present embodiment, as shown in fig. 1, where the automatic dispatch system includes an RTD (Real Time Dispatching, real-time dispatch system 20), an MES (Manufacturing Execution System, manufacturing execution system 30) and an APC (Advanced Process Control, advanced program control system 10) that are communicatively connected to each other.
The advanced program control system 10 transmits instructions to the manufacturing execution system 30 and the real-time dispatching system 20 based on the test operation rules so as to automatically dispatch the wafer boat box where the target product is located to the target machine. The test operation rule comprises information of a target machine, and the automatic test operation requirement comprises information of a target product which can be operated on the target machine.
In detail, the advanced program control system 10 selects all products that can be tested on the target machine according to the automatic test operation requirement, and transmits the test operation rule to the real-time dispatching system 20; the real-time dispatching system 20 picks out target products from all products according to actual parameters of the online products, and sends reservation requirements to the manufacturing execution system 30; the manufacturing execution system 30 obtains information of the target cassette of the target product to be commissioned according to the information of the target product to complete reservation, and obtains reservation information, and transmits the reservation information to the advanced program control system 10. Wherein the actual parameters are the product model number and the quantity of the online product.
The program control system 10 locks the target cassette according to the reservation information, and makes a request for disassembling the target cassette (i.e., dividing all the products of the target cassette into two batches including the sub-target cassettes of the target products of the required number) to the manufacturing execution system 30 according to the required number of the target products; the manufacturing execution system 30 automatically disassembles the target wafer boat boxes to obtain sub-target wafer boat boxes carrying the required number of target products, and obtains the information of the sub-target wafer boat boxes needing to be tested, and the manufacturing execution system 30 feeds back the information to the advanced program control system 10; the program control system 10 transmits the message to the real-time dispatch system 20, the real-time dispatch system 20 reserves the transmission of the sub-target cassette to the manufacturing execution system 30 according to the message, and the manufacturing execution system 30 automatically dispatches the target product in the sub-target cassette to the target machine after confirming the reservation.
The manufacturing execution system 30 performs a test run on the target product and feeds back completion information to the advanced program control system 10 after the test run is completed. In detail, the manufacturing execution system 30 performs a test run on a target product, and feeds back completion information to the prior program control system 10 and the engineering unit after the test run is completed, and the engineering unit verifies the test run product and notifies the automatic operation system of the end of the test run.
Fig. 2 is a flow chart of an automatic dispatch method for a test run product according to the present embodiment. As shown in fig. 2, the embodiment provides an automatic dispatching method for a commissioning product, which includes the following steps:
step 1: the manufacturing unit puts forward the test operation requirement on the target machine to the engineering unit, and the engineering unit establishes test operation rules according to the test operation requirement and puts forward automatic test operation requirement to the advanced program control system 10;
step 2: according to the automatic test operation requirement, the real-time dispatching system 20 and the advanced program control system 10 cooperate to select target products capable of test operation on the target machine, and transmit instructions to the manufacturing execution system 30 and the real-time dispatching system 20 based on test operation rules, so as to automatically dispatch the wafer boat boxes where the target products are located to the target machine.
The following describes in detail an automatic dispatch method for a test run product provided in this embodiment.
First, step 1 is executed, where the manufacturing unit sets up a commissioning rule according to a commissioning requirement to an engineering unit, and sets up an automatic commissioning requirement to the advanced program control system 10. The test operation rule comprises information of a target machine, and the automatic test operation requirement comprises information of a target product which can be operated on the target machine.
In this step, the automated dispatch system includes RTDs (Real Time Dispatching, real-time dispatch system 20), MES (Manufacturing Execution System, manufacturing execution system 30) and APC (Advanced Process Control, advanced process control system 10) communicatively coupled to each other.
The method specifically comprises the following steps:
firstly, the RTD provides dispatch parameters for the MES, and automatically dispatches the product to the target machine through the APC, when the target machine needs to perform product test operation due to a fault loop and other reasons, the test operation requirement of the product on the target machine is proposed, so that a Manufacturing unit (MFG) proposes the test operation requirement to an engineering unit (mobile).
Then, the engineering unit judges whether the test operation is needed, establishes a test operation rule in the APC according to the test operation requirement when the test operation is needed, and provides an automatic test operation requirement for the APC.
Then, step 2 is executed, according to the automatic commissioning requirement, the real-time dispatching system 20 and the advanced program control system 10 cooperate to select the target product capable of commissioning on the target machine, and send instructions to the manufacturing execution system 30 and the real-time dispatching system 20 based on commissioning rules, so as to automatically dispatch the cassette where the target product is located to the target machine.
The method specifically comprises the following steps:
according to the automatic test operation requirement, the APC selects all products which can be tested on the target machine, and transmits the test operation rule to the RTD; according to actual parameters of online products (namely the product model number, the quantity and the like of the current online products), the RTD picks out target products from all the products and sends reservation requirements to the MES; the MES obtains information of a target wafer cassette of a target product to be tested according to the information of the target product to finish reservation, obtains reservation information and sends the reservation information to the APC; APC locks the target cassette according to the reservation information, and according to the required quantity of the said target product, propose the requirement to dismantle the batch target cassette to MES; the MES automatically disassembles the target wafer boat boxes to obtain sub-target wafer boat boxes bearing the required number of target products, and obtains the information of the sub-target wafer boat boxes needing to be tested, and the MES feeds back the information to the APC; the APC transmits the message to the RTD, the RTD reserves the transmission of the sub-target cassette to the MES according to the message, and the MES automatically dispatches the target product in the sub-target cassette to the target machine after confirming the reservation.
After step S2, then, the MES performs test operation on the target product, and after the test operation is completed, the completion information is fed back to the APC and the engineering unit, and the engineering unit verifies the test operation product to compare whether the product quality after the fault loop (after the fault is relieved, the product returns to the production line) meets the specification, and notifies the automatic operation system of the end of the test operation.
As shown in fig. 3, when the automatic dispatch method (i.e., method 1) of the test run product of the present embodiment is not used, the total time spent by the processes 1 to 6 is 48.5 hours, while when the automatic dispatch method (i.e., method 2) of the test run product of the present embodiment is used, the total time spent by the processes 1 to 6 is 16 hours, so that the estimated total time spent by all the process flows is 67% man hours, which greatly reduces the man power, that is, the time spent in the dispatch process of the product is greatly reduced. Taking the process 1 as an example, the conventional method needs to take 17.5 hours per person per day, and the automatic dispatch method for the commissioning product of this embodiment (i.e. when the automatic dispatch method for the commissioning product of this embodiment is not used) needs to take 4 hours per person per day.
In summary, the present application provides an automatic dispatch system and an automatic dispatch method for a test run product, which have unexpected effects that: the automatic dispatch system comprises a real-time dispatch system 20, a manufacturing execution system 30 and an advanced program control system 10 which are in communication connection, wherein the advanced program control system 10 is provided with a test operation rule on a target machine and receives automatic test operation requirements, the real-time dispatch system 20 and the advanced program control system 10 cooperate to pick out target products which can be tested on the target machine, the advanced program control system 10 transmits instructions to the manufacturing execution system 30 and the real-time dispatch system 20 based on the test operation rule so as to automatically dispatch a wafer boat box where the target products are positioned to the target machine.
It will be appreciated that although the application has been described above in terms of preferred embodiments, the above embodiments are not intended to limit the application. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art without departing from the scope of the technology, or the technology can be modified to be equivalent. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present application still fall within the scope of the technical solution of the present application.
Claims (7)
1. An automatic dispatch system is characterized by comprising a real-time dispatch system, a manufacturing execution system and an advanced program control system which are mutually communicated,
the advanced program control system is provided with a test operation rule on a target machine, receives automatic test operation requirements set forth by engineering units, selects all products which can be tested on the target machine according to the automatic test operation requirements, and transmits the test operation rule to the real-time dispatching system;
the real-time dispatching system picks out target products from all the products according to actual parameters of the online products, and sends reservation requirements to the manufacturing execution system; the manufacturing execution system obtains information of a target wafer cassette of the target product to be tested according to the information of the target product to complete reservation, obtains reservation information, and sends the reservation information to the advanced program control system so as to automatically dispatch the wafer cassette of the target product to the target machine; wherein the actual parameters are the product model number and the quantity of the online product.
2. The automated dispatch system of claim 1, wherein the advanced process control system locks the target cassette based on the reservation information and presents a request to the manufacturing execution system to disassemble the target cassette based on a desired number of the target products; the manufacturing execution system automatically disassembles the target wafer boat boxes to obtain sub-target wafer boat boxes bearing required quantity of target products and obtain information of the sub-target wafer boat boxes needing to be tested, and the manufacturing execution system feeds the information back to the advanced program control system; the advanced program control system transmits the information to the real-time dispatching system, the real-time dispatching system reserves the transmission of the sub-target cassette for the manufacturing execution system according to the information, and the manufacturing execution system automatically dispatches target products in the sub-target cassette to the target machine station after confirming the reservation.
3. The automated dispatch system of claim 2, wherein the manufacturing execution system performs a commissioning of the target product and feeds back completion information to the advanced manufacturing program control system after the commissioning is completed.
4. An automatic dispatch method for a test run product is characterized by comprising the following steps:
the manufacturing unit puts forward a test operation requirement on a target machine to an engineering unit, and the engineering unit establishes a test operation rule according to the test operation requirement and puts forward an automatic test operation requirement to an advanced program control system; and
according to the automatic commissioning demand, the advanced program control system selects all products which can be commissioned on the target machine, and transmits the commissioning rule to a real-time dispatching system; according to actual parameters of online products, the real-time dispatching system picks out target products from all the products and sends reservation requirements to the manufacturing execution system; the manufacturing execution system obtains information of a target wafer cassette of the target product to be tested according to the information of the target product to complete reservation, obtains reservation information, and sends the reservation information to the advanced program control system so as to automatically dispatch the wafer cassette of the target product to the target machine, wherein the actual parameters are the product model number and the quantity of the online product.
5. The method for automatically dispatching a test run product according to claim 4, wherein the specific method for establishing test run rules according to the test run requirements and providing automatic test run requirements to an advanced program control system comprises the following steps:
judging whether to perform trial operation, establishing a trial operation rule in the advanced program control system according to the trial operation requirement when the trial operation is required, and providing an automatic trial operation requirement for the advanced program control system.
6. The method for automatically dispatching the test run product according to claim 4, wherein the specific method for automatically dispatching the wafer boat where the target product is located to the target machine is as follows:
the advanced program control system locks the target wafer boat boxes according to the reservation information and provides the requirement of disassembling the target wafer boat boxes for the manufacturing execution system according to the required number of the target products; the manufacturing execution system automatically disassembles the target wafer boat boxes to obtain sub-target wafer boat boxes bearing required quantity of target products and obtain information of the sub-target wafer boat boxes needing to be tested, and the manufacturing execution system feeds the information back to the advanced program control system; the advanced program control system transmits the information to the real-time dispatching system, the real-time dispatching system reserves the transmission of the sub-target cassette for the manufacturing execution system according to the information, and the manufacturing execution system automatically dispatches target products in the sub-target cassette to the target machine station after confirming the reservation.
7. The method for automatically dispatching a commissioning product of claim 4, wherein after said automatic operation system automatically dispatches a commissioning product to said target machine, further comprising:
the manufacturing execution system performs trial operation on the target product, and feeds back the completion information to the advanced program control system and the engineering unit after the trial operation is completed, and the engineering unit verifies the trial operation product and notifies the automatic operation system of the end of the trial operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311121556.1A CN116845015B (en) | 2023-09-01 | 2023-09-01 | Automatic dispatching system and automatic dispatching method for commissioning products |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311121556.1A CN116845015B (en) | 2023-09-01 | 2023-09-01 | Automatic dispatching system and automatic dispatching method for commissioning products |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116845015A CN116845015A (en) | 2023-10-03 |
| CN116845015B true CN116845015B (en) | 2023-11-24 |
Family
ID=88174730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311121556.1A Active CN116845015B (en) | 2023-09-01 | 2023-09-01 | Automatic dispatching system and automatic dispatching method for commissioning products |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116845015B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118657460B (en) * | 2024-08-21 | 2024-12-13 | 苏州派迅智能科技有限公司 | Semiconductor efficient manufacturing chip logistics and intelligent dispatching method and system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104979232A (en) * | 2014-04-02 | 2015-10-14 | 中芯国际集成电路制造(上海)有限公司 | Method for storing wafer transfer box and system for realizing storage of wafer transfer box |
| CN113361833A (en) * | 2020-03-02 | 2021-09-07 | 联芯集成电路制造(厦门)有限公司 | Chemical mechanical polishing system and related dispatching management method |
| CN114897361A (en) * | 2022-05-11 | 2022-08-12 | 合肥晶合集成电路股份有限公司 | Wafer batch dispatching method based on real-time dispatching system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7672748B2 (en) * | 2006-04-17 | 2010-03-02 | Chartered Semiconductor Manufacturing, Ltd. | Automated manufacturing systems and methods |
| SG156651A1 (en) * | 2006-04-17 | 2009-11-26 | Chartered Semiconductor Mfg | Manufacturing system with active failover |
-
2023
- 2023-09-01 CN CN202311121556.1A patent/CN116845015B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104979232A (en) * | 2014-04-02 | 2015-10-14 | 中芯国际集成电路制造(上海)有限公司 | Method for storing wafer transfer box and system for realizing storage of wafer transfer box |
| CN113361833A (en) * | 2020-03-02 | 2021-09-07 | 联芯集成电路制造(厦门)有限公司 | Chemical mechanical polishing system and related dispatching management method |
| CN114897361A (en) * | 2022-05-11 | 2022-08-12 | 合肥晶合集成电路股份有限公司 | Wafer batch dispatching method based on real-time dispatching system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116845015A (en) | 2023-10-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6622055B2 (en) | Method of control management of production line | |
| US6256550B1 (en) | Overall equipment effectiveness on-line categories system and method | |
| CN116845015B (en) | Automatic dispatching system and automatic dispatching method for commissioning products | |
| CN109877649A (en) | Automate cutter online test method and detection system | |
| CN108288119A (en) | A kind of intelligentized factory control method and system | |
| CN111459116A (en) | High-efficiency digital management system for intelligent production line of pipes | |
| CN111522303A (en) | Planned scheduling method and equipment | |
| CN111263579A (en) | SMT chip mounter material verification error-proofing control method based on production informatization management system | |
| CN111240276A (en) | Production automation control management system | |
| CN115729187A (en) | Processing method and device based on engine digital assembly verification | |
| CN107168253A (en) | Computer integrated manufacturing system and its manufacture method | |
| CN104021499B (en) | Semiconductor manufacturing control method | |
| Matsuyama et al. | A state-of-the-art automation system of an ASIC wafer fab in Japan | |
| CN118000435A (en) | Feed processing technology based on automatic production line | |
| CN117032111A (en) | Error control method for factory automation production line | |
| Kübler et al. | Simulation-assisted run-to-run control for battery manufacturing in a cloud environment | |
| CN117610871A (en) | Method and device for executing production flow of MES system | |
| US20020198617A1 (en) | System and method for controlling priority of lots employed in MES | |
| CN115826545A (en) | Multi-variety small-batch mixed line machining flexible manufacturing scheduling and executing method and system | |
| CN114443299B (en) | Flexible automatic lamination system based on 5G communication and edge calculation | |
| CN101414170B (en) | AMHS system for integrated circuit production line and implementing method thereof | |
| CN100461055C (en) | Method for sharing semiconductor machine and manufacturing system using same | |
| CN114418788A (en) | Automatic flexible production scheduling method and system for drawer line | |
| CN115471048A (en) | Production line equipment comprehensive efficiency monitoring and collaborative optimization method based on digital twin | |
| CN106925415A (en) | A kind of ceramic raw material energy-saving control method and system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |