DE112013002559B4 - Spektralsensor - Google Patents

Spektralsensor Download PDF

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Publication number
DE112013002559B4
DE112013002559B4 DE112013002559.0T DE112013002559T DE112013002559B4 DE 112013002559 B4 DE112013002559 B4 DE 112013002559B4 DE 112013002559 T DE112013002559 T DE 112013002559T DE 112013002559 B4 DE112013002559 B4 DE 112013002559B4
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DE
Germany
Prior art keywords
light
filter
layer
receiving surface
mirror
Prior art date
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Application number
DE112013002559.0T
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German (de)
English (en)
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DE112013002559T5 (de
Inventor
c/o Hamamatsu Photonics K.K. Kasahara Takashi
c/o Hamamatsu Photonics K.K. Shibayama Katsumi
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Publication of DE112013002559T5 publication Critical patent/DE112013002559T5/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
DE112013002559.0T 2012-05-18 2013-05-08 Spektralsensor Active DE112013002559B4 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP2012114340 2012-05-18
JP2012114340A JP5926610B2 (ja) 2012-05-18 2012-05-18 分光センサ
JP2012-114340 2012-05-18
PCT/JP2013/062919 WO2013172231A1 (ja) 2012-05-18 2013-05-08 分光センサ

Publications (2)

Publication Number Publication Date
DE112013002559T5 DE112013002559T5 (de) 2015-02-05
DE112013002559B4 true DE112013002559B4 (de) 2022-09-15

Family

ID=49583638

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013002559.0T Active DE112013002559B4 (de) 2012-05-18 2013-05-08 Spektralsensor

Country Status (5)

Country Link
US (1) US9273999B2 (enExample)
JP (1) JP5926610B2 (enExample)
CN (1) CN104272070B (enExample)
DE (1) DE112013002559B4 (enExample)
WO (1) WO2013172231A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5988690B2 (ja) * 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
JP5875936B2 (ja) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
AU2013393870B2 (en) * 2013-07-09 2017-06-29 Halliburton Energy Services, Inc. Integrated computational elements with laterally-distributed spectral filters
CN104597550B (zh) * 2015-02-02 2017-05-31 上海理工大学 一种线性渐变滤光片中间楔形谐振腔层的制备方法
JP6945450B2 (ja) * 2015-10-02 2021-10-06 浜松ホトニクス株式会社 光検出装置
US11513339B2 (en) 2017-03-14 2022-11-29 Hamamatsu Photonics K.K. Optical module
JP6778134B2 (ja) 2017-03-14 2020-10-28 浜松ホトニクス株式会社 光モジュール及びその実装方法
US11561388B2 (en) 2017-03-14 2023-01-24 Hamamatsu Photonics K.K. Light module
CN110418994B (zh) * 2017-03-14 2022-04-19 浜松光子学株式会社 光模块

Citations (3)

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Publication number Priority date Publication date Assignee Title
JPH02502490A (ja) 1987-12-11 1990-08-09 サンタ・バーバラ・リサーチ・センター くさびフィルタ分光計
JPH0814509B2 (ja) 1986-05-15 1996-02-14 ミノルタ株式会社 分光測定センサ
JP2006058301A (ja) 2004-08-23 2006-03-02 Palo Alto Research Center Inc チップサイズ波長検出器

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US4054389A (en) 1976-09-23 1977-10-18 International Business Machines Corporation Spectrophotometer with photodiode array
JPS57151830A (en) * 1981-03-13 1982-09-20 Union Giken:Kk Spectrophotometer
JPS58195127A (ja) 1982-05-10 1983-11-14 Japan Spectroscopic Co マルチチヤネル検知器及びマルチチヤネル分光測定装置
JPS5972861A (ja) * 1982-10-19 1984-04-24 Canon Inc 画像読取り装置
JPS62170647U (enExample) 1986-04-17 1987-10-29
JPS6435325A (en) * 1987-07-31 1989-02-06 Shimadzu Corp Spectral sensor
JPH076839B2 (ja) 1991-03-29 1995-01-30 株式会社島津製作所 分光光度計
US5784507A (en) 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
JP3375147B2 (ja) * 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
JPH06120462A (ja) 1992-10-01 1994-04-28 Matsushita Electron Corp 固体撮像装置
JP2713838B2 (ja) 1992-10-15 1998-02-16 浜松ホトニクス株式会社 分光イメージングセンサ
JPH1078353A (ja) * 1996-09-02 1998-03-24 Yokogawa Electric Corp 分光装置および分光装置のダイクロイックミラーアレイの製造方法
US6785002B2 (en) * 2001-03-16 2004-08-31 Optical Coating Laboratory, Inc. Variable filter-based optical spectrometer
US7015457B2 (en) 2002-03-18 2006-03-21 Honeywell International Inc. Spectrally tunable detector
IL159249A0 (en) 2002-04-23 2004-06-01 Small packaged spectroscopic sensor unit
JP2005037762A (ja) 2003-07-17 2005-02-10 Sun Tec Kk 光学素子、波長可変光フィルタ、光アドドロップモジュールおよび波長可変光源
JP2006284474A (ja) 2005-04-04 2006-10-19 Nikon Corp フォトセンサ
CN1888833A (zh) 2005-06-30 2007-01-03 天津麦索特科技发展有限公司 全光谱、双cmos线性成像传感器检测装置及其检测方法
CN101622517B (zh) 2007-03-01 2012-03-21 皇家飞利浦电子股份有限公司 光检测器装置
JP2008232843A (ja) 2007-03-20 2008-10-02 Casio Comput Co Ltd 分光強度測定素子
JP2010523984A (ja) * 2007-04-03 2010-07-15 武藤工業株式会社 分光光度計及び方法
JP5207938B2 (ja) 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5074291B2 (ja) 2008-05-15 2012-11-14 浜松ホトニクス株式会社 分光モジュール
JP5998426B2 (ja) 2010-03-05 2016-09-28 セイコーエプソン株式会社 光学センサー及び電子機器
JP5609542B2 (ja) * 2010-10-28 2014-10-22 セイコーエプソン株式会社 光測定装置
JP5707107B2 (ja) * 2010-11-22 2015-04-22 浜松ホトニクス株式会社 分光センサ
JP5634836B2 (ja) * 2010-11-22 2014-12-03 浜松ホトニクス株式会社 分光センサの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0814509B2 (ja) 1986-05-15 1996-02-14 ミノルタ株式会社 分光測定センサ
JPH02502490A (ja) 1987-12-11 1990-08-09 サンタ・バーバラ・リサーチ・センター くさびフィルタ分光計
JP2006058301A (ja) 2004-08-23 2006-03-02 Palo Alto Research Center Inc チップサイズ波長検出器

Also Published As

Publication number Publication date
WO2013172231A1 (ja) 2013-11-21
CN104272070A (zh) 2015-01-07
US9273999B2 (en) 2016-03-01
CN104272070B (zh) 2016-03-09
US20150131101A1 (en) 2015-05-14
JP5926610B2 (ja) 2016-05-25
JP2013242178A (ja) 2013-12-05
DE112013002559T5 (de) 2015-02-05

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Representative=s name: HOFFMANN - EITLE PATENT- UND RECHTSANWAELTE PA, DE

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Owner name: HAMAMATSU PHOTONICS K.K., HAMAMATSU-SHI, JP

Free format text: FORMER OWNER: HAMAMATSU PHOTONICS K.K., HAMAMATSU-SHI, SHIZUOKA-KEN, JP

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Owner name: HAMAMATSU PHOTONICS K.K., HAMAMATSU-SHI, JP

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