JP2000338508A - Method and device for production of liquid crystal panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To significantly shorten the production time by omitting the production processes and changing the order of the production processes in the production of a large-size liquid crystal display device, and to obtain a large-size liquid crystal display panel showing little variance in the quality and no irregular display state. SOLUTION: In the production process of a liquid crystal display device consisting of a pair of substrates at least one of which is transparent and a liquid crystal compsn. layer interposed between the substrates, after a liquid crystal is injected into a liquid crystal cell 8, the excess liquid crystal depositing on the injection port is removed by vacuum cleaning or N2 blow cleaning while the substrates are kept in the state as the liquid crystal is injected, namely, not inverted upside down. Then a tray preliminarily prepared by applying a sealing agent 34 on a quartz substrate 31 is pressed to the injection port and irradiated with UV rays at a time to harden the sealing agent. Thus, the period from completion of the injection of the liquid crystal into the all liquid crystal cells to the sealing of the cells is controlled to be the same.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a large-screen liquid crystal display.

[0002]

2. Description of the Related Art In a conventional liquid crystal cell process of a large-screen liquid crystal display device, as shown in FIG. 1, after liquid crystal injection is completed, a pressure cell gap is adjusted, and then an injection port sealing process is performed. When the injection port sealing process is performed after the injection is completed without adjusting the pressure cell gap, if the injection port sealing is not completed within a few minutes after the completion of the liquid crystal injection, as shown in FIG. The longer the cell length, the more the cell gap changes. Problems such as in-plane cell gap non-uniformity, lot-to-lot cell gap non-uniformity, lot-to-lot cell gap non-uniformity, and non-uniformity due to cell gap non-uniformity in the polarizing plate bonding process also occur. As the size of the liquid crystal display panel becomes larger, the change in the cell gap due to the leaving time shown in FIG. 33 becomes larger. Therefore, any panel maker has introduced a pressurized cell gap adjustment process.

[0003] After sealing the injection port, in the conventional liquid crystal cell process, the panel is washed and then subjected to isotropic treatment to reorient the liquid crystal molecules. At the time of injecting the liquid crystal, the various liquid crystals attached to the glass substrate were washed and removed, followed by high-temperature heat treatment and rapid cooling to eliminate alignment defects. In a conventional injection port sealing step, a UV curing sealing material is applied to the injection port by a dispenser with the injection port facing upward. Since the inlet is not cleaned, a lot of liquid crystal will fall to the area of the effective screen. If the isotropic treatment is performed in this state, the liquid crystal deteriorates due to the high-temperature heat treatment, and the liquid crystal becomes highly viscous, so that it becomes difficult to expose the liquid crystal during panel cleaning. Therefore, in the conventional process, the liquid crystal panel was washed before performing the isotropic treatment.

As shown in FIG. 7, in the case of a conventional liquid crystal injecting machine, in the case of an in-line structure, one heating chamber is provided before injection, and the purpose is to discharge the adsorbed gas in the liquid crystal cell. As shown in FIG. 14, the structure of the heating chamber has a heater inside the chamber, a soaking plate and a stirring fan, and a cooling pipe is mounted on the outer wall of the chamber. There was a large difference in the temperature of the chamber body.

[0005]

As shown in FIG. 33, in the conventional liquid crystal cell process, when the liquid crystal panel is large, the change in the cell gap due to the variation in the time from the completion of the injection to the sealing of the injection port is large. As shown in FIG. 1, after the completion of the injection, adjustment of the pressurized cell gap was always necessary.
When the cell gap adjustment process is introduced, the time from the completion of the injection to the sealing of the injection port becomes longer, and the liquid crystal remaining at the injection port becomes
Foreign matter and contaminants in the air adhere, and unevenness occurs due to contamination at the inlet. The larger the liquid crystal panel, the more frequently the glass edge was damaged during handling, causing a decrease in yield. A few hours are required for the entire gap adjustment process, and the process time is long, so clean stockers and cassettes for storage, robots for moving from cassette to cassette, trolleys for moving from the liquid crystal injection device to the gap adjustment device, etc. Equipment and a clean room area were required.

As shown in FIGS. 3 and 4, in the conventional liquid crystal cell process, after the liquid crystal is injected, the injection port is sealed and then the panel is washed. In the conventional injection port sealing, as shown in FIG. 28, the liquid crystal cell is turned upside down after liquid crystal injection, and then the injection port is sealed using a dispenser. Since the inlet had to be at the top, the liquid crystal attached near the inlet was down and contaminated the glass surface of the liquid crystal panel.
In the case of a large-sized liquid crystal panel, the amount of liquid crystal adhering to a large amount is also large, so that the area of contamination is large. Therefore, the liquid crystal adhering immediately after sealing the injection port must be cleaned and removed. During this panel cleaning, the cleaning liquid permeated into the gaps of the panel, and the temperature of the liquid crystal panel was raised during the isotropic treatment, so that the components of the cleaning liquid were easily diffused and infiltrated from the seal portion, causing unevenness around the seal of the liquid crystal panel. . In particular, when a cyano-based liquid crystal composition is used, this defect is likely to occur frequently.

As shown in FIG. 7, the conventional in-line type liquid crystal injecting apparatus has only one chamber for heating and degassing, so that heating and degassing are not sufficiently performed, resulting in a defect that bubbles remain in the liquid crystal panel. In addition, the liquid crystal cell and the liquid crystal tray are not heated at the time of liquid crystal injection, and the injection speed is very slow due to the atmospheric pressure difference injection at room temperature, so large liquid crystal panels and vertical alignment mode liquid crystal panels that are difficult to inject are injected for mass production. A large number of devices were required. For this reason, the price of the entire apparatus becomes extremely high, and the area of the clean room is required to be large, which has been a problem in terms of running costs.

In a conventional heating chamber, a heater is installed inside the chamber as shown in FIG. 14, and the internal temperature is made uniform by a soaking plate and a fan. The chamber body was cooled to room temperature using cooling water. For this reason, a phenomenon occurs in which the cleaning liquid soaked in the gap of the cassette jig evaporates in the heating chamber and cools and condenses on the inner surface of the chamber. A problem arose.

A conventional heating and pressurizing type liquid crystal injection apparatus is also shown in FIG.
A heater was installed inside the chamber in the same way as in the above, and the internal temperature was made uniform by a soaking plate and a fan. The chamber body was cooled to room temperature using cooling water. For this reason, there has been a problem that a component that is easily volatilized out of the liquid crystal composition evaporates in the chamber, and is thermally decomposed by the heater being heated, thereby contaminating the inside of the chamber. The decomposed low-molecular substances were adsorbed on the liquid crystal, causing a change in physical properties such as the resistance value of the liquid crystal.

SUMMARY OF THE INVENTION The present invention provides means for solving these problems, and has an object to increase the investment efficiency and production efficiency of a large-sized liquid crystal panel manufacturing plant, to manufacture large-sized liquid crystal display panels at low cost and with good yield. It is to provide a way to do it.

[0011]

Means for Solving the Problems In order to solve the above problems and achieve the above object, the present invention uses the following means.

In a manufacturing process of a liquid crystal display device comprising a pair of substrates, at least one of which is transparent, and a liquid crystal composition layer sandwiched between the substrates, [Means 1] a plurality of in-line type liquid crystal injection machines are arranged; In order to perform the same process at the same time, the inline liquid crystal filling machine is filled with a plurality of cassettes, and the same number of or more filling ports as the number of cassettes are installed, and liquid crystal filling is installed. The liquid crystal cells housed in a plurality of cassettes of the same lot, which have been completed, are simultaneously sealed.

[Means 2] An injection port sealing device is continuously arranged in an in-line configuration in an in-line type liquid crystal injecting machine to simultaneously seal liquid crystal cells housed in a plurality of cassettes of the same lot in which liquid crystal has been injected. .

[Means 3] In the method according to the means 1 or 2, after the liquid crystal injection is completed, the liquid crystal cells in the cassette are not turned upside down, and the posture in the cassette at the time when the injection is completed is maintained. The liquid crystal cells housed in a plurality of cassettes of the same lot are simultaneously sealed with the inlet.

[Means 4] With respect to the in-line type liquid crystal injecting apparatus described in Means 1 or 2, after evacuating the inside of the liquid crystal cell, three chambers for injecting liquid crystal into the liquid crystal cell are arranged in-line. Two chambers were provided with the function of heating and pressurizing.

[Means 5] In the step of sealing the liquid crystal injection port described in the means 1 or 2, the time from separating the liquid crystal cell and the liquid crystal tray to sealing the injection port of the liquid crystal cell is within 4 minutes. did.

[Means 6] In the sealing method described in the means 3, the liquid crystal tray is separated from the liquid crystal panel after a difference between the temperature of the heated liquid crystal panel and the room temperature becomes 20 degrees or less after the completion of liquid crystal injection. . Immediately after the separation, the various liquid crystals attached to the injection port are removed by a vacuum method. Immediately after removal, a manufacturing method that simultaneously fills the liquid crystal cells contained in multiple cassettes of the same lot with the inlet.

[Means 7] After the liquid crystal injection port sealing step described in the means 3 and the means 6 is completed, the liquid crystal panel is cleaned after performing an isotropic treatment.

[Means 8] A high voltage of at least three times the liquid crystal driving voltage is applied between the pixel electrode of the active matrix substrate after the isotropic treatment and the common electrode formed on the other substrate facing the active matrix substrate. Is applied.

[Means 9] After sealing the liquid crystal injection port, at least three times the liquid crystal driving voltage is applied between the pixel electrode of the active matrix substrate and the common electrode formed on the other substrate facing the active matrix substrate. By applying a high voltage, the isotropic treatment was omitted.

[Means 10] With respect to the liquid crystal injecting device used in the liquid crystal injecting step described in the means 1 or 2, the liquid crystal cell heating chamber has a heating mechanism provided outside the chamber to heat the entire chamber body.

[Means 11] In the liquid crystal injection device described in the means 10, the whole chamber having a heating mechanism outside the chamber is covered with a heat insulating cover.

[Means 12] In the liquid crystal injection device described in the means 10, high-pressure nitrogen gas having the same temperature as the inside of the chamber is jetted into the inside of the chamber to agitate the nitrogen gas inside the chamber.

[Means 13] When injecting liquid crystal into the liquid crystal cell, a substrate having good heat conductivity is interposed between the liquid crystal cells, and heat is supplied to the liquid crystal cell from a heat source on the upper side through the substrate having good heat conductivity. The liquid crystal cell is heated.

[Means 14] In the liquid crystal cell heating apparatus according to the means 13, a magnetic material is used as an upper heat source, and a high frequency magnetic field is applied to the magnetic material from outside the chamber to cause the magnetic material to generate heat.

[Means 15] In the liquid crystal cell heating apparatus according to the means 13, a resistance heating element is used as an upper heat source, and the resistance heating element is energized from the outside of the chamber to generate heat. The liquid crystal cell is heated through a hot plate.

[Means 16] In the liquid crystal cell heating apparatus according to the means 13, the light emitting element and the light receiving element for determining whether or not the liquid crystal has been completely injected into the liquid crystal cell are provided with a transfer of heat from an upper heating element. I assembled it on a hot plate.

[Means 17] In the liquid crystal cell heating device described in the means 13 and 16, a function of transmitting information on whether liquid crystal has been completely injected into the liquid crystal cell to the outside of the chamber by a radio signal or an optical signal. Was held.

[Means 18] In the filling step of the liquid crystal cell described in the means 1 or 2, a UV curable sealing material is applied in advance to the pallet, and the liquid crystal cell adhered to the liquid crystal cell after the liquid crystal injection is completed. After removing the liquid crystal, a UV-curing sealing material is applied to the injection ports of all the liquid crystal cells at once. After the sealing material completely covers the injection port, the UV curing sealing material is irradiated with UV light to cure the sealing material. After the encapsulant has fully cured, the pallet is removed from the liquid crystal cell.

[Means 19] In the manufacturing method according to the means 18, a quartz glass plate is used as a pallet plate, and a metal film such as a chromium film or a molybdenum film or a metal silicide film is used as a UV light shielding film. The portion corresponding to the entrance had no UV light blocking film, and the surface of the pallet plate on which the UV curing sealing material was applied was covered with a Teflon-based peeling film.

[Means 20] With respect to the transfer pallet plate described in Means 19, the portion of the pallet plate corresponding to the injection port portion of the liquid crystal cell has no UV light shielding film and is concavely concave. And a Teflon-based peeling film.

[Means 21] In the filling step of the liquid crystal cell according to the means 1 or 2, a UV curing encapsulant is applied to the pallet in advance, and the liquid adhered to the liquid crystal cell into which the liquid crystal has been injected. After removing the liquid crystal, the UV curable sealing material is applied to all the liquid crystal cell inlets at once, and the UV curable sealant is transferred from the pallet to the liquid crystal cell inlets. After removing the transfer pallet, only the UV-curing sealing material transferred to the injection port of the liquid crystal cell is irradiated with UV light using a photomask to cure the sealing material.

[Means 22] In the filling step of the filling means described in Means 21, the region corresponding to the filling portion of the liquid crystal cell of the transfer pallet is concavely concave, and a Teflon-based silicon film is formed on the surface. A coated transfer plate is used.

[Means 23] In the injection port sealing step described in the means 18 or 21, when irradiating the UV curing sealing material with UV light, a cylindrical lens is arranged corresponding to the liquid crystal cell, and The UV light is focused on the applied UV curing sealing material.

[Means 24] In the liquid crystal cell heating apparatus according to the means 13, a self-excited vibration type thin tube heat pipe is used as a heat transfer plate sandwiched between the liquid crystal cells.

[Means 25] In the liquid crystal cell heating device according to the means 13, 14, 15, only the liquid crystal cell other than the liquid crystal cell inlet is heated, and the liquid crystal tray and the liquid crystal on the tray are not heated. Liquid crystal is injected under pressure.

[0037]

By using the means 1, 2, 3, and 5, the time from the completion of liquid crystal injection to the sealing of the injection port can be shortened, and a plurality of liquid crystal cells of the same lot can be processed and managed within the same time. A liquid crystal panel with a uniform gap can be produced.
If the time from the completion of the liquid crystal injection to the sealing of the injection port can be controlled within 4 minutes, the cells will not be in a swollen state, so that the movement of the spacer beads in the polarizing plate bonding process and the cell gap unevenness do not occur. Since the pressure sealing step is not required, the manufacturing time can be shortened by 2 hours or more, and the productivity of the cell step is greatly improved. The problem of inlet contamination caused by being left for a long time in the pressure sealing process is also greatly reduced. Since there is no defect due to gap unevenness due to foreign matter generated in the case of pressure sealing or breakage of glass due to handling error, the yield is greatly improved. Furthermore, since a pressure sealing device, a storage, a transfer robot, a transfer cassette, and a cart are not required, capital investment costs can be reduced, and the area of a clean room can be reduced, so that running costs can be significantly reduced.

By using the means 4, the tact time for injecting a liquid crystal in a large-sized liquid crystal panel or in a vertical alignment mode which is difficult to inject can be reduced by about 1 to 6 times as compared with an in-line liquid crystal injecting apparatus having one heating and pressure liquid crystal injecting chamber. . In the case of a mass production factory that requires eight in-line liquid crystal injection devices with one heating and pressure injection chamber, an equivalent production volume can be realized with five in-line liquid crystal injection devices with two heating and pressure injection chambers. Significant improvement of production efficiency, reduction of capital investment cost, and reduction of running cost due to reduction of clean room area can be realized.

By using the means 3, 6, 7, and 8, any liquid crystal adhering to the liquid crystal cell at the time of injection does not fall on the effective screen of the liquid crystal panel. Therefore, the isotropic treatment is performed before the panel is washed. It becomes possible. By performing high-temperature heat treatment in a state in which the cleaning liquid does not penetrate into the gap between the glass substrates, thermal diffusion and contamination of the cleaning liquid from the periphery of the seal can be drastically reduced, so that the occurrence of unevenness around the seal can be reduced. When using a cyano-based liquid crystal that is easily hydrolyzed by moisture, it is particularly important to perform the isotropic treatment before cleaning the panel in order to ensure long-term reliability. In the case of a high-definition liquid crystal panel, if a structure is adopted in which the common electrode crosses the center of the pixel electrode, reverse twist disclination frequently occurs. In the method of performing isotropic treatment after performing panel cleaning, if the isotropic treatment is performed multiple times, a large amount of moisture permeates the main seal part and diffuses into the effective pixel area, so the selection of liquid crystal and alignment film is not done well The problem of unevenness and afterimages frequently occurs.
In the step of performing panel cleaning after performing the isotropic processing first, if the reverse twist disclination frequently occurs, the cleaning liquid is not soaked in the gap of the glass substrate, so the isotropic processing is performed a plurality of times. Also, unevenness around the seal hardly occurs. When it is desired to limit the isotropic treatment to only one time, when the reverse twist disclination occurs, the orientation defect can be completely solved by using the means 8.

The use of the means 9 makes it possible to omit the isotropic processing. Since a high-temperature heat treatment step is not required, the manufacturing process is shortened and the production efficiency is improved. Since it is possible to reduce capital investment costs and the area of the clean room, running costs can also be reduced. Since the high-temperature heat treatment is eliminated, the diffusion and penetration of moisture from the main seal portion is also reduced. Therefore, even when a cyano-based liquid crystal is used, the occurrence of unevenness around the seal can be reduced.

By using the means 10, 11, and 12, it is possible to prevent the cleaning liquid permeated into the gap of the cassette jig from condensing on the inner wall of the chamber, which is generated in the conventional heating chamber for deaeration. By baking the chamber body, various kinds of adsorbed gas can be degassed, so that the contamination inside the chamber can be greatly improved. Thereby, the occurrence of injection port unevenness can be significantly reduced. Further, the problem that the volatile liquid crystal component is thermally decomposed by the heater inside the chamber, which is generated in the conventional heating and pressurizing injection chamber, and that the inside of the chamber is contaminated is drastically reduced.

By using the means 13, 14, 15, 24, and 25, the liquid crystal cell can be accurately heated in a short time even in a vacuum-chambered chamber, so that the liquid crystal injection time can be greatly reduced. Further, since the liquid crystal injection speed can be increased without warming the liquid crystal in the liquid crystal tray, a change in the component of the liquid crystal composition hardly occurs. The temperature of the liquid crystal tray can be maintained at the room temperature level so as to prevent the volatile components of the liquid crystal from evaporating into the chamber. This can reduce the contamination of the inner wall of the chamber due to the volatile components present in the liquid crystal composition.

The use of the means 16 and 17 makes it possible to measure in real time the variation of the liquid crystal injection speed generated in a plurality of liquid crystal cells, thereby preventing the occurrence of defective panels due to incomplete injection. Since the time from the completion of the injection to the sealing of the injection port can be accurately controlled, the cell gap variation between lots can be significantly reduced, and the yield can be improved.

Means 18, 19, 20, 21, 22, 23
By using a liquid crystal cell, it is possible to remove a large amount of liquid crystal while keeping the liquid crystal cells of the same lot with the injection port facing down, so that the adhesion of liquid crystal to the surface of the liquid crystal panel can be minimized. Since the liquid crystal cell injection port does not need to be turned upside down, the time from the completion of liquid crystal injection to the sealing of the injection port can be minimized, and the liquid crystal cells of the same lot can be sealed at the same time. Uniformity can be improved.

[0045]

Embodiment 1 FIGS. 25 and 31 are plan views of a factory layout according to a first embodiment of the present invention. FIG. 4 is an apparatus layout diagram relating to a liquid crystal injection step, an injection port sealing step, an isotropic processing step, a panel cleaning step, and a panel inspection step. Arrange multiple in-line liquid crystal injection devices,
In order to perform the same process at the same time, the inline liquid crystal filling machine is filled with a plurality of cassettes, and the same number of or more filling ports as the number of cassettes are installed, and liquid crystal filling is installed. The liquid crystal cells housed in a plurality of cassettes of the same lot, which have been completed, can be simultaneously sealed. In FIG. 25, six in-line type liquid crystal injecting machines are installed, and a function to simultaneously inject three cassettes in one lot is provided. After the liquid crystal is completely injected into the cell, the three cassettes are separated into three cassette transport systems and distributed to three of the four inlet sealing devices. Here, after removing various liquid crystals adhering to the injection port, the liquid crystal cells housed in the three cassettes are simultaneously subjected to injection port sealing processing. After the sealing material is sufficiently cured, an isotropic treatment is performed. Then, it moves to the panel cleaning liquid. After the washed liquid crystal panel is subjected to an appearance inspection, a simple driving inspection is performed, and the process proceeds to the next step.

In FIG. 31, six in-line type liquid crystal injecting machines are installed, and a function to inject three cassettes in one lot at the same time is provided. After the liquid crystal is completely injected, the three cassettes are separated into three cassette transport systems.
Dispensed into a single inlet sealing device. Here, the liquid crystal cells housed in the three cassettes after the removal of various liquid crystals attached to the injection port are simultaneously subjected to the processing of sealing the injection port. After the sealing material has hardened sufficiently, perform panel cleaning,
Next, an isotropic treatment is performed. Next, after the appearance inspection, a simple driving inspection is performed, and the process proceeds to the next step. FIG.
5 and FIG. 31, in the case of simultaneously processing four cassettes in one lot, four cassette transport systems are required, and four or more injection port sealing devices are also required.

Embodiment 2 FIG. 37 is a plan view of a factory layout according to a second embodiment of the present invention. FIG. 4 is an apparatus layout diagram relating to a liquid crystal injection step, an injection port sealing step, an isotropic processing step, a panel cleaning step, and a panel inspection step. An injection port sealing device is continuously arranged in the in-line type liquid crystal injection device in an in-line configuration so that liquid crystal cells housed in a plurality of cassettes of the same lot after the completion of liquid crystal injection can be simultaneously sealed. Six inline injection devices and six injection port sealing devices are installed. This apparatus configuration can minimize the time from the completion of the injection to the sealing of the injection port, and also facilitates time management. If the injection port is further sealed, it is not necessary to simultaneously process the same lot in the subsequent steps. Therefore, a plurality of high-speed cassette transport systems as in the first embodiment are not required. As the size of the liquid crystal panel becomes larger, the amount of change in the cell gap with respect to the change in time from the completion of the injection to the sealing becomes larger.
It is necessary to control the time from the completion of the injection to the sealing within 4 minutes. In the isotropic treatment of a large liquid crystal panel of 18 inches or more, uniform heating and rapid cooling becomes difficult in a batch system. As shown in FIG. 36, an apparatus dedicated to isotropic processing is required. After performing the isotropic treatment, the panel is cleaned, and then the appearance inspection and the simple driving inspection are performed, and the process proceeds to the next step.

[Embodiment 3] FIGS. 27, 35 and 36 show
A third embodiment of the present invention is an inline liquid crystal injection / sealing / isotropic processing apparatus, an inline liquid crystal injection / sealing apparatus, and an inline configuration isotropic processing apparatus. In the case of a large liquid crystal panel of 18 inches or more, as shown in FIG. 28, when the liquid crystal is injected, the injection port is at the bottom, and when the injection port is sealed, the injection is completed by performing an upside down operation such that the injection port is at the top. It takes too much time to seal. If a long time has elapsed since the completion of the injection, the liquid crystal cell swells, causing a defect when the polarizing plate is attached. In the injection port sealing device of FIGS. 35 and 27 of the present invention, the injection port has the same posture as that when the liquid crystal is injected. Most of the liquid crystal adhering near the inlet is simultaneously removed by a vacuum-type removing device as shown in FIG. Inlet sealing is also performed with the inlet facing downward. FIG. 36 is a conceptual diagram of a single-wafer apparatus that performs isotropic processing of a large liquid crystal panel of 18 inches or more one by one. The directions of the hot and cold winds are blown out in opposite directions so that the winds do not mix. Hot air is blown on both upper and lower surfaces of the liquid crystal panel in a strip shape, and the temperature of the hot air is adjusted so that the upper surface and the lower surface have the same temperature. The liquid crystal panel of the liquid crystal panel is moved from the liquid state to a cool air region, and the cool air is blown on both upper and lower surfaces of the liquid crystal panel in a band shape to rapidly cool the liquid crystal panel. As the size of the liquid crystal panel increases, the cooling rate of the batch type tends to cause unevenness in the cooling rate of the liquid crystal panel, which tends to cause poor alignment.

Embodiment 4 FIGS. 26, 38 and 40 show
9 shows a fourth embodiment of the present invention. This is the process flow of the simultaneous transfer sealing process. After the liquid crystal is completely injected into the liquid crystal cell, the remaining liquid crystal is removed by a vacuum device shown in FIG. Next, a quartz pallet to which a UV-curable sealing material has been applied in advance is applied to the injection port of the liquid crystal cell, and after the sealing material completely covers the injection port, UV light is applied to the UV-curing sealing material. Irradiate to cure the sealant. After the sealing material is sufficiently cured, the quartz pallet is removed from the liquid crystal cell. UV
There is no film that blocks ultraviolet rays at the position where the cured sealing material is applied in advance, and a groove having a width smaller than the thickness of the glass of the liquid crystal cell is formed. A Teflon-based peeling film is coated on the surface of the quartz pallet so that the UV curing sealing material is easily peeled off from the quartz pallet when cured by ultraviolet rays. As shown in FIG. 34, a groove may be formed in the Teflon film for cutting. As the ultraviolet blocking film, a metal film such as chromium or molybdenum is used. Silicide compounds of these metals may be used. If the film thickness is 2000 mm or more, a sufficient effect of blocking ultraviolet rays can be obtained. Teflon-based membrane is 2
About 5 μm is sufficient. Since Teflon having a thickness of 25 μm transmits 70% or more of ultraviolet rays having a wavelength of 200 nm or more, the UV curable material can be sufficiently cured. If the intensity of the ultraviolet light does not decrease, a cylindrical lens may be attached to a quartz pallet as shown in FIG. 40 to collect ultraviolet light. Since the Teflon film is soft, if the liquid crystal cell comes into direct contact with the Teflon film, the film may be damaged and peeled off. As shown in FIG. 38, insert a spacer between 0 and 2 mm to 0,
By creating a gap of about 3 mm, damage to the quartz pallet can be prevented.

[Embodiment 5] FIG. 41 shows a fifth embodiment of the present invention. This is the process flow of the simultaneous transfer sealing process.
After the liquid crystal is completely injected into the liquid crystal cell, the remaining liquid crystal is removed by the vacuum device shown in FIG. Next, a quartz pallet to which a UV-curing sealing material is applied in advance is applied to the injection port of the liquid crystal cell. After the sealing material completely covers the injection port, the quartz pallet is separated from the liquid crystal cell. With this operation, the UV curing sealing material is transferred to the injection port. Next, ultraviolet rays are irradiated using a photomask so that only the UV curing sealing material at the injection port can be irradiated with ultraviolet light. If ultraviolet light intensity is not sufficient, a cylindrical lens may be attached to a photomask to collect ultraviolet light. The surface of the quartz pallet to which the UV-curable sealing material is transferred is coated with a Teflon-based peeling film. In this step, the Teflon film is not required to have a property of transmitting ultraviolet light, so that the Teflon film may be thick.

Embodiment 6 FIGS. 32 and 44 show a sixth embodiment of the present invention. The process from injecting the liquid crystal into the liquid crystal cell, sealing the injection port and inspecting the appearance is usually shown in FIGS.
The three cases shown in FIG. 5 can be considered. In each step, an isotropic treatment is used as a re-orientation treatment in order to correct an orientation defect at the time of implantation. If the pixel density was low, this process could correct the alignment defect.However, if the pixels were dense and the center of the pixel was covered by a common electrode, and there were irregularities inside the pixel, only the isotropic process was used. In some cases, poor orientation cannot be completely repaired. In such a case, FIG.
As shown in 2, the scanning electrode and the video signal wiring are all connected, a positive voltage is applied to the connected electrode, and a negative voltage is applied to the common electrode on the color filter side facing the pixel electrode. The liquid crystal driving voltage of 3 between both electrodes
By applying the voltage twice or more, the defective orientation is instantaneously corrected. In the IPS mode liquid crystal panel, as shown in FIG. 44, a positive voltage is applied to the scanning electrode and the video signal wiring,
A negative voltage is applied to the common electrode. By applying a voltage of three times or more the liquid crystal driving voltage between both electrodes, the defective alignment is instantaneously repaired. If the high-voltage reorientation treatment of the present invention is used, the isotropic treatment is not required, and a liquid crystal cell process as shown in FIG. 6 can be formed. By using this process, the manufacturing process can be shortened, and the yield and reliability can be improved.

Embodiment 7 FIG. 9 shows a seventh embodiment of the present invention. The configuration of the apparatus has two chambers for heating and deaeration, one chamber for cooling vacuum, and three chambers for liquid crystal injection (two chambers for heating and pressurizing). A conventional in-line type liquid crystal injecting machine has a configuration shown in FIG. Heating was performed in one chamber, and liquid crystal injection was performed in two chambers. This configuration was sufficient for mass production of liquid crystal panels of 14 inches or less, but 15
Various problems have arisen when mass-producing large LCD panels for monitors larger than inches. One is a problem that the heating and degassing chamber alone cannot sufficiently heat the chamber uniformly and the residual gas inside the liquid crystal cell cannot be released. Another problem is that the alignment film in the vertical alignment mode has poor wettability and a very low liquid crystal injection speed. The larger the LCD panel, the longer the injection time. The temperature profile and pressure profile of the in-line type liquid crystal injecting machine having the configuration of FIG. 7 are as shown in FIG. Since the heating time in the heating degassing chamber is short, it cannot be sufficiently heated in a large liquid crystal cell. In the liquid crystal injection chamber, the difference between the internal pressure of the liquid crystal cell and the atmospheric pressure is small in the fourth chamber, so that the injection speed is extremely low. As a countermeasure, an in-line type liquid crystal injection machine having the configuration shown in FIG. 8 was manufactured. The temperature profile and pressure profile of this configuration are shown in FIG.
It is said that it is in 1. In this configuration, up to a size of 20 inches can be used for mass production. The injection speed can be reduced several times by heating and pressurizing at the time of liquid crystal injection. However, when liquid crystal is injected into a liquid crystal cell having a size of 20 inches or more or a large liquid crystal cell in a vertical alignment mode, the heating and pressing injection chamber is required to be 1 With the chamber alone, it takes a considerable time for the temperature of the liquid crystal cell substrate to rise, and the tact time cannot be reduced. There is also a method of heating the liquid crystal tray to raise the temperature of the liquid crystal itself, lower the viscosity, and increase the injection rate, but using this method, the volatile component of the liquid crystal composition evaporates and the composition changes. Problem occurs. In the present invention, by arranging two or more heating and pressure injection chambers as shown in FIG. 9, a tact time of about の of the in-line type liquid crystal injection apparatus having the configuration of FIG. 8 is realized. In addition, the degassing chamber has a pressurizing function in addition to heating, realizing uniform heating and rapid heating. Accordingly, a 40-inch IPS mode liquid crystal panel and a 25-inch vertical alignment mode liquid crystal panel can be mass-produced without reducing the tact time.

Embodiment 8 FIGS. 15 and 16 show an eighth embodiment of the present invention. Conventional heating degassing chambers and heating injection chambers have a structure as shown in FIG. A heater for heating was installed inside the chamber, the heater was covered with a soaking plate, and the temperature of the internal liquid crystal cell was made uniform by stirring the internal nitrogen gas with a fan. In a conventional chamber, a cooling pipe is installed on the outer surface of the chamber main body, and the chamber main body is cooled to room temperature level by flowing de-iced water. In the conventional heating degassing chamber, there is a problem that the cleaning liquid permeated into the gap of the cassette is heated by the heater and evaporated to condense on the inner wall of the chamber body. Similarly, in the heated liquid crystal injection chamber, a component in which the heated liquid crystal easily volatilizes condenses on the inner wall of the chamber body. As shown in FIG. 15, the heating degassing chamber and the heating pouring chamber of the present invention heat the chamber main body by a heating pipe installed on the outer surface of the chamber main body. The stirring of the nitrogen gas inside the chamber is performed by blowing out high-pressure nitrogen gas into the chamber by a compressor installed outside the chamber. With this structure, the cleaning liquid soaked into the cassette does not condense on the inner wall of the chamber. Similarly, in the heat injection chamber, the volatile component of the liquid crystal does not condense on the inner wall of the chamber. The vacuum injection chamber can also be heated by heating the chamber body as shown in FIG. 16, thereby preventing contamination due to adsorption to the inner wall of the chamber. By making the inner wall of the chamber mirror-finished by electropolishing, even if contamination occurs, it can be easily cleaned and the cleanliness can be secured. Thermal efficiency and safety can be improved by covering the outer wall of the chamber with an insulating cover.

Ninth Embodiment FIGS. 17, 18, 19, 20, 29 and 30 show a ninth embodiment of the present invention. The entire cassette containing the liquid crystal cells is covered with a box-shaped cover with good thermal conductivity, and the entire box is heated by heaters installed on the ceiling and sides of the box. When the cassette with the heating cover shown in FIGS. 17 and 18 is inserted into the in-line type liquid crystal injecting machine shown in FIG. 9, the temperature profile and the pressure profile inside the cassette are as shown in FIG.
In the heat-pressurized degassing chamber, both the chamber body and the cassette cover are heated. In a cooling chamber, a vacuum liquid crystal injection chamber, and a heating and pressing chamber, only the cassette cover is heated. Since the liquid crystal tray is arranged in a region that is less likely to be heated compared to a cassette or a liquid crystal cell, the temperature rise is small. Evaporation of components that are easily volatilized in the liquid crystal component is suppressed, so that there is almost no change in composition.

[Embodiment 10] FIG. 21, FIG. 22, FIG.
FIGS. 42 and 43 show a tenth embodiment of the present invention. A plate having good thermal conductivity or a plate of a self-excited vibration type thin tube heat pipe is sandwiched between both sides of the liquid crystal cell substrate, and a heating element is installed on the upper portion of the plate to generate heat. In FIG. 21, a magnetic heating plate is provided above the heat transfer plate. As shown in FIG. 23, a high-frequency magnetic field is applied from outside the chamber to cause the magnetic heating plate to generate heat. In FIG. 22, a resistance heating element is installed on the upper part of the heat transfer plate, and electricity is supplied to the resistance heating element from outside the chamber to cause the resistance heating element to generate heat. When the cassette provided with the heat transfer plates shown in FIGS. 21 and 22 is put into the inline type liquid crystal injecting machine shown in FIG. 9, the temperature profile and the pressure profile on the surface of the liquid crystal cell of the cassette are as shown in FIG. In the heating / pressurizing degassing chamber, both the chamber body and the heat transfer plate are heated. In a cooling chamber, a vacuum liquid crystal injection chamber, and a heating and pressing chamber, only the heat transfer plate is heated. Since the liquid crystal tray is not heated, the liquid crystal composition does not change. As shown in FIGS. 42 and 43, the lower portion of the heat transfer plate is broken so that the region near the inlet is not heated. Since the heat resistance of the main sealing material of the liquid crystal cell is about 120 degrees, the temperature of the upper part of the heat transfer plate must not exceed 120 degrees.

[Embodiment 11] FIG. 24 shows an eleventh embodiment of the present invention. FIG. 24 shows the heat transfer plate of FIGS. 21 and 22 in which a light emitting element and a light receiving element are embedded. In the case of the heating / pressurizing injection method, the injection speed varies due to the variation of the liquid crystal cell temperature and the variation of the cell gap. Time management alone requires a considerable amount of time for liquid crystal to be injected into all liquid crystal cells. If the injection chamber is left in the injection chamber for an excessively long time after completion of the injection, the tact time cannot be reduced and the production efficiency does not increase. According to the present invention, it is possible to immediately proceed to the next step after confirming by the optical sensor that all the liquid crystal cells have been completely injected. In the heat injection method, the volume of the liquid crystal contracts because the temperature of the liquid crystal panel drops when the process proceeds to the injection port sealing step after the injection is completed. Since the shrinkage of the liquid crystal is larger than the shrinkage of the glass substrate, there is an advantage that the cell gap does not increase during the time period when the temperature of the liquid crystal panel is falling. If the liquid crystal tray and the liquid crystal panel are separated in a state where the difference between the temperature of the liquid crystal panel and the room temperature is 20 degrees or more, bubbles enter the liquid crystal cell from the injection port because the cooling rate of the liquid crystal panel is fast. Therefore, in the heat injection method, the liquid crystal tray and the liquid crystal panel must be separated after the difference between the temperature of the liquid crystal panel and room temperature becomes 20 degrees or less.

[Twelfth Embodiment] FIGS. 45 and 46 show a twelfth embodiment of the present invention. If the inlet is not sealed within 4 minutes after separating the liquid crystal tray and the liquid crystal panel, a large amount of inlets can be sealed in a short time at a time because bubbles will enter the liquid crystal cell from the inlet. There must be. Conventional Figure 2
When the injection port is sealed by the dispenser method as described in No. 8, it is possible to increase the processing speed by using a plurality of dispensers, but it is not possible to set the same sealing time. For this reason, processing capacity has been increased by distributing a plurality of cassettes of the same lot to a plurality of sealing devices and performing parallel processing. For medium-sized and small-sized liquid crystal panels, even with this production method, there was little variation in the cell gap,
In the case of a large-sized panel, there has been a problem that the quality variation becomes large unless panels of the same lot are processed at the same time. FIG. 26 and FIG. 41 show steps conceived for processing panels of the same lot at the same time. FIG. 45 is a plan view of the transfer pallet plate used in this step.
In order to accurately determine the position of the liquid crystal cells, the liquid crystal cells are aligned at equal intervals using positioning pins. Next, alignment of the exposure hole of the transfer pallet plate and the liquid crystal cell is performed using a CCD camera. The alignment adjustment with the liquid crystal cell may be performed using both ends of the transfer pallet plate. If alignment is good, apply the transfer pallet plate to the liquid crystal cell. In the process of FIG. 26, the sealing material is cured by irradiating UV light while pressing. After curing, the transfer pallet plate is released from the liquid crystal cell. In the step of FIG. 41, the transfer pallet is removed from the liquid crystal cell after the transfer pallet is pressed down and the UV curing sealing material is transferred to the injection port. Immediately afterwards, replace the photomask plate with the transfer pallet plate,
After the alignment with the liquid crystal cell is adjusted, the sealing material is cured by irradiating UV light.

FIG. 46 is a sectional view of an apparatus for applying the transfer pallet of the present invention to a liquid crystal cell and irradiating UV light.
The Teflon-based film coated on the transfer pallet absorbs 20 to 30% of UV light. When the intensity of the UV light is insufficient, the UV intensity can be improved several times or more by installing a cylindrical lens below the transfer pallet as shown in FIG.
By irradiating the sealing material with UV light while moving the lamp unit and dividing the irradiation frequency into a plurality of times, it is possible to reduce internal stress generated when the sealing material is cured.

[0059]

According to the present invention, the injection tact time of a large liquid crystal panel can be shortened, and the step of adjusting the pressure gap is not required. Therefore, the liquid crystal encapsulation process can be greatly shortened, and the production efficiency can be increased. The simplification of the process eliminates the necessity of a clean stocker and a pressure gap adjusting device, so that investment efficiency and running costs can be reduced. LCD cell handling failures are also drastically reduced. Since the amount of contaminants introduced into the liquid crystal injection device can be drastically reduced, the occurrence of injection hole unevenness can also be drastically reduced. Since the change in the liquid crystal composition can be prevented even by using the heating and pressurizing injection step, a liquid crystal panel having uniform quality can be mass-produced. Even if the size of the liquid crystal panel is increased, the same lot can be sealed at the same time without being turned upside down and in the position of the injection step, so that the liquid crystal panel can be made very large. By producing an IPS mode liquid crystal panel using the process of the present invention, a highly reliable panel free from unevenness around the seal can be realized at the lowest cost.

[Brief description of the drawings]

FIG. 1 is a process diagram of a conventional large-sized liquid crystal panel from liquid crystal injection to injection port sealing.

FIG. 2 is a process diagram from the liquid crystal injection of the large liquid crystal panel to the injection port sealing of the present invention.

FIG. 3 is a conventional process elimination process.

FIG. 4 is a conventional process elimination process.

FIG. 5 is a process omitting process according to the present invention.

FIG. 6 is a process omitting steps according to the present invention.

FIG. 7 is a configuration diagram of each chamber of a conventional in-line type liquid crystal injection device.

FIG. 8 is a diagram showing the configuration of each chamber of the in-line type liquid crystal injection device of the present invention.

FIG. 9 is a configuration diagram of each chamber of the in-line type liquid crystal injection device of the present invention.

FIG. 10 shows a temperature profile and a pressure profile of a conventional in-line type liquid crystal injection device.

FIG. 11 shows a temperature profile and a pressure profile of the in-line type liquid crystal injection device of the present invention.

FIG. 12 shows a temperature profile and a pressure profile of the in-line type liquid crystal injection device of the present invention.

FIG. 13 shows a temperature profile and a pressure profile of the in-line type liquid crystal injection device of the present invention.

FIG. 14 is a structural diagram of a conventional heating chamber.

FIG. 15 is a structural view of a heating chamber according to the present invention.

FIG. 16 is a structural view of a heating chamber of the present invention.

FIG. 17 is a vertical sectional view of a liquid crystal cell heating cassette cover of the present invention.

FIG. 18 is a vertical sectional view of a liquid crystal cell heating cassette cover of the present invention.

FIG. 19 is a horizontal sectional view of a liquid crystal cell heating cassette cover of the present invention.

FIG. 20 is a horizontal sectional view of a liquid crystal cell heating cassette cover of the present invention.

FIG. 21 is a vertical sectional view of a liquid crystal cell heating cover according to the present invention.

FIG. 22 is a vertical sectional view of a liquid crystal cell heating cover according to the present invention.

FIG. 23 shows the structure of a liquid crystal cell heating chamber according to the present invention.

FIG. 24 is a liquid crystal injection end point detection sensor of the present invention.

FIG. 25 is an apparatus layout diagram from a liquid crystal injection step to an inspection according to the present invention.

FIG. 26: Process flow of simultaneous injection port sealing of the present invention

FIG. 27 is a diagram showing the configuration of an inline apparatus from liquid crystal injection to isotropic processing according to the present invention.

FIG. 28 is a process flow from a conventional liquid crystal injection step to sealing of an injection port.

FIG. 29 is a structural diagram of the heating chamber of the present invention.

FIG. 30 is a structural view of a heating chamber of the present invention.

FIG. 31 is an apparatus layout diagram from a liquid crystal injection step to an inspection according to the present invention.

FIG. 32 is a diagram showing a method for correcting reverse twist disclination according to the present invention.

FIG. 33 is a diagram showing a relationship between a cell gap and a standing time after completion of liquid crystal injection.

FIG. 34: Pallet plate for transferring a UV-curable sealing material of the present invention

FIG. 35 is a manufacturing apparatus in which the functions of liquid crystal injection and injection port sealing of the present invention are arranged in-line.

FIG. 36 shows a single-wafer type isotropic processing apparatus in which the heating chamber and the rapid cooling chamber of the present invention are arranged in an inline configuration.

FIG. 37 is an apparatus layout diagram from a liquid crystal injection step to an inspection according to the present invention.

FIG. 38 shows a pallet plate and a large liquid crystal cell for transferring a UV-curable sealing material according to the present invention.

FIG. 39 is a sectional view of a liquid crystal cell inlet vacuum cleaner of the present invention.

FIG. 40 is a sectional view of a palette plate for transferring a UV-curable sealing material of the present invention.

FIG. 41: Process flow for sealing the inlet of the present invention

FIG. 42 is a plan view of a liquid crystal cell heating plate and a liquid crystal cell of the present invention.

FIG. 43 is a plan view of the liquid crystal cell heating plate and the liquid crystal cell of the present invention.

FIG. 44 is a diagram showing a method for correcting reverse twist disclination according to the present invention.

FIG. 45 is a plan view of a pallet plate for transferring a UV-curable sealing material according to the present invention.

FIG. 46 is a configuration diagram of a UV irradiation optical system of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Heating chamber 2 ... Cooling pipe 3 ... IR heater 4 ... Heat equalizing plate 5 ... Heat insulation cover 6 ... Diffusion fan 7 ... Motor 8 ... Liquid crystal cell 9 ... Cassette jig 10 ... Cassette transport tray 11... Heating pipe 12... Heating high-temperature and high-pressure nitrogen gas discharge port 13... High-temperature and high-pressure nitrogen gas intake port 14. Induction heating plate) 16: Heater for cassette cover heating 17: Cassette cover for uniform heating 18: Cell cover (heat transfer plate) for uniform heating 19: Heater for cell cover heating 20: For generating an AC magnetic field Coil 21 Soft ferrite core 22 Liquid crystal 23 Liquid crystal tray 24 Combined transfer tray 25 Nonmagnetic insulating plate 26 Heat-resistant polarizing plate 27 Light emitting element 28 Sensor 29: Cassette moving lane 30: AGV 31: Quartz substrate 32: UV blocking / mask 33: Stripping film (Teflon) 34: Sealing material (UV curable resin) 35: Dispenser 36 ... ... Ultraviolet light 37 ... Condensing lens 38 ... Optical fiber 39 ... Color filter substrate 40 ... Active matrix element substrate 41 ... Transparent pixel electrode 42 ... Color filter side common transparent electrode 43 ... Active matrix element drive terminal 44 ... Common electrode terminal 45... Black mask 46... Upper and lower contact conductive particles (silver particles) 47... Color filter side alignment film 48... Active matrix element side alignment film 49... Voltage application device 50. Panel 51: Main seal 52: Contact spacer 53: Vacuum Mu cleaner 54 Cylindrical quartz lens 55 UV curing sealing material transfer plate 56 Liquid crystal injection port 57 Scanning electrode 58 Video signal electrode 59 Thin film transistor element 60 Liquid crystal drive electrode 61 Pixel Inner common electrode 62 Positioning pin 63 Metal halide lamp or mercury lamp 64 45 degree UV reflection mirror

Claims (30)

[Claims] In a manufacturing process of a liquid crystal display device comprising a pair of substrates, at least one of which is transparent, and a liquid crystal composition layer sandwiched between said substrates, a plurality of in-line type liquid crystal injection machines are arranged. In the liquid crystal injecting machine, a plurality of cassettes are filled so that the same processing can be performed simultaneously.
Install the same number of or more injection port sealing devices as the number of cassettes to be filled, and simultaneously seal the liquid crystal cells stored in multiple cassettes of the same lot after liquid crystal injection is completed. Characteristic manufacturing method. 2. A process for manufacturing a liquid crystal display device comprising a pair of transparent substrates, at least one of which is transparent, and a liquid crystal composition layer sandwiched between said substrates, wherein said injection port is continuously connected to an inline type liquid crystal injection machine in an inline configuration. A manufacturing method, comprising: arranging a sealing device, and simultaneously sealing liquid crystal cells housed in a plurality of cassettes of the same lot in which liquid crystal has been injected. 3. In the liquid crystal injection port sealing step according to claim 1 or 2, after the liquid crystal injection is completed, the liquid crystal cell in the cassette is not turned upside down. Wherein the liquid crystal cells stored in a plurality of cassettes of the same lot are simultaneously sealed in the inlet while holding the posture of the liquid crystal cell. 4. The liquid crystal injecting step according to claim 1 or 2, wherein three or more chambers for injecting liquid crystal into the liquid crystal cell after evacuating the inside of the liquid crystal cell are arranged in-line. An in-line type liquid crystal injecting device, wherein at least one chamber has a function of heating and pressurizing. 5. A liquid crystal tray and a liquid crystal cell are separated after the completion of liquid crystal injection in the liquid crystal injection port sealing step according to claim 1 or 2. A manufacturing method, wherein the time from separation to sealing of an injection port is set to 4 minutes or less. 6. The liquid crystal cell is separated from the liquid crystal tray when the difference between the temperature of the liquid crystal panel heated after the completion of the injection and the room temperature becomes 20 degrees or less in the liquid crystal injection port sealing step according to claim 3. A manufacturing method in which liquid crystal cells housed in a plurality of cassettes of the same lot are simultaneously sealed with an inlet, after removing various liquid crystals adhering to the inlet immediately. 7. A method for manufacturing a liquid crystal panel, comprising the steps of: performing an isotropic treatment after the step of sealing a liquid crystal injection port according to claim 3; 8. In a manufacturing process of a liquid crystal display device comprising a pair of substrates at least one of which is transparent, and a liquid crystal composition layer sandwiched between said substrates, a pixel electrode of an active matrix substrate after the isotropic treatment is formed. A manufacturing method, wherein a high voltage that is three times or more the liquid crystal driving voltage is applied between a common electrode formed on a substrate facing a matrix substrate. 9. A method for manufacturing a liquid crystal display device comprising a pair of substrates, at least one of which is transparent, and a liquid crystal composition layer sandwiched between said substrates, after sealing an injection port, a pixel electrode of an active matrix substrate. A liquid crystal characterized by applying a high voltage at least three times the liquid crystal driving voltage between the common electrode formed on the other substrate facing the active matrix substrate to omit the isotropic treatment. Panel manufacturing method. 10. A liquid crystal injecting apparatus used in the liquid crystal injecting step according to claim 1 or 2, wherein the liquid crystal cell heating chamber is provided with a heating mechanism outside the chamber to heat the entire chamber body. Inline type liquid crystal injection device. 11. The in-line type liquid crystal injection device according to claim 10, wherein the whole of the chamber provided with a heating mechanism outside the chamber is covered with a heat insulating cover. 12. The liquid crystal injection device according to claim 10, wherein high-pressure nitrogen gas having the same temperature as the inside of the chamber is jetted into the inside of the chamber, and the nitrogen gas inside the chamber is stirred. apparatus. 13. A method of manufacturing a liquid crystal display device comprising a pair of transparent substrates at least one of which is transparent and a liquid crystal composition layer sandwiched between said substrates, wherein liquid crystal is injected into a liquid crystal cell.
A heating / injecting device comprising a substrate having good thermal conductivity sandwiched between liquid crystal cells and transmitting heat from the heat source above to the liquid crystal cell through the substrate having good thermal conductivity to heat the liquid crystal cell. 14. A liquid crystal cell heating apparatus according to claim 13, wherein a magnetic material is used as an upper heat source, and a high-frequency magnetic field is applied to the magnetic material from outside the chamber to cause the magnetic material to generate heat. Heating injection equipment. 15. The liquid crystal cell heating device according to claim 13, wherein a resistance heating element is used as an upper heating source, and heat is applied to the resistance heating element from outside the chamber to cause the resistance heating element to generate heat. A heating injection device for heating a liquid crystal cell through a plate. 16. A liquid crystal cell heating apparatus according to claim 13, further comprising: a light emitting element for judging that the liquid crystal has been completely injected into the cell, on a heat transfer plate for transferring heat from an upper heating element. A liquid crystal cell heating device incorporating a light receiving element. 17. A liquid crystal cell heating device according to claim 13 or 16, having a function of transmitting information on whether liquid crystal has been completely injected into the liquid crystal cell to the outside of the chamber by a radio signal or an optical signal. A liquid crystal cell heating device characterized in that: 18. The method according to claim 1, wherein in the step of sealing the injection port of the liquid crystal cell, U
After applying a V-curing encapsulant and removing any liquid crystal adhering to the liquid crystal cells into which the liquid crystal has been injected, the UV-curing encapsulant is applied to the injection ports of all the liquid crystal cells at once. After the encapsulant completely covers the inlet, U
V light is applied to cure the sealing material. After the encapsulant has fully cured, the pallet is removed from the liquid crystal cell. A manufacturing method in which liquid crystal cells of the same lot are simultaneously transferred and sealed by using the above steps. 19. The method according to claim 18, wherein
A quartz glass plate is used for the pallet plate, and a metal film such as a chromium film or a molybdenum film or a metal silicide film is used for the UV light blocking film. A transfer pallet plate, characterized in that a surface of the plate on which a UV curing sealing material is applied is coated with a peeling film such as Teflon. 20. The transfer pallet plate according to claim 19, wherein the portion of the pallet plate corresponding to the injection port portion of the liquid crystal cell has no UV light blocking film and is concavely concave, and the surface has: A transfer pallet plate, which is coated with a Teflon-based peeling film. 21. A method according to claim 1 or 2, wherein the pallet is preliminarily UV-coated in the filling step of the liquid crystal cell.
After applying a hardened encapsulant and removing any liquid crystal adhering to the liquid crystal cells where liquid crystal has been injected, apply a UV hardened encapsulant to all of the liquid crystal cell inlets at once and palletize. To transfer the UV-curable sealing material to the injection port of the liquid crystal cell. A method for manufacturing, comprising: removing a transfer pallet; and irradiating UV light using a photomask to only the UV-curable sealing material transferred to the injection port of the liquid crystal cell to cure the sealing material. 22. The method according to claim 21, wherein
A transfer pallet plate, wherein a region corresponding to a liquid crystal cell inlet of the transfer pallet plate is concavely concave and the surface is coated with a Teflon-based peeling film. 23. When irradiating a UV curing sealing material with UV light in the manufacturing process according to claim 18 or 21,
Injection port sealing device characterized by disposing a cylindrical lens corresponding to a liquid crystal cell and concentrating UV light on a UV curing sealing material applied to the injection port 24. The liquid crystal cell heating apparatus according to claim 13, wherein a self-excited vibration type thin tube heat pipe is used for a heat transfer plate sandwiched between the liquid crystal cells. 25. The liquid crystal cell heating apparatus according to claim 13, 14 or 15, wherein only the liquid crystal cell other than the liquid crystal cell inlet is heated, and the liquid crystal tray and the liquid crystal on the tray are not heated. A heating and pressurizing injection apparatus for injecting liquid crystal under pressure. 26. A method of manufacturing a liquid crystal display device comprising a pair of transparent substrates, at least one of which is sandwiched between the substrates, and a liquid crystal composition layer formed on the active matrix substrate after the isotropic treatment. Liquid crystal, wherein a high voltage that is at least three times the liquid crystal driving voltage is applied between the liquid crystal driving electrode and a comb-shaped common electrode formed on the active matrix substrate facing the liquid crystal driving electrode. Panel manufacturing method. 27. A method for manufacturing a liquid crystal display device comprising a pair of transparent substrates at least one of which is sandwiched between said substrates and a liquid crystal composition layer sandwiched between said substrates, said liquid crystal composition being formed on an active matrix substrate side after sealing an injection port. A liquid crystal driving voltage of 3 is applied between a comb-shaped liquid crystal driving electrode and a comb-shaped common electrode formed on the active matrix substrate facing the liquid crystal driving electrode.
A method for manufacturing a liquid crystal panel, wherein isotropic treatment is omitted by applying a high voltage twice or more. 28. A liquid crystal display device comprising a pair of transparent substrates at least one of which is transparent and a liquid crystal composition layer sandwiched between said substrates, wherein a liquid crystal panel sealed with an injection port is provided.
Manufacturing method characterized by quenching one by one after isotropic treatment one by one 29. A liquid crystal panel according to claim 28, wherein the band-shaped hot air is passed through the liquid crystal panel to a region where the band-shaped hot air is blown out from both upper and lower directions and left and right directions. A single-wafer heating / cooling apparatus that cools rapidly by passing the band-shaped cold air through a band-shaped liquid region to a region that is blown out from both directions, up and down or left and right. 30. A liquid crystal display device wherein a liquid crystal injection port is sealed by the manufacturing method according to claim 18.