CN103424108B - 陀螺传感器和电子设备 - Google Patents

陀螺传感器和电子设备 Download PDF

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Publication number
CN103424108B
CN103424108B CN201310175469.4A CN201310175469A CN103424108B CN 103424108 B CN103424108 B CN 103424108B CN 201310175469 A CN201310175469 A CN 201310175469A CN 103424108 B CN103424108 B CN 103424108B
Authority
CN
China
Prior art keywords
functional element
axis
gyro sensor
vibrating body
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201310175469.4A
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English (en)
Chinese (zh)
Other versions
CN103424108A (zh
Inventor
泷泽照夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN103424108A publication Critical patent/CN103424108A/zh
Application granted granted Critical
Publication of CN103424108B publication Critical patent/CN103424108B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CN201310175469.4A 2012-05-14 2013-05-13 陀螺传感器和电子设备 Expired - Fee Related CN103424108B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012110209A JP6061064B2 (ja) 2012-05-14 2012-05-14 ジャイロセンサー、および電子機器
JP2012-110209 2012-05-14

Publications (2)

Publication Number Publication Date
CN103424108A CN103424108A (zh) 2013-12-04
CN103424108B true CN103424108B (zh) 2018-01-09

Family

ID=49547587

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310175469.4A Expired - Fee Related CN103424108B (zh) 2012-05-14 2013-05-13 陀螺传感器和电子设备

Country Status (3)

Country Link
US (1) US9879999B2 (enExample)
JP (1) JP6061064B2 (enExample)
CN (1) CN103424108B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6195051B2 (ja) 2013-03-04 2017-09-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
JP6380737B2 (ja) * 2014-04-18 2018-08-29 セイコーエプソン株式会社 電子デバイス、電子機器、および移動体
JP2016099269A (ja) * 2014-11-25 2016-05-30 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
JP6604170B2 (ja) * 2015-11-27 2019-11-13 株式会社デンソー 振動型角速度センサ
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
JP7098904B2 (ja) * 2017-09-29 2022-07-12 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体
JP7191118B2 (ja) * 2018-11-30 2022-12-16 京セラ株式会社 多軸角速度センサ

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Publication number Priority date Publication date Assignee Title
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
JPH0894654A (ja) 1994-09-21 1996-04-12 Murata Mfg Co Ltd データ入力装置
US6032531A (en) * 1997-08-04 2000-03-07 Kearfott Guidance & Navigation Corporation Micromachined acceleration and coriolis sensor
JPH1164001A (ja) * 1997-08-12 1999-03-05 Murata Mfg Co Ltd 角速度センサ
JP3435665B2 (ja) * 2000-06-23 2003-08-11 株式会社村田製作所 複合センサ素子およびその製造方法
US6614143B2 (en) * 2000-08-30 2003-09-02 The Penn State Research Foundation Class V flextensional transducer with directional beam patterns
US6829937B2 (en) * 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
JP2005049130A (ja) * 2003-07-30 2005-02-24 Oki Electric Ind Co Ltd 加速度センサ及び加速度センサの製造方法
US7458263B2 (en) 2003-10-20 2008-12-02 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US6939473B2 (en) 2003-10-20 2005-09-06 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
EP1832841B1 (en) * 2006-03-10 2015-12-30 STMicroelectronics Srl Microelectromechanical integrated sensor structure with rotary driving motion
JP2007322295A (ja) * 2006-06-02 2007-12-13 Sony Corp 角速度検出装置および角速度検出装置の製造方法
US7444869B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing and parametric amplification of MEMS inertial sensors
JP4343965B2 (ja) * 2007-02-15 2009-10-14 Ｏｋｉセミコンダクタ株式会社 慣性センサ
WO2009037751A1 (ja) * 2007-09-19 2009-03-26 Murata Manufacturing Co., Ltd. 複合センサおよび加速度センサ
DE102007051591B4 (de) * 2007-10-12 2019-04-25 Robert Bosch Gmbh Mikromechanische Vorrichtung mit Antriebsrahmen
US7859084B2 (en) * 2008-02-28 2010-12-28 Panasonic Corporation Semiconductor substrate
JP4609558B2 (ja) * 2008-09-02 2011-01-12 株式会社デンソー 角速度センサ
JP2010127763A (ja) * 2008-11-27 2010-06-10 Hitachi Ltd 半導体力学量検出センサ及びそれを用いた制御装置
JP5737848B2 (ja) * 2010-03-01 2015-06-17 セイコーエプソン株式会社 センサーデバイス、センサーデバイスの製造方法、モーションセンサー及びモーションセンサーの製造方法
JP5527015B2 (ja) * 2010-05-26 2014-06-18 セイコーエプソン株式会社 素子構造体、慣性センサー、電子機器
JP5822177B2 (ja) * 2011-05-20 2015-11-24 セイコーエプソン株式会社 ジャイロセンサー、電子機器

Also Published As

Publication number Publication date
US9879999B2 (en) 2018-01-30
CN103424108A (zh) 2013-12-04
JP2013238437A (ja) 2013-11-28
US20130298673A1 (en) 2013-11-14
JP6061064B2 (ja) 2017-01-18

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Granted publication date: 20180109