CN104081500A - 放射线固化型切割用粘合带 - Google Patents

放射线固化型切割用粘合带 Download PDF

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Publication number
CN104081500A
CN104081500A CN201380007115.7A CN201380007115A CN104081500A CN 104081500 A CN104081500 A CN 104081500A CN 201380007115 A CN201380007115 A CN 201380007115A CN 104081500 A CN104081500 A CN 104081500A
Authority
CN
China
Prior art keywords
radiation
curing
adhesive
adhesive tape
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380007115.7A
Other languages
English (en)
Chinese (zh)
Inventor
大田乡史
玉川有理
矢吹朗
服部聪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Publication of CN104081500A publication Critical patent/CN104081500A/zh
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22Plastics; Metallised plastics
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/30Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38Pressure-sensitive adhesives [PSA]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/40Additional features of adhesives in the form of films or foils characterized by the presence of essential components
    • C09J2301/416Additional features of adhesives in the form of films or foils characterized by the presence of essential components use of irradiation
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/50Additional features of adhesives in the form of films or foils characterized by process specific features
    • C09J2301/502Additional features of adhesives in the form of films or foils characterized by process specific features process for debonding adherents
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2415/00Presence of rubber derivatives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2433/00Presence of (meth)acrylic polymer

Landscapes

  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Dicing (AREA)
  • Adhesive Tapes (AREA)
CN201380007115.7A 2012-09-27 2013-09-20 放射线固化型切割用粘合带 Pending CN104081500A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-214776 2012-09-27
JP2012214776A JP5294365B1 (ja) 2012-09-27 2012-09-27 放射線硬化型ダイシング用粘着テープ
PCT/JP2013/075561 WO2014050763A1 (ja) 2012-09-27 2013-09-20 放射線硬化型ダイシング用粘着テープ

Publications (1)

Publication Number Publication Date
CN104081500A true CN104081500A (zh) 2014-10-01

Family

ID=49396754

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380007115.7A Pending CN104081500A (zh) 2012-09-27 2013-09-20 放射线固化型切割用粘合带

Country Status (5)

Country Link
JP (1) JP5294365B1 (ko)
KR (1) KR101487148B1 (ko)
CN (1) CN104081500A (ko)
TW (1) TWI500735B (ko)
WO (1) WO2014050763A1 (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107078037A (zh) * 2015-03-02 2017-08-18 琳得科株式会社 切割片与半导体芯片的制造方法
CN110582839A (zh) * 2017-12-27 2019-12-17 古河电气工业株式会社 辐射固化型切割用粘合带
CN111876095A (zh) * 2017-09-28 2020-11-03 日东电工株式会社 增强薄膜
CN112585742A (zh) * 2018-08-08 2021-03-30 琳得科株式会社 端子保护用胶带及带电磁波屏蔽膜的半导体装置的制造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6129541B2 (ja) * 2012-12-17 2017-05-17 リンテック株式会社 ダイシングシート
JP6310492B2 (ja) * 2016-03-31 2018-04-11 古河電気工業株式会社 電子デバイスパッケージ用テープ
MY186094A (en) * 2016-03-31 2021-06-21 Furukawa Electric Co Ltd Removable adhesive sheet for semiconductor processing
JP6804860B2 (ja) * 2016-04-05 2020-12-23 パナック株式会社 キャリアシート及びカット部材の製造方法
CN112534554B (zh) * 2018-08-08 2024-02-06 琳得科株式会社 端子保护用胶带及带电磁波屏蔽膜的半导体装置的制造方法
JP2020125371A (ja) * 2019-02-01 2020-08-20 日東電工株式会社 粘着シート

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010135494A (ja) * 2008-12-03 2010-06-17 Furukawa Electric Co Ltd:The ダイシングテープ
CN101903983A (zh) * 2007-12-18 2010-12-01 古河电气工业株式会社 晶圆粘贴用粘合片及晶圆的加工方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4876451B2 (ja) * 2005-06-27 2012-02-15 日立化成工業株式会社 接着シート
US7825517B2 (en) * 2007-07-16 2010-11-02 Taiwan Semiconductor Manufacturing Company, Ltd. Method for packaging semiconductor dies having through-silicon vias
JP4717051B2 (ja) * 2007-11-08 2011-07-06 日東電工株式会社 ダイシング・ダイボンドフィルム
JP4553400B2 (ja) * 2008-02-18 2010-09-29 日東電工株式会社 ダイシング・ダイボンドフィルム
EP2151857A2 (en) * 2008-08-04 2010-02-10 Nitto Denko Corporation Dicing die-bonding film
KR20100028687A (ko) * 2008-09-05 2010-03-15 주식회사 동진디스플레이재료 오프셋 인쇄 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101903983A (zh) * 2007-12-18 2010-12-01 古河电气工业株式会社 晶圆粘贴用粘合片及晶圆的加工方法
JP2010135494A (ja) * 2008-12-03 2010-06-17 Furukawa Electric Co Ltd:The ダイシングテープ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107078037A (zh) * 2015-03-02 2017-08-18 琳得科株式会社 切割片与半导体芯片的制造方法
CN107078037B (zh) * 2015-03-02 2020-08-14 琳得科株式会社 切割片与半导体芯片的制造方法
CN111876095A (zh) * 2017-09-28 2020-11-03 日东电工株式会社 增强薄膜
US11945984B2 (en) 2017-09-28 2024-04-02 Nitto Denko Corporation Reinforcing film
CN110582839A (zh) * 2017-12-27 2019-12-17 古河电气工业株式会社 辐射固化型切割用粘合带
CN110582839B (zh) * 2017-12-27 2023-06-06 古河电气工业株式会社 辐射固化型切割用粘合带
CN112585742A (zh) * 2018-08-08 2021-03-30 琳得科株式会社 端子保护用胶带及带电磁波屏蔽膜的半导体装置的制造方法

Also Published As

Publication number Publication date
TW201420714A (zh) 2014-06-01
KR101487148B1 (ko) 2015-01-28
KR20140099337A (ko) 2014-08-11
JP5294365B1 (ja) 2013-09-18
WO2014050763A1 (ja) 2014-04-03
JP2014072221A (ja) 2014-04-21
TWI500735B (zh) 2015-09-21

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SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20141001