CN104272070B - 分光传感器 - Google Patents

分光传感器 Download PDF

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Publication number
CN104272070B
CN104272070B CN201380023137.2A CN201380023137A CN104272070B CN 104272070 B CN104272070 B CN 104272070B CN 201380023137 A CN201380023137 A CN 201380023137A CN 104272070 B CN104272070 B CN 104272070B
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CN201380023137.2A
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English (en)
Chinese (zh)
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CN104272070A (zh
Inventor
笠原隆
柴山胜己
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
CN201380023137.2A 2012-05-18 2013-05-08 分光传感器 Active CN104272070B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012114340A JP5926610B2 (ja) 2012-05-18 2012-05-18 分光センサ
JP2012-114340 2012-05-18
PCT/JP2013/062919 WO2013172231A1 (ja) 2012-05-18 2013-05-08 分光センサ

Publications (2)

Publication Number Publication Date
CN104272070A CN104272070A (zh) 2015-01-07
CN104272070B true CN104272070B (zh) 2016-03-09

Family

ID=49583638

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380023137.2A Active CN104272070B (zh) 2012-05-18 2013-05-08 分光传感器

Country Status (5)

Country Link
US (1) US9273999B2 (enExample)
JP (1) JP5926610B2 (enExample)
CN (1) CN104272070B (enExample)
DE (1) DE112013002559B4 (enExample)
WO (1) WO2013172231A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5875936B2 (ja) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
JP5988690B2 (ja) * 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
US10718881B2 (en) * 2013-07-09 2020-07-21 Halliburton Energy Services, Inc. Integrated computational elements with laterally-distributed spectral filters
CN104597550B (zh) * 2015-02-02 2017-05-31 上海理工大学 一种线性渐变滤光片中间楔形谐振腔层的制备方法
WO2017057372A1 (ja) * 2015-10-02 2017-04-06 浜松ホトニクス株式会社 光検出装置
CN110418994B (zh) * 2017-03-14 2022-04-19 浜松光子学株式会社 光模块
US11561388B2 (en) 2017-03-14 2023-01-24 Hamamatsu Photonics K.K. Light module
DE112018001349T5 (de) 2017-03-14 2019-11-21 Hamamatsu Photonics K.K. Optisches Modul
JP6778134B2 (ja) 2017-03-14 2020-10-28 浜松ホトニクス株式会社 光モジュール及びその実装方法

Citations (9)

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CN1065523A (zh) * 1991-03-29 1992-10-21 株式会社岛津制作所 分光光度计
US20030173504A1 (en) * 2002-03-18 2003-09-18 Honeywell International Inc. Spectrally tunable detector
WO2003091676A1 (en) * 2002-04-23 2003-11-06 Hiromu Maeda Small packaged spectroscopic sensor unit
CN1498340A (zh) * 2001-03-16 2004-05-19 ��ѧͿ��ʵ�鹫˾ 基于可变滤波器的光学分光计
CN1888833A (zh) * 2005-06-30 2007-01-03 天津麦索特科技发展有限公司 全光谱、双cmos线性成像传感器检测装置及其检测方法
JP2008232843A (ja) * 2007-03-20 2008-10-02 Casio Comput Co Ltd 分光強度測定素子
CN101680804A (zh) * 2007-04-03 2010-03-24 武藤工业株式会社 分光光度计和方法
CN101970993A (zh) * 2008-05-15 2011-02-09 浜松光子学株式会社 分光模块
CN102027342A (zh) * 2008-05-15 2011-04-20 浜松光子学株式会社 分光模块以及分光模块的制造方法

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US4054389A (en) 1976-09-23 1977-10-18 International Business Machines Corporation Spectrophotometer with photodiode array
JPS57151830A (en) * 1981-03-13 1982-09-20 Union Giken:Kk Spectrophotometer
JPS58195127A (ja) 1982-05-10 1983-11-14 Japan Spectroscopic Co マルチチヤネル検知器及びマルチチヤネル分光測定装置
JPS5972861A (ja) * 1982-10-19 1984-04-24 Canon Inc 画像読取り装置
JPS62170647U (enExample) 1986-04-17 1987-10-29
JPH0814509B2 (ja) * 1986-05-15 1996-02-14 ミノルタ株式会社 分光測定センサ
JPS6435325A (en) * 1987-07-31 1989-02-06 Shimadzu Corp Spectral sensor
US4957371A (en) 1987-12-11 1990-09-18 Santa Barbara Research Center Wedge-filter spectrometer
US5784507A (en) 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
JP3375147B2 (ja) * 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
JPH06120462A (ja) 1992-10-01 1994-04-28 Matsushita Electron Corp 固体撮像装置
JP2713838B2 (ja) 1992-10-15 1998-02-16 浜松ホトニクス株式会社 分光イメージングセンサ
JPH1078353A (ja) * 1996-09-02 1998-03-24 Yokogawa Electric Corp 分光装置および分光装置のダイクロイックミラーアレイの製造方法
JP2005037762A (ja) 2003-07-17 2005-02-10 Sun Tec Kk 光学素子、波長可変光フィルタ、光アドドロップモジュールおよび波長可変光源
US7310153B2 (en) 2004-08-23 2007-12-18 Palo Alto Research Center, Incorporated Using position-sensitive detectors for wavelength determination
JP2006284474A (ja) 2005-04-04 2006-10-19 Nikon Corp フォトセンサ
US8324560B2 (en) 2007-03-01 2012-12-04 Koninklijke Philipe Electronics N.V. Optical detector device
JP5998426B2 (ja) 2010-03-05 2016-09-28 セイコーエプソン株式会社 光学センサー及び電子機器
JP5609542B2 (ja) * 2010-10-28 2014-10-22 セイコーエプソン株式会社 光測定装置
JP5634836B2 (ja) * 2010-11-22 2014-12-03 浜松ホトニクス株式会社 分光センサの製造方法
JP5707107B2 (ja) * 2010-11-22 2015-04-22 浜松ホトニクス株式会社 分光センサ

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1065523A (zh) * 1991-03-29 1992-10-21 株式会社岛津制作所 分光光度计
CN1498340A (zh) * 2001-03-16 2004-05-19 ��ѧͿ��ʵ�鹫˾ 基于可变滤波器的光学分光计
US20030173504A1 (en) * 2002-03-18 2003-09-18 Honeywell International Inc. Spectrally tunable detector
WO2003091676A1 (en) * 2002-04-23 2003-11-06 Hiromu Maeda Small packaged spectroscopic sensor unit
CN1518660A (zh) * 2002-04-23 2004-08-04 ǰ����� 小型封装分光传感器组件
CN1888833A (zh) * 2005-06-30 2007-01-03 天津麦索特科技发展有限公司 全光谱、双cmos线性成像传感器检测装置及其检测方法
JP2008232843A (ja) * 2007-03-20 2008-10-02 Casio Comput Co Ltd 分光強度測定素子
CN101680804A (zh) * 2007-04-03 2010-03-24 武藤工业株式会社 分光光度计和方法
CN101970993A (zh) * 2008-05-15 2011-02-09 浜松光子学株式会社 分光模块
CN102027342A (zh) * 2008-05-15 2011-04-20 浜松光子学株式会社 分光模块以及分光模块的制造方法

Also Published As

Publication number Publication date
JP5926610B2 (ja) 2016-05-25
DE112013002559B4 (de) 2022-09-15
WO2013172231A1 (ja) 2013-11-21
JP2013242178A (ja) 2013-12-05
CN104272070A (zh) 2015-01-07
DE112013002559T5 (de) 2015-02-05
US20150131101A1 (en) 2015-05-14
US9273999B2 (en) 2016-03-01

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