KR100706002B1 - Liquid crystal panel and liquid crystal display device using the same - Google Patents

Abstract

A liquid crystal panel multifaceted from a mother glass, which provides a mother substrate reliably adsorbed by an electrostatic chuck in the state of a substrate before cutting, a liquid crystal panel and a manufacturing method thereof, and a liquid crystal display device using the liquid crystal panel.

The liquid crystal panel which concerns on this invention is a liquid crystal panel multifaceted from a mother glass. This mother substrate (upper substrate 4) is provided with a cell pattern 12 corresponding to the liquid crystal panel. The cell patterns 12 are electrically connected to each other by the conductive material 13 and are integrated so as to span the first electrode 9 and the second electrode 10. Then, a voltage is applied to and adsorbed to the first electrode 9 and the second electrode 10 of the electrostatic chuck.

LCD panel, electrostatic chuck

Description

Liquid crystal panel and liquid crystal display using the same {LIQUID CRYSTAL PANEL AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME}

BRIEF DESCRIPTION OF THE DRAWINGS The top view which shows the structure in the board | substrate state of the liquid crystal panel which concerns on Embodiment 1 of this invention.

2 is a cross-sectional view showing a configuration of adsorption by an electrostatic chuck of a substrate of a liquid crystal panel according to Embodiment 1 of the present invention.

3 is a plan view showing the configuration of the liquid crystal panel according to the second embodiment of the present invention in a substrate state.

4 is a plan view showing a configuration in a substrate state of a liquid crystal panel according to another embodiment of the present invention.

5 is a cross-sectional view showing a configuration of a liquid crystal dropping method using an electrostatic chuck.

6 is a cross-sectional view showing a configuration of adsorption by an electrostatic chuck of a substrate of a liquid crystal panel.

7 is a plan view showing the configuration of a liquid crystal panel in a substrate state.

8 is a cross-sectional view showing a configuration of adsorption by an electrostatic chuck of a substrate of a conventional liquid crystal panel.

9 is a plan view showing a configuration in a substrate state of a conventional liquid crystal panel.

* Explanation of symbols for the main parts of the drawings *

1: liquid crystal 2: sealant

3: lower substrate 4: upper substrate

5: lower surface plate 6: upper surface plate

7: chamber 8: horizontal moving mechanism

9: first electrode 10: second electrode

11: insulator 12: cell pattern

13: conductive material

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mother substrate, a liquid crystal panel, a manufacturing method thereof, and a liquid crystal display device, and more particularly, to a multi-faceted liquid crystal panel in which an electrostatic chuck method is used in a manufacturing process.

The liquid crystal display device includes a liquid crystal panel and a planar light source device formed on the rear surface of the liquid crystal panel. This liquid crystal panel is constituted by a thin film transistor array substrate (TFT array substrate) and a color filter substrate (CF substrate) having a liquid crystal layer interposed therebetween. On this TFT array substrate, a pixel electrode made of a switching element and a transparent conductive film such as ITO is formed. On the CF substrate, an opposing electrode made of a transparent conductive film such as ITO and facing the pixel electrode is formed. Spacers are formed between the TFT array substrate and the CF substrate in order to make the distance between the substrates constant.

Dividing the manufacturing process of this liquid crystal display into large groups, the array process of forming wiring patterns, switching elements (in the case of an active matrix type), etc., on a glass substrate, the color filter process of forming a color filter, etc., on the other substrate, and the orientation It consists of a cell process of encapsulating a liquid crystal between a process, arrangement of spacers and opposing glass substrates, and a module process of attaching a driver IC, attaching a backlight, or the like. In the manufacturing apparatus of the liquid crystal display device, vacuum adsorption is frequently used for three-dimensional conveyance of a substrate or a liquid crystal cell.

As the liquid crystal injection method in the cell process, for example, a vacuum injection method (also referred to as a pressure injection method) shown in JP-A-8-17933 has been used conventionally. The vacuum injection method of this liquid crystal is demonstrated. First, the TFT array substrate and the CF substrate are bonded together with a sealant. Then, a liquid crystal injection hole is formed in a part of the bonded substrate. Then, the liquid crystal plate and the substrate containing the liquid crystal is placed in the chamber and the chamber is evacuated to a used vacuum environment. Subsequently, the liquid crystal inlet is impregnated into the liquid crystal plate. Then, the pressure is reduced and the liquid crystal is injected between the substrates by the pressure difference. In addition, there is also an injection method using a capillary phenomenon by forming a fiber bundle at the liquid crystal inlet.

However, the vacuum injection method requires a step of vacuuming, a step of back pressure, and a step of sealing the liquid crystal inlet, which makes the process complicated and reduces the manufacturing cost. In addition, since the liquid crystal is injected by immersing the substrate in the liquid crystal dish, the expensive liquid crystal material is consumed more than a predetermined injection amount, which is uneconomical. Moreover, in the case of the board | substrate with a large area, it took a long time to inject and for that reason, the production efficiency was bad. Moreover, when sealing a liquid crystal injection opening, air bubbles easily generate | occur | produce, and careful management was required on the production technology.

In order to solve the said problem, the dripping method currently shown, for example in Unexamined-Japanese-Patent No. 2002-040398 has become used recently. A dripping method is demonstrated using FIG. 5 is a cross-sectional view showing the configuration of a dropping method. Here, reference numeral 1 denotes a liquid crystal, 2 denotes a sealant, 3 denotes a lower substrate, 4 denotes an upper substrate, 5 denotes a lower plate, 6 an upper plate, 7 a chamber, and 8 a horizontal moving mechanism. In the chamber 7, a substrate of either the TFT array substrate or the CF substrate is disposed on the horizontal lower surface plate 5. This substrate is referred to as the lower substrate 3. Here, the surface on which the pattern (not shown) and the spacer (not shown) are formed is faced up, and the sealing agent 2 is applied around the surface. The liquid crystal 1 of predetermined amount is dripped in the area | region enclosed with this sealing agent using a dispenser (not shown). In addition, the upper substrate 4 facing the lower substrate 3 is held on the upper surface plate 6 by the electrostatic chuck. The upper surface plate 6 is lowered with a motor or the like to bond the lower substrate 3 and the upper substrate 4 to each other. The lower surface plate 5 is provided with a horizontal (X, Y, θ direction) moving mechanism 8 for bonding the substrate with high precision. And a sealing agent is hardened by irradiation of an ultraviolet-ray, and heating. In addition, the bonded substrate is cut into a predetermined number and divided.

In the dropping method as described above, there is no step of sealing the liquid crystal inlet, and the liquid crystal can be sealed (dropped, bonded) in the same chamber. Thus, the manufacturing process is simplified. Moreover, since all the sealing processes can be performed in a vacuum, there is little influence of a contamination.

Here, since the inside of the chamber 7 is made into a vacuum, vacuum adsorption does not function to hold the upper substrate 4. Therefore, the electrostatic chuck is attached to the upper surface plate 6. The structure of this electrostatic chuck will be described with reference to FIGS. 6 and 7. 6 is a cross-sectional view showing the configuration of an electrostatic chuck, and FIG. 7 is a plan view showing the configuration of an electrostatic chuck. Since the same code | symbol as the code | symbol used in FIG. 5 shows the same structure, description is abbreviate | omitted. Reference numeral 9 is a first electrode, 10 is a second electrode, 11 is an insulator, and 12 is a cell pattern.

As shown in FIG. 6, the first electrode 9 and the second electrode 10 are attached to the upper surface plate 6. An insulator 11 is formed between the first electrode 9 and the second electrode 10. As the first electrode 9 and the second electrode 10, SiC or the like having controlled electrical characteristics is used to generate stable adsorption force. As the insulator 11, alumina having a high insulating property and a small discharge gas in a vacuum is used.

A voltage is applied to these electrode pairs to charge the first electrode 9 positively and the second electrode 10 negatively. An upper substrate 4 having conductive cell patterns 12 formed under these electrode pairs is formed. The cell pattern 12 is opposed to the electrode pair with the insulating upper substrate 4 interposed therebetween. For this reason, the part of the conductive material facing the first electrode 9 is negative and the part facing the second electrode induces a positive charge. Therefore, the electrode pair and the cell pattern 12 become a capacitor of a parallel plate with the insulating upper substrate 4 interposed therebetween, electrostatically adsorbing the upper substrate 4 by the force of Johnson-Lavec generated therebetween, Can be fixed

The first electrode 9 and the second electrode 10 are each formed in two, as indicated by the dotted lines in FIG. 7. In addition, when the upper substrate 4 is a TFT array substrate, this cell pattern 12 is an array pattern such as pixel electrodes, source wirings, gate wirings, and the like. In the case of a CF substrate, it is an counter electrode etc. which oppose a pixel electrode. These cell patterns 12 are divided for each cell. In FIG. 7, two cell patterns 12 are formed in order to cut two liquid crystal panels from a pair of mother glass. Each cell pattern 12 is polarized positively and negatively so that the upper substrate 4 becomes an electrostatic chuck.

By the way, in recent years, mother glass is enlarged in order to improve productivity, and the number of sheets of the liquid crystal panel cut | disconnected from one mother glass is increasing. In addition, even if the substrate size is small, a plurality of liquid crystal panels of small size used for a mobile phone or a PDA are formed to cut a plurality of liquid crystal panels. Thus, when using the said electrostatic chuck with respect to the multi-faceted board | substrate with which many liquid crystal panels are formed, there existed the following problems.

Problems will be described with reference to FIGS. 8 and 9. 8 is a cross-sectional view showing the configuration of the upper substrate 4 and the electrode pairs, and FIG. 9 is a plan view. Since the same code | symbol as the code | symbol used in FIG. 5, FIG. 6, and FIG. 7 shows the same structure, description is abbreviate | omitted. Here, 42 small cell patterns 12 are formed in the upper substrate 4. In addition, since the structure of an electrostatic chuck is the same structure as FIG. 6, FIG. 7, it abbreviate | omits description.

As shown in FIG. 9, when electrostatic chucking the upper substrate 4 on which the plurality of cell patterns 12 are formed, the cell pattern 12 is smaller than the first electrode 9 and the second electrode 10. Thus, the cell pattern 12 does not span both the first electrode 9 and the second electrode 10. These individual cell patterns 12 are independent. Therefore, even if positive and negative voltages are applied to the first electrode 9 and the second electrode 10, the positive and negative charges cannot be simultaneously applied to the individual cell patterns 12, so that the cell pattern 12 There was a problem that it could not be electrostatically adsorbed because it was not polarized. Further, the cell pattern 12 is somewhat smaller than the first electrode 9 and the second electrode 10, and the smaller the area over both electrodes is, the smaller the amount of charge is polarized and the adsorption force (force of Johnson-Label) ) There was a problem of weakening.

As described above, when the cell pattern 12 is smaller than the electrode of the electrostatic chuck, there is a problem that it is not adsorbed or the adsorption force is weakened. If the adsorption force is weakened, the upper substrate 4 may not be adsorbed or the substrate may fall while being adsorbed. Moreover, there also existed a problem that the position of the upper board | substrate 4 shifts in the bonding process.

As a countermeasure, it is conceivable to increase the number of electrodes by making the first electrode 9 and the second electrode 10 small, but increasing the number of electrodes leads to a complicated structure and a large number of expensive components such as SiC or alumina. It is uneconomical to use. In addition, in the case of optimizing the shape of the electrode by cell size (manufacturing number) and adsorbing with a small number of electrodes, it is necessary to replace these electrodes and the insulator 11 when the cell size is changed. Going a lot is not very productive.

As described above, in the liquid crystal panel multifaceted from the conventional mother substrate, there is a problem in that the mother substrate cannot be reliably adsorbed by the electrostatic chuck.

SUMMARY OF THE INVENTION The present invention has been completed to solve such a problem, and includes a mother substrate, a liquid crystal panel and a method of manufacturing the same, and a liquid crystal panel, wherein the liquid crystal panel is multifaceted from the mother substrate. It is an object to provide a liquid crystal display device used.

The liquid crystal panel according to the present invention is a liquid crystal panel multifaceted from a mother substrate (for example, the upper substrate 4 in the present embodiment), and includes a plurality of cell patterns electrically connected to each other corresponding to the liquid crystal panel ( For example, a some liquid crystal panel board | substrate is cut | disconnected and manufactured from the mother substrate which has the cell pattern 12) in embodiment of this invention. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

The liquid crystal panel which concerns on this invention is a liquid crystal panel multifaceted from a mother substrate, Comprising: The process which adsorb | sucks the mother substrate which has a some cell pattern electrically connected with each other corresponding to the said liquid crystal panel with an electrostatic chuck, and the said mother substrate It manufactures by the process of cut | disconnecting a some liquid crystal panel board | substrate from the. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

In the liquid crystal panel, it is preferable that the plurality of cell patterns are electrically connected so as to span the electrode pair of the electrostatic chuck. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

It is preferable that the above-mentioned process of adsorb | sucking the said mother substrate by an electrostatic chuck is performed in the dripping process of a liquid crystal. For this reason, it can reliably adsorb | suck by an electrostatic chuck in the dripping process of the liquid crystal performed in vacuum.

In the above-described preferred embodiment, the mother substrate is a mother substrate in which a plurality of thin film transistor array substrates are cut, and at least one of a source wiring, a gate wiring, a storage capacitor wiring, and a short ring is formed on the thin film transistor array substrate. Preferably, at least one of the source wiring, the gate wiring, the storage capacitor wiring, and the short ring is extended to electrically connect the plurality of cell patterns. Thereby, it can adsorb | suck easily by an electrostatic chuck in a manufacturing process.

In the above-described preferred embodiment, the mother substrate is a mother substrate in which a plurality of color filter substrates are cut, a counter electrode is formed on the color filter substrate on the mother substrate, and the counter electrodes are connected to electrically connect the plurality of cell patterns. It is preferable to connect with. Thereby, it can adsorb | suck easily by an electrostatic chuck in a manufacturing process.

It is preferable to use the above-mentioned liquid crystal panel for a liquid crystal display device.

The mother substrate according to the present invention is a liquid crystal panel mother substrate in which a plurality of liquid crystal panel substrates are cut, and has a plurality of cell patterns electrically connected to each other corresponding to the liquid crystal panel. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

In the mother substrate, it is preferable that the plurality of cell patterns are electrically connected to span the electrode pair of the electrostatic chuck. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

According to a preferred embodiment of the present invention, the mother substrate is a mother substrate in which a plurality of thin film transistor array substrates are cut, and at least one of a source wiring, a gate wiring, a storage capacitor wiring, and a short ring is formed on the thin film transistor array substrate. And extending the at least one of the source wiring, the gate wiring, the storage capacitor wiring, and the short ring to electrically connect the plurality of cell patterns. Thereby, it can adsorb | suck easily by an electrostatic chuck in a manufacturing process.

In a preferred embodiment of the present invention, the mother substrate is a mother substrate in which a plurality of color filter substrates are cut, a counter electrode is formed on the color filter substrate on the mother substrate, and the plurality of cell patterns are connected by connecting the counter electrodes. It is characterized by electrically connecting. Thereby, it can adsorb | suck easily by an electrostatic chuck in a manufacturing process.

The manufacturing method of the liquid crystal panel which concerns on this invention is a manufacturing method of the liquid crystal panel which multiplies a liquid crystal panel from a mother substrate, Comprising: The mother substrate which has a some cell pattern electrically connected with each other corresponding to the said liquid crystal panel on the said board | substrate. And a step of cutting the mother substrate into a plurality of liquid crystal panel substrates. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

The manufacturing method of the liquid crystal panel which concerns on this invention is a manufacturing method of the liquid crystal panel which multiplies a liquid crystal panel from a mother substrate, and is electrically connected to a 1st mother substrate (for example, the upper substrate 4 in this embodiment). A process of forming a plurality of cell patterns and a plurality of cell patterns (for example, the cell pattern 12 in the present embodiment) on the second mother substrate (for example, the lower substrate 3 in the present embodiment). )), A step of applying a sealant (for example, the sealant (2) in the present embodiment) around the cell pattern of the second mother substrate, and the sealing of the second mother substrate A step of dropping a liquid crystal (for example, the liquid crystal 1 in the present embodiment) in an area surrounded by zero, a step of adsorbing the first mother substrate by an electrostatic chuck, the first mother substrate and the second It is equipped with the process of pasting a mother board. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

In a preferred embodiment of the above-described manufacturing method, the first mother substrate is a mother substrate in which a plurality of thin film transistor array substrates are cut, and a source wiring, a gate wiring, a storage capacitor wiring, and a short ring are formed on the thin film transistor array substrate on the mother substrate. And at least one of the source wiring, the gate wiring, the storage capacitor wiring, and the short ring is extended to electrically connect the plurality of cell patterns. Thereby, it can reliably adsorb | suck by an electrostatic chuck in a manufacturing process.

According to a preferred embodiment of the above-described manufacturing method, the mother substrate is a mother substrate in which a plurality of color filter substrates are cut, a counter electrode is formed on the color filter substrate on the mother substrate, and the counter electrodes are connected to each other. The cell pattern is electrically connected. Thereby, the mother substrate can be easily adsorbed by the electrostatic chuck in the manufacturing process of the liquid crystal panel.

In the above-described manufacturing method, it is preferable that the plurality of cell patterns are electrically connected to each other so as to span the electrode pair of the electrostatic chuck. Thereby, it can reliably adsorb | suck by an electrostatic chuck in the manufacturing process of a liquid crystal panel.

Embodiment 1 of the invention

The liquid crystal panel which concerns on Embodiment 1 of this invention is demonstrated using FIG. 1, FIG. 2, FIG. 1 is a plan view of a mother glass on which a liquid crystal panel according to the present embodiment is formed. 2 is a cross-sectional view showing the configuration when the mother glass is electrostatic chucked. 5 is a cross-sectional view showing the configuration of a liquid crystal dropping method using an electrostatic chuck. Where reference numeral 1 denotes a liquid crystal, 2 a sealant, 3 a lower substrate, 4 an upper substrate, 5 a lower surface plate, 6 an upper surface plate, 7 a chamber, 8 a horizontal moving mechanism, 9 a first electrode, 10 Silver is a second electrode, 11 is an insulator, 12 is a cell pattern, and 13 is a conductive material.

As described in the prior art, the electrostatic chuck is often used in the dropping process of the liquid crystal in the manufacturing process of the liquid crystal display device. Hereinafter, the dropping method of the liquid crystal using the substrate adsorption by the electrostatic chuck will be described.

In the chamber 7, a substrate of either the TFT array substrate or the CF substrate is disposed on the horizontal lower surface plate 5. This substrate is referred to as the lower substrate 3. Here, the surface on which the cell pattern (not shown here) and the spacer (not shown) are formed is facing up. This cell pattern is formed corresponding to the liquid crystal panel, and the sealing agent 2 is apply | coated around it. The liquid crystal 1 of predetermined amount is dripped at the area | region enclosed by this sealing agent 2 using a dispenser. And the upper board | substrate 4 which opposes the lower board | substrate 3 is hold | maintained in the upper surface plate 6 by the electrostatic chuck. The upper surface plate 6 is lowered by a motor to join the lower substrate 3 and the upper substrate 4 to each other. The lower surface plate 5 is provided with a horizontal (X, Y, θ direction) moving mechanism 8 for bonding the substrate with high precision. And a sealing agent is hardened by irradiation of an ultraviolet-ray, and heating. Thereafter, the bonded substrates are cut and divided for each cell pattern.

In the dropping method as described above, there is no step of sealing the liquid crystal inlet, and the liquid crystal can be sealed (dropped, bonded) in the same chamber. Thus, the manufacturing process is simplified. And since all the sealing processes can be performed in a vacuum, there is little influence of contamination.

The present invention uses the electrostatic chuck described above for the upper substrate 4 in which a plurality of cell patterns 12 are formed to cut a plurality of liquid crystal panels from a pair of mother glass. The mother glass (upper substrate 4) and the electrostatic chuck in which these many cell patterns 12 were formed are demonstrated using FIG. 1, FIG.

As shown in FIG. 2, the electrode pairs of the first electrode 9, the second electrode 10, and the insulator 11 are attached to the upper surface plate 6. Since the first electrode 9 and the second electrode 10 are each formed in two, as shown by the dotted lines in FIG. 1, two pairs of electrode pairs (four electrodes) are provided on one upper substrate 4 ( Mother glass). As the first electrode 9 and the second electrode 10, SiC or the like having controlled electrical characteristics is used to generate stable adsorption force. As the insulator 11, alumina having a high insulating property and a small discharge gas in a vacuum is used. Of course, as long as an electrode is electroconductive and an insulator has insulation, materials other than that may be sufficient as it. The upper substrate 4 is provided with a cell pattern 12 of 6 × 7 small cells corresponding to each liquid crystal panel. In the case where the upper substrate 4 is a TFT array substrate, the cell pattern 12 is a wiring such as source wiring, a gate wiring, a storage capacitor wiring, or an electrode such as a gate electrode, a source electrode, a pixel electrode, or the like. In the case of a CF substrate, the cell pattern 12 is a counter electrode or the like facing the pixel electrode. In the present invention, the cell pattern 12 differs from the prior art in that the cell pattern 12 is electrically connected and conducted by the conductive material 13.

When the upper board | substrate 4 in which this electroconductive raw material 13 is formed is attracted by the electrostatic chuck, it becomes as shown in FIG. Since the individual cell patterns 12 are electrically connected by this conductive material 13, a large conductive film is formed. Therefore, since a plurality of cell patterns 12 are formed for one electrode, and the whole is a large conductor even if the cell pattern 12 that spans the electrode pair is not formed, positive and negative correspondences are made for each electrode. To induce charge. As a result, the entire cell pattern 12 is polarized to be adsorbed even past the insulator (glass substrate).

When the upper substrate 4 is a CF substrate, an ITO pattern as shown in FIG. 1 may be formed in the conductive material to form the counter electrode with ITO or the like, and the respective cell patterns 12 may be conducted. For this reason, since a conductive material can be formed in the same process as the counter electrode, the effect of the present invention can be obtained without increasing the process. When the upper substrate 4 is a TFT array substrate, each cell pattern 12 can be conducted by extending source wiring, gate wiring, and the like. It is also possible to use a storage capacitor wiring (accumulation capacitor wiring) formed under the pixel electrode to accumulate charge in the pixel electrode. Furthermore, in order to prevent the breakdown by static electricity, each cell pattern may be connected using a short ring, which is a wiring pattern for shorting the ends of each wiring on the TFT array substrate. By using at least one or two or more of these, the effect of the present invention can be obtained without increasing the process. Of course, a conductive dedicated pattern for connecting the cell patterns 12 may be formed and connected.

Embodiment 2 of the invention

The liquid crystal panel which concerns on this invention is demonstrated using FIG. 3 is a plan view showing a substrate state before cutting the liquid crystal panel. Since the same code | symbol as the code | symbol used in FIG. 1 shows the same structure, description is abbreviate | omitted. In addition, since the structure of an electrostatic chuck is also the same as FIG. 2, FIG. 5, description is abbreviate | omitted.

In the substrate state, in the present embodiment, the cell pattern 12 differs from the first embodiment in that only the horizontal lines are electrically connected by the conductive material 13. Even in such a configuration, since the cell pattern and the conductive material span the electrode pairs, positive and negative charges are induced and polarized. Therefore, the board | substrate which formed the small cell pattern can be adsorb | sucked without a fall of adsorption force.

In addition, the structure of the cell pattern 12 and the electroconductive material 13 is not limited to the form of illustration, Comprising: The cell pattern 12 is connected by the electroconductive material 13, the conductor is integrated, and it spreads across an electrode pair. If so, the same effect can be achieved. Of course, it is not necessary to connect and integrate all the cell patterns, and it is also possible to connect a cell pattern in the shape according to the electrode pair. Similar effects can be obtained by connecting the cell patterns 12 so as to span the electrode pairs.

Other embodiment

In order to adsorb and hold the substrate using the electrostatic chuck as described above, at least one pair of electrodes with respect to one conductor (conductive film) must be formed even beyond the insulator. For this reason, in the board | substrate which formed the cell whose size of one conductor is smaller than an electrode, it is necessary to make a board | substrate adsorb | suck by an electrostatic chuck using many smaller electrode pairs. In the present invention, even if the cell pattern is smaller than the electrode, it is possible to adsorb by the electrostatic chuck using fewer electrode pairs. As described above, electroconductive adsorption by an electrode pair smaller than the cell pattern is made possible by forming an integrated conductor by connecting a small cell pattern formed on the substrate with a conductive material.

As described above, when the present invention is used, the number of electrode pairs can be reduced because the cell pattern is integrated. For example, as shown in FIG. 4, even the pair of electrode pairs in which the first electrode 9 and the second electrode 10 are mounted one by one can increase the adsorption force of the electrostatic chuck. Thereby, the number of parts of an electrostatic chuck can be reduced and the structure of an electrode can be simplified, and manufacturing cost can be reduced.

The liquid crystal panel which concerns on this invention can not only use for the upper board | substrate 4 of a liquid crystal dropping process, but can also adsorb | suck and fix the lower board | substrate 3 with an electrostatic chuck. Thereby, the adsorption force of the lower board | substrate 3 improves and it becomes possible to join a board | substrate with high precision. Of course, the upper substrate 4 and the lower substrate 3 may be electrostatically chucked at the same time. In addition, it is possible to use not only the dropping step of the liquid crystal but also the step of absorbing, conveying and fixing the mother glass before cutting with the electrostatic chuck. In this case, the substrate may be inclined as well as the horizontal. Thereby, the adsorption | suction, holding | maintenance, fixing, conveyance, and movement of the board | substrate which provided the many cell pattern can be made easy.

The present invention can be used when a plurality of cell patterns are formed regardless of the size of a liquid crystal panel or mother glass, and smaller than the electrode pair of the electrostatic chuck. Similarly, this invention can be used if the cell pattern corresponding to two or more liquid crystal panels is formed irrespective of the number of sheets multifaceted. In addition, this invention can be used without being limited to the shape of the cell pattern and electrode pair which were shown. In addition, although the mother substrate was made into glass in embodiment, it may be another material, such as plastics.

It is preferable to use the liquid crystal panel manufactured by the manufacturing process as mentioned above for a liquid crystal display device.

According to the present invention, a liquid crystal panel multifaceted from a mother glass can be provided with a mother substrate reliably adsorbed by an electrostatic chuck, a liquid crystal panel and a manufacturing method thereof, and a liquid crystal display device using the liquid crystal panel.

Claims (16)

As a manufacturing method of a liquid crystal panel multifaceted from a mother substrate, And a plurality of liquid crystal panel substrates are cut and manufactured from a mother substrate having a plurality of cell patterns electrically connected to each other corresponding to the liquid crystal panel. As a manufacturing method of a liquid crystal panel multifaceted from a mother substrate, Adsorbing a mother substrate having a plurality of cell patterns electrically connected to each other corresponding to the liquid crystal panel by an electrostatic chuck, and It is produced by a process of cutting a plurality of liquid crystal panel substrates from the mother substrate. The method of claim 2, And a plurality of cell patterns are electrically connected so as to span the electrode pairs of the electrostatic chuck. The method of claim 2 or 3, The step of adsorbing the mother substrate by the electrostatic chuck, the manufacturing method of the liquid crystal panel, characterized in that carried out in the dropping step of the liquid crystal. The method according to any one of claims 1 to 3, The mother substrate is a mother substrate in which a plurality of thin film transistor array substrates are cut, At least one of a source wiring, a gate wiring, a storage capacitor wiring, and a short ring is formed on the thin film transistor array substrate, And at least one of the source wiring, the gate wiring, the storage capacitor wiring, and the short ring to electrically connect the plurality of cell patterns. The method according to any one of claims 1 to 3, The mother substrate is a mother substrate in which a plurality of color filter substrates are cut, Opposite electrodes are formed on the color filter substrate on the mother substrate, The counter electrode is connected to electrically connect the plurality of cell patterns. delete A liquid crystal panel mother substrate in which a plurality of liquid crystal panel substrates are cut, A mother substrate for liquid crystal panels comprising a plurality of cell patterns electrically connected to each other corresponding to the liquid crystal panels. The method of claim 8, A liquid crystal panel mother substrate, wherein the plurality of cell patterns are electrically connected so as to span the electrode pairs of the electrostatic chuck. The method according to claim 8 or 9, The mother substrate is a mother substrate in which a plurality of thin film transistor array substrates are cut, At least one of a source wiring, a gate wiring, a storage capacitor wiring, and a short ring is formed on the thin film transistor array substrate, And at least one of the source wiring, the gate wiring, the storage capacitor wiring, and the short ring to electrically connect the plurality of cell patterns. The method according to claim 8 or 9, The mother substrate is a mother substrate in which a plurality of color filter substrates are cut, Opposite electrodes are formed on the color filter substrate on the mother substrate, A mother substrate for a liquid crystal panel, wherein the counter electrode is connected to electrically connect the plurality of cell patterns. delete As a manufacturing method of a liquid crystal panel which multiplies a liquid crystal panel from a mother substrate, Forming a plurality of cell patterns electrically connected to the first mother substrate, Forming a plurality of cell patterns on the second mother substrate, Applying a sealant around the cell pattern of the second mother substrate; Dropping liquid crystal in a region surrounded by the sealing agent of the second mother substrate, Adsorbing the first mother substrate by an electrostatic chuck, and A method of manufacturing a liquid crystal panel comprising the step of bonding the first mother substrate and the second mother substrate. The method of claim 13, The first mother substrate is a mother substrate in which a plurality of thin film transistor array substrates are cut. At least one of a source wiring, a gate wiring, a storage capacitor wiring, and a short ring is formed on the thin film transistor array substrate on the mother substrate. And at least one of the source wiring, the gate wiring, the storage capacitor wiring, and the short ring to electrically connect the plurality of cell patterns. The method of claim 13, The mother substrate is a mother substrate in which a plurality of color filter substrates are cut, An opposite electrode is formed on the color filter substrate on the mother substrate; The counter electrode is connected to electrically connect the plurality of cell patterns. The method of claim 13, And the plurality of cell patterns are electrically connected to each other so as to span the electrode pairs of the electrostatic chuck.

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