CN103777275B - 提供绝热耦合的聚合物波导阵列和硅波导阵列的对准 - Google Patents
提供绝热耦合的聚合物波导阵列和硅波导阵列的对准 Download PDFInfo
- Publication number
- CN103777275B CN103777275B CN201310489341.5A CN201310489341A CN103777275B CN 103777275 B CN103777275 B CN 103777275B CN 201310489341 A CN201310489341 A CN 201310489341A CN 103777275 B CN103777275 B CN 103777275B
- Authority
- CN
- China
- Prior art keywords
- polymer
- silicon
- array
- mask
- waveguide array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-231090 | 2012-10-18 | ||
JP2012231090A JP2014081586A (ja) | 2012-10-18 | 2012-10-18 | アディアバティック結合を実現させる、シングルモード・ポリマー導波路(PWG)アレイと、シリコン導波路(SiWG)アレイとの整列。 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103777275A CN103777275A (zh) | 2014-05-07 |
CN103777275B true CN103777275B (zh) | 2017-06-06 |
Family
ID=50485411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310489341.5A Active CN103777275B (zh) | 2012-10-18 | 2013-10-18 | 提供绝热耦合的聚合物波导阵列和硅波导阵列的对准 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9008477B2 (zh) |
JP (1) | JP2014081586A (zh) |
CN (1) | CN103777275B (zh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014081587A (ja) * | 2012-10-18 | 2014-05-08 | International Business Maschines Corporation | アディアバティック結合を実現させる、シングルモード・ポリマー導波路(PWG)アレイと、シリコン導波路(SiWG)アレイとの整列。 |
US9726820B2 (en) | 2014-08-14 | 2017-08-08 | Raytheon Company | End pumped PWG with tapered core thickness |
CA2994649C (en) | 2015-08-04 | 2023-09-26 | Asahi Glass Co Ltd | Resin optical waveguide |
WO2017022719A1 (ja) * | 2015-08-04 | 2017-02-09 | 旭硝子株式会社 | 樹脂光導波路 |
CN108780192B (zh) * | 2016-03-23 | 2021-01-05 | Agc株式会社 | 复合光波导 |
CA3026263C (en) * | 2016-06-02 | 2024-06-11 | AGC Inc. | Resin optical waveguide |
CN107688211B (zh) * | 2016-08-04 | 2020-09-25 | 苏州旭创科技有限公司 | 一种光波导器件及其制作方法 |
JP6962326B2 (ja) * | 2016-09-06 | 2021-11-05 | Agc株式会社 | 樹脂光導波路及び複合光導波路 |
US9715064B1 (en) * | 2016-09-13 | 2017-07-25 | Globalfoundries Inc. | Multi-chip modules with vertically aligned grating couplers for transmission of light signals between optical waveguides |
JP7101454B2 (ja) * | 2016-12-28 | 2022-07-15 | 日東電工株式会社 | 光電気混載基板 |
US10436991B2 (en) | 2017-05-19 | 2019-10-08 | Adolite Inc. | Optical interconnect modules based on glass substrate with polymer waveguide |
JP6909637B2 (ja) | 2017-05-25 | 2021-07-28 | 新光電気工業株式会社 | 光導波路装置及びその製造方法 |
CN107144919A (zh) * | 2017-06-28 | 2017-09-08 | 湖北工业大学 | 一种聚合物光波导芯片的制作方法 |
US10107966B1 (en) * | 2017-09-06 | 2018-10-23 | International Business Machines Corporation | Single-mode polymer waveguide connector assembly |
CN112119335B (zh) | 2018-05-18 | 2023-05-02 | Agc株式会社 | 聚合物光波导及复合光波导 |
IT201800005891A1 (it) * | 2018-05-31 | 2019-12-01 | Procedimento per realizzare un dispositivo per accoppiamento adiabatico, dispositivo e sistema corrispondenti | |
FR3084479B1 (fr) * | 2018-07-25 | 2021-03-05 | St Microelectronics Grenoble 2 | Dispositif electronique et assemblage, incluant des guides d'ondes optiques |
US10641953B1 (en) * | 2018-10-26 | 2020-05-05 | Arm Limited | Optical waveguide connecting device |
US10962711B2 (en) * | 2018-11-29 | 2021-03-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor package and manufacturing method thereof |
FR3089310A1 (fr) * | 2018-12-04 | 2020-06-05 | Stmicroelectronics (Grenoble 2) Sas | Dispositif électronique comprenant une puce électronique pourvue d’un câble optique |
JP7138056B2 (ja) * | 2019-01-24 | 2022-09-15 | 京セラ株式会社 | 光コネクタモジュール及び光導波路基板の製造方法 |
JP7222136B2 (ja) * | 2019-01-24 | 2023-02-14 | 京セラ株式会社 | 光コネクタモジュール及び光導波路基板の製造方法 |
WO2020226120A1 (ja) | 2019-05-09 | 2020-11-12 | Agc株式会社 | ポリマー光導波路および複合光導波路 |
US20220268998A1 (en) * | 2019-07-25 | 2022-08-25 | Kyocera Corporation | Optical circuit board and electronic component mounting structure using same |
EP4323821A1 (en) * | 2021-04-12 | 2024-02-21 | Corning Research & Development Corporation | Waveguide substrate connection systems and methods |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6709607B2 (en) * | 1996-12-31 | 2004-03-23 | Honeywell International Inc. | Flexible optic connector assembly |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3077720B2 (ja) | 1992-09-30 | 2000-08-14 | 日本電信電話株式会社 | 光導波路の作製方法 |
JP3117107B2 (ja) | 1993-08-03 | 2000-12-11 | シャープ株式会社 | 光集積回路素子の組立構造 |
JPH09311253A (ja) * | 1996-05-20 | 1997-12-02 | Fujitsu Ltd | 光結合構造とその製造方法 |
JPH11258455A (ja) | 1998-03-11 | 1999-09-24 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路部品及びこれを用いた光導波路モジュール |
JP2000075158A (ja) | 1998-08-31 | 2000-03-14 | Sony Corp | 光導波路の製造方法、製造装置および光導波路 |
JP4014519B2 (ja) | 2002-07-17 | 2007-11-28 | 日東電工株式会社 | ポリマー光導波路の製造方法 |
JP2005017394A (ja) * | 2003-06-23 | 2005-01-20 | Sharp Corp | 光電気回路基板およびその製造方法 |
JP2005181959A (ja) * | 2003-12-22 | 2005-07-07 | Rohm & Haas Electronic Materials Llc | 光ファイバーをプリント配線板の埋め込み型導波路に連結する方法および構造体 |
JP2005208187A (ja) | 2004-01-21 | 2005-08-04 | Ricoh Opt Ind Co Ltd | 導波路構造を有する光学デバイスとその製造方法 |
JP2006139147A (ja) | 2004-11-12 | 2006-06-01 | Bridgestone Corp | 光導波路およびその製造方法 |
JP4807091B2 (ja) | 2006-02-09 | 2011-11-02 | パナソニック電工株式会社 | 光伝送モジュール用コネクタ構造 |
JP2008058530A (ja) | 2006-08-30 | 2008-03-13 | Nippon Telegr & Teleph Corp <Ntt> | 押し出しラミネートによる導波路作製方法および金型の作製方法 |
JP4730274B2 (ja) | 2006-09-29 | 2011-07-20 | ソニー株式会社 | 光結合器、光コネクタ及びレセプタクル型光伝送モジュール |
JP5156502B2 (ja) | 2007-06-26 | 2013-03-06 | パナソニック株式会社 | 光モジュール |
US8724937B2 (en) * | 2011-12-20 | 2014-05-13 | International Business Machines Corporation | Fiber to wafer interface |
US8534927B1 (en) * | 2012-03-23 | 2013-09-17 | International Business Machines Corporation | Flexible fiber to wafer interface |
-
2012
- 2012-10-18 JP JP2012231090A patent/JP2014081586A/ja active Pending
-
2013
- 2013-10-07 US US14/047,085 patent/US9008477B2/en active Active
- 2013-10-18 CN CN201310489341.5A patent/CN103777275B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6709607B2 (en) * | 1996-12-31 | 2004-03-23 | Honeywell International Inc. | Flexible optic connector assembly |
Non-Patent Citations (1)
Title |
---|
flexible optical probe for planar lightwave circuits testing;Abdullah J Zakariya,Tao Liu et al;《CLEO/QELS》;20081231;正文第1-2页 * |
Also Published As
Publication number | Publication date |
---|---|
CN103777275A (zh) | 2014-05-07 |
US9008477B2 (en) | 2015-04-14 |
JP2014081586A (ja) | 2014-05-08 |
US20140112616A1 (en) | 2014-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103777275B (zh) | 提供绝热耦合的聚合物波导阵列和硅波导阵列的对准 | |
US9658411B2 (en) | Alignment of single-mode polymer waveguide (PWG) array and silicon waveguide (SiWG) array of providing adiabatic coupling | |
JP6029115B2 (ja) | 光デバイス、光コネクタ・アセンブリおよび光接続方法 | |
JP2008216905A (ja) | 光モジュール及び光導波路の製造方法 | |
JP2006522364A (ja) | 2次元光ファイバアレイ | |
US9389362B1 (en) | Adaptive optical interconnection of components of an electro-optical circuit | |
JP2007178852A (ja) | 光配線基板及びこれを用いた光モジュール | |
US9085112B2 (en) | Method of forming single-mode polymer waveguide array assembly | |
US6400857B1 (en) | Method for making integrated and composite optical devices utilizing prefabricated optical fibers and such devices | |
JP4888241B2 (ja) | マイクロレンズアレイ付き部品の製造方法 | |
US7760981B2 (en) | Manufacturing method of optical waveguide device, optical waveguide device obtained thereby, and optical waveguide connecting structure used for the same | |
EP2083301B1 (en) | Manufacturing method of optical waveguide device | |
JP7372578B2 (ja) | 光モジュール | |
JP3595817B2 (ja) | 光モジュールの実装方法及び実装構造 | |
US20030048994A1 (en) | Planar optical waveguide apparatus | |
JPH02157805A (ja) | ガイド付光導波路およびその製造方法 | |
US6445837B1 (en) | Hybrid opto-electronic circuits and method of making | |
US20040165829A1 (en) | Passive alignment of optical fibers with optical elements | |
KR20070071454A (ko) | 인쇄회로기판용 광연결블럭 및 그 제조방법 | |
JP2018151416A (ja) | 光コネクタ | |
US12019276B2 (en) | Optical connector module and method of manufacturing optical waveguide board | |
JP2004309552A (ja) | 光回路部材とその製造方法 | |
JP4172097B2 (ja) | ロッドレンズ付き光ファイバ配列部品の製造方法 | |
JP2009300562A (ja) | 多チャンネル直角光路変換素子 | |
JPH07159636A (ja) | 導波路型光部品およびその調整方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171117 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171117 Address after: American New York Patentee after: Core USA second LLC Address before: New York grams of Armand Patentee before: International Business Machines Corp. |
|
TR01 | Transfer of patent right |