CN103586772B - 压力检测装置 - Google Patents
压力检测装置 Download PDFInfo
- Publication number
- CN103586772B CN103586772B CN201210291857.4A CN201210291857A CN103586772B CN 103586772 B CN103586772 B CN 103586772B CN 201210291857 A CN201210291857 A CN 201210291857A CN 103586772 B CN103586772 B CN 103586772B
- Authority
- CN
- China
- Prior art keywords
- pressure
- pressure sensor
- force transmission
- transmission element
- detecting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
- B24B49/165—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load for grinding tyres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0038—Other grinding machines or devices with the grinding tool mounted at the end of a set of bars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/005—Manipulators for mechanical processing tasks
- B25J11/0065—Polishing or grinding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/081—Touching devices, e.g. pressure-sensitive
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0061—Force sensors associated with industrial machines or actuators
- G01L5/0076—Force sensors associated with manufacturing machines
Abstract
Description
压力检测装置 | 100 |
支撑件 | 10 |
收容部 | 11 |
收容槽 | 112 |
安装部 | 13 |
安装面 | 131 |
安装孔 | 1311 |
容纳槽 | 1313 |
定位槽 | 1315 |
压力感测器 | 30 |
穿设孔 | 31 |
传力件 | 40 |
本体 | 41 |
传力部 | 43 |
装设部 | 45 |
限位孔 | 451 |
锁紧件 | 50 |
过载保护盖 | 60 |
过载保护部 | 61 |
限位件 | 70 |
减震组件 | 80 |
封装软体胶 | 81 |
橡胶减震板 | 83 |
Claims (8)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210291857.4A CN103586772B (zh) | 2012-08-16 | 2012-08-16 | 压力检测装置 |
TW101130910A TWI477355B (zh) | 2012-08-16 | 2012-08-24 | 壓力檢測裝置 |
US13/912,394 US20140047928A1 (en) | 2012-08-16 | 2013-06-07 | Pressure detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210291857.4A CN103586772B (zh) | 2012-08-16 | 2012-08-16 | 压力检测装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103586772A CN103586772A (zh) | 2014-02-19 |
CN103586772B true CN103586772B (zh) | 2016-01-06 |
Family
ID=50077200
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210291857.4A Active CN103586772B (zh) | 2012-08-16 | 2012-08-16 | 压力检测装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20140047928A1 (zh) |
CN (1) | CN103586772B (zh) |
TW (1) | TWI477355B (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5820842B2 (ja) * | 2013-05-08 | 2015-11-24 | 富士重工業株式会社 | 車輪反力検出装置 |
CN105841864B (zh) * | 2016-03-28 | 2018-12-04 | 北京交通大学 | 钢轨打磨头的压力测量装置 |
CN106553126B (zh) * | 2016-11-18 | 2019-07-09 | 东兴自动化投资有限公司 | 抛光过程的压力检测、控制与自动补偿的方法 |
EP3379222B1 (en) | 2017-03-22 | 2020-12-30 | Methode Electronics Malta Ltd. | Magnetoelastic based sensor assembly |
WO2019168565A1 (en) | 2018-02-27 | 2019-09-06 | Methode Electronics,Inc. | Towing systems and methods using magnetic field sensing |
US11221262B2 (en) | 2018-02-27 | 2022-01-11 | Methode Electronics, Inc. | Towing systems and methods using magnetic field sensing |
US11491832B2 (en) | 2018-02-27 | 2022-11-08 | Methode Electronics, Inc. | Towing systems and methods using magnetic field sensing |
US11084342B2 (en) | 2018-02-27 | 2021-08-10 | Methode Electronics, Inc. | Towing systems and methods using magnetic field sensing |
US11135882B2 (en) | 2018-02-27 | 2021-10-05 | Methode Electronics, Inc. | Towing systems and methods using magnetic field sensing |
US11014417B2 (en) | 2018-02-27 | 2021-05-25 | Methode Electronics, Inc. | Towing systems and methods using magnetic field sensing |
CN113834642B (zh) * | 2020-06-24 | 2023-12-05 | 中国航发商用航空发动机有限责任公司 | 托板螺母安装质量检测工具及其检测方法 |
Citations (8)
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GB1109831A (en) * | 1964-02-05 | 1968-04-18 | Raymond Stanley Hall | Improvements in and relating to force measuring devices |
US3433064A (en) * | 1967-05-23 | 1969-03-18 | Revere Corp America | Flexible structure for yieldably withstanding forces |
JPH06335715A (ja) * | 1993-05-27 | 1994-12-06 | Hitachi Ltd | オンラインロール研削装置を備えた圧延機 |
CN1142049A (zh) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | 陶瓷电容式压力变送器及制作工艺 |
JP2001091237A (ja) * | 1999-09-27 | 2001-04-06 | Okuma Corp | 誤差補正値作成装置 |
CN101118194A (zh) * | 2007-09-14 | 2008-02-06 | 哈尔滨工业大学 | 提供转矩和弯矩过载保护的关节力矩传感器 |
CN102240962A (zh) * | 2010-05-10 | 2011-11-16 | 三星电子株式会社 | 化学机械研磨设备的调节器及调节方法 |
CN102601719A (zh) * | 2011-01-20 | 2012-07-25 | 株式会社荏原制作所 | 研磨方法和研磨装置 |
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US2726494A (en) * | 1950-11-29 | 1955-12-13 | Ammco Tools Inc | Cylinder hone |
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US3498114A (en) * | 1968-04-11 | 1970-03-03 | Hewlett Packard Co | Transducer for measuring force and displacement |
US3812723A (en) * | 1972-01-21 | 1974-05-28 | Byron Jackson Inc | Force measuring weighing device |
US4635405A (en) * | 1983-05-18 | 1987-01-13 | Timesavers, Inc. | Continuous arcuate feed assembly |
DK155299B (da) * | 1986-04-18 | 1989-03-20 | Struers As | Apparat til slibning eller polering af emner |
US4899599A (en) * | 1987-12-07 | 1990-02-13 | Magnetic Power Systems, Inc. | Strain force sensor means |
JPH06186098A (ja) * | 1992-12-17 | 1994-07-08 | Hitachi Ltd | 力検出器 |
GB2284918B (en) * | 1993-12-17 | 1997-05-21 | Fuji Heavy Ind Ltd | Inflation pressure sensor for automobile pneumatic tyre |
JPH08236484A (ja) * | 1995-02-28 | 1996-09-13 | Hitachi Ltd | 半導体ウエハのブレーキング方法および装置 |
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US5808255A (en) * | 1996-07-22 | 1998-09-15 | Texas Instruments Incorporated | Fluid pressure responsive electric switch |
US5833519A (en) * | 1996-08-06 | 1998-11-10 | Micron Technology, Inc. | Method and apparatus for mechanical polishing |
JPH1071560A (ja) * | 1996-08-27 | 1998-03-17 | Speedfam Co Ltd | ウエハ加圧装置 |
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US5939638A (en) * | 1997-08-01 | 1999-08-17 | Zovath; Peter J. | Pressure sensor with protective internal wall |
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US6123607A (en) * | 1998-01-07 | 2000-09-26 | Ravkin; Michael A. | Method and apparatus for improved conditioning of polishing pads |
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JP3763975B2 (ja) * | 1998-07-21 | 2006-04-05 | 株式会社荏原製作所 | トップリング制御装置及びポリッシング装置 |
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US6206754B1 (en) * | 1999-08-31 | 2001-03-27 | Micron Technology, Inc. | Endpoint detection apparatus, planarizing machines with endpointing apparatus, and endpointing methods for mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
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US6709322B2 (en) * | 2001-03-29 | 2004-03-23 | Lam Research Corporation | Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing |
JP4197103B2 (ja) * | 2002-04-15 | 2008-12-17 | 株式会社荏原製作所 | ポリッシング装置 |
WO2004012249A1 (ja) * | 2002-07-26 | 2004-02-05 | Nikon Corporation | 研磨装置 |
GB2396211B (en) * | 2002-10-06 | 2006-02-22 | Weatherford Lamb | Multiple component sensor mechanism |
US7150674B2 (en) * | 2002-10-09 | 2006-12-19 | Koyo Machine Industries Co., Ltd. | Both-side grinding method and both-side grinding machine for thin disc work |
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JP5306065B2 (ja) * | 2009-06-04 | 2013-10-02 | 株式会社荏原製作所 | ドレッシング装置およびドレッシング方法 |
JP5407693B2 (ja) * | 2009-09-17 | 2014-02-05 | 旭硝子株式会社 | ガラス基板の製造方法、研磨方法及び研磨装置、並びにガラス基板 |
JP4963138B1 (ja) * | 2011-07-27 | 2012-06-27 | 株式会社トライフォース・マネジメント | 力覚センサ |
CN103376174B (zh) * | 2012-04-27 | 2016-03-09 | 鸿富锦精密工业(深圳)有限公司 | 压力检测装置 |
-
2012
- 2012-08-16 CN CN201210291857.4A patent/CN103586772B/zh active Active
- 2012-08-24 TW TW101130910A patent/TWI477355B/zh not_active IP Right Cessation
-
2013
- 2013-06-07 US US13/912,394 patent/US20140047928A1/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1109831A (en) * | 1964-02-05 | 1968-04-18 | Raymond Stanley Hall | Improvements in and relating to force measuring devices |
US3433064A (en) * | 1967-05-23 | 1969-03-18 | Revere Corp America | Flexible structure for yieldably withstanding forces |
JPH06335715A (ja) * | 1993-05-27 | 1994-12-06 | Hitachi Ltd | オンラインロール研削装置を備えた圧延機 |
CN1142049A (zh) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | 陶瓷电容式压力变送器及制作工艺 |
JP2001091237A (ja) * | 1999-09-27 | 2001-04-06 | Okuma Corp | 誤差補正値作成装置 |
CN101118194A (zh) * | 2007-09-14 | 2008-02-06 | 哈尔滨工业大学 | 提供转矩和弯矩过载保护的关节力矩传感器 |
CN102240962A (zh) * | 2010-05-10 | 2011-11-16 | 三星电子株式会社 | 化学机械研磨设备的调节器及调节方法 |
CN102601719A (zh) * | 2011-01-20 | 2012-07-25 | 株式会社荏原制作所 | 研磨方法和研磨装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103586772A (zh) | 2014-02-19 |
US20140047928A1 (en) | 2014-02-20 |
TWI477355B (zh) | 2015-03-21 |
TW201408432A (zh) | 2014-03-01 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information |
Inventor after: Liu Daoyun Inventor before: Bao Yancheng Inventor before: Tang Aijun |
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CB03 | Change of inventor or designer information | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170502 Address after: Tianjin City, Xiqing economic and Technological Development Zone Saida emerging industrial park G block 3 layer B Patentee after: Fangyuan Radio & television inspection and inspection Limited by Share Ltd Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Co-patentee before: Hon Hai Precision Industry Co., Ltd. Patentee before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. |
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TR01 | Transfer of patent right |