JP2004053670A - Liquid crystal panel and liquid crystal display device using same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mother substrate which is certainly attracted with an electrostatic chuck in the state of a substrate before being cut off, a liquid crystal panel cut out of the mother glass by gang printing, a method for manufacturing the liquid crystal panel and a liquid crystal display device using the liquid crystal panel. <P>SOLUTION: The liquid crystal panel is cut out of the mother glass by gang printing. The mother substrate (the upper substrate 4) is provided with cell patterns 12 corresponding to the liquid crystal panels. Furthermore, the cell patterns 12 are mutually electrically connected via a conductive material 13 and are integrated so as to stride over first and second electrodes 9, 10. The mother substrate is attracted by applying voltage to the first and second electrodes 9, 10 of the electrostatic chuck. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a mother substrate, a liquid crystal panel, a method of manufacturing the same, and a liquid crystal display device, and more particularly, to a multi-panel liquid crystal panel using an electrostatic chuck method in a manufacturing process.
[0002]
[Prior art]
The liquid crystal display device includes a liquid crystal panel and a planar light source device provided on a back surface of the liquid crystal panel. This liquid crystal panel includes a thin film transistor array substrate (TFT array substrate) sandwiching a liquid crystal layer and a color filter substrate (CF substrate). The TFT array substrate is provided with switching elements and pixel electrodes made of a transparent conductive film such as ITO. The CF substrate is made of a transparent conductive film such as ITO and provided with a counter electrode facing the pixel electrode. A spacer is provided between the TFT array substrate and the CF substrate in order to keep the distance between the substrates constant.
[0003]
The manufacturing process of this liquid crystal display device is roughly divided into an array process for forming a wiring pattern and a switching element (in the case of an active matrix type) on a glass substrate, and a color filter process for forming a color filter and the like on the other substrate. And a cell process of sealing the liquid crystal between the glass substrates facing each other, and a module process of mounting a driver IC and mounting a backlight. In a liquid crystal display device manufacturing apparatus, vacuum suction is frequently used for three-dimensional transport of a substrate or a liquid crystal cell.
[0004]
As a method of injecting liquid crystal in the above-described cell process, for example, a vacuum injection method (also referred to as a pressure injection method) as disclosed in JP-A-8-17933 has been conventionally used. The method of vacuum injection of the liquid crystal will be described. First, the TFT array substrate and the CF substrate are bonded with a sealant. Then, a liquid crystal injection port is provided in a part of the bonded substrates. Then, the liquid crystal dish and the substrate containing the liquid crystal are placed in a chamber, and the chamber is evacuated to a medium-high vacuum environment. Next, the liquid crystal injection port is impregnated in the liquid crystal dish. Then, the pressure is restored, and the liquid crystal is injected between the substrates by the pressure difference. Further, there is also an injection method in which a fiber bundle is provided at a liquid crystal injection port and a capillary phenomenon is utilized.
[0005]
However, the vacuum injection method requires a step of applying a vacuum, a step of restoring pressure, and a step of closing the liquid crystal injection port, and the steps are complicated, and it has been difficult to reduce the manufacturing cost. Further, since the liquid crystal is injected by immersing the substrate in the liquid crystal dish, an expensive liquid crystal material is consumed in a predetermined injection amount or more, which is not economical. In the case of a substrate having a large area, it takes a long time to perform implantation, and therefore, the production efficiency is poor. Further, bubbles are easily generated when the liquid crystal injection port is closed, and therefore, it is necessary to closely control the production technology.
[0006]
In order to solve the above-mentioned problems, in recent years, for example, a dropping method as disclosed in JP-A-2002-040398 has been used. The dropping method will be described with reference to FIG. FIG. 5 is a sectional view showing the configuration of the dropping method. Here, 1 is a liquid crystal, 2 is a sealant, 3 is a lower substrate, 4 is an upper substrate, 5 is a lower platen, 6 is an upper platen, 7 is a chamber, and 8 is a horizontal moving mechanism. One of the TFT array substrate and the CF substrate is placed on the horizontal lower platen 5 in the chamber 7. This substrate is referred to as a lower substrate 3. Here, the surface on which the pattern (not shown) and the spacer (not shown) are provided faces upward, and the sealant 2 is applied around the surface. Using a dispenser (not shown), a predetermined amount of the liquid crystal 1 is dropped into a region surrounded by the sealant. The upper substrate 4 facing the lower substrate 3 is held on the upper surface plate 6 by an electrostatic chuck. The upper platen 6 is lowered by a motor or the like, and the lower substrate 3 and the upper substrate 4 are bonded together. The lower platen 5 is provided with a horizontal (X, Y, θ direction) moving mechanism 8 to bond the substrates with high accuracy. Then, the sealant is cured by irradiation with ultraviolet rays and heating. Further, the bonded substrate is cut into a predetermined number and divided.
[0007]
In the dropping method as described above, there is no step of sealing the liquid crystal injection port, and the liquid crystal can be sealed (dropped and bonded) in the same chamber. Therefore, the manufacturing process is simplified. In addition, since the entire encapsulation process can be performed in a vacuum, the influence of contamination is small.
[0008]
Here, since the inside of the chamber 7 is in a vacuum, vacuum suction does not function for holding the upper substrate 4. Therefore, the upper surface plate 6 incorporates an electrostatic chuck. The configuration of the electrostatic chuck will be described with reference to FIGS. FIG. 6 is a sectional view showing the configuration of the electrostatic chuck, and FIG. 7 is a plan view showing the configuration of the electrostatic chuck. Since the same reference numerals as those shown in FIG. 5 indicate the same configuration, the description will be omitted. 9 is a first electrode, 10 is a second electrode, 11 is an insulator, and 12 is a cell pattern.
[0009]
As shown in FIG. 6, a first electrode 9 and a second electrode 10 are incorporated in the upper surface plate 6. An insulator 11 is provided between the first electrode 9 and the second electrode 10. The first electrode 9 and the second electrode 10 are made of SiC or the like whose electric characteristics are controlled in order to generate a stable attraction force. The insulator 11 is made of alumina or the like, which has high insulating properties and emits little gas in a vacuum.
[0010]
A voltage is applied to these electrode pairs to charge the first electrode 9 positively and the second electrode 10 negatively. An upper substrate 4 having a conductive cell pattern 12 formed under these electrode pairs is provided. This cell pattern 12 faces the electrode pair via the insulating upper substrate 4. Therefore, a portion of the conductive material facing the first electrode 9 is negative, and a portion of the conductive material facing the second electrode is induced with a positive charge. Therefore, the electrode pair and the cell pattern 12 form a parallel plate capacitor with the insulating upper substrate 4 interposed therebetween, and the upper substrate 4 can be electrostatically attracted and fixed by the Johnson-Rahbek force generated therebetween.
[0011]
The first electrode 9 and the second electrode 10 are provided two each as shown by a dotted line in FIG. When the upper substrate 4 is a TFT array substrate, the cell pattern 12 is an array pattern of pixel electrodes, source lines, gate lines, and the like. In the case of a CF substrate, it is a counter electrode facing the pixel electrode or the like. These cell patterns 12 are divided for each cell. In FIG. 7, two cell patterns 12 are formed to cut out two liquid crystal panels from a pair of mother glasses. Each cell pattern 12 is polarized positively or negatively, and the upper substrate 4 is electrostatically chucked.
[0012]
By the way, in recent years, in order to improve productivity, the size of the mother glass has been increased, and the number of liquid crystal panels cut out from one mother glass has increased. Even if the substrate size is small, a large number of small-sized liquid crystal panels used for mobile phones, PDAs, and the like are formed, and a large number of liquid crystal panels are cut out. When the above-mentioned electrostatic chuck is used for a multi-panel substrate on which a large number of liquid crystal panels are formed, there are the following problems.
[0013]
The problem will be described with reference to FIGS. FIG. 8 is a sectional view showing the configuration of the upper substrate 4 and the electrode pair, and FIG. 9 is a plan view. The same reference numerals as those given in FIGS. 5, 6, and 7 denote the same components, and a description thereof will be omitted. Here, 42 small cell patterns 12 are provided on the upper substrate 4. The configuration of the electrostatic chuck is the same as that shown in FIGS.
[0014]
When the upper substrate 4 on which a large number of cell patterns 12 are provided as shown in FIG. 9 is electrostatically chucked, the cell pattern 12 is smaller than the first electrode 9 and the second electrode 10. Therefore, the cell pattern 12 does not extend over both the first electrode 9 and the second electrode 10. These individual cell patterns 12 are independent. Therefore, even if a positive or negative voltage is applied to the first electrode 9 and the second electrode 10, it is impossible to simultaneously apply positive and negative charges to the individual cell patterns 12, so that the cell patterns 12 are electrostatically attracted without being polarized. There was a problem that it was not possible. Further, the cell pattern 12 becomes smaller to some extent as compared with the first electrode 9 and the second electrode 10, and when the area across both electrodes is reduced, the amount of polarized charges is reduced, and the adsorbing force (Johnson-Labeck force) is weakened. There was a problem.
[0015]
As described above, when the cell pattern 12 is smaller than the electrode of the electrostatic chuck, there is a problem that the cell pattern 12 is not attracted or the attraction force is weakened. When the suction force is weak, the upper substrate 4 may not be sucked, or the substrate may drop during the suction. There is also a problem that the position of the upper substrate 4 is shifted during the bonding process.
[0016]
As a countermeasure, a method of increasing the number of electrodes by reducing the size of the first electrode 9 and the second electrode 10 can be considered. However, increasing the number of electrodes complicates the structure and requires expensive components such as SiC and alumina. It is not economical to use many. Further, when the shape of the electrode is optimized by the cell size (number of chamfers) and the electrode is adsorbed with a small number of electrodes, it is necessary to replace the electrode 11 with the insulator 11 when the cell size is changed, which is troublesome. The productivity is low.
[0017]
[Problems to be solved by the invention]
As described above, in the liquid crystal panel in which the number of the substrates is larger than that of the conventional mother substrate, there is a problem that the mother substrate cannot be reliably attracted by the electrostatic chuck.
[0018]
The present invention has been made in order to solve such problems, and a liquid crystal panel obtained by removing a plurality of substrates from a mother substrate, wherein the mother substrate is reliably attracted by an electrostatic chuck, a liquid crystal panel, and the like. It is an object of the present invention to provide a manufacturing method thereof and a liquid crystal display device using the liquid crystal panel.
[0019]
[Means for Solving the Problems]
The liquid crystal panel according to the present invention is a liquid crystal panel that is formed in a plurality of planes from a mother substrate (for example, the upper substrate 4 in the present embodiment), and corresponds to the liquid crystal panel and is electrically connected to each other. It is manufactured by cutting a plurality of liquid crystal panel substrates from a mother substrate having a cell pattern (for example, the cell pattern 12 in the embodiment of the present invention). Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0020]
A liquid crystal panel according to the present invention is a liquid crystal panel that is formed on a larger number of planes than a mother substrate, and a mother substrate having a plurality of cell patterns electrically connected to each other corresponding to the liquid crystal panel is attracted by an electrostatic chuck. And a step of cutting out a plurality of liquid crystal panel substrates from the mother substrate. Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0021]
In the above liquid crystal panel, it is preferable that the plurality of cell patterns are electrically connected so as to extend over the electrode pair of the electrostatic chuck. Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0022]
The step of adsorbing the mother substrate by the electrostatic chuck is desirably performed in a liquid crystal dropping step. Thus, in the liquid crystal dropping step performed in a vacuum, the liquid crystal can be reliably sucked by the electrostatic chuck.
[0023]
As the preferred embodiment described above, the mother substrate is a mother substrate from which a plurality of thin film transistor array substrates are cut out, and at least one of a source wiring, a gate wiring, an auxiliary capacitance wiring, and a short ring is formed on the thin film transistor array substrate, It is preferable that the plurality of cell patterns be electrically connected by extending at least one of the source wiring, the gate wiring, the auxiliary capacitance wiring, and the short ring. Thereby, it can be easily attracted by the electrostatic chuck in the manufacturing process.
[0024]
As the preferred embodiment described above, the mother substrate is a mother substrate from which a plurality of color filter substrates are cut out, and a counter electrode is formed on the color filter substrate on the mother substrate, and by connecting the counter electrode, It is desirable that a plurality of cell patterns be electrically connected. Thereby, it can be easily attracted by the electrostatic chuck in the manufacturing process.
[0025]
The above-mentioned liquid crystal panel is desirably used for a liquid crystal display device.
[0026]
The motherboard according to the present invention is a motherboard for a liquid crystal panel from which a plurality of substrates for a liquid crystal panel is cut out, and has a plurality of cell patterns corresponding to the liquid crystal panel and electrically connected to each other. Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0027]
In the above mother substrate, it is preferable that the plurality of cell patterns are electrically connected so as to straddle the electrode pair of the electrostatic chuck. Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0028]
In a preferred embodiment of the present invention, the mother substrate is a mother substrate from which a plurality of thin film transistor array substrates are cut out, and at least one of a source wiring, a gate wiring, an auxiliary capacitance wiring, and a short ring is formed on the thin film transistor array substrate. The plurality of cell patterns are electrically connected by extending at least one of the source wiring, the gate wiring, the auxiliary capacitance wiring, and the short ring. Thereby, it can be easily attracted by the electrostatic chuck in the manufacturing process.
[0029]
In a preferred embodiment of the present invention, the mother substrate is a mother substrate from which a plurality of color filter substrates are cut out, and a counter electrode is formed on the color filter substrate on the mother substrate, wherein the counter electrode is formed. By connecting, the plurality of cell patterns are electrically connected. Thereby, it can be easily attracted by the electrostatic chuck in the manufacturing process.
[0030]
The method for manufacturing a liquid crystal panel according to the present invention is a method for manufacturing a liquid crystal panel in which a plurality of liquid crystal panels are taken from a mother substrate, and a plurality of cells corresponding to the liquid crystal panels on the substrate and electrically connected to each other. The method includes a step of adsorbing a mother substrate having a pattern by an electrostatic chuck, and a step of cutting the mother substrate into a plurality of liquid crystal panel substrates. Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0031]
The method for manufacturing a liquid crystal panel according to the present invention is a method for manufacturing a liquid crystal panel in which multiple liquid crystal panels are formed from a mother substrate, and is electrically connected to a first mother substrate (for example, the upper substrate 4 in the present embodiment). Forming a plurality of cell patterns, and forming a plurality of cell patterns (eg, cell pattern 12 in the present embodiment) on a second mother substrate (eg, lower substrate 3 in the present embodiment). Applying a sealant (for example, the sealant 2 in the present embodiment) around the cell pattern of the second mother substrate; and applying a liquid crystal to a region of the second mother substrate surrounded by the sealant. (For example, a step of dropping the liquid crystal 1 in the present embodiment), a step of adsorbing the first mother substrate by an electrostatic chuck, a step of adhering the first mother substrate and the second mother substrate, Those having a step of bonding the substrates. Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0032]
In a preferred embodiment of the above manufacturing method, the first mother substrate is a mother substrate from which a plurality of thin film transistor array substrates are cut out, and the thin film transistor array substrate on the mother substrate has a source wiring, a gate wiring, an auxiliary capacitor At least one of a wiring and a short ring is formed, and the plurality of cell patterns are electrically connected by extending at least one of the source wiring, the gate wiring, the auxiliary capacitance wiring, and the short ring. It is characterized by the following. Thereby, it is possible to surely adsorb by the electrostatic chuck in the manufacturing process.
[0033]
In a preferred embodiment of the above-described manufacturing method, the mother substrate is a mother substrate from which a plurality of color filter substrates are cut out, and a counter electrode is formed on the color filter substrate on the mother substrate, and the counter electrode is connected. Thus, the plurality of cell patterns are electrically connected. Thus, in the manufacturing process of the liquid crystal panel, the mother substrate can be easily sucked by the electrostatic chuck.
[0034]
In the above-described manufacturing method, it is preferable that the plurality of cell patterns are electrically connected to each other so as to straddle an electrode pair of the electrostatic chuck. Thus, in the manufacturing process of the liquid crystal panel, it is possible to surely hold the liquid crystal panel by the electrostatic chuck.
[0035]
BEST MODE FOR CARRYING OUT THE INVENTION
First Embodiment of the Invention
First Embodiment A liquid crystal panel according to a first embodiment of the present invention will be described with reference to FIGS. 1, 2, and 5. FIG. FIG. 1 is a plan view of a mother glass provided with a liquid crystal panel according to the present embodiment. FIG. 2 is a cross-sectional view showing the configuration when the mother glass is electrostatically chucked. FIG. 5 is a sectional view showing a configuration of a liquid crystal dropping method using an electrostatic chuck. Here, 1 is a liquid crystal, 2 is a sealant, 3 is a lower substrate, 4 is an upper substrate, 5 is a lower platen, 6 is an upper platen, 7 is a chamber, 8 is a horizontal moving mechanism, 9 is a first electrode, Is a second electrode, 11 is an insulator, 12 is a cell pattern, and 13 is a conductive material.
[0036]
As described in the related art, an electrostatic chuck is often used in a liquid crystal dropping step in a manufacturing process of a liquid crystal display device. Hereinafter, a liquid crystal dropping method using substrate suction by an electrostatic chuck will be described.
[0037]
One of the TFT array substrate and the CF substrate is placed on the horizontal lower platen 5 in the chamber 7. This substrate is referred to as a lower substrate 3. Here, the surface on which the cell pattern (not shown here) and the spacer (not shown) are provided faces upward. The cell pattern is provided corresponding to the liquid crystal panel, and a sealant 2 is applied around the cell pattern. A predetermined amount of the liquid crystal 1 is dropped into a region surrounded by the sealant 2 using a dispenser. Next, the upper substrate 4 facing the lower substrate 3 is held on the upper surface plate 6 by an electrostatic chuck. The upper platen 6 is lowered by a motor, and the lower substrate 3 and the upper substrate 4 are bonded. The lower platen 5 is provided with a horizontal (X, Y, θ direction) moving mechanism 8 to bond the substrates with high accuracy. Then, the sealant is cured by irradiation with ultraviolet rays and heating. Thereafter, the bonded substrate is cut and divided for each cell pattern.
[0038]
In the dropping method as described above, there is no step of sealing the liquid crystal injection port, and the liquid crystal can be sealed (dropped and bonded) in the same chamber. Therefore, the manufacturing process is simplified. In addition, since the entire encapsulation process can be performed in a vacuum, the influence of contamination is small.
[0039]
In the present invention, the above-described electrostatic chuck is used for the upper substrate 4 provided with a large number of cell patterns 12 so that a large number of liquid crystal panels are cut out from a pair of mother glasses. The mother glass (upper substrate 4) provided with the plurality of cell patterns 12 and the electrostatic chuck will be described with reference to FIGS.
[0040]
As shown in FIG. 2, in the present embodiment, an electrode pair of the first electrode 9, the second electrode 10, and the insulator 11 is incorporated in the upper surface plate 6. Since the first electrode 9 and the second electrode 10 are provided two each as shown by a dotted line in FIG. 1, two pairs of electrodes (four electrodes) are provided on one upper substrate 4 (mother glass). Will correspond. The first electrode 9 and the second electrode 10 are made of SiC or the like whose electric characteristics are controlled in order to generate a stable attraction force. The insulator 11 is made of alumina or the like, which has high insulating properties and emits little gas in a vacuum. Of course, other materials may be used as long as the electrode is conductive and the insulator is insulating. The upper substrate 4 is provided with a 6 × 7 small cell pattern 12 corresponding to each liquid crystal panel. When the upper substrate 4 is a TFT array substrate, the cell pattern 12 becomes a wiring such as a source wiring, a gate wiring, and an auxiliary capacitance wiring, and an electrode such as a gate electrode, a source electrode, and a pixel electrode. In the case of a CF substrate, the cell pattern 12 is a counter electrode facing the pixel electrode. The present invention differs from the prior art in that the cell patterns 12 are electrically connected by a conductive material 13 and are conductive.
[0041]
FIG. 2 shows a case where the upper substrate 4 provided with the conductive material 13 is attracted by an electrostatic chuck. Since the individual cell patterns 12 are electrically connected by the conductive material 13, a large conductive film is formed. Therefore, a plurality of cell patterns 12 are provided for one electrode. Even if the cell pattern 12 is not formed over the electrode pair, since the whole is a large conductor, positive and negative charges are induced corresponding to each electrode. As a result, the entire cell pattern 12 is polarized and adsorbed over the insulator (glass substrate).
[0042]
When the upper substrate 4 is a CF substrate, an ITO pattern as shown in FIG. 1 may be formed in the step of forming a counter electrode on the conductive material using ITO or the like, and the respective cell patterns 12 may be made conductive. Thus, the conductive material can be formed in the same step as the counter electrode, so that the effects of the present invention can be obtained without increasing the number of steps. When the upper substrate 4 is a TFT array substrate, the source lines, the gate lines, and the like may be extended to make each cell pattern 12 conductive. Further, an auxiliary capacitance line (storage capacitance line) formed below the pixel electrode and accumulating charge in the pixel electrode may be used. Further, in order to prevent destruction due to static electricity, each cell pattern may be connected by using a short ring which is a wiring pattern for short-circuiting the ends of each wiring on the TFT array substrate. By utilizing at least one or two or more of these, the effects of the present invention can be obtained without increasing the number of steps. Of course, the connection may be performed by providing a conductive exclusive pattern for connecting the cell patterns 12.
[0043]
Embodiment 2 of the invention
The liquid crystal panel according to the present invention will be described with reference to FIG. FIG. 3 is a plan view showing a substrate state before the liquid crystal panel is cut out. Since the same reference numerals as those shown in FIG. 1 indicate the same components, the description will be omitted. The configuration of the electrostatic chuck is the same as that shown in FIGS.
[0044]
In the substrate state, the present embodiment is different from the first embodiment in that the cell patterns 12 are electrically connected only by one row of the conductive material 13 in the horizontal direction. Even in such a configuration, since the cell pattern and the conductive material straddle the electrode pair, positive and negative charges are induced and polarized. Therefore, a substrate on which a small cell pattern is formed can be suctioned without lowering the suction force.
[0045]
In addition, the configuration of the cell pattern 12 and the conductive material 13 is not limited to the illustrated form, and the cell pattern 12 and the conductive material 13 may be connected by the conductive material 13 so as to integrate the conductors and to extend over the electrode pair. Similar effects can be obtained. Of course, all the cell patterns need not be connected and integrated, and the cell patterns may be connected in a shape corresponding to the electrode pairs. A similar effect can be obtained by connecting the cell pattern 12 so as to straddle the electrode pair.
[0046]
Other embodiments.
In order to adsorb and hold the substrate using the electrostatic chuck, it is necessary to form at least a pair of electrodes for one conductor (conductive film) over the insulator. For this reason, in a substrate on which a cell in which the size of one conductor is smaller than that of an electrode is formed, it is necessary to use a large number of smaller electrode pairs to attract the substrate by an electrostatic chuck. According to the present invention, even if the cell pattern is smaller than the electrodes, suction by the electrostatic chuck can be performed using a small number of electrode pairs. As described above, the small cell patterns formed on the substrate are connected to each other by a conductive material to form an integrated conductor, so that electrostatic attraction can be performed with a smaller number of electrode pairs than the cell patterns.
[0047]
As described above, by using the present invention, the number of electrode pairs can be reduced in order to integrate the cell pattern. For example, as shown in FIG. 4, a single electrode pair in which one first electrode 9 and one second electrode 10 are incorporated can increase the chucking force of the electrostatic chuck. Thus, the number of components of the electrostatic chuck can be reduced, the configuration of the electrodes can be simplified, and the manufacturing cost can be reduced.
[0048]
The liquid crystal panel according to the present invention may be used not only for the upper substrate 4 of the liquid crystal dropping process but also for adsorbing and fixing the lower substrate 3 with an electrostatic chuck. Thereby, the attraction force of the lower substrate 3 is increased, and the substrates can be bonded with high accuracy. Of course, the upper substrate 4 and the lower substrate 3 may be simultaneously electrostatically chucked. Further, the present invention can be used not only for the liquid crystal dropping step but also for a step of sucking, transporting, and fixing mother glass before being cut out by an electrostatic chuck. In this case, the substrate may be placed not only horizontally but also inclined. This makes it possible to easily perform suction, holding, fixing, transport, and movement of a substrate provided with a large number of cell patterns.
[0049]
The present invention can be used if a plurality of cell patterns are formed irrespective of the size of the liquid crystal panel or mother glass, and are smaller than the electrode pair of the electrostatic chuck. Similarly, the present invention can be used as long as a cell pattern corresponding to two or more liquid crystal panels is formed irrespective of the number of multiple panels. Further, the present invention can be used without being limited to the illustrated cell patterns and the shapes of the electrode pairs. Although the mother substrate is made of glass in the embodiment, other materials such as plastic may be used.
[0050]
The liquid crystal panel manufactured by the above manufacturing process is preferably used for a liquid crystal display device.
[0051]
【The invention's effect】
According to the present invention, it is possible to provide a liquid crystal panel obtained by removing a plurality of sheets from mother glass, which is reliably attracted by an electrostatic chuck, a liquid crystal panel, a method of manufacturing the same, and a liquid crystal display device using the liquid crystal panel. it can.
[Brief description of the drawings]
FIG. 1 is a plan view showing a configuration of a liquid crystal panel in a substrate state according to a first embodiment of the present invention.
FIG. 2 is a cross-sectional view illustrating a configuration of suction of the substrate of the liquid crystal panel by the electrostatic chuck according to the first embodiment of the present invention;
FIG. 3 is a plan view showing a configuration of a liquid crystal panel in a substrate state according to a second embodiment of the present invention;
FIG. 4 is a plan view showing a configuration of a liquid crystal panel in a substrate state according to another embodiment of the present invention.
FIG. 5 is a cross-sectional view illustrating a configuration of a liquid crystal dropping method using an electrostatic chuck.
FIG. 6 is a cross-sectional view showing a configuration of suction of a substrate of a liquid crystal panel by an electrostatic chuck.
FIG. 7 is a plan view showing a configuration of the liquid crystal panel in a substrate state.
FIG. 8 is a cross-sectional view illustrating a configuration of a conventional liquid crystal panel substrate suctioned by an electrostatic chuck.
FIG. 9 is a plan view showing a configuration of a conventional liquid crystal panel in a substrate state.
[Explanation of symbols]
1 LCD
2 Sealant
3 Lower board
4 Upper substrate
5 Lower surface plate
6 Upper surface plate
7 chamber
8. Horizontal movement mechanism
9 First electrode
10 Second electrode
11 Insulator
12 cell pattern
13 conductive material

Claims (16)

A liquid crystal panel that is multi-faceted from the mother board,
A liquid crystal panel manufactured by cutting a plurality of liquid crystal panel substrates from a mother substrate having a plurality of cell patterns electrically connected to each other corresponding to the liquid crystal panel. A liquid crystal panel that is multi-faceted from the mother board,
Corresponding to the liquid crystal panel, a step of sucking a mother substrate having a plurality of cell patterns electrically connected to each other by an electrostatic chuck,
A liquid crystal panel manufactured by a step of cutting out a plurality of liquid crystal panel substrates from the mother substrate. 3. The liquid crystal panel according to claim 2, wherein the plurality of cell patterns are electrically connected so as to straddle an electrode pair of the electrostatic chuck. The liquid crystal panel according to claim 2, wherein the step of attracting the mother substrate by an electrostatic chuck is performed in a step of dropping liquid crystal. The mother substrate is a mother substrate from which a plurality of thin film transistor array substrates are cut out,
At least one of a source wiring, a gate wiring, an auxiliary capacitance wiring, and a short ring are formed on the thin film transistor array substrate,
5. The liquid crystal according to claim 1, wherein the plurality of cell patterns are electrically connected by extending at least one of the source line, the gate line, the auxiliary capacitance line, and the short ring. 6. panel. The mother substrate is a mother substrate from which a plurality of color filter substrates are cut out,
A counter electrode is formed on the color filter substrate on the mother substrate,
The liquid crystal panel according to claim 1, wherein the plurality of cell patterns are electrically connected by connecting the counter electrode. A liquid crystal display device using the liquid crystal panel according to claim 1. A liquid crystal panel mother board from which a plurality of liquid crystal panel boards are cut out,
A motherboard for a liquid crystal panel corresponding to a liquid crystal panel and having a plurality of cell patterns electrically connected to each other. 9. The motherboard for a liquid crystal panel according to claim 8, wherein the plurality of cell patterns are electrically connected so as to straddle an electrode pair of the electrostatic chuck. The mother substrate is a mother substrate from which a plurality of thin film transistor array substrates are cut out,
At least one of a source wiring, a gate wiring, an auxiliary capacitance wiring, and a short ring are formed on the thin film transistor array substrate,
The liquid crystal according to claim 8, wherein the plurality of cell patterns are electrically connected by extending at least one of the source line, the gate line, the auxiliary capacitance line, and the short ring. Mother board for panel. The mother substrate is a mother substrate from which a plurality of color filter substrates are cut out,
A counter electrode is formed on the color filter substrate on the mother substrate,
The liquid crystal panel according to claim 8, wherein the plurality of cell patterns are electrically connected by connecting the counter electrode. A method for manufacturing a liquid crystal panel in which multiple liquid crystal panels are taken from a mother substrate,
Corresponding to the liquid crystal panel on the substrate, a step of attracting a mother substrate having a plurality of cell patterns electrically connected to each other by an electrostatic chuck,
A method for manufacturing a liquid crystal panel, comprising a step of cutting the mother substrate into a plurality of liquid crystal panel substrates. A method for manufacturing a liquid crystal panel in which multiple liquid crystal panels are taken from a mother substrate,
Forming a plurality of cell patterns electrically connected to the first mother substrate;
Forming a plurality of cell patterns on the second mother substrate;
Applying a sealant around the cell pattern of the second mother substrate;
Dropping liquid crystal in a region of the second mother substrate surrounded by the sealant;
Adsorbing the first mother substrate by an electrostatic chuck;
A method for manufacturing a liquid crystal panel, comprising a step of bonding the first mother substrate and the second mother substrate. The first mother substrate is a mother substrate from which a plurality of thin film transistor array substrates are cut out,
On the thin film transistor array substrate on the mother substrate, at least one of a source wiring, a gate wiring, an auxiliary capacitance wiring, and a short ring are formed,
14. The plurality of cell patterns are electrically connected by extending at least one of the source wiring, the gate wiring, the auxiliary capacitance wiring, and the short ring. The manufacturing method of the liquid crystal panel described in the above. The mother substrate is a mother substrate from which a plurality of color filter substrates are cut out,
A counter electrode is formed on the color filter substrate on the mother substrate,
14. The liquid crystal panel according to claim 12, wherein the plurality of cell patterns are electrically connected by connecting the counter electrode. 16. The method according to claim 12, wherein the plurality of cell patterns are electrically connected to each other so as to straddle an electrode pair of the electrostatic chuck.

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