AU2012234336B2 - Coordinate measuring machine - Google Patents
Coordinate measuring machine Download PDFInfo
- Publication number
- AU2012234336B2 AU2012234336B2 AU2012234336A AU2012234336A AU2012234336B2 AU 2012234336 B2 AU2012234336 B2 AU 2012234336B2 AU 2012234336 A AU2012234336 A AU 2012234336A AU 2012234336 A AU2012234336 A AU 2012234336A AU 2012234336 B2 AU2012234336 B2 AU 2012234336B2
- Authority
- AU
- Australia
- Prior art keywords
- dynamic
- drive unit
- frame element
- coordinate measuring
- measuring machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005259 measurement Methods 0.000 claims abstract description 75
- 238000006073 displacement reaction Methods 0.000 claims abstract description 70
- 230000033001 locomotion Effects 0.000 claims abstract description 55
- 230000007246 mechanism Effects 0.000 claims description 49
- 230000001133 acceleration Effects 0.000 claims description 28
- 230000010355 oscillation Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 23
- 230000001419 dependent effect Effects 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 16
- 230000001052 transient effect Effects 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 5
- 239000011149 active material Substances 0.000 claims 1
- 238000004364 calculation method Methods 0.000 claims 1
- 238000004590 computer program Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 description 30
- 230000000694 effects Effects 0.000 description 19
- 238000013459 approach Methods 0.000 description 7
- 230000005284 excitation Effects 0.000 description 7
- 238000012937 correction Methods 0.000 description 6
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 238000013016 damping Methods 0.000 description 6
- 230000006399 behavior Effects 0.000 description 5
- 230000036461 convulsion Effects 0.000 description 5
- 230000003068 static effect Effects 0.000 description 5
- 238000005452 bending Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000010438 granite Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000638 stimulation Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000000418 atomic force spectrum Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11160313.0 | 2011-03-29 | ||
| EP11160313A EP2505956A1 (en) | 2011-03-29 | 2011-03-29 | Coordinate measuring machine |
| PCT/EP2012/055394 WO2012130832A1 (en) | 2011-03-29 | 2012-03-27 | Coordinate measuring machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU2012234336A1 AU2012234336A1 (en) | 2013-08-22 |
| AU2012234336B2 true AU2012234336B2 (en) | 2014-08-07 |
Family
ID=44204198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2012234336A Ceased AU2012234336B2 (en) | 2011-03-29 | 2012-03-27 | Coordinate measuring machine |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9086262B2 (enExample) |
| EP (2) | EP2505956A1 (enExample) |
| JP (1) | JP5770359B2 (enExample) |
| KR (1) | KR101525864B1 (enExample) |
| CN (1) | CN103477181B (enExample) |
| AU (1) | AU2012234336B2 (enExample) |
| BR (1) | BR112013024072A2 (enExample) |
| CA (1) | CA2828826C (enExample) |
| WO (1) | WO2012130832A1 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2820374B1 (en) * | 2012-03-02 | 2020-07-29 | Hexagon Metrology, Inc | Coordinate measuring machine with constrained counterweight |
| EP2735843A1 (en) * | 2012-11-21 | 2014-05-28 | Hexagon Technology Center GmbH | Measuring machine and method for automated measurement of an object |
| CN104251676A (zh) * | 2013-06-28 | 2014-12-31 | 鸿富锦精密工业(深圳)有限公司 | 三次元测量装置 |
| EP2824420B1 (de) * | 2013-07-08 | 2019-03-06 | Hexagon Technology Center GmbH | Lagebestimmungseinrichtung mit einer inertialen Messeinheit |
| JP6219141B2 (ja) * | 2013-11-27 | 2017-10-25 | 株式会社ミツトヨ | 形状測定装置及び形状測定方法 |
| US9534890B2 (en) * | 2014-03-11 | 2017-01-03 | Hexagon Metrology S.P.A. | Measuring machine provided with an improved transmission system |
| EP3189302B1 (en) * | 2014-09-02 | 2021-03-24 | Renishaw Plc. | Coordinate measuring method and apparatus for inspecting workpieces, comprising generating measurement correction values using a reference shape that is known not to deviate substantially from a perfect form |
| EP2998696B1 (en) * | 2014-09-18 | 2021-01-06 | Hexagon Technology Center GmbH | Method for compensating lobing behaviour of a CMM touch probe |
| EP3034991B2 (en) * | 2014-12-19 | 2022-08-24 | Hexagon Technology Center GmbH | Method and system for actively counteracting displacement forces with a probing unit |
| EP3054265B1 (en) * | 2015-02-04 | 2022-04-20 | Hexagon Technology Center GmbH | Coordinate measuring machine |
| EP3064902B1 (de) * | 2015-03-06 | 2017-11-01 | Hexagon Technology Center GmbH | System zur bestimmung von positionen |
| US10620003B2 (en) | 2015-04-28 | 2020-04-14 | Hexagon Technology Center Gmbh | Active damping of a measuring device |
| WO2016183339A1 (en) | 2015-05-12 | 2016-11-17 | Hexagon Metrology, Inc. | Apparatus and method of controlling a coordinate measuring machine using environmental information or coordinate measuring machine information |
| EP3303991B1 (en) | 2015-05-29 | 2019-09-18 | Hexagon Metrology, Inc | Coordinate measuring machine with object location logic |
| ITUB20155868A1 (it) * | 2015-11-05 | 2017-05-05 | Claudio Arrighi | Asse mobile a ponte oscillante spinto da trasmissione a cinghia piatta per macchina posizionatrice automatica di precisione |
| EP3179203B1 (en) * | 2015-12-11 | 2021-03-31 | TESA Sàrl | Articulating probe head for measuring system |
| EP3222966B1 (en) * | 2016-03-23 | 2018-09-12 | Hexagon Technology Center GmbH | Coordinate measuring machine with an improved belt drive |
| DE102016112011A1 (de) | 2016-04-14 | 2017-10-19 | Jenoptik Industrial Metrology Germany Gmbh | Verfahren zum Betreiben einer Messvorrichtung |
| US10585419B1 (en) | 2016-04-27 | 2020-03-10 | Beneficial Machine Tools Llc | Methods and devices for performing in-situ inspections during a computer assisted setup of a machine tool table |
| JP6722502B2 (ja) * | 2016-04-27 | 2020-07-15 | 株式会社キーエンス | 三次元座標測定器 |
| US10416647B1 (en) | 2016-04-27 | 2019-09-17 | Beneficial Machine Tools Llc | Apparatus for determining axes for the computer assisted setup of a machine tool table |
| US9903699B2 (en) * | 2016-04-27 | 2018-02-27 | Beneficial Photonics, Inc. | Apparatus for the computer assisted setup of a machine tool table |
| DE102016221950B4 (de) * | 2016-11-09 | 2021-09-23 | Carl Zeiss Industrielle Messtechnik Gmbh | Maschine mit Einrichtung zum Reduzieren einer unerwünschten Rotation eines Maschinenteils |
| JP6825884B2 (ja) * | 2016-11-15 | 2021-02-03 | 株式会社ミツトヨ | 三次元測定機 |
| DE102016226073A1 (de) * | 2016-12-22 | 2018-06-28 | Deckel Maho Pfronten Gmbh | Vorrichtung zum einsatz in einer numerisch gesteuerten werkzeugmaschine zur verwendung in einem verfahren zum vermessen der numerisch gesteuerten werkzeugmaschine |
| JP2020517939A (ja) * | 2017-04-19 | 2020-06-18 | レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company | 測定装置カウンターバランス |
| US10845192B2 (en) * | 2017-09-13 | 2020-11-24 | Shawn Thomas Lause | Machine tool test fixture |
| EP3470777B1 (en) * | 2017-10-10 | 2021-09-29 | Hexagon Technology Center GmbH | System, method and computer program product for determining a state of a tool positioning machine |
| US11385139B2 (en) * | 2018-11-21 | 2022-07-12 | Martin E. Best | Active backlash detection methods and systems |
| JP7177672B2 (ja) * | 2018-11-26 | 2022-11-24 | オークマ株式会社 | 数値制御装置 |
| CN109655024B (zh) * | 2019-01-24 | 2020-05-19 | 大连理工大学 | 采用空间变换技术的位移传感器外部参数标定方法 |
| DE102019202709B4 (de) * | 2019-02-28 | 2025-08-07 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren und Vorrichtung zur Schwingungsisolierung einer Positioniereinrichtung |
| CN111928748B (zh) * | 2019-05-13 | 2022-05-13 | 安徽科瑞特模塑有限公司 | 一种车辆导流罩加工用通用检具 |
| DE102020213112A1 (de) | 2020-08-07 | 2022-02-10 | Carl Zeiss Industrielle Messtechnik Gmbh | Anordnung und Verfahren zum Vermessen eines Messobjekts |
| JP7505695B2 (ja) * | 2020-12-07 | 2024-06-25 | 三菱電機株式会社 | モータ制御装置 |
| GB202218150D0 (en) * | 2022-12-02 | 2023-01-18 | Cape Peninsula Univ Of Technology | A coordinate movement machine |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4340477C1 (de) * | 1993-11-27 | 1995-04-20 | Leitz Mestechnik Gmbh | Koordinatenmeßmaschine mit einer in axialer Richtung in Lagerebenen verschiebbaren Pinole |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19920169A1 (de) * | 1999-05-03 | 2000-11-09 | Heidelberger Druckmasch Ag | Verfahren und Vorrichtung zur Linearitätsmessung |
| JPS5834333A (ja) | 1981-08-26 | 1983-02-28 | Hitachi Ltd | カツプリング応力監視装置 |
| DE3401141C2 (de) * | 1984-01-14 | 1987-01-22 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längen- oder Winkelmeßeinrichtung |
| DE3437094C1 (de) * | 1984-10-10 | 1986-02-13 | Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf | Koordinaten-Messmaschine in Portalbauweise |
| JP2771158B2 (ja) | 1986-09-09 | 1998-07-02 | 日本電気株式会社 | クロックジェネレータ |
| JPH044170Y2 (enExample) * | 1986-10-21 | 1992-02-07 | ||
| GB8705302D0 (en) * | 1987-03-06 | 1987-04-08 | Renishaw Plc | Combined scale & interferometer |
| SU1700353A1 (ru) * | 1987-05-12 | 1991-12-23 | Вильнюсский Филиал Экспериментального Научно-Исследовательского Института Металлорежущих Станков | Координатна измерительна машина |
| US4866643A (en) * | 1987-10-09 | 1989-09-12 | Brown & Sharpe Manufacturing Company | Method for automatic compensation of probe offset in a coordinate measuring machine |
| US4928396A (en) | 1989-03-07 | 1990-05-29 | The Warner & Swasey Company | Coordinate measuring machine with improved carriage drive system |
| JPH0620965Y2 (ja) | 1990-09-28 | 1994-06-01 | 株式会社ミツトヨ | 三次元測定機 |
| US5511422A (en) | 1993-04-09 | 1996-04-30 | Monitoring Technology Corporation | Method and apparatus for analyzing and detecting faults in bearings and other rotating components that slip |
| US5660255A (en) | 1994-04-04 | 1997-08-26 | Applied Power, Inc. | Stiff actuator active vibration isolation system |
| SE506213C2 (sv) * | 1996-03-20 | 1997-11-24 | Johansson Ab C E | Anordning för att åstadkomma en i huvudsak rätlinjig rörelse hos en rörlig del i en mätmaskin där kraftöverföringen sker från en typ av rörelse till den linjära rörelsen |
| DE19642827B4 (de) * | 1996-03-29 | 2005-06-23 | Zf Sachs Ag | Aktuator zur Schwingungsbedämpfung |
| GB9616577D0 (en) | 1996-08-07 | 1996-09-25 | Lucas Ind Plc | Improvements relating to gearboxes |
| WO2000014474A1 (en) * | 1998-09-08 | 2000-03-16 | Brown & Sharpe Manufacturing Company | Coordinate measuring machine having a machine tool frame |
| CN1347793A (zh) * | 2001-11-08 | 2002-05-08 | 财团法人工业技术研究院 | 旋转主轴刀具轴向偏摆的外部主动补偿方法及装置 |
| AT502910B1 (de) | 2002-10-10 | 2009-07-15 | M & R Automation Gmbh | Verfahren und anordnung zur aufzeichnung und auswertung von messdaten einer getriebeprüfeinrichtung |
| GB0326532D0 (en) | 2003-11-13 | 2003-12-17 | Renishaw Plc | Method of error compensation |
| CN1239882C (zh) * | 2004-01-06 | 2006-02-01 | 南京航空航天大学 | 三坐标精密移动平台 |
| JP4675047B2 (ja) | 2004-02-02 | 2011-04-20 | 株式会社ミツトヨ | 三次元測定機の測定座標補正方法及び三次元測定システム |
| FR2875070B1 (fr) * | 2004-09-03 | 2006-12-29 | Ecole Norm Superieure Cachan | Procede et dispositif de compensation des vibrations d'une machine electrique, et machines electriques ainsi equipees |
| GB2425840A (en) | 2005-04-13 | 2006-11-08 | Renishaw Plc | Error correction of workpiece measurements |
| JP2007309684A (ja) * | 2006-05-16 | 2007-11-29 | Mitsutoyo Corp | 測定制御装置、表面性状測定装置、および、測定制御方法 |
| ITTO20070318A1 (it) * | 2007-05-10 | 2008-11-11 | Hexagon Metrology Spa | Metodo per la determinazione degli errori geometrici in una macchina utensile o di misura |
| WO2009001385A1 (en) * | 2007-06-28 | 2008-12-31 | Hexagon Metrology S.P.A. | Method for determining dynamic errors in a measuring machine |
| JP2009153228A (ja) * | 2007-12-18 | 2009-07-09 | Sanyo Electric Co Ltd | ピエゾアクチュエータ用駆動回路及び防振制御回路 |
| CN101574868B (zh) * | 2008-05-08 | 2012-01-25 | 金宝电子工业股份有限公司 | 喷墨头的定位方法 |
| JP5373319B2 (ja) | 2008-05-23 | 2013-12-18 | 株式会社ミツトヨ | 画像測定機 |
| US7636170B1 (en) * | 2008-09-12 | 2009-12-22 | National Formosa University | Static/dynamic multi-function measuring device for linear unit |
| CN101562409B (zh) * | 2009-05-12 | 2012-06-20 | 北京航空航天大学 | 压电结构阻尼控制实物补偿法 |
| EP2270425A1 (en) * | 2009-07-03 | 2011-01-05 | Leica Geosystems AG | Coordinate measuring machine (CMM) and method of compensating errors in a CMM |
| CH701868B1 (fr) * | 2009-09-07 | 2015-01-15 | Tesa Sa | Machine à mesurer des coordonnées motorisée à programmation manuelle et méthode de contrôle d'une telle machine. |
| CN201613477U (zh) * | 2010-02-23 | 2010-10-27 | 协鸿工业股份有限公司 | 进给系统温升量测与补偿装置 |
-
2011
- 2011-03-29 EP EP11160313A patent/EP2505956A1/en not_active Withdrawn
-
2012
- 2012-03-27 EP EP12710521.1A patent/EP2691732B1/en active Active
- 2012-03-27 BR BR112013024072A patent/BR112013024072A2/pt active Search and Examination
- 2012-03-27 WO PCT/EP2012/055394 patent/WO2012130832A1/en not_active Ceased
- 2012-03-27 US US14/002,089 patent/US9086262B2/en active Active
- 2012-03-27 KR KR1020137028538A patent/KR101525864B1/ko not_active Expired - Fee Related
- 2012-03-27 CA CA2828826A patent/CA2828826C/en not_active Expired - Fee Related
- 2012-03-27 AU AU2012234336A patent/AU2012234336B2/en not_active Ceased
- 2012-03-27 JP JP2014501574A patent/JP5770359B2/ja not_active Expired - Fee Related
- 2012-03-27 CN CN201280015826.4A patent/CN103477181B/zh active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4340477C1 (de) * | 1993-11-27 | 1995-04-20 | Leitz Mestechnik Gmbh | Koordinatenmeßmaschine mit einer in axialer Richtung in Lagerebenen verschiebbaren Pinole |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2691732A1 (en) | 2014-02-05 |
| US9086262B2 (en) | 2015-07-21 |
| JP2014512529A (ja) | 2014-05-22 |
| AU2012234336A1 (en) | 2013-08-22 |
| CN103477181B (zh) | 2017-03-15 |
| US20140007441A1 (en) | 2014-01-09 |
| JP5770359B2 (ja) | 2015-08-26 |
| EP2691732B1 (en) | 2015-03-04 |
| KR20140005309A (ko) | 2014-01-14 |
| EP2505956A1 (en) | 2012-10-03 |
| BR112013024072A2 (pt) | 2016-12-06 |
| CA2828826A1 (en) | 2012-10-04 |
| CA2828826C (en) | 2015-11-24 |
| WO2012130832A1 (en) | 2012-10-04 |
| CN103477181A (zh) | 2013-12-25 |
| KR101525864B1 (ko) | 2015-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2012234336B2 (en) | Coordinate measuring machine | |
| JP2014512529A5 (enExample) | ||
| US9593927B2 (en) | Dynamical monitoring and modelling of a coordinate measuring machine | |
| US10969221B2 (en) | Active damping of a measuring device | |
| US9726482B2 (en) | Method of actively counteracting displacement forces with a probing unit | |
| EP2762829B1 (en) | Variable modelling of a measuring device | |
| JP6430335B2 (ja) | 多数の要素システムを制御調節する装置および方法 | |
| JP5127934B2 (ja) | 機械運動軌跡測定装置、数値制御工作機械および機械運動軌跡測定方法 | |
| US20140222373A1 (en) | Dynamical monitoring of a coordinate measuring machine using recursive filtering | |
| JP2012254517A (ja) | 位置決め制御装置、これを備えた工作機械 | |
| Mohan et al. | A cohesive modeling technique for theoretical and experimental estimation of damping in serial robots with rigid and flexible links |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FGA | Letters patent sealed or granted (standard patent) | ||
| MK14 | Patent ceased section 143(a) (annual fees not paid) or expired |