CN104875496B - 接合体、接合方法及制造装置、喷墨头单元及其记录装置 - Google Patents
接合体、接合方法及制造装置、喷墨头单元及其记录装置 Download PDFInfo
- Publication number
- CN104875496B CN104875496B CN201510054883.9A CN201510054883A CN104875496B CN 104875496 B CN104875496 B CN 104875496B CN 201510054883 A CN201510054883 A CN 201510054883A CN 104875496 B CN104875496 B CN 104875496B
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- ink
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Links
- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 172
- 229920002050 silicone resin Polymers 0.000 claims abstract description 28
- 229920005989 resin Polymers 0.000 claims abstract description 17
- 239000011347 resin Substances 0.000 claims abstract description 17
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 15
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims abstract description 5
- 238000010438 heat treatment Methods 0.000 claims description 75
- 238000012546 transfer Methods 0.000 claims description 43
- 230000008569 process Effects 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 230000007246 mechanism Effects 0.000 description 52
- 239000010408 film Substances 0.000 description 47
- 239000000758 substrate Substances 0.000 description 47
- 238000004891 communication Methods 0.000 description 20
- 238000003825 pressing Methods 0.000 description 17
- 238000001723 curing Methods 0.000 description 13
- 239000007788 liquid Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000005304 joining Methods 0.000 description 10
- 238000003860 storage Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000008961 swelling Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 2
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 244000126211 Hericium coralloides Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229940121375 antifungal agent Drugs 0.000 description 1
- 239000003429 antifungal agent Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
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- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920001038 ethylene copolymer Polymers 0.000 description 1
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/80—Siloxanes having aromatic substituents, e.g. phenyl side groups
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014037479A JP6330365B2 (ja) | 2014-02-27 | 2014-02-27 | 接合方法、接合体の製造装置、接合体、インクジェットヘッドユニットおよびインクジェット式記録装置 |
| JP2014-037479 | 2014-02-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104875496A CN104875496A (zh) | 2015-09-02 |
| CN104875496B true CN104875496B (zh) | 2017-12-29 |
Family
ID=53881382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510054883.9A Active CN104875496B (zh) | 2014-02-27 | 2015-02-03 | 接合体、接合方法及制造装置、喷墨头单元及其记录装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US9789691B2 (enExample) |
| JP (1) | JP6330365B2 (enExample) |
| CN (1) | CN104875496B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6330365B2 (ja) * | 2014-02-27 | 2018-05-30 | セイコーエプソン株式会社 | 接合方法、接合体の製造装置、接合体、インクジェットヘッドユニットおよびインクジェット式記録装置 |
| JP6610117B2 (ja) * | 2015-09-18 | 2019-11-27 | コニカミノルタ株式会社 | 接続構造体、インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置 |
| US10207484B2 (en) | 2016-08-19 | 2019-02-19 | Seiko Epson Corporation | Manufacturing method of joined body, manufacturing method of MEMS device, manufacturing method of liquid ejecting head, and manufacturing device of joined body |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62161513A (ja) * | 1986-01-10 | 1987-07-17 | Kiyuubitsuku Eng:Kk | シリコ−ンゲルシ−トの製造装置 |
| JPS63246893A (ja) * | 1987-04-02 | 1988-10-13 | 日立化成工業株式会社 | 応力緩衝層付き回路基板の製造法 |
| CA2136514C (en) * | 1993-11-26 | 2000-01-11 | Masashi Kitani | An ink jet recording head, an ink jet unit and an ink jet apparatus using said recording head |
| JP3305192B2 (ja) * | 1995-03-15 | 2002-07-22 | セイコーエプソン株式会社 | 接着剤転写方法、及び転写装置 |
| US5953032A (en) | 1997-06-10 | 1999-09-14 | Lexmark International, Inc. | Method for forming and inspecting a barrier layer of an ink jet print cartridge |
| US6030071A (en) | 1997-07-03 | 2000-02-29 | Lexmark International, Inc. | Printhead having heating element conductors arranged in a matrix |
| JP3809491B2 (ja) * | 1997-10-29 | 2006-08-16 | アイシン高丘株式会社 | 燃料電池用セパレータ |
| JP2000218784A (ja) * | 1999-02-03 | 2000-08-08 | Fuji Electric Co Ltd | インクジェット記録ヘッド |
| JP4016386B2 (ja) * | 2002-08-22 | 2007-12-05 | セイコーエプソン株式会社 | 液体噴射ヘッド部材 |
| US7566122B2 (en) * | 2004-04-15 | 2009-07-28 | Hewlett-Packard Development Company, L.P. | Fluid ejection device utilizing a one-part epoxy adhesive |
| JP2006346940A (ja) * | 2005-06-14 | 2006-12-28 | Fuji Xerox Co Ltd | 液滴吐出ヘッドの製造方法 |
| JP2007111904A (ja) * | 2005-10-18 | 2007-05-10 | Canon Inc | 液体吐出ヘッドおよびその製造方法 |
| JP2009136762A (ja) * | 2007-12-06 | 2009-06-25 | Seiko Epson Corp | 接着剤塗布装置、接着剤塗布方法及び接着剤転写装置 |
| JP5498191B2 (ja) * | 2009-02-16 | 2014-05-21 | 株式会社東芝 | 水素電力貯蔵システムおよび水素電力貯蔵方法 |
| JP2010274523A (ja) * | 2009-05-28 | 2010-12-09 | Seiko Epson Corp | 液滴吐出ヘッドおよび液滴吐出装置 |
| JP5929264B2 (ja) * | 2012-02-03 | 2016-06-01 | 株式会社リコー | 液滴吐出ヘッド、インクカートリッジおよび画像形成装置 |
| JP5770674B2 (ja) * | 2012-04-04 | 2015-08-26 | 信越化学工業株式会社 | 光学半導体装置用基板及びその製造方法、並びに光学半導体装置 |
| JP2014031394A (ja) * | 2012-08-01 | 2014-02-20 | Shin Etsu Chem Co Ltd | 付加硬化型シリコーン組成物、及び該組成物の硬化物により半導体素子が被覆された半導体装置 |
| JP2014065220A (ja) * | 2012-09-26 | 2014-04-17 | Brother Ind Ltd | 液体吐出装置の製造方法、ノズルプレートの製造方法、及び、液体吐出装置 |
| JP6330365B2 (ja) * | 2014-02-27 | 2018-05-30 | セイコーエプソン株式会社 | 接合方法、接合体の製造装置、接合体、インクジェットヘッドユニットおよびインクジェット式記録装置 |
| JP6273901B2 (ja) | 2014-02-27 | 2018-02-07 | セイコーエプソン株式会社 | 接合方法、接合体の製造装置、接合体、インクジェットヘッドユニットおよびインクジェット式記録装置 |
-
2014
- 2014-02-27 JP JP2014037479A patent/JP6330365B2/ja active Active
-
2015
- 2015-02-03 CN CN201510054883.9A patent/CN104875496B/zh active Active
- 2015-02-26 US US14/632,801 patent/US9789691B2/en active Active
-
2017
- 2017-08-07 US US15/671,035 patent/US10189259B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US9789691B2 (en) | 2017-10-17 |
| CN104875496A (zh) | 2015-09-02 |
| JP6330365B2 (ja) | 2018-05-30 |
| US20170334207A1 (en) | 2017-11-23 |
| US10189259B2 (en) | 2019-01-29 |
| JP2015160385A (ja) | 2015-09-07 |
| US20150239223A1 (en) | 2015-08-27 |
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