CN104480528A - 一种泡生法蓝宝石长晶设备的自动氩气充填工艺 - Google Patents
一种泡生法蓝宝石长晶设备的自动氩气充填工艺 Download PDFInfo
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- CN104480528A CN104480528A CN201410722225.8A CN201410722225A CN104480528A CN 104480528 A CN104480528 A CN 104480528A CN 201410722225 A CN201410722225 A CN 201410722225A CN 104480528 A CN104480528 A CN 104480528A
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- Prior art keywords
- inch
- valve
- magnetic valve
- argon gas
- hours
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims abstract description 118
- 229910052786 argon Inorganic materials 0.000 title claims abstract description 59
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 14
- 239000010980 sapphire Substances 0.000 title claims abstract description 14
- 238000005429 filling process Methods 0.000 title claims abstract description 13
- 239000013078 crystal Substances 0.000 title abstract description 20
- 238000009792 diffusion process Methods 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 45
- 238000002425 crystallisation Methods 0.000 claims description 6
- 230000008025 crystallization Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000000137 annealing Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 238000005336 cracking Methods 0.000 abstract description 3
- 238000004891 communication Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 229910001573 adamantine Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410722225.8A CN104480528B (zh) | 2014-12-03 | 2014-12-03 | 一种泡生法蓝宝石长晶设备的自动氩气充填工艺 |
Applications Claiming Priority (1)
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CN201410722225.8A CN104480528B (zh) | 2014-12-03 | 2014-12-03 | 一种泡生法蓝宝石长晶设备的自动氩气充填工艺 |
Publications (2)
Publication Number | Publication Date |
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CN104480528A true CN104480528A (zh) | 2015-04-01 |
CN104480528B CN104480528B (zh) | 2017-02-01 |
Family
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Family Applications (1)
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CN201410722225.8A Active CN104480528B (zh) | 2014-12-03 | 2014-12-03 | 一种泡生法蓝宝石长晶设备的自动氩气充填工艺 |
Country Status (1)
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CN (1) | CN104480528B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108588832A (zh) * | 2018-04-28 | 2018-09-28 | 内蒙古恒嘉晶体材料有限公司 | 制备蓝宝石晶体的改进的泡生法及晶体生长炉 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6122050A (en) * | 1998-02-26 | 2000-09-19 | Cornell Research Foundation, Inc. | Optical interface for a radially viewed inductively coupled argon plasma-Optical emission spectrometer |
EP1493466A1 (en) * | 2003-06-30 | 2005-01-05 | Nucletron B.V. | Miniature X-ray source with cryogenic cooling |
CN202945372U (zh) * | 2012-11-09 | 2013-05-22 | 浙江特锐新能源有限公司 | 快速降温高温炉 |
CN103266348A (zh) * | 2013-05-03 | 2013-08-28 | 江苏海翔化工有限公司 | 快速节能单晶硅拉制停炉工艺 |
CN103643300A (zh) * | 2013-11-26 | 2014-03-19 | 浙江上城科技有限公司 | 一种用于蓝宝石加工过程中的退火方法 |
CN104005081A (zh) * | 2014-05-28 | 2014-08-27 | 上海卡姆丹克太阳能科技有限公司 | 一种单晶炉的停炉冷却系统及工艺 |
-
2014
- 2014-12-03 CN CN201410722225.8A patent/CN104480528B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6122050A (en) * | 1998-02-26 | 2000-09-19 | Cornell Research Foundation, Inc. | Optical interface for a radially viewed inductively coupled argon plasma-Optical emission spectrometer |
EP1493466A1 (en) * | 2003-06-30 | 2005-01-05 | Nucletron B.V. | Miniature X-ray source with cryogenic cooling |
CN202945372U (zh) * | 2012-11-09 | 2013-05-22 | 浙江特锐新能源有限公司 | 快速降温高温炉 |
CN103266348A (zh) * | 2013-05-03 | 2013-08-28 | 江苏海翔化工有限公司 | 快速节能单晶硅拉制停炉工艺 |
CN103643300A (zh) * | 2013-11-26 | 2014-03-19 | 浙江上城科技有限公司 | 一种用于蓝宝石加工过程中的退火方法 |
CN104005081A (zh) * | 2014-05-28 | 2014-08-27 | 上海卡姆丹克太阳能科技有限公司 | 一种单晶炉的停炉冷却系统及工艺 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108588832A (zh) * | 2018-04-28 | 2018-09-28 | 内蒙古恒嘉晶体材料有限公司 | 制备蓝宝石晶体的改进的泡生法及晶体生长炉 |
CN108588832B (zh) * | 2018-04-28 | 2021-09-24 | 内蒙古恒嘉晶体材料有限公司 | 制备蓝宝石晶体的改进的泡生法及晶体生长炉 |
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CN104480528B (zh) | 2017-02-01 |
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Effective date of registration: 20161123 Address after: Kandun Street Dachang road Cixi city Zhejiang province 315300 Ningbo City No. 398 Applicant after: Ningbo Jing Gong crystal Science and Technology Ltd. Address before: 310013 Xihu District, Hangzhou, Wensanlu Road, No. venture building, room 199, room 1402 Applicant before: Liu Yu |
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Effective date of registration: 20180830 Address after: 225321 15, 401, Xiangyang Road, Xiangyang South Road, Taizhou port, Jiangsu, 401 Patentee after: Li Wenkang Address before: 102600 3 floor, 2 building, No. 4 Daxing District Garden Road, Beijing, 1 unit 317 Patentee before: Beijing informed investment home intellectual property rights Operation Co., Ltd. |
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Address after: 210000 No. 128 Shanxi Road, Gulou District, Nanjing City, Jiangsu Province Patentee after: Li Wenkang Address before: 225321 15, 401, Xiangyang Road, Xiangyang South Road, Taizhou port, Jiangsu, 401 Patentee before: Li Wenkang |
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Effective date of registration: 20200618 Address after: No. A316, 244000 High-tech Entrepreneurship Service Center, Tongling City, Anhui Province Patentee after: TONGLING XIANGYU COMMERCE AND TRADE Co.,Ltd. Address before: 210000 No. 128 Shanxi Road, Gulou District, Nanjing City, Jiangsu Province Patentee before: Li Wenkang |