CN103160791A - 一种钠掺杂钼平面溅射靶材的制备方法 - Google Patents
一种钠掺杂钼平面溅射靶材的制备方法 Download PDFInfo
- Publication number
- CN103160791A CN103160791A CN2013100993857A CN201310099385A CN103160791A CN 103160791 A CN103160791 A CN 103160791A CN 2013100993857 A CN2013100993857 A CN 2013100993857A CN 201310099385 A CN201310099385 A CN 201310099385A CN 103160791 A CN103160791 A CN 103160791A
- Authority
- CN
- China
- Prior art keywords
- sodium
- target material
- molybdenum
- sputtering target
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title claims abstract description 68
- 229910052750 molybdenum Inorganic materials 0.000 title claims abstract description 55
- 239000011733 molybdenum Substances 0.000 title claims abstract description 41
- 239000013077 target material Substances 0.000 title claims abstract description 36
- 238000005477 sputtering target Methods 0.000 title claims abstract description 34
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 61
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims abstract description 46
- 239000011734 sodium Substances 0.000 claims abstract description 46
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims abstract description 27
- 125000004436 sodium atom Chemical group 0.000 claims abstract description 16
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000006243 chemical reaction Methods 0.000 claims abstract description 10
- 238000000498 ball milling Methods 0.000 claims abstract description 9
- VLAPMBHFAWRUQP-UHFFFAOYSA-L molybdic acid Chemical compound O[Mo](O)(=O)=O VLAPMBHFAWRUQP-UHFFFAOYSA-L 0.000 claims description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 239000007864 aqueous solution Substances 0.000 claims description 10
- 238000001125 extrusion Methods 0.000 claims description 10
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- 239000011812 mixed powder Substances 0.000 claims description 10
- 238000000465 moulding Methods 0.000 claims description 10
- 239000011684 sodium molybdate Substances 0.000 claims description 10
- 235000015393 sodium molybdate Nutrition 0.000 claims description 10
- TVXXNOYZHKPKGW-UHFFFAOYSA-N sodium molybdate (anhydrous) Chemical compound [Na+].[Na+].[O-][Mo]([O-])(=O)=O TVXXNOYZHKPKGW-UHFFFAOYSA-N 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 125000004429 atom Chemical group 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 18
- 239000010409 thin film Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 abstract description 5
- QNWMNMIVDYETIG-UHFFFAOYSA-N gallium(ii) selenide Chemical compound [Se]=[Ga] QNWMNMIVDYETIG-UHFFFAOYSA-N 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 239000002994 raw material Substances 0.000 abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 238000007731 hot pressing Methods 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 238000009776 industrial production Methods 0.000 abstract 1
- 238000012216 screening Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 10
- 229910052711 selenium Inorganic materials 0.000 description 9
- 239000011669 selenium Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000011160 research Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- CDZGJSREWGPJMG-UHFFFAOYSA-N copper gallium Chemical compound [Cu].[Ga] CDZGJSREWGPJMG-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910000058 selane Inorganic materials 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000011775 sodium fluoride Substances 0.000 description 1
- 235000013024 sodium fluoride Nutrition 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
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CN201310099385.7A CN103160791B (zh) | 2013-03-26 | 2013-03-26 | 一种钠掺杂钼平面溅射靶材的制备方法 |
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CN201310099385.7A CN103160791B (zh) | 2013-03-26 | 2013-03-26 | 一种钠掺杂钼平面溅射靶材的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN103160791A true CN103160791A (zh) | 2013-06-19 |
CN103160791B CN103160791B (zh) | 2015-04-22 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104073771A (zh) * | 2014-07-01 | 2014-10-01 | 河北工业大学 | 一种钼掺钠溅射靶材的制备方法 |
CN104087903A (zh) * | 2014-07-25 | 2014-10-08 | 安泰科技股份有限公司 | 钼钠管型靶材及其制造方法和钼钠靶材 |
CN104894517A (zh) * | 2015-04-08 | 2015-09-09 | 无锡舒玛天科新能源技术有限公司 | 钠掺杂钼旋转靶材及其制备方法 |
CN106591786A (zh) * | 2016-11-11 | 2017-04-26 | 洛阳科威钨钼有限公司 | 一种掺杂型钼靶材的制备方法 |
CN107815654A (zh) * | 2017-11-16 | 2018-03-20 | 金堆城钼业股份有限公司 | 一种制备二硫化钼溅射靶材的方法 |
CN111593305A (zh) * | 2020-04-08 | 2020-08-28 | 辽宁工业大学 | 一种氢氧化钠掺杂制备钼钠靶材的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1077714A (zh) * | 1992-04-14 | 1993-10-27 | 上海工业大学 | 环烷酸钼及其钼硫抗磨剂的制备工艺 |
JP2008156694A (ja) * | 2006-12-22 | 2008-07-10 | Mitsubishi Alum Co Ltd | スパッタリングターゲット材およびその製造方法 |
CN101919062A (zh) * | 2008-01-11 | 2010-12-15 | 克莱麦克斯工程材料有限公司 | 钠/钼复合金属粉末、其产品以及光伏电池的生产方法 |
CN102333606A (zh) * | 2009-02-25 | 2012-01-25 | 克莱麦克斯工程材料有限公司 | 钠/钼粉末压块及其生产方法 |
-
2013
- 2013-03-26 CN CN201310099385.7A patent/CN103160791B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1077714A (zh) * | 1992-04-14 | 1993-10-27 | 上海工业大学 | 环烷酸钼及其钼硫抗磨剂的制备工艺 |
JP2008156694A (ja) * | 2006-12-22 | 2008-07-10 | Mitsubishi Alum Co Ltd | スパッタリングターゲット材およびその製造方法 |
CN101919062A (zh) * | 2008-01-11 | 2010-12-15 | 克莱麦克斯工程材料有限公司 | 钠/钼复合金属粉末、其产品以及光伏电池的生产方法 |
CN102333606A (zh) * | 2009-02-25 | 2012-01-25 | 克莱麦克斯工程材料有限公司 | 钠/钼粉末压块及其生产方法 |
Non-Patent Citations (1)
Title |
---|
曹维成等: "掺杂不同微量元素对钼材性能的影响", 《稀有金属快报》, vol. 25, no. 8, 31 December 2006 (2006-12-31), pages 29 - 32 * |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104073771A (zh) * | 2014-07-01 | 2014-10-01 | 河北工业大学 | 一种钼掺钠溅射靶材的制备方法 |
CN104073771B (zh) * | 2014-07-01 | 2016-04-13 | 河北工业大学 | 一种钼掺钠溅射靶材的制备方法 |
CN104087903A (zh) * | 2014-07-25 | 2014-10-08 | 安泰科技股份有限公司 | 钼钠管型靶材及其制造方法和钼钠靶材 |
CN104894517A (zh) * | 2015-04-08 | 2015-09-09 | 无锡舒玛天科新能源技术有限公司 | 钠掺杂钼旋转靶材及其制备方法 |
CN104894517B (zh) * | 2015-04-08 | 2017-09-22 | 无锡舒玛天科新能源技术有限公司 | 钠掺杂钼旋转靶材及其制备方法 |
CN106591786A (zh) * | 2016-11-11 | 2017-04-26 | 洛阳科威钨钼有限公司 | 一种掺杂型钼靶材的制备方法 |
CN106591786B (zh) * | 2016-11-11 | 2019-02-15 | 洛阳科威钨钼有限公司 | 一种掺杂型钼靶材的制备方法 |
CN107815654A (zh) * | 2017-11-16 | 2018-03-20 | 金堆城钼业股份有限公司 | 一种制备二硫化钼溅射靶材的方法 |
CN107815654B (zh) * | 2017-11-16 | 2020-02-11 | 金堆城钼业股份有限公司 | 一种制备二硫化钼溅射靶材的方法 |
CN111593305A (zh) * | 2020-04-08 | 2020-08-28 | 辽宁工业大学 | 一种氢氧化钠掺杂制备钼钠靶材的方法 |
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CN103160791B (zh) | 2015-04-22 |
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