CN103293426B - 元件检测装置 - Google Patents

元件检测装置 Download PDF

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Publication number
CN103293426B
CN103293426B CN201310062540.8A CN201310062540A CN103293426B CN 103293426 B CN103293426 B CN 103293426B CN 201310062540 A CN201310062540 A CN 201310062540A CN 103293426 B CN103293426 B CN 103293426B
Authority
CN
China
Prior art keywords
plate
adsorption plate
test department
inspection device
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201310062540.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN103293426A (zh
Inventor
柳弘俊
徐龙镇
金旻成
柳泰植
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JT Corp
Original Assignee
JT Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020120071089A external-priority patent/KR102000949B1/ko
Application filed by JT Corp filed Critical JT Corp
Publication of CN103293426A publication Critical patent/CN103293426A/zh
Application granted granted Critical
Publication of CN103293426B publication Critical patent/CN103293426B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
CN201310062540.8A 2012-02-29 2013-02-28 元件检测装置 Expired - Fee Related CN103293426B (zh)

Applications Claiming Priority (16)

Application Number Priority Date Filing Date Title
KR20120021447 2012-02-29
KR10-2012-0021447 2012-02-29
KR1020120071089A KR102000949B1 (ko) 2012-02-29 2012-06-29 소자검사장치
KR10-2012-0071089 2012-06-29
KR10-2012-0071098 2012-06-29
KR1020120071086A KR102000948B1 (ko) 2012-02-29 2012-06-29 소자검사장치
KR1020120071098A KR102000950B1 (ko) 2012-02-29 2012-06-29 소자검사장치
KR10-2012-0071086 2012-06-29
KR1020130009890A KR101417773B1 (ko) 2012-02-29 2013-01-29 소자검사장치 및 소자가압툴
KR1020130009888A KR101430101B1 (ko) 2012-02-29 2013-01-29 소자검사장치
KR1020130009889A KR101417772B1 (ko) 2012-02-29 2013-01-29 소자검사장치
KR10-2013-0009888 2013-01-29
KR10-2013-0009889 2013-01-29
KR1020130009887A KR101436028B1 (ko) 2012-02-29 2013-01-29 소자검사장치
KR10-2013-0009887 2013-01-29
KR10-2013-0009890 2013-01-29

Publications (2)

Publication Number Publication Date
CN103293426A CN103293426A (zh) 2013-09-11
CN103293426B true CN103293426B (zh) 2017-03-01

Family

ID=49082993

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201310062540.8A Expired - Fee Related CN103293426B (zh) 2012-02-29 2013-02-28 元件检测装置
CN201310062576.6A Expired - Fee Related CN103293458B (zh) 2012-02-29 2013-02-28 元件检测装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201310062576.6A Expired - Fee Related CN103293458B (zh) 2012-02-29 2013-02-28 元件检测装置

Country Status (2)

Country Link
CN (2) CN103293426B (ko)
WO (2) WO2013129872A1 (ko)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103675679B (zh) * 2013-12-05 2016-08-31 上海电机系统节能工程技术研究中心有限公司 一种用于电机全自动出厂试验系统的输送辊道
KR102120713B1 (ko) * 2014-03-18 2020-06-11 (주)테크윙 반도체소자 테스트용 핸들러
KR102401058B1 (ko) * 2015-05-12 2022-05-23 (주)제이티 소자핸들러
CN106269542B (zh) * 2015-06-11 2018-05-22 鸿劲科技股份有限公司 电子元件预热预冷装置及其应用的作业设备
WO2017119786A1 (ko) * 2016-01-07 2017-07-13 (주)제이티 이송툴모듈 및 그를 가지는 소자핸들러
CN106019110B (zh) * 2016-05-17 2019-01-22 西北工业大学 一种发光电子元件的自动检测装置
CN107490578B (zh) * 2016-06-12 2020-10-09 英泰克普拉斯有限公司 半导体元件检查装置
CN106680691A (zh) * 2016-12-06 2017-05-17 深圳市燕麦科技股份有限公司 一种上料装置
CN111868536A (zh) * 2018-03-11 2020-10-30 宰体有限公司 元件检查装置
JP2019164099A (ja) * 2018-03-20 2019-09-26 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
KR20190120678A (ko) * 2018-04-16 2019-10-24 (주)제이티 소자핸들러
KR20190124132A (ko) * 2018-04-25 2019-11-04 (주)테크윙 전자부품 테스트용 핸들러
CN110095707A (zh) * 2019-04-09 2019-08-06 深圳市贝优通新能源技术开发有限公司 一种具有调整功能的便捷型芯片检测设备
CN114325208A (zh) * 2020-09-30 2022-04-12 鸿劲精密股份有限公司 模块化测试装置及其应用的测试设备
KR20230102440A (ko) * 2021-12-30 2023-07-07 세메스 주식회사 푸셔 구동 유닛 및 테스트 핸들러
KR102612764B1 (ko) * 2022-05-24 2023-12-12 주식회사 티에스이 반도체 패키지의 테스트 장치
TWI827473B (zh) * 2023-02-22 2023-12-21 鴻勁精密股份有限公司 電子元件作業機
CN117443786B (zh) * 2023-12-22 2024-03-12 杭州芯云半导体技术有限公司 一种基于老化测试的半导体器件分选方法及系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1837841A (zh) * 2005-03-22 2006-09-27 未来产业株式会社 用于测试半导体器件的处理机
TW201111803A (en) * 2009-09-25 2011-04-01 Secron Co Ltd Connection unit and a test handler having the connection unit for connecting a semiconductor device to a test apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100671397B1 (ko) * 2004-10-15 2007-01-18 미래산업 주식회사 반도체 소자 테스트 핸들러의 소자 접속장치
KR100748482B1 (ko) * 2006-01-23 2007-08-10 미래산업 주식회사 반도체 소자 테스트 핸들러
KR100862638B1 (ko) * 2007-03-13 2008-10-09 (주) 인텍플러스 클리닝 수단이 일체로 구비된 반도체 소자의 검사 장치 및그를 이용한 반도체 소자의 검사 방법
KR100874610B1 (ko) * 2007-10-23 2008-12-17 한국기계연구원 반도체 픽업장치 및 그 이용방법
KR100945215B1 (ko) * 2008-05-22 2010-03-03 미래산업 주식회사 테스트 핸들러
KR101133188B1 (ko) * 2009-03-27 2012-04-09 (주)제이티 소자소팅장치 및 그 방법
CN101988947B (zh) * 2009-07-29 2013-06-19 智邦科技股份有限公司 管线式元件测试系统及其方法
KR101058095B1 (ko) * 2009-09-22 2011-08-24 박순명 반도체소자의 성능 측정 시스템 및 방법
KR101864781B1 (ko) * 2010-04-21 2018-06-05 미래산업 주식회사 트레이 이송방법 및 이를 이용한 테스트 핸들러

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1837841A (zh) * 2005-03-22 2006-09-27 未来产业株式会社 用于测试半导体器件的处理机
TW201111803A (en) * 2009-09-25 2011-04-01 Secron Co Ltd Connection unit and a test handler having the connection unit for connecting a semiconductor device to a test apparatus

Also Published As

Publication number Publication date
CN103293426A (zh) 2013-09-11
WO2013129872A1 (ko) 2013-09-06
WO2013129873A1 (ko) 2013-09-06
CN103293458B (zh) 2017-03-01
CN103293458A (zh) 2013-09-11

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