KR970006694B1 - A manufacturing method of an optical path regulating apparatus - Google Patents

A manufacturing method of an optical path regulating apparatus Download PDF

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Publication number
KR970006694B1
KR970006694B1 KR93024398A KR930024398A KR970006694B1 KR 970006694 B1 KR970006694 B1 KR 970006694B1 KR 93024398 A KR93024398 A KR 93024398A KR 930024398 A KR930024398 A KR 930024398A KR 970006694 B1 KR970006694 B1 KR 970006694B1
Authority
KR
South Korea
Prior art keywords
forming
sacrificial layer
supports
contact terminals
elastic portion
Prior art date
Application number
KR93024398A
Other languages
Korean (ko)
Other versions
KR950016306A (en
Inventor
Suk-Won Lee
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR93024398A priority Critical patent/KR970006694B1/en
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority to PCT/KR1994/000148 priority patent/WO1995012287A1/en
Priority to PL94314124A priority patent/PL176406B1/en
Priority to AU80052/94A priority patent/AU693119B2/en
Priority to RU96110182/09A priority patent/RU2140722C1/en
Priority to CA002175198A priority patent/CA2175198A1/en
Priority to HU9601094A priority patent/HU220516B1/en
Priority to JP51252995A priority patent/JP3283881B2/en
Priority to CZ19961180A priority patent/CZ288846B6/en
Priority to BR9407923A priority patent/BR9407923A/en
Priority to CN94193967A priority patent/CN1047056C/en
Priority to ES94117124T priority patent/ES2140490T3/en
Priority to DE69420666T priority patent/DE69420666T2/en
Priority to EP94117124A priority patent/EP0651274B1/en
Priority to US08/331,399 priority patent/US5661611A/en
Priority to MYPI94002871A priority patent/MY113977A/en
Priority to TW083110157A priority patent/TW279930B/zh
Publication of KR950016306A publication Critical patent/KR950016306A/en
Application granted granted Critical
Publication of KR970006694B1 publication Critical patent/KR970006694B1/en
Priority to US08/877,645 priority patent/US5936757A/en
Priority to US08/877,084 priority patent/US5900998A/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

A method of fabricating an optical path controller includes the steps of forming a sacrificial layer on a driving substrate on which contact terminals are formed, the driving substrate including transistors arranged in matrix form, the sacrificial layer having no contact with the contact terminals, forming supports on a region on which the sacrificial layer is not formed, the supports surrounding the contact terminals, forming an elastic portion on the sacrificial layer and supports and removing a predetermined portion of the elastic portion and supports to expose the contact terminals, thereby forming trenches, forming plugs in the trenches and forming a signal electrode on the elastic portion, the signal electrode being electrically connected to the plugs, sequentially forming a modification portion, bias electrode and mirror on the signal electrode, removing a predetermined portion of the mirror to elastic portion to expose the sacrificial layer, and removing the sacrificial layer.
KR93024398A 1993-10-29 1993-11-16 A manufacturing method of an optical path regulating apparatus KR970006694B1 (en)

Priority Applications (19)

Application Number Priority Date Filing Date Title
KR93024398A KR970006694B1 (en) 1993-11-16 1993-11-16 A manufacturing method of an optical path regulating apparatus
BR9407923A BR9407923A (en) 1993-10-29 1994-10-25 Set of M x N thin film actuated mirrors optical projection system and process for manufacturing a set of M x N thin film actuated mirrors
AU80052/94A AU693119B2 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and methods for its manufacture
RU96110182/09A RU2140722C1 (en) 1993-10-29 1994-10-25 Thin-film actuated mirror matrix and process of its manufacture
CA002175198A CA2175198A1 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and methods for its manufacture
HU9601094A HU220516B1 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and method for its manufacture
JP51252995A JP3283881B2 (en) 1993-10-29 1994-10-25 M × N thin-film actuated mirror array and method of manufacturing the same
CZ19961180A CZ288846B6 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and method for the manufacture thereof.
PCT/KR1994/000148 WO1995012287A1 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and methods for its manufacture
CN94193967A CN1047056C (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and method for its manufacture
PL94314124A PL176406B1 (en) 1993-10-29 1994-10-25 System of movable thin-layer mirrors and method of making such system
ES94117124T ES2140490T3 (en) 1993-10-29 1994-10-28 MATRIX OF THIN FILM DRIVEN MIRRORS AND ITS MANUFACTURING METHOD.
DE69420666T DE69420666T2 (en) 1993-10-29 1994-10-28 Arrangement of controlled thin film mirrors and process for their production
EP94117124A EP0651274B1 (en) 1993-10-29 1994-10-28 Thin film actuated mirror array and method for the manufacture thereof
US08/331,399 US5661611A (en) 1993-10-29 1994-10-28 Thin film actuated mirror array and method for the manufacture thereof
MYPI94002871A MY113977A (en) 1993-10-29 1994-10-28 Thin film actuated mirror array and method for the manufacture thereof
TW083110157A TW279930B (en) 1993-10-29 1994-11-03
US08/877,645 US5936757A (en) 1993-10-29 1997-06-17 Thin film actuated mirror array
US08/877,084 US5900998A (en) 1993-10-29 1997-06-17 Thin film actuated mirror array and method for the manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93024398A KR970006694B1 (en) 1993-11-16 1993-11-16 A manufacturing method of an optical path regulating apparatus

Publications (2)

Publication Number Publication Date
KR950016306A KR950016306A (en) 1995-06-17
KR970006694B1 true KR970006694B1 (en) 1997-04-29

Family

ID=19368222

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93024398A KR970006694B1 (en) 1993-10-29 1993-11-16 A manufacturing method of an optical path regulating apparatus

Country Status (1)

Country Link
KR (1) KR970006694B1 (en)

Also Published As

Publication number Publication date
KR950016306A (en) 1995-06-17

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