CN102815866A - 一种光纤预制棒的掺杂装置 - Google Patents
一种光纤预制棒的掺杂装置 Download PDFInfo
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- CN102815866A CN102815866A CN2012102943951A CN201210294395A CN102815866A CN 102815866 A CN102815866 A CN 102815866A CN 2012102943951 A CN2012102943951 A CN 2012102943951A CN 201210294395 A CN201210294395 A CN 201210294395A CN 102815866 A CN102815866 A CN 102815866A
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- doping
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- 239000013307 optical fiber Substances 0.000 title abstract description 45
- 239000012071 phase Substances 0.000 claims abstract description 55
- 239000007789 gas Substances 0.000 claims abstract description 46
- 238000006243 chemical reaction Methods 0.000 claims abstract description 45
- 239000007791 liquid phase Substances 0.000 claims abstract description 38
- 238000010438 heat treatment Methods 0.000 claims abstract description 36
- 230000008021 deposition Effects 0.000 claims abstract description 22
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 20
- 239000001301 oxygen Substances 0.000 claims abstract description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000002019 doping agent Substances 0.000 claims abstract description 18
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- 238000009834 vaporization Methods 0.000 claims description 2
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- 238000000034 method Methods 0.000 abstract description 48
- 239000000243 solution Substances 0.000 abstract description 42
- 238000002347 injection Methods 0.000 abstract description 29
- 239000007924 injection Substances 0.000 abstract description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 26
- 238000000151 deposition Methods 0.000 abstract description 25
- 229910052761 rare earth metal Inorganic materials 0.000 abstract description 24
- 238000002360 preparation method Methods 0.000 abstract description 19
- 239000000463 material Substances 0.000 abstract description 16
- 238000005253 cladding Methods 0.000 abstract description 14
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 14
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 abstract description 12
- 150000002500 ions Chemical class 0.000 abstract description 12
- 239000002131 composite material Substances 0.000 abstract description 11
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- 238000005229 chemical vapour deposition Methods 0.000 abstract description 5
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- 238000004017 vitrification Methods 0.000 abstract description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 28
- -1 rare-earth ions Chemical class 0.000 description 19
- 239000000835 fiber Substances 0.000 description 14
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 13
- 239000005049 silicon tetrachloride Substances 0.000 description 13
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 13
- 239000012792 core layer Substances 0.000 description 12
- 239000010410 layer Substances 0.000 description 12
- 239000002994 raw material Substances 0.000 description 12
- 239000011162 core material Substances 0.000 description 9
- 239000011259 mixed solution Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 6
- CKLHRQNQYIJFFX-UHFFFAOYSA-K ytterbium(III) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Yb+3] CKLHRQNQYIJFFX-UHFFFAOYSA-K 0.000 description 6
- HDGGAKOVUDZYES-UHFFFAOYSA-K erbium(iii) chloride Chemical compound Cl[Er](Cl)Cl HDGGAKOVUDZYES-UHFFFAOYSA-K 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 238000002791 soaking Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 241001075561 Fioria Species 0.000 description 3
- 230000005587 bubbling Effects 0.000 description 3
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- 239000011521 glass Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- KWMNWMQPPKKDII-UHFFFAOYSA-N erbium ytterbium Chemical compound [Er].[Yb] KWMNWMQPPKKDII-UHFFFAOYSA-N 0.000 description 2
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(iii) oxide Chemical compound O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- ICAKDTKJOYSXGC-UHFFFAOYSA-K lanthanum(iii) chloride Chemical compound Cl[La](Cl)Cl ICAKDTKJOYSXGC-UHFFFAOYSA-K 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000006060 molten glass Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 229940058401 polytetrafluoroethylene Drugs 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- ILOTUXNTERMOJL-UHFFFAOYSA-K thulium(iii) chloride Chemical compound Cl[Tm](Cl)Cl ILOTUXNTERMOJL-UHFFFAOYSA-K 0.000 description 2
- PYOOBRULIYNHJR-UHFFFAOYSA-K trichloroholmium Chemical compound Cl[Ho](Cl)Cl PYOOBRULIYNHJR-UHFFFAOYSA-K 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- YKIKHUWCDJLQGB-UHFFFAOYSA-N [Er].[La] Chemical compound [Er].[La] YKIKHUWCDJLQGB-UHFFFAOYSA-N 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- VYLVYHXQOHJDJL-UHFFFAOYSA-K cerium trichloride Chemical compound Cl[Ce](Cl)Cl VYLVYHXQOHJDJL-UHFFFAOYSA-K 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- QZVJQDVSMIUGPK-UHFFFAOYSA-L dichloroholmium Chemical compound Cl[Ho]Cl QZVJQDVSMIUGPK-UHFFFAOYSA-L 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000005365 phosphate glass Substances 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XHGGEBRKUWZHEK-UHFFFAOYSA-L tellurate Chemical compound [O-][Te]([O-])(=O)=O XHGGEBRKUWZHEK-UHFFFAOYSA-L 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01838—Reactant delivery systems, e.g. reactant deposition burners for delivering and depositing additional reactants as liquids or solutions, e.g. for solution doping of the deposited glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
- C03B2201/36—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers doped with rare earth metals and aluminium, e.g. Er-Al co-doped
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210294395.1A CN102815866B (zh) | 2012-08-17 | 2012-08-17 | 一种光纤预制棒的掺杂装置 |
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CN201210294395.1A CN102815866B (zh) | 2012-08-17 | 2012-08-17 | 一种光纤预制棒的掺杂装置 |
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CN102815866A true CN102815866A (zh) | 2012-12-12 |
CN102815866B CN102815866B (zh) | 2015-03-11 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107179580A (zh) * | 2017-06-30 | 2017-09-19 | 华中科技大学鄂州工业技术研究院 | 用于剥除高功率包层光的侧耦合光纤及其制备方法 |
CN107335386A (zh) * | 2016-04-29 | 2017-11-10 | 中国科学院大连化学物理研究所 | 一种催化反应器构型及制备和在无氧条件下催化甲烷直接合成乙烯的方法 |
CN108545924A (zh) * | 2018-06-29 | 2018-09-18 | 成都富通光通信技术有限公司 | 一种制作光纤预制棒的缩棒方法 |
CN109437546A (zh) * | 2018-12-03 | 2019-03-08 | 长飞光纤光缆股份有限公司 | 光纤预制棒加热炉及其加热掺杂方法 |
CN110161022A (zh) * | 2019-05-05 | 2019-08-23 | 程桂香 | 一种环保检测专用的污水水质检验装置 |
CN110456447A (zh) * | 2019-08-17 | 2019-11-15 | 山东光韵智能科技有限公司 | 一种防水防火光纤及其制备方法和采用该光纤的照明系统 |
CN110606657A (zh) * | 2018-06-15 | 2019-12-24 | 华中科技大学 | 一种大芯径稀土掺杂光纤预制棒及其制备方法 |
CN112299703A (zh) * | 2020-11-13 | 2021-02-02 | 中国电子科技集团公司第四十六研究所 | 一种掺杂溶液喷洒装置及喷洒方法 |
CN114044626A (zh) * | 2021-12-10 | 2022-02-15 | 中国电子科技集团公司第四十六研究所 | 一种基于fcvd的光纤预制棒稀土汽相掺杂方法 |
CN115028351A (zh) * | 2022-05-30 | 2022-09-09 | 武汉长盈通光电技术股份有限公司 | 光纤预制棒内孔在线式沉积系统及沉积方法 |
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CN87200763U (zh) * | 1987-01-27 | 1987-12-02 | 国家建筑材料工业局南京玻璃纤维研究设计院 | 光纤预制棒尾气清灰过滤控压装置 |
US4826288A (en) * | 1987-04-09 | 1989-05-02 | Polaroid Corporation, Patent Department | Method for fabricating optical fibers having cores with high rare earth content |
CN1490267A (zh) * | 2003-07-14 | 2004-04-21 | 烽火通信科技股份有限公司 | 一种制造掺稀土光纤预制棒的方法 |
CN102213792A (zh) * | 2011-06-09 | 2011-10-12 | 华中科技大学 | 一种大模场有源光纤及其制备方法 |
US20120014653A1 (en) * | 2009-03-26 | 2012-01-19 | Fujikura Ltd. | Manufacturing method for optical fiber preform and optical fiber |
-
2012
- 2012-08-17 CN CN201210294395.1A patent/CN102815866B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN87200763U (zh) * | 1987-01-27 | 1987-12-02 | 国家建筑材料工业局南京玻璃纤维研究设计院 | 光纤预制棒尾气清灰过滤控压装置 |
US4826288A (en) * | 1987-04-09 | 1989-05-02 | Polaroid Corporation, Patent Department | Method for fabricating optical fibers having cores with high rare earth content |
CN1490267A (zh) * | 2003-07-14 | 2004-04-21 | 烽火通信科技股份有限公司 | 一种制造掺稀土光纤预制棒的方法 |
US20120014653A1 (en) * | 2009-03-26 | 2012-01-19 | Fujikura Ltd. | Manufacturing method for optical fiber preform and optical fiber |
CN102213792A (zh) * | 2011-06-09 | 2011-10-12 | 华中科技大学 | 一种大模场有源光纤及其制备方法 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107335386B (zh) * | 2016-04-29 | 2021-01-22 | 中国科学院大连化学物理研究所 | 一种催化反应器构型及制备和在无氧条件下催化甲烷直接合成乙烯的方法 |
CN107335386A (zh) * | 2016-04-29 | 2017-11-10 | 中国科学院大连化学物理研究所 | 一种催化反应器构型及制备和在无氧条件下催化甲烷直接合成乙烯的方法 |
CN107179580A (zh) * | 2017-06-30 | 2017-09-19 | 华中科技大学鄂州工业技术研究院 | 用于剥除高功率包层光的侧耦合光纤及其制备方法 |
CN107179580B (zh) * | 2017-06-30 | 2019-12-10 | 华中科技大学鄂州工业技术研究院 | 用于剥除高功率包层光的侧耦合光纤及其制备方法 |
CN110606657A (zh) * | 2018-06-15 | 2019-12-24 | 华中科技大学 | 一种大芯径稀土掺杂光纤预制棒及其制备方法 |
CN108545924A (zh) * | 2018-06-29 | 2018-09-18 | 成都富通光通信技术有限公司 | 一种制作光纤预制棒的缩棒方法 |
CN109437546A (zh) * | 2018-12-03 | 2019-03-08 | 长飞光纤光缆股份有限公司 | 光纤预制棒加热炉及其加热掺杂方法 |
CN109437546B (zh) * | 2018-12-03 | 2021-08-24 | 长飞光纤光缆股份有限公司 | 光纤预制棒加热炉及其加热掺杂方法 |
CN110161022A (zh) * | 2019-05-05 | 2019-08-23 | 程桂香 | 一种环保检测专用的污水水质检验装置 |
WO2021031115A1 (zh) * | 2019-08-17 | 2021-02-25 | 山东光韵智能科技有限公司 | 一种防水防火光纤及其制备方法和采用该光纤的照明系统 |
CN110456447A (zh) * | 2019-08-17 | 2019-11-15 | 山东光韵智能科技有限公司 | 一种防水防火光纤及其制备方法和采用该光纤的照明系统 |
CN112299703A (zh) * | 2020-11-13 | 2021-02-02 | 中国电子科技集团公司第四十六研究所 | 一种掺杂溶液喷洒装置及喷洒方法 |
CN112299703B (zh) * | 2020-11-13 | 2024-03-12 | 中国电子科技集团公司第四十六研究所 | 一种掺杂溶液喷洒装置及喷洒方法 |
CN114044626A (zh) * | 2021-12-10 | 2022-02-15 | 中国电子科技集团公司第四十六研究所 | 一种基于fcvd的光纤预制棒稀土汽相掺杂方法 |
CN114044626B (zh) * | 2021-12-10 | 2023-05-02 | 中国电子科技集团公司第四十六研究所 | 一种基于fcvd的光纤预制棒稀土汽相掺杂方法 |
CN115028351A (zh) * | 2022-05-30 | 2022-09-09 | 武汉长盈通光电技术股份有限公司 | 光纤预制棒内孔在线式沉积系统及沉积方法 |
CN115028351B (zh) * | 2022-05-30 | 2024-10-11 | 武汉长盈通光电技术股份有限公司 | 光纤预制棒内孔在线式沉积系统及沉积方法 |
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