CN1047056C - 薄膜致动反射镜阵列及其制造方法 - Google Patents

薄膜致动反射镜阵列及其制造方法 Download PDF

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Publication number
CN1047056C
CN1047056C CN94193967A CN94193967A CN1047056C CN 1047056 C CN1047056 C CN 1047056C CN 94193967 A CN94193967 A CN 94193967A CN 94193967 A CN94193967 A CN 94193967A CN 1047056 C CN1047056 C CN 1047056C
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CN
China
Prior art keywords
layer
electrode
array
actuating mechanism
actuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN94193967A
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English (en)
Chinese (zh)
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CN1134208A (zh
Inventor
金东局
池政范
李硕源
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019930022798A external-priority patent/KR970006685B1/ko
Priority claimed from KR93024398A external-priority patent/KR970006694B1/ko
Priority claimed from KR1019930025879A external-priority patent/KR970006698B1/ko
Priority claimed from KR1019930031720A external-priority patent/KR970008404B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of CN1134208A publication Critical patent/CN1134208A/zh
Application granted granted Critical
Publication of CN1047056C publication Critical patent/CN1047056C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Laminated Bodies (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
CN94193967A 1993-10-29 1994-10-25 薄膜致动反射镜阵列及其制造方法 Expired - Lifetime CN1047056C (zh)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
KR1993/22798 1993-10-29
KR1019930022798A KR970006685B1 (ko) 1993-10-29 1993-10-29 광로조절장치
KR1993/24398 1993-11-16
KR93024398A KR970006694B1 (en) 1993-11-16 1993-11-16 A manufacturing method of an optical path regulating apparatus
KR1019930025879A KR970006698B1 (ko) 1993-11-30 1993-11-30 투사형 화상 표시 장치의 광로 조절 장치 구조
KR1993/25879 1993-11-30
KR1019930031720A KR970008404B1 (ko) 1993-12-30 1993-12-30 투사형 화상표시장치의 광로 조절기
KR1993/31720 1993-12-30

Publications (2)

Publication Number Publication Date
CN1134208A CN1134208A (zh) 1996-10-23
CN1047056C true CN1047056C (zh) 1999-12-01

Family

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Family Applications (1)

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CN94193967A Expired - Lifetime CN1047056C (zh) 1993-10-29 1994-10-25 薄膜致动反射镜阵列及其制造方法

Country Status (16)

Country Link
US (2) US5661611A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0651274B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP3283881B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN1047056C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU (1) AU693119B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BR (1) BR9407923A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA2175198A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CZ (1) CZ288846B6 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69420666T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES2140490T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
HU (1) HU220516B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
MY (1) MY113977A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
PL (1) PL176406B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
RU (1) RU2140722C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW279930B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO1995012287A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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RU2140722C1 (ru) * 1993-10-29 1999-10-27 Дэу Электроникс Ко., Лтд. Тонкопленочная приводимая в действие зеркальная матрица и способ ее изготовления
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TW348324B (en) * 1996-01-31 1998-12-21 Daewoo Electronics Co Ltd Thin film actuated mirror array having dielectric layers
IL127391A0 (en) * 1996-06-05 1999-10-28 Remote Source Lighting Int Inc Large-area fiber optic display using piezoelectric shutters
BE1010327A7 (fr) * 1996-06-05 1998-06-02 Remote Source Lighting Int Inc Dispositif de modulation de la lumiere electro-optique comprenant des bimorphes.
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
WO1998033327A1 (en) * 1997-01-23 1998-07-30 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
CA2278624A1 (en) * 1997-01-23 1998-07-30 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
RU2180158C2 (ru) * 1997-01-23 2002-02-27 Дэу Электроникс Ко., Лтд. Тонкопленочная матрица управляемых зеркал для оптической проекционной системы и способ ее изготовления
WO1998038801A1 (en) * 1997-02-26 1998-09-03 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
KR19990004774A (ko) * 1997-06-30 1999-01-25 배순훈 박막형 광로 조절 장치의 제조 방법
DE10031877C1 (de) * 2000-06-30 2001-12-20 Fraunhofer Ges Forschung Vorrichtung zur Ablenkung von optischen Strahlen
JP2002122809A (ja) * 2000-10-18 2002-04-26 Canon Inc 投射型表示装置
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
US6624549B2 (en) * 2001-03-02 2003-09-23 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of fabricating the same
US6721510B2 (en) * 2001-06-26 2004-04-13 Aoptix Technologies, Inc. Atmospheric optical data transmission system
DE10150424B4 (de) * 2001-10-11 2004-07-29 Siemens Ag Reflexionssystem und Verwendung des Reflexionssystems
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
WO2017171882A1 (en) * 2016-04-01 2017-10-05 Intel Corporation Piezoelectrically actuated mirrors for optical communications
CN114779464A (zh) * 2022-05-24 2022-07-22 北京有竹居网络技术有限公司 光学信号调制器、控制方法及投影设备

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US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system

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US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system

Also Published As

Publication number Publication date
AU8005294A (en) 1995-05-22
WO1995012287A1 (en) 1995-05-04
CN1134208A (zh) 1996-10-23
PL314124A1 (en) 1996-08-19
JP3283881B2 (ja) 2002-05-20
EP0651274B1 (en) 1999-09-15
HU220516B1 (hu) 2002-03-28
US5900998A (en) 1999-05-04
ES2140490T3 (es) 2000-03-01
EP0651274A1 (en) 1995-05-03
US5661611A (en) 1997-08-26
PL176406B1 (pl) 1999-05-31
CA2175198A1 (en) 1995-05-04
CZ118096A3 (en) 1996-09-11
DE69420666D1 (de) 1999-10-21
MY113977A (en) 2002-07-31
HU9601094D0 (en) 1996-07-29
JPH09504387A (ja) 1997-04-28
RU2140722C1 (ru) 1999-10-27
BR9407923A (pt) 1996-11-26
HUT75803A (en) 1997-05-28
TW279930B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-07-01
AU693119B2 (en) 1998-06-25
DE69420666T2 (de) 1999-12-30
CZ288846B6 (cs) 2001-09-12

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Patentee after: Daewoo Electronics Corp.

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Expiration termination date: 20141025

Granted publication date: 19991201