CN104412164A - 支撑装置、光刻装置和器件制造方法 - Google Patents
支撑装置、光刻装置和器件制造方法 Download PDFInfo
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- CN104412164A CN104412164A CN201380028677.XA CN201380028677A CN104412164A CN 104412164 A CN104412164 A CN 104412164A CN 201380028677 A CN201380028677 A CN 201380028677A CN 104412164 A CN104412164 A CN 104412164A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
Abstract
Description
Claims (31)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710708172.8A CN107367907B (zh) | 2012-05-29 | 2013-05-17 | 支撑装置、光刻装置和器件制造方法 |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261652582P | 2012-05-29 | 2012-05-29 | |
US61/652,582 | 2012-05-29 | ||
US201261666348P | 2012-06-29 | 2012-06-29 | |
US61/666,348 | 2012-06-29 | ||
PCT/EP2013/060218 WO2013178484A1 (en) | 2012-05-29 | 2013-05-17 | Support apparatus, lithographic apparatus and device manufacturing method |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710708172.8A Division CN107367907B (zh) | 2012-05-29 | 2013-05-17 | 支撑装置、光刻装置和器件制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104412164A true CN104412164A (zh) | 2015-03-11 |
CN104412164B CN104412164B (zh) | 2017-09-12 |
Family
ID=48446376
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380028677.XA Active CN104412164B (zh) | 2012-05-29 | 2013-05-17 | 支撑装置、光刻装置和器件制造方法 |
CN201710708172.8A Active CN107367907B (zh) | 2012-05-29 | 2013-05-17 | 支撑装置、光刻装置和器件制造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710708172.8A Active CN107367907B (zh) | 2012-05-29 | 2013-05-17 | 支撑装置、光刻装置和器件制造方法 |
Country Status (8)
Country | Link |
---|---|
US (3) | US9507275B2 (zh) |
EP (1) | EP2856262B1 (zh) |
JP (2) | JP5973064B2 (zh) |
KR (2) | KR101671787B1 (zh) |
CN (2) | CN104412164B (zh) |
NL (1) | NL2010817A (zh) |
TW (2) | TWI574124B (zh) |
WO (1) | WO2013178484A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109256354A (zh) * | 2017-07-14 | 2019-01-22 | 财团法人工业技术研究院 | 转移支撑件及转移模块 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104412164B (zh) * | 2012-05-29 | 2017-09-12 | Asml荷兰有限公司 | 支撑装置、光刻装置和器件制造方法 |
KR102054322B1 (ko) | 2012-05-29 | 2019-12-10 | 에이에스엠엘 네델란즈 비.브이. | 대상물 홀더 및 리소그래피 장치 |
DE102014206686A1 (de) * | 2014-04-07 | 2015-10-08 | Carl Zeiss Smt Gmbh | Verfahren sowie Anordnung zur Aktuierung eines Elementes |
JP6371865B2 (ja) * | 2014-06-10 | 2018-08-08 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及びリソグラフィ装置を製造する方法 |
WO2016005167A1 (en) | 2014-07-09 | 2016-01-14 | Asml Netherlands B.V. | Inspection apparatus, inspection method and device manufacturing method |
DE102014226309A1 (de) * | 2014-12-17 | 2016-06-23 | Carl Zeiss Smt Gmbh | Komponente; optisches System und Lithographieanlage |
JP6466597B2 (ja) * | 2015-04-29 | 2019-02-06 | エーエスエムエル ネザーランズ ビー.ブイ. | サポート装置、リソグラフィ装置およびデバイス製造方法 |
US10514615B2 (en) | 2015-06-23 | 2019-12-24 | Asml Netherlands B.V. | Support apparatus, lithographic apparatus and device manufacturing method |
KR20190126450A (ko) | 2015-10-06 | 2019-11-11 | 에이에스엠엘 홀딩 엔.브이. | 리소그래피 장치의 물체를 유지하는 척과 클램프 및 리소그래피 장치의 클램프에 의해 유지되는 물체의 온도를 제어하는 방법 |
CN108604067B (zh) | 2015-12-08 | 2021-06-11 | Asml荷兰有限公司 | 衬底台、光刻设备和操作光刻设备的方法 |
CN111474826A (zh) | 2015-12-15 | 2020-07-31 | Asml荷兰有限公司 | 衬底保持器、光刻设备及制造器件的方法 |
NL2018653A (en) | 2016-05-12 | 2017-11-15 | Asml Netherlands Bv | Extraction body for lithographic apparatus |
KR102355867B1 (ko) | 2017-06-06 | 2022-01-26 | 에이에스엠엘 네델란즈 비.브이. | 지지 테이블로부터 대상물을 언로딩하는 방법 |
KR102617775B1 (ko) * | 2017-11-20 | 2023-12-22 | 에이에스엠엘 네델란즈 비.브이. | 기판 홀더, 기판 지지체, 및 기판을 클램핑 시스템에 클램핑시키는 방법 |
CN111465901A (zh) * | 2017-12-13 | 2020-07-28 | Asml荷兰有限公司 | 用于光刻设备中的衬底保持器 |
KR20220145343A (ko) * | 2020-02-24 | 2022-10-28 | 에이에스엠엘 네델란즈 비.브이. | 기판 지지체 및 기판 테이블 |
Citations (9)
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KR20070107935A (ko) * | 2006-05-04 | 2007-11-08 | 주식회사 하이닉스반도체 | 액침 리소그래피 장치 |
JP2009043879A (ja) * | 2007-08-08 | 2009-02-26 | Canon Inc | 露光装置およびデバイス製造方法 |
CN101833248A (zh) * | 2009-03-13 | 2010-09-15 | Asml荷兰有限公司 | 衬底台、浸没式光刻设备以及器件制造方法 |
CN101598907B (zh) * | 2008-06-02 | 2011-11-30 | Asml荷兰有限公司 | 衬底台、光刻设备和器件制造方法 |
JP2012023371A (ja) * | 2010-07-16 | 2012-02-02 | Asml Netherlands Bv | リソグラフィ装置および方法 |
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CN104412164B (zh) * | 2012-05-29 | 2017-09-12 | Asml荷兰有限公司 | 支撑装置、光刻装置和器件制造方法 |
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2013
- 2013-05-17 CN CN201380028677.XA patent/CN104412164B/zh active Active
- 2013-05-17 CN CN201710708172.8A patent/CN107367907B/zh active Active
- 2013-05-17 NL NL2010817A patent/NL2010817A/en not_active Application Discontinuation
- 2013-05-17 KR KR1020147036615A patent/KR101671787B1/ko active IP Right Grant
- 2013-05-17 EP EP13723161.9A patent/EP2856262B1/en active Active
- 2013-05-17 WO PCT/EP2013/060218 patent/WO2013178484A1/en active Application Filing
- 2013-05-17 KR KR1020167029498A patent/KR102003416B1/ko active IP Right Grant
- 2013-05-17 JP JP2015514415A patent/JP5973064B2/ja active Active
- 2013-05-17 US US14/403,114 patent/US9507275B2/en active Active
- 2013-05-27 TW TW104140813A patent/TWI574124B/zh active
- 2013-05-27 TW TW102118695A patent/TWI574117B/zh active
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2016
- 2016-07-13 JP JP2016138497A patent/JP6554445B2/ja active Active
- 2016-10-18 US US15/297,001 patent/US10120292B2/en active Active
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2018
- 2018-11-01 US US16/177,585 patent/US10747125B2/en active Active
Patent Citations (9)
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EP1429188A2 (en) * | 2002-11-12 | 2004-06-16 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
CN1894773A (zh) * | 2003-12-15 | 2007-01-10 | 株式会社尼康 | 台装置、曝光装置和曝光方法 |
CN1786832A (zh) * | 2004-12-08 | 2006-06-14 | Asml荷兰有限公司 | 光刻装置和器件制造方法 |
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CN101598907B (zh) * | 2008-06-02 | 2011-11-30 | Asml荷兰有限公司 | 衬底台、光刻设备和器件制造方法 |
CN101833248A (zh) * | 2009-03-13 | 2010-09-15 | Asml荷兰有限公司 | 衬底台、浸没式光刻设备以及器件制造方法 |
JP2012023371A (ja) * | 2010-07-16 | 2012-02-02 | Asml Netherlands Bv | リソグラフィ装置および方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109256354A (zh) * | 2017-07-14 | 2019-01-22 | 财团法人工业技术研究院 | 转移支撑件及转移模块 |
CN109256354B (zh) * | 2017-07-14 | 2021-01-12 | 财团法人工业技术研究院 | 转移支撑件及转移模块 |
Also Published As
Publication number | Publication date |
---|---|
JP6554445B2 (ja) | 2019-07-31 |
EP2856262B1 (en) | 2019-09-25 |
CN107367907A (zh) | 2017-11-21 |
TWI574117B (zh) | 2017-03-11 |
US20150109599A1 (en) | 2015-04-23 |
KR101671787B1 (ko) | 2016-11-02 |
CN107367907B (zh) | 2019-05-03 |
US10747125B2 (en) | 2020-08-18 |
KR20160125538A (ko) | 2016-10-31 |
JP2016189027A (ja) | 2016-11-04 |
TW201405253A (zh) | 2014-02-01 |
WO2013178484A1 (en) | 2013-12-05 |
US9507275B2 (en) | 2016-11-29 |
US20190072863A1 (en) | 2019-03-07 |
US20170090304A1 (en) | 2017-03-30 |
TW201627777A (zh) | 2016-08-01 |
JP2015519755A (ja) | 2015-07-09 |
KR102003416B1 (ko) | 2019-07-24 |
KR20150023506A (ko) | 2015-03-05 |
CN104412164B (zh) | 2017-09-12 |
NL2010817A (en) | 2013-12-02 |
TWI574124B (zh) | 2017-03-11 |
EP2856262A1 (en) | 2015-04-08 |
US10120292B2 (en) | 2018-11-06 |
JP5973064B2 (ja) | 2016-08-23 |
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