CN103503167B - 提高太阳能电池结构中的隧道结的质量的方法 - Google Patents
提高太阳能电池结构中的隧道结的质量的方法 Download PDFInfo
- Publication number
- CN103503167B CN103503167B CN201280020993.8A CN201280020993A CN103503167B CN 103503167 B CN103503167 B CN 103503167B CN 201280020993 A CN201280020993 A CN 201280020993A CN 103503167 B CN103503167 B CN 103503167B
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- CN
- China
- Prior art keywords
- solar cell
- tunnel junction
- group
- group iii
- substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 72
- 230000008021 deposition Effects 0.000 claims abstract description 11
- 238000000151 deposition Methods 0.000 claims description 38
- 238000004211 migration-enhanced epitaxy Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 9
- 229910052733 gallium Inorganic materials 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 9
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052698 phosphorus Inorganic materials 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052787 antimony Inorganic materials 0.000 claims description 7
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 7
- 229910052785 arsenic Inorganic materials 0.000 claims description 7
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 7
- 229910052797 bismuth Inorganic materials 0.000 claims description 7
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 7
- 229910052796 boron Inorganic materials 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 229910052716 thallium Inorganic materials 0.000 claims description 7
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 7
- 230000006911 nucleation Effects 0.000 claims description 5
- 238000010899 nucleation Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 230000005012 migration Effects 0.000 claims description 4
- 238000013508 migration Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 229910021478 group 5 element Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
- H10F10/142—Photovoltaic cells having only PN homojunction potential barriers comprising multiple PN homojunctions, e.g. tandem cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
- H10F71/1272—The active layers comprising only Group III-V materials, e.g. GaAs or InP comprising at least three elements, e.g. GaAlAs or InGaAsP
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/098,122 | 2011-04-29 | ||
| US13/098,122 US20120273042A1 (en) | 2011-04-29 | 2011-04-29 | Method for improving the quality of a tunnel junction in a solar cell structure |
| PCT/US2012/030983 WO2012148618A1 (en) | 2011-04-29 | 2012-03-28 | A method for improving the quality of a tunnel junction in a solar cell structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103503167A CN103503167A (zh) | 2014-01-08 |
| CN103503167B true CN103503167B (zh) | 2016-09-14 |
Family
ID=45932551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280020993.8A Active CN103503167B (zh) | 2011-04-29 | 2012-03-28 | 提高太阳能电池结构中的隧道结的质量的方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20120273042A1 (enExample) |
| EP (1) | EP2702617A1 (enExample) |
| JP (1) | JP2014512703A (enExample) |
| CN (1) | CN103503167B (enExample) |
| RU (1) | RU2604476C2 (enExample) |
| WO (1) | WO2012148618A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098818A (zh) * | 2016-08-26 | 2016-11-09 | 扬州乾照光电有限公司 | 一种锗基砷化镓多结柔性薄膜太阳电池及其制备方法 |
| US10593818B2 (en) * | 2016-12-09 | 2020-03-17 | The Boeing Company | Multijunction solar cell having patterned emitter and method of making the solar cell |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6380601B1 (en) * | 1999-03-29 | 2002-04-30 | Hughes Electronics Corporation | Multilayer semiconductor structure with phosphide-passivated germanium substrate |
| CN101373798A (zh) * | 2007-08-22 | 2009-02-25 | 中国科学院半导体研究所 | 倒装双结铟镓氮太阳能电池结构 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6437060A (en) * | 1987-08-03 | 1989-02-07 | Nippon Telegraph & Telephone | Semiconductor element |
| JPH03235372A (ja) * | 1990-02-10 | 1991-10-21 | Sumitomo Electric Ind Ltd | 超高効率太陽電池 |
| JPH05201792A (ja) * | 1992-01-27 | 1993-08-10 | Hitachi Ltd | 薄膜結晶製造装置 |
| JPH08162659A (ja) * | 1994-12-06 | 1996-06-21 | Japan Energy Corp | 太陽電池 |
| JPH0964386A (ja) * | 1995-08-18 | 1997-03-07 | Japan Energy Corp | 多接合太陽電池 |
| JPH1012905A (ja) * | 1996-06-27 | 1998-01-16 | Hitachi Ltd | 太陽電池及びその製造方法 |
| JPH1074968A (ja) * | 1996-09-02 | 1998-03-17 | Nippon Telegr & Teleph Corp <Ntt> | 太陽電池およびその製造方法 |
| US5944913A (en) * | 1997-11-26 | 1999-08-31 | Sandia Corporation | High-efficiency solar cell and method for fabrication |
| US6252287B1 (en) * | 1999-05-19 | 2001-06-26 | Sandia Corporation | InGaAsN/GaAs heterojunction for multi-junction solar cells |
| JP2001111074A (ja) * | 1999-08-03 | 2001-04-20 | Fuji Xerox Co Ltd | 半導体素子及び太陽電池 |
| WO2003044840A1 (en) * | 2001-11-08 | 2003-05-30 | Midwest Research Institute | Reactive codoping of gaalinp compound semiconductors |
| US7122733B2 (en) * | 2002-09-06 | 2006-10-17 | The Boeing Company | Multi-junction photovoltaic cell having buffer layers for the growth of single crystal boron compounds |
| US7071407B2 (en) * | 2002-10-31 | 2006-07-04 | Emcore Corporation | Method and apparatus of multiplejunction solar cell structure with high band gap heterojunction middle cell |
| US7812249B2 (en) * | 2003-04-14 | 2010-10-12 | The Boeing Company | Multijunction photovoltaic cell grown on high-miscut-angle substrate |
| RU2308122C1 (ru) * | 2006-06-05 | 2007-10-10 | Институт физики полупроводников Сибирского отделения Российской академии наук | Каскадный солнечный элемент |
| RU2382439C1 (ru) * | 2008-06-05 | 2010-02-20 | Общество с ограниченной ответственностью "Национальная инновационная компания "Новые энергетические проекты" (ООО "Национальная инновационная компания "НЭП") | Каскадный фотопреобразователь и способ его изготовления |
-
2011
- 2011-04-29 US US13/098,122 patent/US20120273042A1/en not_active Abandoned
-
2012
- 2012-03-28 RU RU2013152841/28A patent/RU2604476C2/ru active
- 2012-03-28 EP EP12712847.8A patent/EP2702617A1/en not_active Withdrawn
- 2012-03-28 JP JP2014508363A patent/JP2014512703A/ja not_active Withdrawn
- 2012-03-28 WO PCT/US2012/030983 patent/WO2012148618A1/en not_active Ceased
- 2012-03-28 CN CN201280020993.8A patent/CN103503167B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6380601B1 (en) * | 1999-03-29 | 2002-04-30 | Hughes Electronics Corporation | Multilayer semiconductor structure with phosphide-passivated germanium substrate |
| CN101373798A (zh) * | 2007-08-22 | 2009-02-25 | 中国科学院半导体研究所 | 倒装双结铟镓氮太阳能电池结构 |
Non-Patent Citations (1)
| Title |
|---|
| Optical properties of GaAs/GaNxAs1-x quantum well structures grown by migration-enhanced epitaxy;Y.G. Hong, et al.;《JOURNAL OF CRYSTAL GROWTH》;20020831;第242卷(第1-2期);第29页左列第1段至第34页左列第2段,图1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| RU2013152841A (ru) | 2015-06-10 |
| US20120273042A1 (en) | 2012-11-01 |
| CN103503167A (zh) | 2014-01-08 |
| RU2604476C2 (ru) | 2016-12-10 |
| WO2012148618A1 (en) | 2012-11-01 |
| EP2702617A1 (en) | 2014-03-05 |
| JP2014512703A (ja) | 2014-05-22 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |