CN104634335B - 检测装置、传感器、电子设备以及移动体 - Google Patents

检测装置、传感器、电子设备以及移动体 Download PDF

Info

Publication number
CN104634335B
CN104634335B CN201410637881.8A CN201410637881A CN104634335B CN 104634335 B CN104634335 B CN 104634335B CN 201410637881 A CN201410637881 A CN 201410637881A CN 104634335 B CN104634335 B CN 104634335B
Authority
CN
China
Prior art keywords
circuit
signal
power supply
voltage
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410637881.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN104634335A (zh
Inventor
牧克彦
樋口哲平
野宫崇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN104634335A publication Critical patent/CN104634335A/zh
Application granted granted Critical
Publication of CN104634335B publication Critical patent/CN104634335B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/156—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
    • H02M3/158—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/45—Differential amplifiers
    • H03F3/45071—Differential amplifiers with semiconductor devices only
    • H03F3/45076—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier
    • H03F3/45179—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier using MOSFET transistors as the active amplifying circuit
    • H03F3/45183—Long tailed pairs
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/45—Differential amplifiers
    • H03F3/45071—Differential amplifiers with semiconductor devices only
    • H03F3/45076—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier
    • H03F3/45475—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier using IC blocks as the active amplifying circuit
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03G—CONTROL OF AMPLIFICATION
    • H03G3/00—Gain control in amplifiers or frequency changers
    • H03G3/20—Automatic control
    • H03G3/30—Automatic control in amplifiers having semiconductor devices
    • H03G3/3005—Automatic control in amplifiers having semiconductor devices in amplifiers suitable for low-frequencies, e.g. audio amplifiers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/261—Amplifier which being suitable for instrumentation applications
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45212—Indexing scheme relating to differential amplifiers the differential amplifier being designed to have a reduced offset
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45466—Indexing scheme relating to differential amplifiers the CSC being controlled, e.g. by a signal derived from a non specified place in the dif amp circuit
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45504—Indexing scheme relating to differential amplifiers the CSC comprising more than one switch
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45508—Indexing scheme relating to differential amplifiers the CSC comprising a voltage generating circuit as bias circuit for the CSC
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45528—Indexing scheme relating to differential amplifiers the FBC comprising one or more passive resistors and being coupled between the LC and the IC
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45536—Indexing scheme relating to differential amplifiers the FBC comprising a switch and being coupled between the LC and the IC
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45674—Indexing scheme relating to differential amplifiers the LC comprising one current mirror

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Gyroscopes (AREA)
CN201410637881.8A 2013-11-07 2014-11-06 检测装置、传感器、电子设备以及移动体 Active CN104634335B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013231343A JP6303411B2 (ja) 2013-11-07 2013-11-07 検出装置、センサー、電子機器及び移動体
JP2013-231343 2013-11-07

Publications (2)

Publication Number Publication Date
CN104634335A CN104634335A (zh) 2015-05-20
CN104634335B true CN104634335B (zh) 2018-06-19

Family

ID=53005992

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410637881.8A Active CN104634335B (zh) 2013-11-07 2014-11-06 检测装置、传感器、电子设备以及移动体

Country Status (3)

Country Link
US (1) US9698686B2 (OSRAM)
JP (1) JP6303411B2 (OSRAM)
CN (1) CN104634335B (OSRAM)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6213165B2 (ja) * 2013-11-07 2017-10-18 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
US9689738B1 (en) * 2014-04-14 2017-06-27 Lightworks Ii, Llc Method and apparatus for offset frequency separation and drop out mitigation in non-contact vibrometry
JP6500522B2 (ja) * 2015-03-16 2019-04-17 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
JP2016178601A (ja) * 2015-03-23 2016-10-06 セイコーエプソン株式会社 データ処理回路、物理量検出用回路、物理量検出装置、電子機器及び移動体
US10030976B2 (en) * 2015-05-13 2018-07-24 Kionix, Inc. Phase-based measurement and control of a gyroscope
CN104977027B (zh) * 2015-05-29 2017-06-13 江阴苏阳电子股份有限公司 基于mcm‑3d封装的微型智能传感器
JP6561702B2 (ja) * 2015-09-09 2019-08-21 セイコーエプソン株式会社 物理量検出システム、電子機器及び移動体
EP3367452A1 (en) * 2017-02-28 2018-08-29 Koninklijke Philips N.V. Electroactive material actuator and drive method
KR101869924B1 (ko) * 2017-01-31 2018-06-21 다믈멀티미디어주식회사 자이로센서 모듈
CN106859607B (zh) * 2017-04-07 2024-05-28 北京睿仁医疗科技有限公司 一种多参数监控系统
WO2020095450A1 (ja) * 2018-11-09 2020-05-14 株式会社安川電機 電力変換装置、圧送装置、及び制御方法
KR20220116290A (ko) * 2020-01-24 2022-08-22 가부시키가이샤 리코 센서 소자 및 센서 시스템
FR3114146B1 (fr) * 2020-09-17 2022-08-12 Safran Electronics & Defense capteur vibrant avec unité d’hybridation
CN113156341B (zh) * 2021-03-11 2023-08-04 南京高速齿轮制造有限公司 一种齿轮箱振动传感器检测电路及装置
CN113904584B (zh) * 2021-09-17 2024-05-24 中国科学院沈阳自动化研究所 一种应用于压电复合纤维的高压驱动器
CN115032786A (zh) * 2022-06-27 2022-09-09 湖北三江航天万峰科技发展有限公司 一种提升微振镜扭转控制精度的控制系统及控制方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1141429A (zh) * 1995-01-11 1997-01-29 富川义朗 静电型传感器装置中减少电容分量的回路
JP2008099257A (ja) * 2006-09-13 2008-04-24 Citizen Holdings Co Ltd 発振回路
CN101520327A (zh) * 2008-02-29 2009-09-02 精工爱普生株式会社 物理量测定装置以及电子设备
JP2010169408A (ja) * 2009-01-20 2010-08-05 Epson Toyocom Corp 物理量検出装置

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05259738A (ja) 1992-03-13 1993-10-08 Hitachi Ltd 発振回路
JPH06265358A (ja) * 1993-03-15 1994-09-20 Tokin Corp 圧電振動ジャイロ用駆動検出回路
JPH08307199A (ja) * 1995-01-11 1996-11-22 Yoshiro Tomikawa 静電型変換手段の容量成分低減回路および静電型変換手段の駆動装置ならびに検出装置
JP3805837B2 (ja) * 1996-08-12 2006-08-09 トヨタ自動車株式会社 角速度検出装置
US6510737B1 (en) 2000-09-15 2003-01-28 Bei Technologies, Inc. Inertial rate sensor and method with improved tuning fork drive
JP2006029901A (ja) 2004-07-14 2006-02-02 Sony Corp 振動ジャイロの駆動回路
US7849744B2 (en) 2006-08-02 2010-12-14 Seiko Epson Corporation Driving device, physical quantity measurement device, and electronic instrument
JP4930253B2 (ja) 2006-08-02 2012-05-16 セイコーエプソン株式会社 駆動装置、物理量測定装置及び電子機器
JP2008089577A (ja) 2006-09-08 2008-04-17 Seiko Epson Corp 駆動装置、物理量測定装置及び電子機器
JP5294228B2 (ja) * 2006-09-27 2013-09-18 シチズンホールディングス株式会社 物理量センサ
JP2008096244A (ja) * 2006-10-11 2008-04-24 Nippon Dempa Kogyo Co Ltd 2軸検出型の角速度センサ
JP4380732B2 (ja) * 2007-06-04 2009-12-09 セイコーエプソン株式会社 検出回路、振動型ジャイロセンサ回路、振動型ジャイロセンサおよび電子機器
JP4450029B2 (ja) * 2007-07-24 2010-04-14 セイコーエプソン株式会社 発振駆動回路、発振駆動装置、物理量測定回路、物理量測定装置および電子機器
JP4572350B2 (ja) 2008-03-21 2010-11-04 セイコーエプソン株式会社 同期検波回路、検出回路、物理量測定装置、ジャイロセンサおよび電子機器
JP5360361B2 (ja) 2008-07-17 2013-12-04 セイコーエプソン株式会社 角速度検出装置用回路、角速度検出装置及び故障判定システム
WO2011010446A1 (ja) 2009-07-22 2011-01-27 パナソニック株式会社 角速度センサ
JP4821900B2 (ja) 2009-09-11 2011-11-24 セイコーエプソン株式会社 検出装置、物理量測定装置及び電子機器
WO2011045909A1 (ja) 2009-10-13 2011-04-21 パナソニック株式会社 角速度センサ
EP2336717B1 (en) * 2009-12-21 2012-09-19 STMicroelectronics Srl Microelectromechanical device having an oscillating mass, and method for controlling a microelectromechanical device having an oscillating mass
JP5717376B2 (ja) 2010-03-31 2015-05-13 シチズンホールディングス株式会社 物理量センサ
US8939007B2 (en) 2011-04-27 2015-01-27 Panasonic Corporation Inertial force sensor and zero point correction method used therein
JP6006402B2 (ja) * 2012-10-18 2016-10-12 株式会社日立製作所 ストレージ装置、及びストレージ装置の記憶制御部
JP6194606B2 (ja) * 2013-03-22 2017-09-13 セイコーエプソン株式会社 検出装置、センサー、ジャイロセンサー、電子機器及び移動体
JP6307840B2 (ja) * 2013-11-07 2018-04-11 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6213165B2 (ja) * 2013-11-07 2017-10-18 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6277689B2 (ja) * 2013-11-27 2018-02-14 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6331365B2 (ja) * 2013-12-05 2018-05-30 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1141429A (zh) * 1995-01-11 1997-01-29 富川义朗 静电型传感器装置中减少电容分量的回路
JP2008099257A (ja) * 2006-09-13 2008-04-24 Citizen Holdings Co Ltd 発振回路
CN101520327A (zh) * 2008-02-29 2009-09-02 精工爱普生株式会社 物理量测定装置以及电子设备
JP2010169408A (ja) * 2009-01-20 2010-08-05 Epson Toyocom Corp 物理量検出装置

Also Published As

Publication number Publication date
JP2015090353A (ja) 2015-05-11
US9698686B2 (en) 2017-07-04
CN104634335A (zh) 2015-05-20
JP6303411B2 (ja) 2018-04-04
US20150122034A1 (en) 2015-05-07

Similar Documents

Publication Publication Date Title
JP6303411B2 (ja) 検出装置、センサー、電子機器及び移動体
JP6277689B2 (ja) 検出装置、センサー、電子機器及び移動体
JP6241246B2 (ja) 検出装置、センサー、電子機器及び移動体
JP4450029B2 (ja) 発振駆動回路、発振駆動装置、物理量測定回路、物理量測定装置および電子機器
JP6307840B2 (ja) 検出装置、センサー、電子機器及び移動体
JP3964875B2 (ja) 角速度センサ
US9506758B2 (en) Detection device, sensor, electronic apparatus, and moving object
US20160276990A1 (en) Circuit device, physical-quantity detecting apparatus, electronic apparatus, and moving object
JP4668407B2 (ja) 角速度センサ
JP5136016B2 (ja) 駆動装置、物理量測定装置及び電子機器
CN110296697B (zh) 电路装置、物理量测量装置、电子设备以及移动体
JP2017050664A (ja) アナログ基準電圧生成回路、回路装置、物理量センサー、電子機器及び移動体
CN105823473B (zh) 电路装置、电子设备、移动体以及物理量检测装置的制造方法
JP6492949B2 (ja) 回路装置、物理量検出装置、電子機器及び移動体
CN104634336B (zh) 检测装置、传感器、电子设备以及移动体
CN106525015B (zh) 物理量检测系统、电子设备以及移动体
JP5181449B2 (ja) 検出装置、センサ及び電子機器
JP2007057340A (ja) 発振回路及び角速度センサ
JP2009168588A (ja) 検出回路、物理量測定装置、ジャイロセンサおよび電子機器
JP6459365B2 (ja) センサー、電子機器、及び移動体
JP2009168659A (ja) 検出回路、物理量測定装置、ジャイロセンセおよび電子機器

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant