CN103676139B - 致动器、光扫描仪、图像显示装置以及头戴式显示器 - Google Patents
致动器、光扫描仪、图像显示装置以及头戴式显示器 Download PDFInfo
- Publication number
- CN103676139B CN103676139B CN201310406472.2A CN201310406472A CN103676139B CN 103676139 B CN103676139 B CN 103676139B CN 201310406472 A CN201310406472 A CN 201310406472A CN 103676139 B CN103676139 B CN 103676139B
- Authority
- CN
- China
- Prior art keywords
- movable platen
- axle
- coil
- actuator
- reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910001021 Ferroalloy Inorganic materials 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
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- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910000828 alnico Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
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- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004078 waterproofing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/02—Viewing or reading apparatus
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/0149—Head-up displays characterised by mechanical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B27/0172—Head mounted characterised by optical features
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012201300A JP6094105B2 (ja) | 2012-09-13 | 2012-09-13 | アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ |
| JP2012-201300 | 2012-09-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103676139A CN103676139A (zh) | 2014-03-26 |
| CN103676139B true CN103676139B (zh) | 2018-03-06 |
Family
ID=50233034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310406472.2A Expired - Fee Related CN103676139B (zh) | 2012-09-13 | 2013-09-09 | 致动器、光扫描仪、图像显示装置以及头戴式显示器 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9423609B2 (enExample) |
| JP (1) | JP6094105B2 (enExample) |
| KR (1) | KR20140035278A (enExample) |
| CN (1) | CN103676139B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6550207B2 (ja) | 2013-10-29 | 2019-07-24 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよびヘッドアップディスプレイ |
| JP2015087444A (ja) | 2013-10-29 | 2015-05-07 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよびヘッドアップディスプレイ |
| US20160124214A1 (en) * | 2014-10-31 | 2016-05-05 | Intel Corporation | Electromagnetic mems device |
| DE102015217935B4 (de) * | 2015-09-18 | 2025-12-24 | Robert Bosch Gmbh | Mikromechanische Aktorvorrichtung und Verfahren zum Verkippen einer mikromechanischen Aktorvorrichtung |
| US9664897B1 (en) | 2015-10-14 | 2017-05-30 | Intel Corporation | Apparatus with a rotatable MEMS device |
| WO2021106488A1 (ja) * | 2019-11-27 | 2021-06-03 | パナソニックＩｐマネジメント株式会社 | 光制御システム及び光学反射素子 |
| KR20220157568A (ko) | 2021-05-21 | 2022-11-29 | 정남수 | 산업용 제품 평탄화 교정장치 |
| KR20220157566A (ko) | 2021-05-21 | 2022-11-29 | 정남수 | 산업용 제품 평탄화 교정방법 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101122683A (zh) * | 2006-08-09 | 2008-02-13 | 精工爱普生株式会社 | 光学设备、光扫描器及图像形成装置 |
| CN101149475A (zh) * | 2006-09-20 | 2008-03-26 | 精工爱普生株式会社 | 执行器件、光扫描仪以及图像形成装置 |
| CN101266335A (zh) * | 2007-03-12 | 2008-09-17 | 精工爱普生株式会社 | 执行机构、光扫描器以及图像形成装置 |
| CN201654329U (zh) * | 2009-12-04 | 2010-11-24 | 刘晓华 | 微型自锁定双轴光开关 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2987750B2 (ja) | 1995-05-26 | 1999-12-06 | 日本信号株式会社 | プレーナ型電磁アクチュエータ |
| EP0825458B1 (en) * | 1996-03-08 | 2002-10-30 | Nihon Shingo Kabushiki Kaisha | Optical barrier |
| US6188504B1 (en) * | 1996-06-28 | 2001-02-13 | Olympus Optical Co., Ltd. | Optical scanner |
| US6108118A (en) * | 1998-07-09 | 2000-08-22 | Olympus Optical Co., Ltd. | Optical deflector |
| US6989614B2 (en) * | 2002-08-21 | 2006-01-24 | Canon Kabushiki Kaisha | Oscillating device |
| US6844951B2 (en) * | 2002-12-23 | 2005-01-18 | Lexmark International, Inc. | Stationary coil oscillator scanning system |
| JP4376527B2 (ja) * | 2003-03-03 | 2009-12-02 | 日本信号株式会社 | 光走査装置 |
| JP2004266150A (ja) * | 2003-03-03 | 2004-09-24 | Miyota Kk | プレーナ型電磁アクチュエータ |
| KR100644896B1 (ko) * | 2005-01-19 | 2006-11-14 | 엘지전자 주식회사 | 전자력 구동 스캐닝 마이크로미러 및 이를 사용한광스캐닝 장치 |
| JP2009042579A (ja) * | 2007-08-10 | 2009-02-26 | Canon Inc | 光偏向装置、及び揺動体のジッタ抑制方法 |
| JP2009069339A (ja) * | 2007-09-12 | 2009-04-02 | Seiko Epson Corp | アクチュエータ、アクチュエータの製造方法、光スキャナ、および画像形成装置 |
| JP2010181586A (ja) * | 2009-02-05 | 2010-08-19 | Toyota Central R&D Labs Inc | 光学装置 |
| JP5402124B2 (ja) | 2009-03-18 | 2014-01-29 | セイコーエプソン株式会社 | 光学デバイス、光スキャナー及び画像形成装置 |
| JP5630015B2 (ja) * | 2009-12-28 | 2014-11-26 | 株式会社ニコン | 空間光変調器、露光装置およびそれらの製造方法 |
| JP5447272B2 (ja) * | 2010-08-05 | 2014-03-19 | セイコーエプソン株式会社 | 光スキャナーおよび画像形成装置 |
| JP5829391B2 (ja) * | 2010-09-22 | 2015-12-09 | 日本信号株式会社 | 光走査装置及びこれを用いた光測距装置 |
-
2012
- 2012-09-13 JP JP2012201300A patent/JP6094105B2/ja not_active Expired - Fee Related
-
2013
- 2013-09-09 CN CN201310406472.2A patent/CN103676139B/zh not_active Expired - Fee Related
- 2013-09-12 KR KR1020130109669A patent/KR20140035278A/ko not_active Withdrawn
- 2013-09-13 US US14/026,365 patent/US9423609B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101122683A (zh) * | 2006-08-09 | 2008-02-13 | 精工爱普生株式会社 | 光学设备、光扫描器及图像形成装置 |
| CN101149475A (zh) * | 2006-09-20 | 2008-03-26 | 精工爱普生株式会社 | 执行器件、光扫描仪以及图像形成装置 |
| CN101266335A (zh) * | 2007-03-12 | 2008-09-17 | 精工爱普生株式会社 | 执行机构、光扫描器以及图像形成装置 |
| CN201654329U (zh) * | 2009-12-04 | 2010-11-24 | 刘晓华 | 微型自锁定双轴光开关 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9423609B2 (en) | 2016-08-23 |
| US20140071510A1 (en) | 2014-03-13 |
| JP2014056132A (ja) | 2014-03-27 |
| JP6094105B2 (ja) | 2017-03-15 |
| CN103676139A (zh) | 2014-03-26 |
| KR20140035278A (ko) | 2014-03-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180306 |