CN104297919A - 反射镜驱动装置及其驱动方法 - Google Patents

反射镜驱动装置及其驱动方法 Download PDF

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Publication number
CN104297919A
CN104297919A CN201410341476.1A CN201410341476A CN104297919A CN 104297919 A CN104297919 A CN 104297919A CN 201410341476 A CN201410341476 A CN 201410341476A CN 104297919 A CN104297919 A CN 104297919A
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CN
China
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mentioned
electrode portion
upper electrode
converter section
actuator
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Pending
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CN201410341476.1A
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English (en)
Chinese (zh)
Inventor
直野崇幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Publication of CN104297919A publication Critical patent/CN104297919A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0043—Increasing angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN201410341476.1A 2013-07-17 2014-07-17 反射镜驱动装置及其驱动方法 Pending CN104297919A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013148570A JP5916668B2 (ja) 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法
JP2013-148570 2013-07-17

Publications (1)

Publication Number Publication Date
CN104297919A true CN104297919A (zh) 2015-01-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410341476.1A Pending CN104297919A (zh) 2013-07-17 2014-07-17 反射镜驱动装置及其驱动方法

Country Status (4)

Country Link
US (1) US9864189B2 (enExample)
EP (1) EP2827182B1 (enExample)
JP (1) JP5916668B2 (enExample)
CN (1) CN104297919A (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110412762A (zh) * 2018-04-26 2019-11-05 株式会社日立制作所 光偏转机以及光偏转机控制装置
CN110462485A (zh) * 2017-03-30 2019-11-15 三菱电机株式会社 光扫描装置及其制造方法
CN110989164A (zh) * 2019-12-24 2020-04-10 成都英飞睿技术有限公司 快速控制反射镜的自适应驱动控制方法、系统及装置
WO2021135135A1 (zh) * 2019-12-31 2021-07-08 中芯集成电路（宁波）有限公司 一种压电驱动结构和成像模组
CN113195399A (zh) * 2018-10-16 2021-07-30 弗劳恩霍夫应用研究促进协会 作为致动器的弯曲换能器、作为传感器的弯曲换能器、以及弯曲换能器系统
CN113728263A (zh) * 2019-04-26 2021-11-30 富士胶片株式会社 微镜器件
CN114105081A (zh) * 2020-08-27 2022-03-01 中光电智能感测股份有限公司 微型扫描面镜
CN116888065A (zh) * 2021-02-10 2023-10-13 三菱电机株式会社 Mems元件、光扫描装置、测距装置以及mems元件的制造方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6092713B2 (ja) * 2013-05-28 2017-03-08 スタンレー電気株式会社 光偏向器
JP6442919B2 (ja) * 2014-08-21 2018-12-26 株式会社デンソー 光走査装置
CN104793333B (zh) * 2015-04-29 2017-04-12 中国科学院光电技术研究所 一种大行程高速多级驱动倾斜镜
JP6485388B2 (ja) * 2016-02-29 2019-03-20 株式会社デンソー 可変焦点ミラーおよび光走査装置
EP3287830B1 (en) * 2016-08-24 2023-04-12 Murata Manufacturing Co., Ltd. A scanning mems reflector system
CN109863442B (zh) * 2016-11-09 2022-03-04 第一精工株式会社 可动反射元件
CN113574007B (zh) * 2019-03-28 2024-12-03 富士胶片株式会社 微镜器件及微镜器件的驱动方法
IT201900004797A1 (it) * 2019-03-29 2020-09-29 St Microelectronics Srl Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio
JP7451930B2 (ja) * 2019-10-11 2024-03-19 株式会社リコー 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両
CN113709642A (zh) * 2021-06-21 2021-11-26 天津大学 压电mems执行器及其形成方法和运行方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007206480A (ja) * 2006-02-03 2007-08-16 Toko Inc 光走査素子
CN101273478A (zh) * 2005-09-26 2008-09-24 富士胶片株式会社 压电器件、驱动该器件的方法、压电设备和液体排放设备
US20100195180A1 (en) * 2009-01-30 2010-08-05 Goichi Akanuma Deflecting mirror for deflecting and scanning light beam

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914803A (en) 1997-07-01 1999-06-22 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
JPH11112048A (ja) * 1997-10-02 1999-04-23 Seiko Epson Corp 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
US6972883B2 (en) 2002-02-15 2005-12-06 Ricoh Company, Ltd. Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
JP2005128147A (ja) * 2003-10-22 2005-05-19 Stanley Electric Co Ltd 光偏向器及び光学装置
WO2005122380A1 (ja) 2004-06-07 2005-12-22 Matsushita Electric Industrial Co., Ltd. アクチュエータ及び該アクチュエータを備えた微動機構並びに該微動機構を備えたカメラモジュール
JP2007199682A (ja) 2005-12-27 2007-08-09 Konica Minolta Holdings Inc 光偏向器および光ビーム走査装置
JP4926596B2 (ja) * 2006-08-08 2012-05-09 スタンレー電気株式会社 光偏向器及びその製造方法
EP1905867A1 (en) * 2006-09-28 2008-04-02 Fujifilm Corporation Process for forming a film, piezoelectric film, and piezoelectric device
JP4972774B2 (ja) * 2007-02-16 2012-07-11 コニカミノルタアドバンストレイヤー株式会社 マイクロスキャナおよびそれを備える光学機器
US7864390B2 (en) 2007-05-28 2011-01-04 Konica Minolta Opto, Inc. Image display apparatus
JP4972781B2 (ja) 2007-06-19 2012-07-11 コニカミノルタアドバンストレイヤー株式会社 マイクロスキャナ及びそれを備えた光走査装置。
JP2009302661A (ja) * 2008-06-10 2009-12-24 Toshiba Corp 圧電デバイス
JP5391600B2 (ja) 2008-07-16 2014-01-15 船井電機株式会社 振動ミラー素子
JP5505306B2 (ja) * 2008-08-22 2014-05-28 コニカミノルタ株式会社 駆動装置
JP2010080813A (ja) * 2008-09-29 2010-04-08 Fujifilm Corp 圧電体膜とその製造方法、圧電素子、及び液体吐出装置
JP5419488B2 (ja) * 2009-02-17 2014-02-19 Ｎｅｃトーキン株式会社 圧電素子
JP5191939B2 (ja) * 2009-03-31 2013-05-08 スタンレー電気株式会社 光偏向器用アクチュエータ装置
JP2011075955A (ja) 2009-09-30 2011-04-14 Brother Industries Ltd 画像表示装置
JP5400636B2 (ja) 2010-01-20 2014-01-29 スタンレー電気株式会社 光偏向器及びこれを用いた光学装置
JP5761194B2 (ja) 2010-07-29 2015-08-12 日本電気株式会社 光走査装置および画像表示装置
JP5264954B2 (ja) * 2011-03-30 2013-08-14 富士フイルム株式会社 ミラー駆動装置及び方法
JP6092713B2 (ja) * 2013-05-28 2017-03-08 スタンレー電気株式会社 光偏向器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101273478A (zh) * 2005-09-26 2008-09-24 富士胶片株式会社 压电器件、驱动该器件的方法、压电设备和液体排放设备
JP2007206480A (ja) * 2006-02-03 2007-08-16 Toko Inc 光走査素子
US20100195180A1 (en) * 2009-01-30 2010-08-05 Goichi Akanuma Deflecting mirror for deflecting and scanning light beam

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110462485A (zh) * 2017-03-30 2019-11-15 三菱电机株式会社 光扫描装置及其制造方法
CN110462485B (zh) * 2017-03-30 2021-07-20 三菱电机株式会社 光扫描装置及其制造方法
CN110412762A (zh) * 2018-04-26 2019-11-05 株式会社日立制作所 光偏转机以及光偏转机控制装置
CN113195399A (zh) * 2018-10-16 2021-07-30 弗劳恩霍夫应用研究促进协会 作为致动器的弯曲换能器、作为传感器的弯曲换能器、以及弯曲换能器系统
US12428290B2 (en) 2018-10-16 2025-09-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bending transducer as actuator, bending transducer as sensor, bending transducer system
CN113728263B (zh) * 2019-04-26 2023-07-07 富士胶片株式会社 微镜器件
CN113728263A (zh) * 2019-04-26 2021-11-30 富士胶片株式会社 微镜器件
CN110989164B (zh) * 2019-12-24 2020-12-08 成都英飞睿技术有限公司 快速控制反射镜的自适应驱动控制方法、系统及装置
CN110989164A (zh) * 2019-12-24 2020-04-10 成都英飞睿技术有限公司 快速控制反射镜的自适应驱动控制方法、系统及装置
CN113130734A (zh) * 2019-12-31 2021-07-16 中芯集成电路（宁波）有限公司 一种压电驱动结构和成像模组
WO2021135135A1 (zh) * 2019-12-31 2021-07-08 中芯集成电路（宁波）有限公司 一种压电驱动结构和成像模组
CN114105081A (zh) * 2020-08-27 2022-03-01 中光电智能感测股份有限公司 微型扫描面镜
TWI758906B (zh) * 2020-08-27 2022-03-21 中光電智能感測股份有限公司 微型掃描面鏡
CN116888065A (zh) * 2021-02-10 2023-10-13 三菱电机株式会社 Mems元件、光扫描装置、测距装置以及mems元件的制造方法

Also Published As

Publication number Publication date
US9864189B2 (en) 2018-01-09
JP5916668B2 (ja) 2016-05-11
JP2015022065A (ja) 2015-02-02
EP2827182A1 (en) 2015-01-21
US20150309307A1 (en) 2015-10-29
EP2827182B1 (en) 2019-06-12

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