CN103177964A - 带选择性浅槽通孔的ldmos及其制备方法 - Google Patents
带选择性浅槽通孔的ldmos及其制备方法 Download PDFInfo
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- CN103177964A CN103177964A CN2011104357090A CN201110435709A CN103177964A CN 103177964 A CN103177964 A CN 103177964A CN 2011104357090 A CN2011104357090 A CN 2011104357090A CN 201110435709 A CN201110435709 A CN 201110435709A CN 103177964 A CN103177964 A CN 103177964A
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CN2011104357090A CN103177964A (zh) | 2011-12-22 | 2011-12-22 | 带选择性浅槽通孔的ldmos及其制备方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111128962A (zh) * | 2019-12-20 | 2020-05-08 | 华虹半导体(无锡)有限公司 | Ldmos器件及其制作方法 |
CN111180339A (zh) * | 2019-12-20 | 2020-05-19 | 华虹半导体(无锡)有限公司 | Ldmos器件的制作方法、ldmos器件 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11214507A (ja) * | 1998-01-21 | 1999-08-06 | Nec Corp | 半導体装置の配線構造およびその製造方法 |
CN101383287A (zh) * | 2008-09-27 | 2009-03-11 | 电子科技大学 | 一种垂直双扩散金属氧化物半导体器件的制造方法 |
US20090212354A1 (en) * | 2008-02-23 | 2009-08-27 | Force Mos Technology Co. Ltd | Trench moseft with trench gates underneath contact areas of esd diode for prevention of gate and source shortate |
US20100176445A1 (en) * | 2009-01-14 | 2010-07-15 | Force Mos Technology Co., Ltd. | Metal schemes of trench MOSFET for copper bonding |
US20100285646A1 (en) * | 2009-05-08 | 2010-11-11 | Wei-Chieh Lin | Method of fabricating power semiconductor device |
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2011
- 2011-12-22 CN CN2011104357090A patent/CN103177964A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11214507A (ja) * | 1998-01-21 | 1999-08-06 | Nec Corp | 半導体装置の配線構造およびその製造方法 |
US20090212354A1 (en) * | 2008-02-23 | 2009-08-27 | Force Mos Technology Co. Ltd | Trench moseft with trench gates underneath contact areas of esd diode for prevention of gate and source shortate |
CN101383287A (zh) * | 2008-09-27 | 2009-03-11 | 电子科技大学 | 一种垂直双扩散金属氧化物半导体器件的制造方法 |
US20100176445A1 (en) * | 2009-01-14 | 2010-07-15 | Force Mos Technology Co., Ltd. | Metal schemes of trench MOSFET for copper bonding |
US20100285646A1 (en) * | 2009-05-08 | 2010-11-11 | Wei-Chieh Lin | Method of fabricating power semiconductor device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111128962A (zh) * | 2019-12-20 | 2020-05-08 | 华虹半导体(无锡)有限公司 | Ldmos器件及其制作方法 |
CN111180339A (zh) * | 2019-12-20 | 2020-05-19 | 华虹半导体(无锡)有限公司 | Ldmos器件的制作方法、ldmos器件 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140108 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20140108 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Applicant before: Shanghai Huahong NEC Electronics Co., Ltd. |
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Application publication date: 20130626 |