JP5916667B2 - ミラー駆動装置及びその駆動方法 - Google Patents

ミラー駆動装置及びその駆動方法 Download PDF

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Publication number
JP5916667B2
JP5916667B2 JP2013148569A JP2013148569A JP5916667B2 JP 5916667 B2 JP5916667 B2 JP 5916667B2 JP 2013148569 A JP2013148569 A JP 2013148569A JP 2013148569 A JP2013148569 A JP 2013148569A JP 5916667 B2 JP5916667 B2 JP 5916667B2
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Japan
Prior art keywords
electrode
actuator
mirror
unit
piezoelectric
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JP2013148569A
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English (en)
Japanese (ja)
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JP2015022064A5 (enExample
JP2015022064A (ja
Inventor
崇幸 直野
崇幸 直野
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Fujifilm Corp
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Fujifilm Corp
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Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2013148569A priority Critical patent/JP5916667B2/ja
Priority to US14/330,415 priority patent/US9678335B2/en
Priority to EP14177045.3A priority patent/EP2827183B1/en
Priority to CN201410341171.0A priority patent/CN104297918A/zh
Publication of JP2015022064A publication Critical patent/JP2015022064A/ja
Publication of JP2015022064A5 publication Critical patent/JP2015022064A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/145—Large signal circuits, e.g. final stages
    • H02N2/147—Multi-phase circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2013148569A 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法 Active JP5916667B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013148569A JP5916667B2 (ja) 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法
US14/330,415 US9678335B2 (en) 2013-07-17 2014-07-14 Mirror drive device and driving method thereof
EP14177045.3A EP2827183B1 (en) 2013-07-17 2014-07-15 Mirror drive device and driving method thereof
CN201410341171.0A CN104297918A (zh) 2013-07-17 2014-07-17 反射镜驱动装置及其驱动方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013148569A JP5916667B2 (ja) 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法

Publications (3)

Publication Number Publication Date
JP2015022064A JP2015022064A (ja) 2015-02-02
JP2015022064A5 JP2015022064A5 (enExample) 2015-03-12
JP5916667B2 true JP5916667B2 (ja) 2016-05-11

Family

ID=51176271

Family Applications (1)

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JP2013148569A Active JP5916667B2 (ja) 2013-07-17 2013-07-17 ミラー駆動装置及びその駆動方法

Country Status (4)

Country Link
US (1) US9678335B2 (enExample)
EP (1) EP2827183B1 (enExample)
JP (1) JP5916667B2 (enExample)
CN (1) CN104297918A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0782011B2 (ja) 1989-12-06 1995-09-06 株式会社日立製作所 サンプル調整装置及び血球計測装置

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JP6606865B2 (ja) * 2015-05-29 2019-11-20 ミツミ電機株式会社 光走査装置及びその製造方法、光走査制御装置
JP6498047B2 (ja) * 2015-06-09 2019-04-10 株式会社トライフォース・マネジメント 可動反射装置およびこれを利用した反射面駆動システム
US10003889B2 (en) * 2015-08-04 2018-06-19 Infineon Technologies Ag System and method for a multi-electrode MEMS device
US10852529B2 (en) 2016-02-17 2020-12-01 Mitsubishi Electric Corporation Mirror driving apparatus and method for manufacturing thereof
CN106324827B (zh) * 2016-09-29 2019-03-12 东南大学 一种谐振式液体振镜及其驱动方法
CN109863442B (zh) * 2016-11-09 2022-03-04 第一精工株式会社 可动反射元件
IT201600121010A1 (it) * 2016-11-29 2018-05-29 St Microelectronics Srl Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di pilotaggio
EP3761100B1 (en) * 2018-02-27 2024-08-14 Pioneer Corporation Optical deflector
US11029512B2 (en) * 2018-06-27 2021-06-08 Microsoft Technology Licensing, Llc Adjusting a resonant frequency of a scanning mirror
CN113574007B (zh) * 2019-03-28 2024-12-03 富士胶片株式会社 微镜器件及微镜器件的驱动方法
JP7209082B2 (ja) * 2019-04-26 2023-01-19 富士フイルム株式会社 マイクロミラーデバイス
EP3961289A4 (en) * 2019-04-26 2022-06-15 FUJIFILM Corporation MICRO-MIRROR DEVICE
JP7451930B2 (ja) * 2019-10-11 2024-03-19 株式会社リコー 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両
CN114105081A (zh) * 2020-08-27 2022-03-01 中光电智能感测股份有限公司 微型扫描面镜
JP7543872B2 (ja) * 2020-11-20 2024-09-03 セイコーエプソン株式会社 光学デバイスの駆動方法、光学システム、及び、表示装置
US12431614B1 (en) 2024-02-05 2025-09-30 Rockwell Collins, Inc. Frequency tunable piezoelectric VLF antenna

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JPH11112048A (ja) * 1997-10-02 1999-04-23 Seiko Epson Corp 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
US6972883B2 (en) * 2002-02-15 2005-12-06 Ricoh Company, Ltd. Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
JP2005128147A (ja) * 2003-10-22 2005-05-19 Stanley Electric Co Ltd 光偏向器及び光学装置
WO2005122380A1 (ja) * 2004-06-07 2005-12-22 Matsushita Electric Industrial Co., Ltd. アクチュエータ及び該アクチュエータを備えた微動機構並びに該微動機構を備えたカメラモジュール
JP4237208B2 (ja) * 2005-09-26 2009-03-11 富士フイルム株式会社 圧電素子及びその駆動方法、圧電装置、液体吐出装置
JP2007199682A (ja) * 2005-12-27 2007-08-09 Konica Minolta Holdings Inc 光偏向器および光ビーム走査装置
JP2007206480A (ja) * 2006-02-03 2007-08-16 Toko Inc 光走査素子
JP4926596B2 (ja) * 2006-08-08 2012-05-09 スタンレー電気株式会社 光偏向器及びその製造方法
EP1905867A1 (en) 2006-09-28 2008-04-02 Fujifilm Corporation Process for forming a film, piezoelectric film, and piezoelectric device
JP4972774B2 (ja) * 2007-02-16 2012-07-11 コニカミノルタアドバンストレイヤー株式会社 マイクロスキャナおよびそれを備える光学機器
US7864390B2 (en) * 2007-05-28 2011-01-04 Konica Minolta Opto, Inc. Image display apparatus
JP4972781B2 (ja) 2007-06-19 2012-07-11 コニカミノルタアドバンストレイヤー株式会社 マイクロスキャナ及びそれを備えた光走査装置。
JP2009302661A (ja) * 2008-06-10 2009-12-24 Toshiba Corp 圧電デバイス
JP5391600B2 (ja) 2008-07-16 2014-01-15 船井電機株式会社 振動ミラー素子
JP5505306B2 (ja) 2008-08-22 2014-05-28 コニカミノルタ株式会社 駆動装置
JP2010080813A (ja) * 2008-09-29 2010-04-08 Fujifilm Corp 圧電体膜とその製造方法、圧電素子、及び液体吐出装置
JP5493735B2 (ja) * 2009-01-30 2014-05-14 株式会社リコー 偏向ミラー、光走査装置、画像形成装置、および画像投影装置
JP5419488B2 (ja) * 2009-02-17 2014-02-19 Ｎｅｃトーキン株式会社 圧電素子
JP5191939B2 (ja) * 2009-03-31 2013-05-08 スタンレー電気株式会社 光偏向器用アクチュエータ装置
JP2011075955A (ja) * 2009-09-30 2011-04-14 Brother Industries Ltd 画像表示装置
JP5400636B2 (ja) * 2010-01-20 2014-01-29 スタンレー電気株式会社 光偏向器及びこれを用いた光学装置
JP5761194B2 (ja) * 2010-07-29 2015-08-12 日本電気株式会社 光走査装置および画像表示装置
JP5264954B2 (ja) * 2011-03-30 2013-08-14 富士フイルム株式会社 ミラー駆動装置及び方法
JP6092713B2 (ja) * 2013-05-28 2017-03-08 スタンレー電気株式会社 光偏向器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0782011B2 (ja) 1989-12-06 1995-09-06 株式会社日立製作所 サンプル調整装置及び血球計測装置

Also Published As

Publication number Publication date
CN104297918A (zh) 2015-01-21
US9678335B2 (en) 2017-06-13
EP2827183B1 (en) 2022-04-27
EP2827183A1 (en) 2015-01-21
US20150022871A1 (en) 2015-01-22
JP2015022064A (ja) 2015-02-02

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