CN103080028B - 用于凝固硅锭的坩埚 - Google Patents

用于凝固硅锭的坩埚 Download PDF

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Publication number
CN103080028B
CN103080028B CN201180041722.6A CN201180041722A CN103080028B CN 103080028 B CN103080028 B CN 103080028B CN 201180041722 A CN201180041722 A CN 201180041722A CN 103080028 B CN103080028 B CN 103080028B
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CN
China
Prior art keywords
crucible
silicon
layer
polysilazane
forming
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Expired - Fee Related
Application number
CN201180041722.6A
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English (en)
Chinese (zh)
Other versions
CN103080028A (zh
Inventor
查尔斯·休格特
伊曼纽尔·弗拉奥特
海伦·里格尼尔
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D9/00—Crystallisation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/0087—Uses not provided for elsewhere in C04B2111/00 for metallurgical applications
    • C04B2111/00879—Non-ferrous metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
CN201180041722.6A 2010-08-27 2011-08-26 用于凝固硅锭的坩埚 Expired - Fee Related CN103080028B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1056804A FR2964117B1 (fr) 2010-08-27 2010-08-27 Creuset pour la solidification de lingot de silicium
FR1056804 2010-08-27
PCT/IB2011/053748 WO2012025905A1 (fr) 2010-08-27 2011-08-26 Creuset pour la solidification de lingot de silicium

Publications (2)

Publication Number Publication Date
CN103080028A CN103080028A (zh) 2013-05-01
CN103080028B true CN103080028B (zh) 2016-08-24

Family

ID=43037050

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180041722.6A Expired - Fee Related CN103080028B (zh) 2010-08-27 2011-08-26 用于凝固硅锭的坩埚

Country Status (8)

Country Link
US (1) US20130247334A1 (enExample)
EP (1) EP2609043A1 (enExample)
JP (1) JP5975994B2 (enExample)
KR (1) KR20130097186A (enExample)
CN (1) CN103080028B (enExample)
BR (1) BR112013004537A2 (enExample)
FR (1) FR2964117B1 (enExample)
WO (1) WO2012025905A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5557334B2 (ja) * 2010-12-27 2014-07-23 コバレントマテリアル株式会社 シリコン単結晶引上げ用シリカガラスルツボ
US9352389B2 (en) 2011-09-16 2016-05-31 Silicor Materials, Inc. Directional solidification system and method
FR2986228B1 (fr) 2012-01-31 2014-02-28 Commissariat Energie Atomique Creuset pour la solidification de lingot de silicium.
DE102012019519B4 (de) 2012-10-05 2015-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer diffusionshemmenden Beschichtung, Tiegel zum Schmelzen und/oder Kristallisieren von Nichteisenmetallen sowie Verwendungszwecke
TWI643983B (zh) * 2013-03-14 2018-12-11 美商希利柯爾材料股份有限公司 定向凝固系統及方法
DE102016201495B4 (de) 2016-02-01 2019-05-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Tiegel mit einer Innenbeschichtung aus SiC als Diffusionsbarriere für Metalle sowie Verfahren zu dessen Herstellung, Verwendung und darin hergestellte Halbleiterkristalle
JP6564151B1 (ja) * 2019-02-28 2019-08-21 株式会社アドマップ ＳｉＣ膜単体構造体
CN112457027B (zh) * 2020-11-26 2022-10-11 西安鑫垚陶瓷复合材料有限公司 大尺寸圆截面陶瓷基复合材料构件熔融渗硅工装及方法
KR102677112B1 (ko) * 2022-05-09 2024-06-20 (주)셀릭 저저항 대구경 잉곳 제조장치
CN116462520A (zh) * 2023-04-28 2023-07-21 长沙新立硅材料科技有限公司 一种用于单晶硅拉制的无氧氮化硅坩埚的制作方法

Citations (2)

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CN101389721A (zh) * 2006-02-23 2009-03-18 克拉里安特国际有限公司 用于阻垢和防腐蚀的包含聚硅氮烷的涂层

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AU603724B2 (en) * 1988-01-22 1990-11-22 Ethyl Corporation Organoborosilazane polymers
JPH0365574A (ja) * 1989-08-01 1991-03-20 Nkk Corp 炭素と炭化ケイ素からなる多孔体の製造方法
US5114749A (en) * 1989-08-01 1992-05-19 Nkk Corporation Method for manufacturing carbon material having good resistance to oxidation by coating the carbon material with an inorganic polysilazane and then heating
JPH0365581A (ja) * 1989-08-01 1991-03-20 Nkk Corp 炭素焼結体の耐酸化性向上方法
US5322825A (en) 1992-05-29 1994-06-21 Allied-Signal Inc. Silicon oxycarbonitride by pyrolysis of polycyclosiloxanes in ammonia
US5837318A (en) * 1995-04-26 1998-11-17 Mcdonnell Douglas Corporation Process for production of low dielectric ceramic composites
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TWI400369B (zh) * 2005-10-06 2013-07-01 Vesuvius Crucible Co 用於矽結晶的坩堝及其製造方法
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Also Published As

Publication number Publication date
US20130247334A1 (en) 2013-09-26
FR2964117A1 (fr) 2012-03-02
FR2964117B1 (fr) 2012-09-28
WO2012025905A1 (fr) 2012-03-01
KR20130097186A (ko) 2013-09-02
CN103080028A (zh) 2013-05-01
EP2609043A1 (fr) 2013-07-03
JP2013536150A (ja) 2013-09-19
BR112013004537A2 (pt) 2016-06-07
JP5975994B2 (ja) 2016-08-23

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