JP5916668B2 - ミラー駆動装置及びその駆動方法 - Google Patents

ミラー駆動装置及びその駆動方法 Download PDF

Info

Publication number
JP5916668B2
JP5916668B2 JP2013148570A JP2013148570A JP5916668B2 JP 5916668 B2 JP5916668 B2 JP 5916668B2 JP 2013148570 A JP2013148570 A JP 2013148570A JP 2013148570 A JP2013148570 A JP 2013148570A JP 5916668 B2 JP5916668 B2 JP 5916668B2
Authority
JP
Japan
Prior art keywords
actuator
unit
piezoelectric
upper electrode
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013148570A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015022065A (ja
JP2015022065A5 (enExample
Inventor
崇幸 直野
崇幸 直野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2013148570A priority Critical patent/JP5916668B2/ja
Priority to US14/330,452 priority patent/US9864189B2/en
Priority to EP14177044.6A priority patent/EP2827182B1/en
Priority to CN201410341476.1A priority patent/CN104297919A/zh
Publication of JP2015022065A publication Critical patent/JP2015022065A/ja
Publication of JP2015022065A5 publication Critical patent/JP2015022065A5/ja
Application granted granted Critical
Publication of JP5916668B2 publication Critical patent/JP5916668B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0043—Increasing angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2013148570A 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法 Active JP5916668B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013148570A JP5916668B2 (ja) 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法
US14/330,452 US9864189B2 (en) 2013-07-17 2014-07-14 Mirror drive device and driving method thereof
EP14177044.6A EP2827182B1 (en) 2013-07-17 2014-07-15 Mirror drive device and driving method thereof
CN201410341476.1A CN104297919A (zh) 2013-07-17 2014-07-17 反射镜驱动装置及其驱动方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013148570A JP5916668B2 (ja) 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法

Publications (3)

Publication Number Publication Date
JP2015022065A JP2015022065A (ja) 2015-02-02
JP2015022065A5 JP2015022065A5 (enExample) 2015-03-12
JP5916668B2 true JP5916668B2 (ja) 2016-05-11

Family

ID=51176270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013148570A Active JP5916668B2 (ja) 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法

Country Status (4)

Country Link
US (1) US9864189B2 (enExample)
EP (1) EP2827182B1 (enExample)
JP (1) JP5916668B2 (enExample)
CN (1) CN104297919A (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6092713B2 (ja) * 2013-05-28 2017-03-08 スタンレー電気株式会社 光偏向器
JP6442919B2 (ja) * 2014-08-21 2018-12-26 株式会社デンソー 光走査装置
CN104793333B (zh) * 2015-04-29 2017-04-12 中国科学院光电技术研究所 一种大行程高速多级驱动倾斜镜
JP6485388B2 (ja) * 2016-02-29 2019-03-20 株式会社デンソー 可変焦点ミラーおよび光走査装置
EP3287830B1 (en) * 2016-08-24 2023-04-12 Murata Manufacturing Co., Ltd. A scanning mems reflector system
CN109863442B (zh) * 2016-11-09 2022-03-04 第一精工株式会社 可动反射元件
CN110462485B (zh) * 2017-03-30 2021-07-20 三菱电机株式会社 光扫描装置及其制造方法
JP6452879B1 (ja) * 2018-04-26 2019-01-16 株式会社日立製作所 光偏向機、および、光偏向機制御装置
JP7176108B2 (ja) * 2018-10-16 2022-11-21 フラウンホファー ゲセルシャフト ツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． アクチュエータとしての曲げ変換器、センサとしての曲げ変換器、曲げ変換器システム
CN113574007B (zh) * 2019-03-28 2024-12-03 富士胶片株式会社 微镜器件及微镜器件的驱动方法
IT201900004797A1 (it) * 2019-03-29 2020-09-29 St Microelectronics Srl Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio
EP3961289A4 (en) * 2019-04-26 2022-06-15 FUJIFILM Corporation MICRO-MIRROR DEVICE
JP7451930B2 (ja) * 2019-10-11 2024-03-19 株式会社リコー 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両
CN110989164B (zh) * 2019-12-24 2020-12-08 成都英飞睿技术有限公司 快速控制反射镜的自适应驱动控制方法、系统及装置
CN113130734A (zh) * 2019-12-31 2021-07-16 中芯集成电路（宁波）有限公司 一种压电驱动结构和成像模组
CN114105081A (zh) * 2020-08-27 2022-03-01 中光电智能感测股份有限公司 微型扫描面镜
WO2022172372A1 (ja) * 2021-02-10 2022-08-18 三菱電機株式会社 Ｍｅｍｓ素子、光走査装置、測距装置およびｍｅｍｓ素子の製造方法
CN113709642A (zh) * 2021-06-21 2021-11-26 天津大学 压电mems执行器及其形成方法和运行方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914803A (en) 1997-07-01 1999-06-22 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
JPH11112048A (ja) * 1997-10-02 1999-04-23 Seiko Epson Corp 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
US6972883B2 (en) 2002-02-15 2005-12-06 Ricoh Company, Ltd. Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
JP2005128147A (ja) * 2003-10-22 2005-05-19 Stanley Electric Co Ltd 光偏向器及び光学装置
WO2005122380A1 (ja) 2004-06-07 2005-12-22 Matsushita Electric Industrial Co., Ltd. アクチュエータ及び該アクチュエータを備えた微動機構並びに該微動機構を備えたカメラモジュール
JP4237208B2 (ja) 2005-09-26 2009-03-11 富士フイルム株式会社 圧電素子及びその駆動方法、圧電装置、液体吐出装置
JP2007199682A (ja) 2005-12-27 2007-08-09 Konica Minolta Holdings Inc 光偏向器および光ビーム走査装置
JP2007206480A (ja) 2006-02-03 2007-08-16 Toko Inc 光走査素子
JP4926596B2 (ja) * 2006-08-08 2012-05-09 スタンレー電気株式会社 光偏向器及びその製造方法
EP1905867A1 (en) * 2006-09-28 2008-04-02 Fujifilm Corporation Process for forming a film, piezoelectric film, and piezoelectric device
JP4972774B2 (ja) * 2007-02-16 2012-07-11 コニカミノルタアドバンストレイヤー株式会社 マイクロスキャナおよびそれを備える光学機器
US7864390B2 (en) 2007-05-28 2011-01-04 Konica Minolta Opto, Inc. Image display apparatus
JP4972781B2 (ja) 2007-06-19 2012-07-11 コニカミノルタアドバンストレイヤー株式会社 マイクロスキャナ及びそれを備えた光走査装置。
JP2009302661A (ja) * 2008-06-10 2009-12-24 Toshiba Corp 圧電デバイス
JP5391600B2 (ja) 2008-07-16 2014-01-15 船井電機株式会社 振動ミラー素子
JP5505306B2 (ja) * 2008-08-22 2014-05-28 コニカミノルタ株式会社 駆動装置
JP2010080813A (ja) * 2008-09-29 2010-04-08 Fujifilm Corp 圧電体膜とその製造方法、圧電素子、及び液体吐出装置
JP5493735B2 (ja) * 2009-01-30 2014-05-14 株式会社リコー 偏向ミラー、光走査装置、画像形成装置、および画像投影装置
JP5419488B2 (ja) * 2009-02-17 2014-02-19 Ｎｅｃトーキン株式会社 圧電素子
JP5191939B2 (ja) * 2009-03-31 2013-05-08 スタンレー電気株式会社 光偏向器用アクチュエータ装置
JP2011075955A (ja) 2009-09-30 2011-04-14 Brother Industries Ltd 画像表示装置
JP5400636B2 (ja) 2010-01-20 2014-01-29 スタンレー電気株式会社 光偏向器及びこれを用いた光学装置
JP5761194B2 (ja) 2010-07-29 2015-08-12 日本電気株式会社 光走査装置および画像表示装置
JP5264954B2 (ja) * 2011-03-30 2013-08-14 富士フイルム株式会社 ミラー駆動装置及び方法
JP6092713B2 (ja) * 2013-05-28 2017-03-08 スタンレー電気株式会社 光偏向器

Also Published As

Publication number Publication date
US9864189B2 (en) 2018-01-09
JP2015022065A (ja) 2015-02-02
EP2827182A1 (en) 2015-01-21
US20150309307A1 (en) 2015-10-29
EP2827182B1 (en) 2019-06-12
CN104297919A (zh) 2015-01-21

Similar Documents

Publication Publication Date Title
JP5916668B2 (ja) ミラー駆動装置及びその駆動方法
JP5916667B2 (ja) ミラー駆動装置及びその駆動方法
US10281716B2 (en) Mirror driving device and driving method thereof
JP6308700B2 (ja) ミラー駆動装置及びその駆動方法
JP5916577B2 (ja) ミラー駆動装置及びその駆動方法
US8879132B2 (en) Mirror driving apparatus, method of driving same and method of manufacturing same
US12019235B2 (en) Micromirror device and method of driving micromirror device
JP5524254B2 (ja) ミラー駆動装置及びその制御方法
JP7237146B2 (ja) マイクロミラーデバイスおよびマイクロミラーデバイスの駆動方法
JP2012208352A (ja) ミラー駆動装置及び方法
JP7601961B2 (ja) マイクロミラーデバイス

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20141210

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141218

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150407

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150414

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150604

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20151203

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160302

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20160310

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160329

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160405

R150 Certificate of patent or registration of utility model

Ref document number: 5916668

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250