TW201010921A - Floating type conveying apparatus - Google Patents

Floating type conveying apparatus Download PDF

Info

Publication number
TW201010921A
TW201010921A TW098118735A TW98118735A TW201010921A TW 201010921 A TW201010921 A TW 201010921A TW 098118735 A TW098118735 A TW 098118735A TW 98118735 A TW98118735 A TW 98118735A TW 201010921 A TW201010921 A TW 201010921A
Authority
TW
Taiwan
Prior art keywords
floating
support roller
fluid
height
conveying
Prior art date
Application number
TW098118735A
Other languages
English (en)
Chinese (zh)
Other versions
TWI378066B (enExample
Inventor
Kensuke Hirata
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW201010921A publication Critical patent/TW201010921A/zh
Application granted granted Critical
Publication of TWI378066B publication Critical patent/TWI378066B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Catching Or Destruction (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Soil Working Implements (AREA)
TW098118735A 2008-06-09 2009-06-05 Floating type conveying apparatus TW201010921A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008150957A JP5422925B2 (ja) 2008-06-09 2008-06-09 浮上搬送装置

Publications (2)

Publication Number Publication Date
TW201010921A true TW201010921A (en) 2010-03-16
TWI378066B TWI378066B (enExample) 2012-12-01

Family

ID=41541200

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098118735A TW201010921A (en) 2008-06-09 2009-06-05 Floating type conveying apparatus

Country Status (4)

Country Link
JP (1) JP5422925B2 (enExample)
KR (1) KR101049872B1 (enExample)
CN (2) CN102673939B (enExample)
TW (1) TW201010921A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5604940B2 (ja) * 2010-03-31 2014-10-15 株式会社Ｉｈｉ 浮上搬送装置
CN103159028B (zh) * 2011-12-09 2017-05-03 株式会社妙德 悬浮输送单元
CN121795142A (zh) * 2023-07-20 2026-04-03 科迪华公司 无升降销的基板装载与暂存

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2004196482A (ja) * 2002-12-18 2004-07-15 Maruyasu Kikai Kk ローラコンベア
JP4626205B2 (ja) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 基板の受渡し方法、及びその装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4780984B2 (ja) * 2005-03-18 2011-09-28 オリンパス株式会社 基板搬送装置
JP4529794B2 (ja) * 2005-05-19 2010-08-25 シンフォニアテクノロジー株式会社 気体浮上搬送装置
CN1966371B (zh) * 2005-11-14 2012-08-15 株式会社Ihi 浮起装置及输送装置
JP4842748B2 (ja) * 2006-09-22 2011-12-21 オリンパス株式会社 基板搬送システム

Also Published As

Publication number Publication date
CN101633442A (zh) 2010-01-27
CN102673939A (zh) 2012-09-19
TWI378066B (enExample) 2012-12-01
JP5422925B2 (ja) 2014-02-19
KR20090127818A (ko) 2009-12-14
CN102673939B (zh) 2015-11-04
KR101049872B1 (ko) 2011-07-15
JP2009292643A (ja) 2009-12-17

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