CN104541077B - 静压气体轴承单元 - Google Patents

静压气体轴承单元 Download PDF

Info

Publication number
CN104541077B
CN104541077B CN201380041777.6A CN201380041777A CN104541077B CN 104541077 B CN104541077 B CN 104541077B CN 201380041777 A CN201380041777 A CN 201380041777A CN 104541077 B CN104541077 B CN 104541077B
Authority
CN
China
Prior art keywords
bearing
thrust
thrust bearing
air
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201380041777.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN104541077A (zh
Inventor
上田智士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oiles Industry Co Ltd
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of CN104541077A publication Critical patent/CN104541077A/zh
Application granted granted Critical
Publication of CN104541077B publication Critical patent/CN104541077B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
CN201380041777.6A 2012-08-10 2013-07-22 静压气体轴承单元 Active CN104541077B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-178123 2012-08-10
JP2012178123A JP2014035054A (ja) 2012-08-10 2012-08-10 静圧気体軸受ユニット
PCT/JP2013/069767 WO2014024666A1 (ja) 2012-08-10 2013-07-22 静圧気体軸受ユニット

Publications (2)

Publication Number Publication Date
CN104541077A CN104541077A (zh) 2015-04-22
CN104541077B true CN104541077B (zh) 2018-05-08

Family

ID=50067900

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380041777.6A Active CN104541077B (zh) 2012-08-10 2013-07-22 静压气体轴承单元

Country Status (5)

Country Link
JP (1) JP2014035054A (https=)
KR (1) KR20150038502A (https=)
CN (1) CN104541077B (https=)
TW (1) TWI622715B (https=)
WO (1) WO2014024666A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104614137B (zh) * 2015-01-15 2016-08-31 浙江大学 基于静压气浮解耦装置的三分量标准振动台
DE102015010875B9 (de) * 2015-08-25 2016-12-29 Thermo Electron (Karlsruhe) Gmbh Rheometer mit Gaslager
CN109564140B (zh) 2016-08-10 2021-05-04 国际计测器株式会社 动平衡测试机
CN109955097B (zh) * 2017-12-22 2020-09-01 上海理工大学 一种静压半球体轴承轴系及精密机床
US11067124B2 (en) * 2018-07-23 2021-07-20 Alio Industries, Inc. Planar rotary air bearing stage
CN111285031B (zh) * 2020-03-11 2021-09-14 上海精测半导体技术有限公司 一种旋转台
CN111637161B (zh) * 2020-05-18 2021-11-09 哈尔滨工程大学 一种带有分布式孔隙的强制润滑轴承
CN111637160B (zh) * 2020-05-18 2021-11-05 哈尔滨工程大学 一种带有不均匀孔径的强制润滑轴承
CN111637159A (zh) * 2020-05-18 2020-09-08 哈尔滨工程大学 一种带有加压孔的自适应强制润滑轴承

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026251U (https=) * 1973-07-02 1975-03-26
JPH03292413A (ja) * 1990-04-06 1991-12-24 Nippon Seiko Kk 多孔質体軸受ユニット
JPH0547543U (ja) * 1991-11-29 1993-06-25 豊田工機株式会社 回転装置
JP3653832B2 (ja) * 1995-12-06 2005-06-02 日本精工株式会社 静圧気体軸受式回転案内装置
JPH11257467A (ja) * 1998-03-06 1999-09-21 Fujiwara:Kk プーリー
JP3667108B2 (ja) * 1998-08-31 2005-07-06 京セラ株式会社 糸状体のガイドローラ
DE102005007297B4 (de) * 2005-02-17 2007-05-31 Minebea Co., Ltd. Fluiddynamisches Luftlagersystem zur Drehlagerung eines Motors
JP5812316B2 (ja) * 2010-10-29 2015-11-11 オイレス工業株式会社 ロール装置
JP5851780B2 (ja) * 2011-09-26 2016-02-03 オイレス工業株式会社 エアベアリングユニット

Also Published As

Publication number Publication date
KR20150038502A (ko) 2015-04-08
CN104541077A (zh) 2015-04-22
JP2014035054A (ja) 2014-02-24
WO2014024666A1 (ja) 2014-02-13
TW201420907A (zh) 2014-06-01
TWI622715B (zh) 2018-05-01

Similar Documents

Publication Publication Date Title
CN104541077B (zh) 静压气体轴承单元
JP5851780B2 (ja) エアベアリングユニット
CA2891937C (en) Air bearing for use as seal
US9903415B2 (en) Motor
US20020122608A1 (en) Externally pressurized gas bearing spindle assembly
JP6288999B2 (ja) 静圧気体軸受装置
CN104024668B (zh) 静压气体轴承装置
CN102823086A (zh) 具有径向和轴向气体轴承的气体激光器
KR101183697B1 (ko) 롤 장치
JP4031867B2 (ja) 静圧空気軸受装置
JP6177619B2 (ja) 静圧気体軸受装置
US20220163064A1 (en) Bearing device and rotating device
JP2017009112A (ja) 静圧気体軸受装置およびこれを用いた糸状体のガイドローラ
CN102341607B (zh) 液力箔片轴承组件
JP4235597B2 (ja) 静圧気体軸受
JPH10299779A (ja) 静圧気体軸受装置
JP2003176821A (ja) 静圧多孔質軸受
JP6500335B2 (ja) 静圧気体軸受回転案内装置
JP7158815B2 (ja) 回転テーブル装置
JP2015098876A (ja) 静圧気体軸受およびこれを用いた回転装置
JPH07317768A (ja) 静圧多孔質軸受
JP2004100925A (ja) 静圧軸受および案内装置
JP2008057696A (ja) 静圧気体軸受装置

Legal Events

Date Code Title Description
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant