CN104584247B - 压电材料 - Google Patents

压电材料 Download PDF

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Publication number
CN104584247B
CN104584247B CN201380044054.1A CN201380044054A CN104584247B CN 104584247 B CN104584247 B CN 104584247B CN 201380044054 A CN201380044054 A CN 201380044054A CN 104584247 B CN104584247 B CN 104584247B
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CN
China
Prior art keywords
piezoelectric
piezoelectric element
electrode
present
piezoelectric material
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Expired - Fee Related
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CN201380044054.1A
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English (en)
Chinese (zh)
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CN104584247A (zh
Inventor
渡边隆之
村上俊介
上田未纪
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Canon Inc
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Canon Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3213—Strontium oxides or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3215—Barium oxides or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
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    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
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    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3281—Copper oxides, cuprates or oxide-forming salts thereof, e.g. CuO or Cu2O
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
  • Camera Bodies And Camera Details Or Accessories (AREA)
CN201380044054.1A 2012-08-27 2013-08-16 压电材料 Expired - Fee Related CN104584247B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012186642 2012-08-27
JP2012-186642 2012-08-27
PCT/JP2013/072487 WO2014034534A1 (en) 2012-08-27 2013-08-16 Piezoelectric material

Publications (2)

Publication Number Publication Date
CN104584247A CN104584247A (zh) 2015-04-29
CN104584247B true CN104584247B (zh) 2017-04-12

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Country Status (7)

Country Link
US (1) US9768375B2 (https=)
EP (1) EP2867929B1 (https=)
JP (1) JP6310212B2 (https=)
KR (1) KR20150046189A (https=)
CN (1) CN104584247B (https=)
TW (1) TWI541214B (https=)
WO (1) WO2014034534A1 (https=)

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US11201571B2 (en) 2016-03-25 2021-12-14 Canon Kabushiki Kaisha Method of manufacturing an oscillator
JP2018107437A (ja) * 2016-12-27 2018-07-05 キヤノン株式会社 振動子、振動波駆動装置、振動波モータおよび電子機器
JP7542941B2 (ja) * 2018-12-21 2024-09-02 キヤノン株式会社 圧電素子の製造方法、電子機器の製造方法、圧電素子、および電子機器
TWI713984B (zh) * 2019-01-28 2020-12-21 和碩聯合科技股份有限公司 計算導體阻抗的方法
CN113578858B (zh) * 2021-08-02 2022-09-27 西安奕斯伟硅片技术有限公司 清洗装置和清洗方法
TWI774498B (zh) * 2021-08-02 2022-08-11 日商雅馬哈智能機器控股股份有限公司 超音波清洗方法
TWI869837B (zh) * 2023-04-28 2025-01-11 毛榆喬 超音波清洗機
TWI892558B (zh) * 2024-04-02 2025-08-01 環球晶圓股份有限公司 超音波清洗裝置的異常檢測方法及檢核晶片

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85100507A (zh) * 1985-04-01 1986-08-13 中国科学院上海硅酸盐研究所 改性铌酸铅钡钠压电陶瓷材料
CN1460093A (zh) * 2001-03-30 2003-12-03 Tdk株式会社 压电陶瓷及其制造方法以及压电元件
JP2004075448A (ja) * 2002-08-15 2004-03-11 Taiyo Yuden Co Ltd 圧電磁器組成物、圧電磁器組成物の製造方法および圧電セラミック部品
CN101239824A (zh) * 2007-02-06 2008-08-13 香港理工大学 铌酸钠钾锆钛酸钡系无铅压电陶瓷组合物
CN101857436A (zh) * 2010-06-12 2010-10-13 中国地质大学（武汉） 一类铌酸钾钠基无铅压电陶瓷粉体及其制备方法
CN102159748A (zh) * 2008-09-19 2011-08-17 富士胶片株式会社 成膜方法、成膜装置、压电膜、压电器件和液体排出装置
CN102249596A (zh) * 2011-03-25 2011-11-23 四川大学 高介电常数铌酸盐系无铅压电陶瓷-聚合物三相复合材料
CN102515761A (zh) * 2011-12-22 2012-06-27 四川师范大学 铌酸钠锆钛酸钡钙系无铅压电陶瓷组合物

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1160334A (ja) * 1997-08-11 1999-03-02 Kyocera Corp アクチュエータ用圧電磁器組成物
TWI228728B (en) 2001-05-29 2005-03-01 Murata Manufacturing Co Piezoelectric ceramic composition, piezoelectric ceramic element and method for producing piezoelectric ceramic composition
JP2005008515A (ja) 2003-05-26 2005-01-13 Nissan Chem Ind Ltd 金属酸化物粒子及びその製造方法
US7157024B2 (en) 2003-05-26 2007-01-02 Nissan Chemical Industries, Ltd. Metal oxide particle and process for producing same
JP4995412B2 (ja) * 2003-05-29 2012-08-08 日本特殊陶業株式会社 圧電磁器組成物及びこれを用いた圧電素子
JP4432969B2 (ja) 2004-08-18 2010-03-17 株式会社村田製作所 圧電磁器組成物、及び圧電素子
JP2008156172A (ja) 2006-12-25 2008-07-10 National Institute Of Advanced Industrial & Technology 無鉛圧電磁器組成物
JP2009227535A (ja) 2008-03-25 2009-10-08 Panasonic Corp 圧電性磁器組成物
JP2009242167A (ja) 2008-03-31 2009-10-22 Tdk Corp 圧電磁器及びそれを用いた圧電素子
JP6021351B2 (ja) * 2011-02-28 2016-11-09 キヤノン株式会社 圧電材料、圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置およびデバイス
JP6108934B2 (ja) * 2012-04-24 2017-04-05 キヤノン株式会社 圧電セラミックス、圧電素子、超音波モータおよび塵埃除去装置
JP6249669B2 (ja) * 2012-08-27 2017-12-20 キヤノン株式会社 圧電材料、圧電素子、および電子機器
TW201434789A (zh) * 2013-01-29 2014-09-16 Canon Kk 壓電材料、壓電元件及電子裝備

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85100507A (zh) * 1985-04-01 1986-08-13 中国科学院上海硅酸盐研究所 改性铌酸铅钡钠压电陶瓷材料
CN1460093A (zh) * 2001-03-30 2003-12-03 Tdk株式会社 压电陶瓷及其制造方法以及压电元件
JP2004075448A (ja) * 2002-08-15 2004-03-11 Taiyo Yuden Co Ltd 圧電磁器組成物、圧電磁器組成物の製造方法および圧電セラミック部品
CN101239824A (zh) * 2007-02-06 2008-08-13 香港理工大学 铌酸钠钾锆钛酸钡系无铅压电陶瓷组合物
CN102159748A (zh) * 2008-09-19 2011-08-17 富士胶片株式会社 成膜方法、成膜装置、压电膜、压电器件和液体排出装置
CN101857436A (zh) * 2010-06-12 2010-10-13 中国地质大学（武汉） 一类铌酸钾钠基无铅压电陶瓷粉体及其制备方法
CN102249596A (zh) * 2011-03-25 2011-11-23 四川大学 高介电常数铌酸盐系无铅压电陶瓷-聚合物三相复合材料
CN102515761A (zh) * 2011-12-22 2012-06-27 四川师范大学 铌酸钠锆钛酸钡钙系无铅压电陶瓷组合物

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