CN104674313A - Electroplating method and device for preparing array micro/nanostructure on coated metal surface - Google Patents
Electroplating method and device for preparing array micro/nanostructure on coated metal surface Download PDFInfo
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- CN104674313A CN104674313A CN201510071023.6A CN201510071023A CN104674313A CN 104674313 A CN104674313 A CN 104674313A CN 201510071023 A CN201510071023 A CN 201510071023A CN 104674313 A CN104674313 A CN 104674313A
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Abstract
The invention discloses an electroplating method and device for preparing an array micro/nanostructure on a coated metal surface. An electroplating solution inlet and an electroplating solution outlet of an electroplating solution flowing channel are respectively provided with an anode; and the upper side of the electroplating solution flowing channel is provided with a template mounting station for placing a film template of the micro/nanostructure, and the lower side of the electroplating solution flowing channel is provided with a substrate mounting station for mounting a substrate. Due to the adoption of the unique electroplating solution flowing channel in the structure and controllable control on the flow rate and current of an electroplating solution in the channel, the quality of an electroplating process can be greatly improved; and by combining the electroplating method, the technical means of the whole electroplating process are simple, convenient and easy, the time and labor are saved, the cost is low, the electroplating method is suitable for a flexible template, the shape of a self-adaptive curve can be designed according to the shape of a base material, and a coating with the array micro/nanostructure can be prepared on a planar or curved surface. The preparation integration of the coating and the surface structure thereof is realized, and secondary structure preparation of the coating is not needed.
Description
Technical field
The present invention relates to electroplating technology and device thereof, particularly relate to a kind of electro-plating method and the device of preparing array micro-nano structure on coated metal surface.
Background technology
Along with society is to the growth of technological innovation needs, was mainly used in metal and the non-metal electroplating technology of decorative articles in the past, has become now important functional coating and accuracy electroplate technology.
Apply very extensive especially in the middle of semiconductor microelectronic industry, and along with semiconductor integrated circuit is to high-density, small light development, various new type functional electroplating technology will continue to bring out.
But electroplating technology ripe at present only can realize compactness and the surface smoothness of coating, does not directly prepare array micro-nano structure on coated metal surface by directly controlling electric current, electroplate liquid etc.
Improve material property by preparation table surface function structure to have and use widely, as improved material hydrophilic, improving self-cleaning property etc.Explore and prepare micro-nano structure on coated metal surface, improve functional coating performance further and have great importance.
Particularly in electronic technology, circuit degree of integration is more and more higher, and circuit card heat flow density increases, and improving heat dissipation for circuit board ability by raising coating Copper Foil specific surface area will have great meaning.
Summary of the invention
The object of the invention is to the technical deficiency that not yet can realize preparing on coated metal surface functional structure for existing electroplating technology, a kind of electro-plating method and the device of preparing array micro-nano structure on coated metal surface are provided.
The present invention is achieved through the following technical solutions:
Prepare an electroplanting device for array micro-nano structure on coated metal surface, this electroplanting device comprises recycle pump 4, power supply 8, electroplate liquid flow passage 3-1; At the electroplate liquid entrance of electroplate liquid flow passage 3-1 and electroplate liquid outlet, anode 2 is set respectively; On the upside of the passage of electroplate liquid flow passage 3-1, be provided with the model sheetinstallat station of the thin-film template 5 for placing micro-nano structure 5-1, station installed by the substrate be provided with on the downside of the passage of electroplate liquid flow passage 3-1 for installing the substrate 6-1 with seed coating; The positive pole jointed anode 2 of described power supply 8, negative pole is as the negative electrode 7 for connecting seed coating.
Current control module 1 is provided with between the positive pole of described power supply 8 and anode 2.
Described recycle pump 4 has the rate control module of its rotating speed of control.
The electro-plating method preparing array micro-nano structure on coated metal surface is as follows:
(1) according to metal or organic plating substrate characteristics, sputtering method or chemical plating method is selected to prepare on substrate 6-1 surface the seed coating 6 that thickness is 0.1-1um, as coated metal absorption initial layers; The substrate 6-1 substrate be arranged on the downside of electroplate liquid flow passage 3-1 then this with seed coating 6 is installed on station, seed coating 6 contact electricity plating solution;
(2) surface is had the thin-film template 5 of micro-nano structure, on the upside of the passage being arranged on electroplate liquid flow passage 3-1 by model sheetinstallat station, the micro-nano structure 5-1 contact electricity plating solution of thin-film template 5; Distance between the end of micro-nano structure 5-1 and the described seed coating of step (1) is 20-100um, and thin-film template 5, as the constraint template of coating, prepares the micro-nano structure of corresponding thin-film template 5 on coated metal surface;
(3) character of initial layers and coated metal material is adsorbed according to coated metal to be plated, metallic particles 3-2 and filling perforation photo etching are added in electroplate liquid, filling perforation photo etching is used for refinement coating crystalline texture, has flat configuration when micro-nano structure 5-1 filled by the coating that metallic particles 3-2 is formed;
(4) in the plating starting stage, by current control module 1 and rate control module, the rotating speed of recycle pump 4 is controlled, adopt 2-10A/dm
2current density, coordinate 0.3-1.5ms
-1the flow velocity of electroplate liquid in electroplate liquid flow passage 3-1 carries out lagging cover; When metallic particles 3-2 grows gradually and is about to the nib contacts with micro-nano structure 5-1 on seed coating 6, because electroplate liquid flowing is limited gradually, now use 0.2-2A/dm instead
2current density, and increase the flow velocity of electroplate liquid in flow passage 3-1 to 1.5-6ms
-1carry out essence plating, metallic particles 3-2 can successfully constantly be grown on seed coating 6, until space between whole micro-nano structure 5-1 is filled up and contact membrane template 5, meanwhile stop flowing in electroplate liquid flow passage 3-1, i.e. electroless plating liquid 3 in electroplate liquid flow passage 3-1, coating stops growing, and completes the micro-nano structure plating on seed coating 6;
(5) after having electroplated, select organic solvent to be dissolved by thin-film template 5, namely obtain the metal plating that surface topography is the micro-nano array structure of concavity cylinder, circular cone, rectangle or hemisphere.
The degree of depth of the described micro-nano array structure of step (5) is 2-100um.
Electroplate liquid 3 temperature is 30 DEG C.
The present invention, relative to prior art, has following advantage and effect:
This device, arranges anode 2 respectively at the electroplate liquid entrance of electroplate liquid flow passage 3-1 and electroplate liquid outlet; On the upside of the passage of electroplate liquid flow passage 3-1, be provided with the model sheetinstallat station of the thin-film template 5 for placing micro-nano structure 5-1, station installed by the substrate be provided with on the downside of the passage of electroplate liquid flow passage 3-1 for installing the substrate 6-1 with seed coating; The positive pole jointed anode 2 of described power supply 8, negative pole is as the negative electrode 7 for connecting seed coating.Due to the flow velocity of electroplate liquid and the control of current adjustment in the electroplate liquid flow passage 3-1 of structure uniqueness and passage, greatly can improve the quality of electroplating technology, in conjunction with this electro-plating method, not only whole electroplating process technique means is simple and easy to do, saving of work and time, and with low cost.
In electroplating process, by placing the thin-film template with micro-nano structure on the upside of the passage of electroplate liquid flow passage 3-1, this thin-film template grows constraint template as coating, thin-film template can be dissolved by lysate again, achieve being separated of thin-film template and micro-nano structure coating, the adjustment of thickness of coating and micro-nano structure pattern can be carried out.
This device is applicable to Flexible formwork assembly, and can carry out the design of self-adaptation curve form according to substrate shapes, prepares the coating with array micro-nano structure in plane or curved surface.Achieve integration prepared by coating and surface tissue thereof, do not need to carry out secondary structure preparation to coating.
Prepared by concavity array structure for circuit card copper foil surface, effectively can improve boiling heat transfer performance, greatly improve heat dissipation for circuit board performance.
Accompanying drawing explanation
Electroplanting device structural representation of the present invention shown in Fig. 1.
Fig. 2 be shown in coated metal surface and prepare the electro-plating method schematic flow sheet of array micro-nano structure; Show in figure, metallic particles 3-2 grows gradually on seed coating 6, but state during nib contacts not with micro-nano structure 5-1.
Fig. 3 be shown in coated metal surface and prepare the electro-plating method schematic flow sheet of array micro-nano structure; Show in figure, metallic particles 3-2 grows gradually on seed coating 6, and is about to state when contacting with the tip of micro-nano structure 5-1.
Fig. 4 be shown in coated metal surface and prepare the electro-plating method schematic flow sheet of array micro-nano structure; Show in figure, metallic particles 3-2 grows gradually on seed coating 6, and the state before gradually the space between whole micro-nano structure 5-1 being filled up.
Embodiment
Below in conjunction with specific embodiment, the present invention is more specifically described in detail.
Embodiment
As shown in Figures 1 to 4.A kind of electroplanting device preparing array micro-nano structure on coated metal surface of the present invention, this electroplanting device comprises recycle pump 4, power supply 8, electroplate liquid flow passage 3-1; At the electroplate liquid entrance of electroplate liquid flow passage 3-1 and electroplate liquid outlet, anode 2 is set respectively; On the upside of the passage of electroplate liquid flow passage 3-1, be provided with the model sheetinstallat station of the thin-film template 5 for placing micro-nano structure 5-1, station installed by the substrate be provided with on the downside of the passage of electroplate liquid flow passage 3-1 for installing the substrate 6-1 with seed coating; The positive pole jointed anode 2 of described power supply 8, negative pole is as the negative electrode 7 for connecting seed coating.
Current control module 1 is provided with between the positive pole of described power supply 8 and anode 2.
Described recycle pump 4 has the rate control module of its rotating speed of control.
The electro-plating method preparing array micro-nano structure on coated metal surface is as follows:
(1) according to metal or organic plating substrate characteristics, sputtering method or chemical plating method is selected to prepare on substrate 6-1 surface the seed coating 6 that thickness is 0.1-1um, as coated metal absorption initial layers; The substrate 6-1 substrate be arranged on the downside of electroplate liquid flow passage 3-1 then this with seed coating 6 is installed on station, seed coating 6 contact electricity plating solution;
(2) surface is had the thin-film template 5 of micro-nano structure (metal), on the upside of the passage being arranged on electroplate liquid flow passage 3-1 by model sheetinstallat station, the micro-nano structure 5-1 contact electricity plating solution of thin-film template 5; Distance between the end of micro-nano structure 5-1 and step (1) described seed coating is 20-100um (preferred 50um), thin-film template 5 (polymer), as the constraint template of coating, prepares the micro-nano structure of corresponding thin-film template 5 on coated metal surface;
(3) character of initial layers and coated metal material is adsorbed according to coated metal to be plated, metallic particles 3-2 and filling perforation photo etching are added in electroplate liquid, filling perforation photo etching is used for refinement coating crystalline texture, has flat configuration when micro-nano structure 5-1 filled by the coating that metallic particles 3-2 is formed;
(4) in the plating starting stage, by current control module 1 and rate control module, the rotating speed of recycle pump 4 is controlled, adopt 2-10A/dm
2current density (preferred 3A/dm
2), coordinate 0.3-1.5ms
-1the flow velocity of (preferred electroplating time is 20min) electroplate liquid in electroplate liquid flow passage 3-1 carries out lagging cover; When metallic particles 3-2 grows gradually and is about to the nib contacts with micro-nano structure 5-1 on seed coating 6, because electroplate liquid flowing is limited gradually, now use 0.2-2A/dm instead
2current density (preferred 0.5A/dm
2), and increase the flow velocity of electroplate liquid in flow passage 3-1 to 1.5-6ms
-1carry out essence plating (preferred 1.8ms
-1), metallic particles 3-2 can successfully constantly be grown on seed coating 6, until space between whole micro-nano structure 5-1 is filled up and contact membrane template 5, meanwhile stop flowing in electroplate liquid flow passage 3-1, i.e. electroless plating liquid 3 in electroplate liquid flow passage 3-1, coating stops growing, and completes the micro-nano structure plating on seed coating 6; (by controlling the flow velocity of electroplate liquid, can effectively prevent Nonuniform filling from causing micro-nano structure opening part to occur occurring space in blocking or coating.)
(5) after having electroplated, select organic solvent to be dissolved by thin-film template 5, namely obtain the metal plating that surface topography is the micro-nano array structure of concavity cylinder, circular cone, rectangle or hemisphere.
The degree of depth of the described micro-nano array structure of step (5) is 2-100um.
Electroplate liquid 3 (CuSo4 electroplate liquid) temperature is 30 DEG C.
The thin-film template 5 of micro-nano structure not with Electrode connection, as coated metal growth constraint template, by rational allocation electrolytic solution and applying bath flow rate, prepare plane or curved surface compact metal coating that big area has array micro-nano structure, to improve coated metal surface property further.
The present invention can also carry out the self-adaptative adjustment of Flexible formwork assembly curve form according to substrate shapes, both can be connected with planar substrate, and also can be connected with Curved surface metal, realizes preparing array micro-nano structure by electric plating method at curved surface or planar metal surface.
Embodiments of the present invention are not restricted to the described embodiments; other are any do not deviate from spirit of the present invention and principle under do change, modification, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (6)
1. prepare an electroplanting device for array micro-nano structure on coated metal surface, it is characterized in that: this electroplanting device comprises recycle pump (4), power supply (8), electroplate liquid flow passage (3-1); At the electroplate liquid entrance of electroplate liquid flow passage (3-1) and electroplate liquid outlet, anode (2) is set respectively; On the upside of the passage of electroplate liquid flow passage (3-1), be provided with the model sheetinstallat station of the thin-film template (5) for placing micro-nano structure (5-1), station installed by the substrate be provided with on the downside of the passage of electroplate liquid flow passage (3-1) for installing the substrate (6-1) with seed coating; The positive pole jointed anode (2) of described power supply (8), negative pole is as the negative electrode (7) for connecting seed coating.
2. electroplanting device according to claim 1, is characterized in that: be provided with current control module (1) between the positive pole of described power supply (8) and anode (2).
3. electroplanting device according to claim 1, is characterized in that: described recycle pump (4) has the rate control module of its rotating speed of control.
4. adopt electroplanting device according to any one of claims 1 to 3 to prepare the electro-plating method of array micro-nano structure on coated metal surface, it is characterized in that comprising the steps:
(1) according to metal or organic plating substrate characteristics, sputtering method or chemical plating method is selected to prepare the seed coating (6) that thickness is 0.1-1um on substrate (6-1) surface, as coated metal absorption initial layers; The substrate (6-1) then this with seed coating (6) is arranged on the substrate installation station of electroplate liquid flow passage (3-1) downside, seed coating (6) contact electricity plating solution;
(2) surface had the thin-film template (5) of micro-nano structure, on the upside of the passage being arranged on electroplate liquid flow passage (3-1) by model sheetinstallat station, micro-nano structure (5-1) the contact electricity plating solution of thin-film template (5); Distance between the end of micro-nano structure (5-1) and the described seed coating (6) of step (1) is 20-100um, thin-film template (5), as the constraint template of coating, prepares the micro-nano structure of corresponding thin-film template (5) on coated metal surface;
(3) character of initial layers and coated metal material is adsorbed according to coated metal to be plated, metallic particles (3-2) and filling perforation photo etching are added in electroplate liquid, filling perforation photo etching is used for refinement coating crystalline texture, has flat configuration when the coating that metallic particles (3-2) is formed fills micro-nano structure (5-1);
(4) in the plating starting stage, by current control module (1) and rate control module, the rotating speed of recycle pump (4) is controlled, adopt 2-10A/dm
2current density, coordinate 0.3-1.5ms
-1the flow velocity of electroplate liquid in electroplate liquid flow passage (3-1) carries out lagging cover; When metallic particles (3-2) grows gradually and is about to the nib contacts with micro-nano structure (5-1) on seed coating (6), because electroplate liquid flowing is limited gradually, now use 0.2-2A/dm instead
2current density, and increase the flow velocity of electroplate liquid in flow passage 3-1 to 1.5-6ms
-1carry out essence plating, metallic particles (3-2) can successfully above constantly be grown at seed coating (6), until space between whole micro-nano structure (5-1) is filled up and contact membrane template (5), meanwhile stop flowing in electroplate liquid flow passage (3-1), the i.e. interior electroless plating liquid (3) of electroplate liquid flow passage (3-1), coating stops growing, and completes the micro-nano structure plating on seed coating (6);
(5), after having electroplated, select organic solvent to be dissolved by thin-film template (5), namely obtain the metal plating that surface topography is the micro-nano array structure of concavity cylinder, circular cone, rectangle or hemisphere.
5. electro-plating method according to claim 4, is characterized in that: the degree of depth of the described micro-nano array structure of step (5) is 2-100um.
6. electro-plating method according to claim 4, is characterized in that: electroplate liquid (3) temperature is 30 DEG C.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105253852A (en) * | 2015-09-02 | 2016-01-20 | 西安建筑科技大学 | Manufacturing method of template of micro-nano composite structure |
| CN105329849A (en) * | 2015-10-16 | 2016-02-17 | 上海师范大学 | MEMS micro array structure processing method based on micro-electroplating |
| CN109056011A (en) * | 2018-07-01 | 2018-12-21 | 青岛昊月鑫电子材料有限公司 | A kind of preparation method applied to high capacity lithium ion cells cathode micropore copper foil |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100224496A1 (en) * | 2005-01-25 | 2010-09-09 | Nippon Mining & Metals Co., Ltd. | Copper electrolytic solution containing as additive compound having specific skeleton, and electrolytic copper foil manufactured therewith |
| CN102766892A (en) * | 2012-08-10 | 2012-11-07 | 重庆绿色智能技术研究院 | Micro-nano processing method and device |
| CN203080093U (en) * | 2012-12-20 | 2013-07-24 | 华南理工大学 | Electro-deposition device for manufacturing micro-nano composite porous copper surface structure |
| CN103320825A (en) * | 2013-06-06 | 2013-09-25 | 宁波微极电子科技有限公司 | Method for manufacturing high-density large-scale micro-nano-structure array |
| CN204509474U (en) * | 2015-02-10 | 2015-07-29 | 华南理工大学 | A kind of electroplanting device preparing array micro-nano structure on coated metal surface |
-
2015
- 2015-02-10 CN CN201510071023.6A patent/CN104674313B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100224496A1 (en) * | 2005-01-25 | 2010-09-09 | Nippon Mining & Metals Co., Ltd. | Copper electrolytic solution containing as additive compound having specific skeleton, and electrolytic copper foil manufactured therewith |
| CN102766892A (en) * | 2012-08-10 | 2012-11-07 | 重庆绿色智能技术研究院 | Micro-nano processing method and device |
| CN203080093U (en) * | 2012-12-20 | 2013-07-24 | 华南理工大学 | Electro-deposition device for manufacturing micro-nano composite porous copper surface structure |
| CN103320825A (en) * | 2013-06-06 | 2013-09-25 | 宁波微极电子科技有限公司 | Method for manufacturing high-density large-scale micro-nano-structure array |
| CN204509474U (en) * | 2015-02-10 | 2015-07-29 | 华南理工大学 | A kind of electroplanting device preparing array micro-nano structure on coated metal surface |
Non-Patent Citations (4)
| Title |
|---|
| "脉冲电镀纳米金工艺分析";谷城等;《电镀与环保》;20120531;第32卷(第3期);第19-21页 * |
| "适用于微加工工艺的纳米多孔铜制备方法";岳恒等;《微纳电子技术》;20140131;第51卷(第1期);第53-58页 * |
| 岳恒等: ""适用于微加工工艺的纳米多孔铜制备方法"", 《微纳电子技术》 * |
| 谷城等: ""脉冲电镀纳米金工艺分析"", 《电镀与环保》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105253852A (en) * | 2015-09-02 | 2016-01-20 | 西安建筑科技大学 | Manufacturing method of template of micro-nano composite structure |
| CN105329849A (en) * | 2015-10-16 | 2016-02-17 | 上海师范大学 | MEMS micro array structure processing method based on micro-electroplating |
| CN109056011A (en) * | 2018-07-01 | 2018-12-21 | 青岛昊月鑫电子材料有限公司 | A kind of preparation method applied to high capacity lithium ion cells cathode micropore copper foil |
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