KR20140035278A - 액츄에이터, 광 스캐너, 화상 표시 장치, 헤드 마운트 디스플레이 - Google Patents

액츄에이터, 광 스캐너, 화상 표시 장치, 헤드 마운트 디스플레이 Download PDF

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Publication number
KR20140035278A
KR20140035278A KR1020130109669A KR20130109669A KR20140035278A KR 20140035278 A KR20140035278 A KR 20140035278A KR 1020130109669 A KR1020130109669 A KR 1020130109669A KR 20130109669 A KR20130109669 A KR 20130109669A KR 20140035278 A KR20140035278 A KR 20140035278A
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KR
South Korea
Prior art keywords
movable plate
reflecting
shaft
coil
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020130109669A
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English (en)
Korean (ko)
Inventor
에미 미즈노
야스시 미조구찌
Original Assignee
세이코 엡슨 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세이코 엡슨 가부시키가이샤 filed Critical 세이코 엡슨 가부시키가이샤
Publication of KR20140035278A publication Critical patent/KR20140035278A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/02—Viewing or reading apparatus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0149—Head-up displays characterised by mechanical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
KR1020130109669A 2012-09-13 2013-09-12 액츄에이터, 광 스캐너, 화상 표시 장치, 헤드 마운트 디스플레이 Withdrawn KR20140035278A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-201300 2012-09-13
JP2012201300A JP6094105B2 (ja) 2012-09-13 2012-09-13 アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ

Publications (1)

Publication Number Publication Date
KR20140035278A true KR20140035278A (ko) 2014-03-21

Family

ID=50233034

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130109669A Withdrawn KR20140035278A (ko) 2012-09-13 2013-09-12 액츄에이터, 광 스캐너, 화상 표시 장치, 헤드 마운트 디스플레이

Country Status (4)

Country Link
US (1) US9423609B2 (enExample)
JP (1) JP6094105B2 (enExample)
KR (1) KR20140035278A (enExample)
CN (1) CN103676139B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220157566A (ko) 2021-05-21 2022-11-29 정남수 산업용 제품 평탄화 교정방법
KR20220157568A (ko) 2021-05-21 2022-11-29 정남수 산업용 제품 평탄화 교정장치

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JP2015087444A (ja) 2013-10-29 2015-05-07 セイコーエプソン株式会社 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよびヘッドアップディスプレイ
JP6550207B2 (ja) 2013-10-29 2019-07-24 セイコーエプソン株式会社 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよびヘッドアップディスプレイ
US20160124214A1 (en) * 2014-10-31 2016-05-05 Intel Corporation Electromagnetic mems device
DE102015217935A1 (de) * 2015-09-18 2017-03-23 Robert Bosch Gmbh Mikromechanische Aktorvorrichtung und Verfahren zum Verkippen einer mikromechanischen Aktorvorrichtung
US9664897B1 (en) 2015-10-14 2017-05-30 Intel Corporation Apparatus with a rotatable MEMS device
WO2021106488A1 (ja) * 2019-11-27 2021-06-03 パナソニックＩｐマネジメント株式会社 光制御システム及び光学反射素子

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JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ
WO1997033186A1 (fr) * 1996-03-08 1997-09-12 Nihon Shingo Kabushiki Kaisha Barriere optique
US6188504B1 (en) * 1996-06-28 2001-02-13 Olympus Optical Co., Ltd. Optical scanner
US6108118A (en) * 1998-07-09 2000-08-22 Olympus Optical Co., Ltd. Optical deflector
US6989614B2 (en) * 2002-08-21 2006-01-24 Canon Kabushiki Kaisha Oscillating device
US6844951B2 (en) * 2002-12-23 2005-01-18 Lexmark International, Inc. Stationary coil oscillator scanning system
JP4376527B2 (ja) * 2003-03-03 2009-12-02 日本信号株式会社 光走査装置
JP2004266150A (ja) * 2003-03-03 2004-09-24 Miyota Kk プレーナ型電磁アクチュエータ
KR100644896B1 (ko) * 2005-01-19 2006-11-14 엘지전자 주식회사 전자력 구동 스캐닝 마이크로미러 및 이를 사용한광스캐닝 장치
JP2008040353A (ja) * 2006-08-09 2008-02-21 Seiko Epson Corp 光学デバイス、光スキャナおよび画像形成装置
JP4251206B2 (ja) * 2006-09-20 2009-04-08 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP4329831B2 (ja) * 2007-03-12 2009-09-09 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2009042579A (ja) * 2007-08-10 2009-02-26 Canon Inc 光偏向装置、及び揺動体のジッタ抑制方法
JP2009069339A (ja) * 2007-09-12 2009-04-02 Seiko Epson Corp アクチュエータ、アクチュエータの製造方法、光スキャナ、および画像形成装置
JP2010181586A (ja) * 2009-02-05 2010-08-19 Toyota Central R&D Labs Inc 光学装置
JP5402124B2 (ja) 2009-03-18 2014-01-29 セイコーエプソン株式会社 光学デバイス、光スキャナー及び画像形成装置
CN201654329U (zh) * 2009-12-04 2010-11-24 刘晓华 微型自锁定双轴光开关
JP5630015B2 (ja) * 2009-12-28 2014-11-26 株式会社ニコン 空間光変調器、露光装置およびそれらの製造方法
JP5447272B2 (ja) * 2010-08-05 2014-03-19 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
JP5829391B2 (ja) * 2010-09-22 2015-12-09 日本信号株式会社 光走査装置及びこれを用いた光測距装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220157566A (ko) 2021-05-21 2022-11-29 정남수 산업용 제품 평탄화 교정방법
KR20220157568A (ko) 2021-05-21 2022-11-29 정남수 산업용 제품 평탄화 교정장치

Also Published As

Publication number Publication date
US20140071510A1 (en) 2014-03-13
US9423609B2 (en) 2016-08-23
JP6094105B2 (ja) 2017-03-15
CN103676139A (zh) 2014-03-26
JP2014056132A (ja) 2014-03-27
CN103676139B (zh) 2018-03-06

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Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20130912

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid