CN103477181B - 坐标测量机 - Google Patents

坐标测量机 Download PDF

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Publication number
CN103477181B
CN103477181B CN201280015826.4A CN201280015826A CN103477181B CN 103477181 B CN103477181 B CN 103477181B CN 201280015826 A CN201280015826 A CN 201280015826A CN 103477181 B CN103477181 B CN 103477181B
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China
Prior art keywords
frame element
coordinate measuring
drive unit
dynamic
measuring machine
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Chinese (zh)
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CN103477181A (zh
Inventor
波·佩特尔松
克努特·西尔克斯
伯恩哈德·施普伦格
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Hexagon Technology Center GmbH
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Hexagon Technology Center GmbH
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CN201280015826.4A 2011-03-29 2012-03-27 坐标测量机 Active CN103477181B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11160313.0 2011-03-29
EP11160313A EP2505956A1 (en) 2011-03-29 2011-03-29 Coordinate measuring machine
PCT/EP2012/055394 WO2012130832A1 (en) 2011-03-29 2012-03-27 Coordinate measuring machine

Publications (2)

Publication Number Publication Date
CN103477181A CN103477181A (zh) 2013-12-25
CN103477181B true CN103477181B (zh) 2017-03-15

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CN201280015826.4A Active CN103477181B (zh) 2011-03-29 2012-03-27 坐标测量机

Country Status (9)

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US (1) US9086262B2 (enExample)
EP (2) EP2505956A1 (enExample)
JP (1) JP5770359B2 (enExample)
KR (1) KR101525864B1 (enExample)
CN (1) CN103477181B (enExample)
AU (1) AU2012234336B2 (enExample)
BR (1) BR112013024072A2 (enExample)
CA (1) CA2828826C (enExample)
WO (1) WO2012130832A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11175130B2 (en) * 2016-12-22 2021-11-16 Deckel Maho Pfronten Gmbh Device for use in a numerically controlled machine tool for application in a method for measuring the numerically controlled machine tool

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2820374B1 (en) * 2012-03-02 2020-07-29 Hexagon Metrology, Inc Coordinate measuring machine with constrained counterweight
EP2735843A1 (en) * 2012-11-21 2014-05-28 Hexagon Technology Center GmbH Measuring machine and method for automated measurement of an object
CN104251676A (zh) * 2013-06-28 2014-12-31 鸿富锦精密工业(深圳)有限公司 三次元测量装置
EP2824420B1 (de) * 2013-07-08 2019-03-06 Hexagon Technology Center GmbH Lagebestimmungseinrichtung mit einer inertialen Messeinheit
JP6219141B2 (ja) * 2013-11-27 2017-10-25 株式会社ミツトヨ 形状測定装置及び形状測定方法
US9534890B2 (en) * 2014-03-11 2017-01-03 Hexagon Metrology S.P.A. Measuring machine provided with an improved transmission system
EP3189302B1 (en) * 2014-09-02 2021-03-24 Renishaw Plc. Coordinate measuring method and apparatus for inspecting workpieces, comprising generating measurement correction values using a reference shape that is known not to deviate substantially from a perfect form
EP2998696B1 (en) * 2014-09-18 2021-01-06 Hexagon Technology Center GmbH Method for compensating lobing behaviour of a CMM touch probe
EP3034991B2 (en) * 2014-12-19 2022-08-24 Hexagon Technology Center GmbH Method and system for actively counteracting displacement forces with a probing unit
EP3054265B1 (en) * 2015-02-04 2022-04-20 Hexagon Technology Center GmbH Coordinate measuring machine
EP3064902B1 (de) * 2015-03-06 2017-11-01 Hexagon Technology Center GmbH System zur bestimmung von positionen
US10620003B2 (en) 2015-04-28 2020-04-14 Hexagon Technology Center Gmbh Active damping of a measuring device
WO2016183339A1 (en) 2015-05-12 2016-11-17 Hexagon Metrology, Inc. Apparatus and method of controlling a coordinate measuring machine using environmental information or coordinate measuring machine information
EP3303991B1 (en) 2015-05-29 2019-09-18 Hexagon Metrology, Inc Coordinate measuring machine with object location logic
ITUB20155868A1 (it) * 2015-11-05 2017-05-05 Claudio Arrighi Asse mobile a ponte oscillante spinto da trasmissione a cinghia piatta per macchina posizionatrice automatica di precisione
EP3179203B1 (en) * 2015-12-11 2021-03-31 TESA Sàrl Articulating probe head for measuring system
EP3222966B1 (en) * 2016-03-23 2018-09-12 Hexagon Technology Center GmbH Coordinate measuring machine with an improved belt drive
DE102016112011A1 (de) 2016-04-14 2017-10-19 Jenoptik Industrial Metrology Germany Gmbh Verfahren zum Betreiben einer Messvorrichtung
US10585419B1 (en) 2016-04-27 2020-03-10 Beneficial Machine Tools Llc Methods and devices for performing in-situ inspections during a computer assisted setup of a machine tool table
JP6722502B2 (ja) * 2016-04-27 2020-07-15 株式会社キーエンス 三次元座標測定器
US10416647B1 (en) 2016-04-27 2019-09-17 Beneficial Machine Tools Llc Apparatus for determining axes for the computer assisted setup of a machine tool table
US9903699B2 (en) * 2016-04-27 2018-02-27 Beneficial Photonics, Inc. Apparatus for the computer assisted setup of a machine tool table
DE102016221950B4 (de) * 2016-11-09 2021-09-23 Carl Zeiss Industrielle Messtechnik Gmbh Maschine mit Einrichtung zum Reduzieren einer unerwünschten Rotation eines Maschinenteils
JP6825884B2 (ja) * 2016-11-15 2021-02-03 株式会社ミツトヨ 三次元測定機
JP2020517939A (ja) * 2017-04-19 2020-06-18 レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company 測定装置カウンターバランス
US10845192B2 (en) * 2017-09-13 2020-11-24 Shawn Thomas Lause Machine tool test fixture
EP3470777B1 (en) * 2017-10-10 2021-09-29 Hexagon Technology Center GmbH System, method and computer program product for determining a state of a tool positioning machine
US11385139B2 (en) * 2018-11-21 2022-07-12 Martin E. Best Active backlash detection methods and systems
JP7177672B2 (ja) * 2018-11-26 2022-11-24 オークマ株式会社 数値制御装置
CN109655024B (zh) * 2019-01-24 2020-05-19 大连理工大学 采用空间变换技术的位移传感器外部参数标定方法
DE102019202709B4 (de) * 2019-02-28 2025-08-07 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zur Schwingungsisolierung einer Positioniereinrichtung
CN111928748B (zh) * 2019-05-13 2022-05-13 安徽科瑞特模塑有限公司 一种车辆导流罩加工用通用检具
DE102020213112A1 (de) 2020-08-07 2022-02-10 Carl Zeiss Industrielle Messtechnik Gmbh Anordnung und Verfahren zum Vermessen eines Messobjekts
JP7505695B2 (ja) * 2020-12-07 2024-06-25 三菱電機株式会社 モータ制御装置
GB202218150D0 (en) * 2022-12-02 2023-01-18 Cape Peninsula Univ Of Technology A coordinate movement machine

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1045645A (zh) * 1989-03-07 1990-09-26 沃纳-斯沃斯公司 有改进拖板驱动系统的坐标测量机
CN1347793A (zh) * 2001-11-08 2002-05-08 财团法人工业技术研究院 旋转主轴刀具轴向偏摆的外部主动补偿方法及装置
CN101574868A (zh) * 2008-05-08 2009-11-11 金宝电子工业股份有限公司 喷墨头的定位装置及方法
CN201613477U (zh) * 2010-02-23 2010-10-27 协鸿工业股份有限公司 进给系统温升量测与补偿装置

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19920169A1 (de) * 1999-05-03 2000-11-09 Heidelberger Druckmasch Ag Verfahren und Vorrichtung zur Linearitätsmessung
JPS5834333A (ja) 1981-08-26 1983-02-28 Hitachi Ltd カツプリング応力監視装置
DE3401141C2 (de) * 1984-01-14 1987-01-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßeinrichtung
DE3437094C1 (de) * 1984-10-10 1986-02-13 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Koordinaten-Messmaschine in Portalbauweise
JP2771158B2 (ja) 1986-09-09 1998-07-02 日本電気株式会社 クロックジェネレータ
JPH044170Y2 (enExample) * 1986-10-21 1992-02-07
GB8705302D0 (en) * 1987-03-06 1987-04-08 Renishaw Plc Combined scale & interferometer
SU1700353A1 (ru) * 1987-05-12 1991-12-23 Вильнюсский Филиал Экспериментального Научно-Исследовательского Института Металлорежущих Станков Координатна измерительна машина
US4866643A (en) * 1987-10-09 1989-09-12 Brown & Sharpe Manufacturing Company Method for automatic compensation of probe offset in a coordinate measuring machine
JPH0620965Y2 (ja) 1990-09-28 1994-06-01 株式会社ミツトヨ 三次元測定機
US5511422A (en) 1993-04-09 1996-04-30 Monitoring Technology Corporation Method and apparatus for analyzing and detecting faults in bearings and other rotating components that slip
DE4340477C1 (de) * 1993-11-27 1995-04-20 Leitz Mestechnik Gmbh Koordinatenmeßmaschine mit einer in axialer Richtung in Lagerebenen verschiebbaren Pinole
US5660255A (en) 1994-04-04 1997-08-26 Applied Power, Inc. Stiff actuator active vibration isolation system
SE506213C2 (sv) * 1996-03-20 1997-11-24 Johansson Ab C E Anordning för att åstadkomma en i huvudsak rätlinjig rörelse hos en rörlig del i en mätmaskin där kraftöverföringen sker från en typ av rörelse till den linjära rörelsen
DE19642827B4 (de) * 1996-03-29 2005-06-23 Zf Sachs Ag Aktuator zur Schwingungsbedämpfung
GB9616577D0 (en) 1996-08-07 1996-09-25 Lucas Ind Plc Improvements relating to gearboxes
WO2000014474A1 (en) * 1998-09-08 2000-03-16 Brown & Sharpe Manufacturing Company Coordinate measuring machine having a machine tool frame
AT502910B1 (de) 2002-10-10 2009-07-15 M & R Automation Gmbh Verfahren und anordnung zur aufzeichnung und auswertung von messdaten einer getriebeprüfeinrichtung
GB0326532D0 (en) 2003-11-13 2003-12-17 Renishaw Plc Method of error compensation
CN1239882C (zh) * 2004-01-06 2006-02-01 南京航空航天大学 三坐标精密移动平台
JP4675047B2 (ja) 2004-02-02 2011-04-20 株式会社ミツトヨ 三次元測定機の測定座標補正方法及び三次元測定システム
FR2875070B1 (fr) * 2004-09-03 2006-12-29 Ecole Norm Superieure Cachan Procede et dispositif de compensation des vibrations d'une machine electrique, et machines electriques ainsi equipees
GB2425840A (en) 2005-04-13 2006-11-08 Renishaw Plc Error correction of workpiece measurements
JP2007309684A (ja) * 2006-05-16 2007-11-29 Mitsutoyo Corp 測定制御装置、表面性状測定装置、および、測定制御方法
ITTO20070318A1 (it) * 2007-05-10 2008-11-11 Hexagon Metrology Spa Metodo per la determinazione degli errori geometrici in una macchina utensile o di misura
WO2009001385A1 (en) * 2007-06-28 2008-12-31 Hexagon Metrology S.P.A. Method for determining dynamic errors in a measuring machine
JP2009153228A (ja) * 2007-12-18 2009-07-09 Sanyo Electric Co Ltd ピエゾアクチュエータ用駆動回路及び防振制御回路
JP5373319B2 (ja) 2008-05-23 2013-12-18 株式会社ミツトヨ 画像測定機
US7636170B1 (en) * 2008-09-12 2009-12-22 National Formosa University Static/dynamic multi-function measuring device for linear unit
CN101562409B (zh) * 2009-05-12 2012-06-20 北京航空航天大学 压电结构阻尼控制实物补偿法
EP2270425A1 (en) * 2009-07-03 2011-01-05 Leica Geosystems AG Coordinate measuring machine (CMM) and method of compensating errors in a CMM
CH701868B1 (fr) * 2009-09-07 2015-01-15 Tesa Sa Machine à mesurer des coordonnées motorisée à programmation manuelle et méthode de contrôle d'une telle machine.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1045645A (zh) * 1989-03-07 1990-09-26 沃纳-斯沃斯公司 有改进拖板驱动系统的坐标测量机
CN1347793A (zh) * 2001-11-08 2002-05-08 财团法人工业技术研究院 旋转主轴刀具轴向偏摆的外部主动补偿方法及装置
CN101574868A (zh) * 2008-05-08 2009-11-11 金宝电子工业股份有限公司 喷墨头的定位装置及方法
CN201613477U (zh) * 2010-02-23 2010-10-27 协鸿工业股份有限公司 进给系统温升量测与补偿装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11175130B2 (en) * 2016-12-22 2021-11-16 Deckel Maho Pfronten Gmbh Device for use in a numerically controlled machine tool for application in a method for measuring the numerically controlled machine tool

Also Published As

Publication number Publication date
EP2691732A1 (en) 2014-02-05
US9086262B2 (en) 2015-07-21
AU2012234336B2 (en) 2014-08-07
JP2014512529A (ja) 2014-05-22
AU2012234336A1 (en) 2013-08-22
US20140007441A1 (en) 2014-01-09
JP5770359B2 (ja) 2015-08-26
EP2691732B1 (en) 2015-03-04
KR20140005309A (ko) 2014-01-14
EP2505956A1 (en) 2012-10-03
BR112013024072A2 (pt) 2016-12-06
CA2828826A1 (en) 2012-10-04
CA2828826C (en) 2015-11-24
WO2012130832A1 (en) 2012-10-04
CN103477181A (zh) 2013-12-25
KR101525864B1 (ko) 2015-06-05

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