CN101815662B - 悬浮装置以及悬浮输送装置 - Google Patents

悬浮装置以及悬浮输送装置 Download PDF

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CN101815662B
CN101815662B CN200880109907.4A CN200880109907A CN101815662B CN 101815662 B CN101815662 B CN 101815662B CN 200880109907 A CN200880109907 A CN 200880109907A CN 101815662 B CN101815662 B CN 101815662B
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平田贤辅
和田芳幸
田中刈入
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Abstract

本发明的用于利用流体使对象物悬浮地进行输送的悬浮输送装置，具备：分别具备上部体和腿部并沿第一方向以及第二方向排列的多个悬浮装置，该上部体具备上面并具备喷出上述流体在上述对象物和上述上面之间产生压力的喷出孔，该腿部为供给上述流体而与上述喷出孔连通且与上述上部体的下部连接并且为确保容许上述喷出来的流体逃散的通道而具有比上述上部体狭窄的外形；将上述流体向上述腿部供给的流体供给装置；以及用于输送对象物的输送装置。

Description

悬浮装置以及悬浮输送装置
技术领域
本发明涉及使用空气等的流体使对象物悬浮的悬浮装置以及悬浮的同时进行输送的悬浮输送装置。
背景技术
提出了几种使用空气等的流体使对象物悬浮的同时进行输送的悬浮输送装置。这些悬浮输送装置典型地是具备多个具有使空气等的流体通过的喷出孔的悬浮装置。悬浮装置沿输送对象物的方向构成列，向对象物喷出空气等的流体并产生压力。对象物利用该压力悬浮，并受到由输送装置得到的驱动力而被输送。相关技术公开于日本国专利申请公开2006-182563号公报中。
根据现有的悬浮装置，在对象物极为宽大的场合，尤其是容易挠曲的材质的场合，保持平坦性地进行悬浮以及输送是困难的。
发明内容
本发明的目的在于提供能够保持对象物的平坦性原状悬浮地进行输送的悬浮输送装置。
根据本发明的第一方案，一种利用由流体供给装置供给的流体使对象物浮起的悬浮装置，具备：上部体，具备上面并具备喷出上述流体在上述对象物和上述上面之间产生压力的喷出孔；以及腿部，为供给上述流体而与上述喷出孔连通且与上述上部体的下部连接并且为确保容许上述喷出来的流体逃散的通道而具有比上述上部体狭窄的外形。
根据本发明的第二方案，用于利用流体使对象物浮起地进行输送的悬浮输送装置，具备：分别具备上部体和腿部并沿第一方向以及第二方向排列的多个悬浮装置，该上部体具备上面并具备喷出上述流体在上述对象物和上述上面之间产生压力的喷出孔，该腿部为供给上述流体而与上述喷出孔连通且与上述上部体的下部连接并且为确保容许上述喷出来的流体逃散的通道而具有比上述上部体狭窄的外形；将上述流体向上述腿部供给的流体供给装置；以及用于输送对象物的输送装置。
优选上述上部体和上述腿部在正面看时呈T字形状。而且优选还具备连通上述流体供给装置和上述腿部的腔室。或者优选上述喷出孔朝向上述喷出孔包围的区域至少在上述上面附近倾斜。
而且优选在上述悬浮输送装置中，上述各悬浮输送装置排列成在上述各上部体之间分别留有间隙。
附图说明
图1是本发明的实施方式的悬浮装置的局部剖视图，是沿着图2的I-I线所取的图。
图2是上述悬浮装置的俯视图。
图3是从图2的III方向观察到的上述悬浮装置的侧视图。
图4是从图2的IV方向观察到的上述悬浮装置的正视图。
图5是上述悬浮输送装置所具备的悬浮装置的俯视图以及正视图。
具体实施方式
在各悬浮装置的能力不均匀的场合或悬浮装置间的间隔不十分紧密的场合，不难理解对象物的平坦性会容易受损。但是在对这些问题进行处理的场合，经常体会到：相比对象物的端部附近，中央附近的悬浮高度变得更高。根据本发明的发明者的研究这被确认为是由于在对象物的端部附近空气容易逃散，另一方面，在中央附近没有空气逃散的路径，即使悬浮装置的能力均匀，结果压力还是会在中央附近变高。以下说明的本发明的实施方式中的悬浮输送装置具有可确保空气逃散的路径的结构。
以下参照附图对本发明的实施方式进行说明。在本说明书、权利要求书及附图中，前方、后方、左方及右方在图中分别定义为标记为FF、FR、L及R的方向。另外，长度方向是连接前和后的方向，宽度方向是与之正交的方向，即连接左和右的方向。该定义为了方便说明，本发明并不必限定于此。
根据本发明的实施方式的悬浮输送装置1是用于使对象物W在垂直方向浮起地在水平输送方向(例如后方FR)进行输送的装置。作为对象物W，整体平面状的比较薄的物体，例如LCD(液晶显示器)用的玻璃基板等的薄板适合。对象物W不一定需要全体地平面状，如果其下面的至少一部分是平面状便可以。为使其浮起，利用例如空气那样的流体。
对象物W是LCD用的薄玻璃基板等的需要在洁净环境下输送的物品的场合，上述悬浮输送装置1在无尘室内等的洁净环境下使用。
如图2所示，悬浮输送装置1具备：在前后方向延伸的基台3；在基台3上在前后方向形成列的输送装置11；以及在基台3上并在前后方向及左右方向的两方向形成列的多个悬浮装置37。悬浮装置37如后所述利用空气那样的流体使对象物W浮起。也可以利用氮或氩等的其它气体、或液体等的其它流体来代替空气。
基台3具备：沿长度方向延伸的工作台5；支撑工作台5的多个支柱7；以及将支柱7相互结合的加强部件9。输送装置11设置在工作台5上。
输送装置11在工作台5上的左端及右端附近具有在对象物W的输送方向上分别形成列的多个辊13。各辊13分别通过旋转轴与蜗轮17一体连接，并由托架15旋转自如地支撑。以在前后方向贯穿工作台5的方式具备一对驱动轴19，各驱动轴19具有与各蜗轮17可驱动地啮合的蜗杆21。在各驱动轴19的前端通过联轴器等可驱动地连接马达23的输出轴。这样，各辊13接受马达23的驱动力会以相同转速旋转。如图4所示，上述各辊13的上端部比上述悬浮装置37的上面稍微向上方突出，并在单一面上对齐地进行配置。对象物W即使处于浮起来的状态，如图4所示为受到驱动力也能与辊13接触。
马达23无需是一对，也可以是两个驱动轴19通过链等的适当的结合机构与单一马达连接。并且，也可以是将可驱动的夹持器或带式输送机等的输送机构应用于输送装置11来代替辊。
参照图1～3，工作台5具备能使空气流通的多个腔室25。或者还可以是单一的腔室。各腔室25在宽度方向延伸，并在长度方向隔开间隔地形成列。各腔室25在其下部具备容许空气流入的一个以上的引入口27，在其上部具备与悬浮装置37连通的多个开口29。各引入口27具备通过托架33支撑在工作台5上的送风装置31。送风装置31是用于供给空气那样的流体的装置，可利用由马达驱动的风扇，但并不限于此。既可以由压缩器供给空气，也可以利用预先储存了压缩了的空气、氮气或氩气等的储气瓶等。在邻接的腔室25之间设有分别连通工作台5上的空间和地板B侧的空间的开口35，希望开口35在宽度方向延伸。
各悬浮装置37具备：具有平坦的上面的上部体39；以及与其下部连接的腿部43。上部体39和腿部43均为空心，内部相互连通。腿部43分别以内部与腔室25的开口29连通的方式固定在工作台5上。悬浮装置37在工作台5上分别沿腔室25在宽度方向形成列，再在长度方向也形成列。
如图5所示，上部体39作为一个例子是矩形，具备与其内部连通并在上面开口的可使空气通过的喷出孔41。该喷出孔41作为一个例子是矩形的环状，但并不限于此，也可以是椭圆形的环状、或一部分被封闭的环状、或者多个小孔排列成环状的形状等其它各种形状。喷出孔41朝向其包围的区域(即朝向内侧)至少在上面附近倾斜。通过具有朝向内侧的倾斜度的喷出孔的空气，其流量越多与对象物之间产生的压力也越高，因而使对象物W较高地浮起，因此就环状并朝向内侧倾斜的喷出孔41而言，通过空气流量的控制，提供浮起高度的可控性。虽然倾斜度越大其倾向越明显，但是若过大则上部体39的制作变得困难，因此倾斜度优选例如45°，但并不限于此。喷出孔41的尺寸与倾斜度在哪个上部体39中实质上都相等。
腿部43具有比上部体39狭窄的外形。与上部体39的比较的腿部43的狭窄度优选在长度方向是必需的，但是也可以取代之或对其进行补充，并对宽度方向付与狭窄度。上部体39和腿部43在正面看时呈T字形状。由于腿部43比上部体39狭窄，因此腿部43间的间隙如图1所示，形成容许喷出来的空气逃散的通道P。
最好是，多个悬浮装置37以其上面彼此呈单一平面的方式使高度一致。这对稳定对象物W的浮起高度有利。
若从送风装置31向腔室25供给空气，则各腔室25向各悬浮装置37均匀地分配空气，从各喷出孔41喷出空气。喷出来的空气在上部体39的上面与对象物W的下面之间即喷出孔41的开口包围的空间产生均匀的压力，因而对上述对象物W给与浮力使其浮起来。另一方面，通过驱动一对马达23，从而一对驱动轴19同步旋转。通过蜗轮17与蜗杆21的啮合，驱动轴19的旋转传到各辊13上。对象物W通过与旋转的辊13接触，从而以浮起来的状态被输送。
通过上述结构，哪个悬浮装置37实质上都产生相等的压力。从各悬浮装置37喷出来的空气在产生均匀的压力之后朝向外侧，经由悬浮装置37间的间隙流向通道P，向外部逃散。由于确保了空气逃散的通道P，因此即使悬浮装置37间的间隙比较狭窄，也不会对空气的逃散造成障碍。所以，能够相互接近地设置悬浮装置37。另外，即使在对象物W的中央附近，由于经由通道P空气的逃散容易，因此防止了对象物W的中央附近更高地浮起的情况。即、对象物W保持平坦性地浮起。
参照优选的实施方式对本发明进行了说明，但是本发明并不限定于上述实施方式。本技术领域的普通技术人员可以基于上述公开的内容通过实施方式的修改或变形来实施本发明。
产业上的可利用性
可提供能够保持对象物的平坦性原状悬浮地进行输送的悬浮输送装置。

Claims (4)

1.一种悬浮输送装置，用于利用流体使对象物浮起地进行输送，其特征在于，具备：
分别具备上部体和腿部并沿第一方向以及第二方向排列的多个悬浮装置，该上部体具备上面并具备喷出上述流体在上述对象物和上述上面之间产生压力的喷出孔，该腿部为供给上述流体而与上述喷出孔连通且与上述上部体的下部连接并且为确保容许上述喷出来的流体逃散的通道而具有比上述上部体狭窄的外形；
将上述流体向上述腿部供给的流体供给装置；以及
用于输送上述对象物的输送装置，
上述各悬浮装置为在上述各上部体之间分别留有间隙而在上述第一方向以及上述第二方向相互分离地排列，为使上述流体向上述通道流动，上述间隙与上述通道连通。
2.根据权利要求1所述的悬浮输送装置，其特征在于，
上述上部体和上述腿部在正面看时呈T字形状。
3.根据权利要求1所述的悬浮输送装置，其特征在于，
还具备连通上述流体供给装置和上述腿部的腔室。
4.根据权利要求1所述的悬浮输送装置，其特征在于，
上述喷出孔朝向上述喷出孔包围的区域至少在上述上面附近倾斜。
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1176625A (zh) * 1995-02-28 1998-03-18 三星电子株式会社 输送引线框的方法和装置及用这种方法和装置的在线系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
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JPS57121524A (en) * 1981-01-16 1982-07-29 Matsushita Electric Ind Co Ltd Float-system transport apparatus
JPS5947457B2 (ja) * 1982-11-15 1984-11-19 株式会社東芝 半導体ウェファ−の洗浄方法
US5222840A (en) * 1991-06-21 1993-06-29 The Stolle Corporation Double plenum air conveyor/accumulator
JP4251279B2 (ja) * 2003-04-14 2009-04-08 株式会社ダイフク 板状体搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ 浮上装置および搬送装置
WO2007088614A1 (ja) * 2006-02-01 2007-08-09 Hirata Corporation ノズル板及び該ノズル板を用いた気流浮上装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1176625A (zh) * 1995-02-28 1998-03-18 三星电子株式会社 输送引线框的方法和装置及用这种方法和装置的在线系统

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开2000-272752A 2000.10.03
JP特开2001-10724A 2001.01.16
JP特开2006-182563A 2006.07.13

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