CN104297918A - 反射镜驱动装置及其驱动方法 - Google Patents
反射镜驱动装置及其驱动方法 Download PDFInfo
- Publication number
- CN104297918A CN104297918A CN201410341171.0A CN201410341171A CN104297918A CN 104297918 A CN104297918 A CN 104297918A CN 201410341171 A CN201410341171 A CN 201410341171A CN 104297918 A CN104297918 A CN 104297918A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- electrode section
- electrode
- actuator portion
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 38
- 238000009826 distribution Methods 0.000 claims abstract description 16
- 238000006073 displacement reaction Methods 0.000 claims description 29
- 238000001514 detection method Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 17
- 230000000694 effects Effects 0.000 claims description 15
- 229910052758 niobium Inorganic materials 0.000 claims description 13
- 238000013461 design Methods 0.000 claims description 11
- 238000012360 testing method Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 229910052787 antimony Inorganic materials 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 238000010276 construction Methods 0.000 claims description 6
- 229910052745 lead Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052706 scandium Inorganic materials 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 230000000052 comparative effect Effects 0.000 description 35
- 239000010408 film Substances 0.000 description 34
- 238000010586 diagram Methods 0.000 description 18
- 239000010955 niobium Substances 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 12
- 230000006835 compression Effects 0.000 description 8
- 238000007906 compression Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000011218 segmentation Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000013598 vector Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- YPQJHZKJHIBJAP-UHFFFAOYSA-N [K].[Bi] Chemical compound [K].[Bi] YPQJHZKJHIBJAP-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000004069 differentiation Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- QNZFKUWECYSYPS-UHFFFAOYSA-N lead zirconium Chemical compound [Zr].[Pb] QNZFKUWECYSYPS-UHFFFAOYSA-N 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- FOLMBQLGENFKLO-UHFFFAOYSA-N [Pb].[Mg].[Nb] Chemical compound [Pb].[Mg].[Nb] FOLMBQLGENFKLO-UHFFFAOYSA-N 0.000 description 1
- SITXNCAAFPTBGM-UHFFFAOYSA-N [Pb].[Nb].[Zn] Chemical compound [Pb].[Nb].[Zn] SITXNCAAFPTBGM-UHFFFAOYSA-N 0.000 description 1
- WOIHABYNKOEWFG-UHFFFAOYSA-N [Sr].[Ba] Chemical compound [Sr].[Ba] WOIHABYNKOEWFG-UHFFFAOYSA-N 0.000 description 1
- BEKPOVOEQGXHMA-UHFFFAOYSA-N [Zr].[Nb].[Ni] Chemical compound [Zr].[Nb].[Ni] BEKPOVOEQGXHMA-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- RPEUFVJJAJYJSS-UHFFFAOYSA-N zinc;oxido(dioxo)niobium Chemical compound [Zn+2].[O-][Nb](=O)=O.[O-][Nb](=O)=O RPEUFVJJAJYJSS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
- H02N2/145—Large signal circuits, e.g. final stages
- H02N2/147—Multi-phase circuits
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-148569 | 2013-07-17 | ||
| JP2013148569A JP5916667B2 (ja) | 2013-07-17 | 2013-07-17 | ミラー駆動装置及びその駆動方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104297918A true CN104297918A (zh) | 2015-01-21 |
Family
ID=51176271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410341171.0A Pending CN104297918A (zh) | 2013-07-17 | 2014-07-17 | 反射镜驱动装置及其驱动方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9678335B2 (enExample) |
| EP (1) | EP2827183B1 (enExample) |
| JP (1) | JP5916667B2 (enExample) |
| CN (1) | CN104297918A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106324827A (zh) * | 2016-09-29 | 2017-01-11 | 东南大学 | 一种谐振式液体振镜及其驱动方法 |
| CN113574007A (zh) * | 2019-03-28 | 2021-10-29 | 富士胶片株式会社 | 微镜器件及微镜器件的驱动方法 |
| CN113728263A (zh) * | 2019-04-26 | 2021-11-30 | 富士胶片株式会社 | 微镜器件 |
| CN114105081A (zh) * | 2020-08-27 | 2022-03-01 | 中光电智能感测股份有限公司 | 微型扫描面镜 |
| CN114518683A (zh) * | 2020-11-20 | 2022-05-20 | 精工爱普生株式会社 | 光学器件的驱动方法、光学系统以及显示装置 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0782011B2 (ja) | 1989-12-06 | 1995-09-06 | 株式会社日立製作所 | サンプル調整装置及び血球計測装置 |
| JP6606865B2 (ja) * | 2015-05-29 | 2019-11-20 | ミツミ電機株式会社 | 光走査装置及びその製造方法、光走査制御装置 |
| JP6498047B2 (ja) * | 2015-06-09 | 2019-04-10 | 株式会社トライフォース・マネジメント | 可動反射装置およびこれを利用した反射面駆動システム |
| US10003889B2 (en) * | 2015-08-04 | 2018-06-19 | Infineon Technologies Ag | System and method for a multi-electrode MEMS device |
| US10852529B2 (en) | 2016-02-17 | 2020-12-01 | Mitsubishi Electric Corporation | Mirror driving apparatus and method for manufacturing thereof |
| CN109863442B (zh) * | 2016-11-09 | 2022-03-04 | 第一精工株式会社 | 可动反射元件 |
| IT201600121010A1 (it) * | 2016-11-29 | 2018-05-29 | St Microelectronics Srl | Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di pilotaggio |
| EP3761100B1 (en) * | 2018-02-27 | 2024-08-14 | Pioneer Corporation | Optical deflector |
| US11029512B2 (en) * | 2018-06-27 | 2021-06-08 | Microsoft Technology Licensing, Llc | Adjusting a resonant frequency of a scanning mirror |
| JP7209082B2 (ja) * | 2019-04-26 | 2023-01-19 | 富士フイルム株式会社 | マイクロミラーデバイス |
| JP7451930B2 (ja) * | 2019-10-11 | 2024-03-19 | 株式会社リコー | 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両 |
| US12431614B1 (en) | 2024-02-05 | 2025-09-30 | Rockwell Collins, Inc. | Frequency tunable piezoelectric VLF antenna |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005128147A (ja) * | 2003-10-22 | 2005-05-19 | Stanley Electric Co Ltd | 光偏向器及び光学装置 |
| JP2007206480A (ja) * | 2006-02-03 | 2007-08-16 | Toko Inc | 光走査素子 |
| CN101273478A (zh) * | 2005-09-26 | 2008-09-24 | 富士胶片株式会社 | 压电器件、驱动该器件的方法、压电设备和液体排放设备 |
| US20080297868A1 (en) * | 2007-05-28 | 2008-12-04 | Konica Minolta Opto, Inc. | Image display apparatus |
| JP2009002978A (ja) * | 2007-06-19 | 2009-01-08 | Konica Minolta Opto Inc | マイクロスキャナ及びそれを備えた光走査装置。 |
| CN101630063A (zh) * | 2008-07-16 | 2010-01-20 | 船井电机株式会社 | 振动镜元件 |
| US20100195180A1 (en) * | 2009-01-30 | 2010-08-05 | Goichi Akanuma | Deflecting mirror for deflecting and scanning light beam |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11112048A (ja) * | 1997-10-02 | 1999-04-23 | Seiko Epson Corp | 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法 |
| US6972883B2 (en) * | 2002-02-15 | 2005-12-06 | Ricoh Company, Ltd. | Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image |
| WO2005122380A1 (ja) * | 2004-06-07 | 2005-12-22 | Matsushita Electric Industrial Co., Ltd. | アクチュエータ及び該アクチュエータを備えた微動機構並びに該微動機構を備えたカメラモジュール |
| JP2007199682A (ja) * | 2005-12-27 | 2007-08-09 | Konica Minolta Holdings Inc | 光偏向器および光ビーム走査装置 |
| JP4926596B2 (ja) * | 2006-08-08 | 2012-05-09 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
| EP1905867A1 (en) | 2006-09-28 | 2008-04-02 | Fujifilm Corporation | Process for forming a film, piezoelectric film, and piezoelectric device |
| JP4972774B2 (ja) * | 2007-02-16 | 2012-07-11 | コニカミノルタアドバンストレイヤー株式会社 | マイクロスキャナおよびそれを備える光学機器 |
| JP2009302661A (ja) * | 2008-06-10 | 2009-12-24 | Toshiba Corp | 圧電デバイス |
| JP5505306B2 (ja) | 2008-08-22 | 2014-05-28 | コニカミノルタ株式会社 | 駆動装置 |
| JP2010080813A (ja) * | 2008-09-29 | 2010-04-08 | Fujifilm Corp | 圧電体膜とその製造方法、圧電素子、及び液体吐出装置 |
| JP5419488B2 (ja) * | 2009-02-17 | 2014-02-19 | Ｎｅｃトーキン株式会社 | 圧電素子 |
| JP5191939B2 (ja) * | 2009-03-31 | 2013-05-08 | スタンレー電気株式会社 | 光偏向器用アクチュエータ装置 |
| JP2011075955A (ja) * | 2009-09-30 | 2011-04-14 | Brother Industries Ltd | 画像表示装置 |
| JP5400636B2 (ja) * | 2010-01-20 | 2014-01-29 | スタンレー電気株式会社 | 光偏向器及びこれを用いた光学装置 |
| JP5761194B2 (ja) * | 2010-07-29 | 2015-08-12 | 日本電気株式会社 | 光走査装置および画像表示装置 |
| JP5264954B2 (ja) * | 2011-03-30 | 2013-08-14 | 富士フイルム株式会社 | ミラー駆動装置及び方法 |
| JP6092713B2 (ja) * | 2013-05-28 | 2017-03-08 | スタンレー電気株式会社 | 光偏向器 |
-
2013
- 2013-07-17 JP JP2013148569A patent/JP5916667B2/ja active Active
-
2014
- 2014-07-14 US US14/330,415 patent/US9678335B2/en active Active
- 2014-07-15 EP EP14177045.3A patent/EP2827183B1/en active Active
- 2014-07-17 CN CN201410341171.0A patent/CN104297918A/zh active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005128147A (ja) * | 2003-10-22 | 2005-05-19 | Stanley Electric Co Ltd | 光偏向器及び光学装置 |
| CN101273478A (zh) * | 2005-09-26 | 2008-09-24 | 富士胶片株式会社 | 压电器件、驱动该器件的方法、压电设备和液体排放设备 |
| JP2007206480A (ja) * | 2006-02-03 | 2007-08-16 | Toko Inc | 光走査素子 |
| US20080297868A1 (en) * | 2007-05-28 | 2008-12-04 | Konica Minolta Opto, Inc. | Image display apparatus |
| JP2009002978A (ja) * | 2007-06-19 | 2009-01-08 | Konica Minolta Opto Inc | マイクロスキャナ及びそれを備えた光走査装置。 |
| CN101630063A (zh) * | 2008-07-16 | 2010-01-20 | 船井电机株式会社 | 振动镜元件 |
| US20100195180A1 (en) * | 2009-01-30 | 2010-08-05 | Goichi Akanuma | Deflecting mirror for deflecting and scanning light beam |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106324827A (zh) * | 2016-09-29 | 2017-01-11 | 东南大学 | 一种谐振式液体振镜及其驱动方法 |
| CN106324827B (zh) * | 2016-09-29 | 2019-03-12 | 东南大学 | 一种谐振式液体振镜及其驱动方法 |
| CN113574007A (zh) * | 2019-03-28 | 2021-10-29 | 富士胶片株式会社 | 微镜器件及微镜器件的驱动方法 |
| CN113574007B (zh) * | 2019-03-28 | 2024-12-03 | 富士胶片株式会社 | 微镜器件及微镜器件的驱动方法 |
| CN113728263A (zh) * | 2019-04-26 | 2021-11-30 | 富士胶片株式会社 | 微镜器件 |
| CN113728263B (zh) * | 2019-04-26 | 2023-07-07 | 富士胶片株式会社 | 微镜器件 |
| CN114105081A (zh) * | 2020-08-27 | 2022-03-01 | 中光电智能感测股份有限公司 | 微型扫描面镜 |
| CN114518683A (zh) * | 2020-11-20 | 2022-05-20 | 精工爱普生株式会社 | 光学器件的驱动方法、光学系统以及显示装置 |
| CN114518683B (zh) * | 2020-11-20 | 2023-11-21 | 精工爱普生株式会社 | 光学器件的驱动方法、光学系统以及显示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5916667B2 (ja) | 2016-05-11 |
| US9678335B2 (en) | 2017-06-13 |
| EP2827183B1 (en) | 2022-04-27 |
| EP2827183A1 (en) | 2015-01-21 |
| US20150022871A1 (en) | 2015-01-22 |
| JP2015022064A (ja) | 2015-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104297918A (zh) | 反射镜驱动装置及其驱动方法 | |
| CN104297919A (zh) | 反射镜驱动装置及其驱动方法 | |
| JP5916577B2 (ja) | ミラー駆動装置及びその駆動方法 | |
| US10281716B2 (en) | Mirror driving device and driving method thereof | |
| US10371940B2 (en) | Mirror driving device and driving method thereof | |
| US8879132B2 (en) | Mirror driving apparatus, method of driving same and method of manufacturing same | |
| CN103246059B (zh) | 镜驱动设备和控制该设备的方法 | |
| JP2012208352A (ja) | ミラー駆動装置及び方法 | |
| CN101981718A (zh) | 压电薄膜及其制造方法、角速度传感器、利用角速度传感器进行的角速度的测定方法、压电发电元件及使用压电发电元件的发电方法 | |
| WO2014119609A1 (ja) | 角速度センサ及びその製造方法 | |
| JP7601961B2 (ja) | マイクロミラーデバイス | |
| JP3755283B2 (ja) | 圧電素子及びその製造方法、圧電素子を用いた振動センサ、圧電アクチュエータ、光スキャナ、歪みセンサ、圧電式振動ジャイロ | |
| JP7698153B2 (ja) | 振動型角速度検出器 | |
| WO2014162940A1 (ja) | 角速度センサ及びその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150121 |
|
| RJ01 | Rejection of invention patent application after publication |