CN102673939B - 浮起输送装置 - Google Patents

浮起输送装置 Download PDF

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Publication number
CN102673939B
CN102673939B CN201210150843.0A CN201210150843A CN102673939B CN 102673939 B CN102673939 B CN 102673939B CN 201210150843 A CN201210150843 A CN 201210150843A CN 102673939 B CN102673939 B CN 102673939B
Authority
CN
China
Prior art keywords
mentioned
float
summit
anvil roll
aforesaid substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201210150843.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN102673939A (zh
Inventor
平田贤辅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Publication of CN102673939A publication Critical patent/CN102673939A/zh
Application granted granted Critical
Publication of CN102673939B publication Critical patent/CN102673939B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Catching Or Destruction (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Soil Working Implements (AREA)
CN201210150843.0A 2008-06-09 2009-06-08 浮起输送装置 Active CN102673939B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-150957 2008-06-09
JP2008150957A JP5422925B2 (ja) 2008-06-09 2008-06-09 浮上搬送装置
CN200910163948A CN101633442A (zh) 2008-06-09 2009-06-08 浮起输送装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN200910163948A Division CN101633442A (zh) 2008-06-09 2009-06-08 浮起输送装置

Publications (2)

Publication Number Publication Date
CN102673939A CN102673939A (zh) 2012-09-19
CN102673939B true CN102673939B (zh) 2015-11-04

Family

ID=41541200

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201210150843.0A Active CN102673939B (zh) 2008-06-09 2009-06-08 浮起输送装置
CN200910163948A Pending CN101633442A (zh) 2008-06-09 2009-06-08 浮起输送装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN200910163948A Pending CN101633442A (zh) 2008-06-09 2009-06-08 浮起输送装置

Country Status (4)

Country Link
JP (1) JP5422925B2 (enExample)
KR (1) KR101049872B1 (enExample)
CN (2) CN102673939B (enExample)
TW (1) TW201010921A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5604940B2 (ja) * 2010-03-31 2014-10-15 株式会社Ｉｈｉ 浮上搬送装置
KR20130065620A (ko) * 2011-12-09 2013-06-19 가부시키가이샤묘토쿠 부상 반송 유닛
WO2025015614A1 (en) * 2023-07-20 2025-01-23 Kateeva Inc. Substrate loading and staging without lift pins

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2004196482A (ja) * 2002-12-18 2004-07-15 Maruyasu Kikai Kk ローラコンベア
JP4626205B2 (ja) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 基板の受渡し方法、及びその装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4780984B2 (ja) * 2005-03-18 2011-09-28 オリンパス株式会社 基板搬送装置
JP4529794B2 (ja) * 2005-05-19 2010-08-25 シンフォニアテクノロジー株式会社 気体浮上搬送装置
CN101920849A (zh) * 2005-11-14 2010-12-22 株式会社Ihi 浮起装置及输送装置
JP4842748B2 (ja) * 2006-09-22 2011-12-21 オリンパス株式会社 基板搬送システム

Also Published As

Publication number Publication date
KR20090127818A (ko) 2009-12-14
JP2009292643A (ja) 2009-12-17
KR101049872B1 (ko) 2011-07-15
JP5422925B2 (ja) 2014-02-19
TW201010921A (en) 2010-03-16
TWI378066B (enExample) 2012-12-01
CN102673939A (zh) 2012-09-19
CN101633442A (zh) 2010-01-27

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