CN104973865B - 一种高导热氮化铝陶瓷的制备方法 - Google Patents
一种高导热氮化铝陶瓷的制备方法 Download PDFInfo
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- CN104973865B CN104973865B CN201510276618.5A CN201510276618A CN104973865B CN 104973865 B CN104973865 B CN 104973865B CN 201510276618 A CN201510276618 A CN 201510276618A CN 104973865 B CN104973865 B CN 104973865B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 35
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title abstract description 7
- 238000005245 sintering Methods 0.000 claims abstract description 50
- 239000000843 powder Substances 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 21
- -1 rare earth metal fluoride Chemical class 0.000 claims abstract description 14
- 238000001035 drying Methods 0.000 claims abstract description 13
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 11
- 238000005238 degreasing Methods 0.000 claims abstract description 10
- 238000002156 mixing Methods 0.000 claims abstract description 10
- 239000000203 mixture Substances 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims abstract description 5
- 229910016653 EuF3 Inorganic materials 0.000 claims abstract description 3
- 229910002319 LaF3 Inorganic materials 0.000 claims abstract description 3
- 229910021175 SmF3 Inorganic materials 0.000 claims abstract description 3
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 claims abstract description 3
- 229910017083 AlN Inorganic materials 0.000 claims description 39
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 39
- 238000000498 ball milling Methods 0.000 claims description 14
- 239000004677 Nylon Substances 0.000 claims description 10
- 235000021355 Stearic acid Nutrition 0.000 claims description 10
- 229920001778 nylon Polymers 0.000 claims description 10
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 10
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 10
- 239000008117 stearic acid Substances 0.000 claims description 10
- 239000011230 binding agent Substances 0.000 claims description 9
- 238000001746 injection moulding Methods 0.000 claims description 9
- 239000002994 raw material Substances 0.000 claims description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000005452 bending Methods 0.000 claims description 8
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 8
- 229920001903 high density polyethylene Polymers 0.000 claims description 6
- 239000004700 high-density polyethylene Substances 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 6
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 6
- 238000007493 shaping process Methods 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 5
- 230000014759 maintenance of location Effects 0.000 claims description 5
- 238000000280 densification Methods 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 229920001155 polypropylene Polymers 0.000 claims description 3
- 239000002274 desiccant Substances 0.000 claims description 2
- 238000000227 grinding Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims description 2
- 239000004094 surface-active agent Substances 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims 1
- 229940116364 hard fat Drugs 0.000 claims 1
- 239000012188 paraffin wax Substances 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 101100348958 Caenorhabditis elegans smf-3 gene Proteins 0.000 abstract description 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000009740 moulding (composite fabrication) Methods 0.000 abstract 1
- 238000001238 wet grinding Methods 0.000 abstract 1
- 238000010792 warming Methods 0.000 description 12
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 229960002415 trichloroethylene Drugs 0.000 description 2
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910001947 lithium oxide Inorganic materials 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 229940105963 yttrium fluoride Drugs 0.000 description 1
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 1
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CN106542828A (zh) * | 2016-10-18 | 2017-03-29 | 华中科技大学 | 一种低温烧结高热导率的氮化铝陶瓷及其制备方法 |
CN107857594A (zh) * | 2017-11-29 | 2018-03-30 | 北京科技大学 | 一种氮化铝陶瓷异型件及其制备方法 |
CN107935601A (zh) * | 2017-12-23 | 2018-04-20 | 洛阳名力科技开发有限公司 | 一种氮化铝陶瓷 |
CN108675795B (zh) * | 2018-07-03 | 2020-11-20 | 北京科技大学 | 一种sps烧结制备高导热和高强度氮化铝陶瓷的方法 |
CN109400172A (zh) * | 2018-10-22 | 2019-03-01 | 厦门钜瓷科技有限公司 | 内部中空流道氮化铝陶瓷器件的制造方法 |
CN109320255A (zh) * | 2018-11-09 | 2019-02-12 | 厦门钜瓷科技有限公司 | 芯片用高导热陶瓷散热器的制备方法 |
CN112830793A (zh) * | 2019-11-22 | 2021-05-25 | 福建臻璟新材料科技有限公司 | 一种凝胶法注模制备高导热和高强度氮化铝陶瓷的制备工艺 |
CN112028636A (zh) * | 2020-08-26 | 2020-12-04 | 北京科技大学 | 一种高导热氮化铝/石墨烯复合陶瓷器件的制备方法 |
CN112811909A (zh) * | 2021-01-06 | 2021-05-18 | 北京科技大学 | 一种热压烧结制备高强度高热导率氮化铝的方法 |
CN113336553A (zh) * | 2021-06-29 | 2021-09-03 | 河南工业大学 | 一种微波烧结合成V2AlC块体材料及其制备方法和应用 |
TWI769913B (zh) | 2021-08-24 | 2022-07-01 | 財團法人工業技術研究院 | 陶瓷複合物及其製備方法 |
CN114289713B (zh) * | 2021-12-14 | 2023-01-10 | 北京科技大学 | 一种二步烧结制备表面金黄色且全致密TiN/Cu材料的方法 |
CN115368142B (zh) * | 2022-07-28 | 2023-07-14 | 杭州大和江东新材料科技有限公司 | 一种低介电损耗氮化铝陶瓷材料及其制备方法 |
CN115925427A (zh) * | 2022-10-20 | 2023-04-07 | 华中科技大学 | 用于钛合金感应熔炼的氮化铝陶瓷复杂坩埚的制备方法 |
CN116283305B (zh) * | 2022-12-12 | 2024-05-28 | 厦门理工学院 | 一种氮化铝氮化硼复合陶瓷及其制备方法 |
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US5744411A (en) * | 1993-07-12 | 1998-04-28 | The Dow Chemical Company | Aluminum nitride sintered body with high thermal conductivity and its preparation |
CN101638319A (zh) * | 2008-07-29 | 2010-02-03 | 比亚迪股份有限公司 | 一种氮化铝复合材料的制备方法 |
CN101948315A (zh) * | 2010-09-21 | 2011-01-19 | 上海理工大学 | 一种高性能氮化铝陶瓷的低温烧结方法 |
CN102344281A (zh) * | 2010-07-30 | 2012-02-08 | 比亚迪股份有限公司 | 一种氮化铝陶瓷基板及其制备方法 |
CN102898141A (zh) * | 2012-10-31 | 2013-01-30 | 中南大学 | 一种高导热氮化铝陶瓷异形件的制备方法 |
CN103553691A (zh) * | 2013-11-01 | 2014-02-05 | 广东工业大学 | 一种颗粒弥散增韧氮化铝陶瓷基板及其制备方法 |
CN103880428A (zh) * | 2013-12-30 | 2014-06-25 | 莱鼎电子材料科技有限公司 | 用于制备高导热陶瓷基片的三元溶剂体系氮化铝浆料配方 |
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2015
- 2015-05-26 CN CN201510276618.5A patent/CN104973865B/zh active Active
Patent Citations (7)
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US5744411A (en) * | 1993-07-12 | 1998-04-28 | The Dow Chemical Company | Aluminum nitride sintered body with high thermal conductivity and its preparation |
CN101638319A (zh) * | 2008-07-29 | 2010-02-03 | 比亚迪股份有限公司 | 一种氮化铝复合材料的制备方法 |
CN102344281A (zh) * | 2010-07-30 | 2012-02-08 | 比亚迪股份有限公司 | 一种氮化铝陶瓷基板及其制备方法 |
CN101948315A (zh) * | 2010-09-21 | 2011-01-19 | 上海理工大学 | 一种高性能氮化铝陶瓷的低温烧结方法 |
CN102898141A (zh) * | 2012-10-31 | 2013-01-30 | 中南大学 | 一种高导热氮化铝陶瓷异形件的制备方法 |
CN103553691A (zh) * | 2013-11-01 | 2014-02-05 | 广东工业大学 | 一种颗粒弥散增韧氮化铝陶瓷基板及其制备方法 |
CN103880428A (zh) * | 2013-12-30 | 2014-06-25 | 莱鼎电子材料科技有限公司 | 用于制备高导热陶瓷基片的三元溶剂体系氮化铝浆料配方 |
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