CN104302962B - 流体运送系统和方法 - Google Patents

流体运送系统和方法 Download PDF

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Publication number
CN104302962B
CN104302962B CN201380021263.4A CN201380021263A CN104302962B CN 104302962 B CN104302962 B CN 104302962B CN 201380021263 A CN201380021263 A CN 201380021263A CN 104302962 B CN104302962 B CN 104302962B
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CN
China
Prior art keywords
fluid
tank
pressure
container
bulk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201380021263.4A
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English (en)
Chinese (zh)
Other versions
CN104302962A (zh
Inventor
乔丹·霍奇斯
理查德·D·奇兹姆
米切尔·W·麦克费龙
唐纳德·D·韦尔
格伦·M·汤姆
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Entegris Inc
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Advanced Technology Materials Inc
Entegris Inc
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Publication of CN104302962A publication Critical patent/CN104302962A/zh
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Publication of CN104302962B publication Critical patent/CN104302962B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
    • B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
CN201380021263.4A 2012-02-24 2013-02-22 流体运送系统和方法 Active CN104302962B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261602898P 2012-02-24 2012-02-24
US61/602,898 2012-02-24
PCT/US2013/027301 WO2013126685A1 (en) 2012-02-24 2013-02-22 Fluid delivery system and method

Publications (2)

Publication Number Publication Date
CN104302962A CN104302962A (zh) 2015-01-21
CN104302962B true CN104302962B (zh) 2017-05-31

Family

ID=49006230

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380021263.4A Active CN104302962B (zh) 2012-02-24 2013-02-22 流体运送系统和方法

Country Status (8)

Country Link
US (2) US9695985B2 (cg-RX-API-DMAC7.html)
EP (1) EP2817555B1 (cg-RX-API-DMAC7.html)
JP (1) JP6397766B2 (cg-RX-API-DMAC7.html)
KR (1) KR20140130704A (cg-RX-API-DMAC7.html)
CN (1) CN104302962B (cg-RX-API-DMAC7.html)
SG (2) SG10201510813PA (cg-RX-API-DMAC7.html)
TW (1) TWI596057B (cg-RX-API-DMAC7.html)
WO (1) WO2013126685A1 (cg-RX-API-DMAC7.html)

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WO2013126685A1 (en) 2012-02-24 2013-08-29 Advanced Technology Materials, Inc. Fluid delivery system and method
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KR101672121B1 (ko) * 2015-03-02 2016-11-02 군산대학교산학협력단 선박용 배기가스 정화장치의 액적균일도 측정장치
US10363543B2 (en) * 2016-04-19 2019-07-30 General Electric Company Gas driven fluid transport
FR3053262A1 (fr) * 2016-07-04 2018-01-05 Adrien Plecis Systeme de preparation d’une composition personnalisee par pression
EP3861356A4 (en) 2018-10-01 2022-07-06 Polyvalor, Limited Partnership System and method of fluid delivery
CN109506125A (zh) * 2018-12-11 2019-03-22 中国寰球工程有限公司 掺混料仓单元集中布置并采用集成压缩机站输送的系统
US11772234B2 (en) 2019-10-25 2023-10-03 Applied Materials, Inc. Small batch polishing fluid delivery for CMP
TWI809498B (zh) * 2020-09-18 2023-07-21 美商慧盛材料美國責任有限公司 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法
KR200496101Y1 (ko) * 2020-12-07 2022-11-01 주식회사 한국가스기술공사 팽창압력을 이용한 액체공급장치
TWI765584B (zh) * 2021-02-25 2022-05-21 江德明 液體傳輸設備

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US5935305A (en) * 1994-10-13 1999-08-10 Advanced Technology Materials, Inc. Storage and delivery system for gaseous compounds
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CN102084114A (zh) * 2008-05-08 2011-06-01 海威气体系统公司 气体发动机的气体供应系统

Also Published As

Publication number Publication date
JP2015510477A (ja) 2015-04-09
SG10201510813PA (en) 2016-01-28
WO2013126685A1 (en) 2013-08-29
EP2817555A1 (en) 2014-12-31
CN104302962A (zh) 2015-01-21
EP2817555B1 (en) 2019-04-03
KR20140130704A (ko) 2014-11-11
SG11201405141TA (en) 2014-09-26
US20150013834A1 (en) 2015-01-15
US9695985B2 (en) 2017-07-04
TWI596057B (zh) 2017-08-21
US10495259B2 (en) 2019-12-03
EP2817555A4 (en) 2016-05-04
JP6397766B2 (ja) 2018-09-26
US20170292653A1 (en) 2017-10-12
TW201343532A (zh) 2013-11-01

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