WO2009044612A1 - 浮上装置及び浮上搬送装置 - Google Patents

浮上装置及び浮上搬送装置 Download PDF

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Publication number
WO2009044612A1
WO2009044612A1 PCT/JP2008/066407 JP2008066407W WO2009044612A1 WO 2009044612 A1 WO2009044612 A1 WO 2009044612A1 JP 2008066407 W JP2008066407 W JP 2008066407W WO 2009044612 A1 WO2009044612 A1 WO 2009044612A1
Authority
WO
WIPO (PCT)
Prior art keywords
floating
fluid
carrier
upper body
carrying
Prior art date
Application number
PCT/JP2008/066407
Other languages
English (en)
French (fr)
Inventor
Kensuke Hirata
Yoshiyuki Wada
Kai Tanaka
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to KR2020127000020U priority Critical patent/KR20120003627U/ko
Priority to CN200880109907.4A priority patent/CN101815662B/zh
Publication of WO2009044612A1 publication Critical patent/WO2009044612A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

　対象物を流体により浮上させて搬送するための浮上搬送装置は、上面を備え、前記流体を噴出して前記対象物と前記上面との間に圧力を生ぜしめる噴出孔を備えた上部体と、前記流体を供給するべく前記噴出孔と連通し、前記上部体の下部に連結され、前記噴出した流体の逃散を許容する通路を確保するべく前記上部体より狭い外形を有する脚部と、をそれぞれ備え、第１の方向および第２の方向に沿って配列した複数の浮上装置と、前記流体を前記脚部へ供給する流体供給装置と、前記対象物を搬送するための搬送装置と、を備える。
PCT/JP2008/066407 2007-10-04 2008-09-11 浮上装置及び浮上搬送装置 WO2009044612A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR2020127000020U KR20120003627U (ko) 2007-10-04 2008-09-11 부상 장치 및 부상 반송 장치
CN200880109907.4A CN101815662B (zh) 2007-10-04 2008-09-11 悬浮装置以及悬浮输送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007261386 2007-10-04
JP2007-261386 2007-10-04

Publications (1)

Publication Number Publication Date
WO2009044612A1 true WO2009044612A1 (ja) 2009-04-09

Family

ID=40526041

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/066407 WO2009044612A1 (ja) 2007-10-04 2008-09-11 浮上装置及び浮上搬送装置

Country Status (5)

Country Link
JP (1) JP5239606B2 (ja)
KR (2) KR20100054857A (ja)
CN (2) CN101815662B (ja)
TW (1) TW200925089A (ja)
WO (1) WO2009044612A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5581611B2 (ja) * 2009-06-02 2014-09-03 株式会社Ｉｈｉ 浮上搬送装置及び浮上ユニット
GB2471712A (en) * 2009-07-10 2011-01-12 De Beers Centenary AG Gemstone alignment system
CN105571938A (zh) * 2016-01-14 2016-05-11 西安交通大学 一种水浮式超薄玻璃基板测量平台
CN111285107B (zh) * 2020-02-24 2020-09-15 江苏科技大学 无接触移动操作装置及控制方法
JP7437186B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
WO2007088936A1 (ja) * 2006-02-01 2007-08-09 Hirata Corporation 気流搬送装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121524A (en) * 1981-01-16 1982-07-29 Matsushita Electric Ind Co Ltd Float-system transport apparatus
JPS5947457B2 (ja) * 1982-11-15 1984-11-19 株式会社東芝 半導体ウェファ−の洗浄方法
US5222840A (en) * 1991-06-21 1993-06-29 The Stolle Corporation Double plenum air conveyor/accumulator
KR960032667A (ko) * 1995-02-28 1996-09-17 김광호 리드프레임의 이송방법
JP4251279B2 (ja) * 2003-04-14 2009-04-08 株式会社ダイフク 板状体搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
WO2007088936A1 (ja) * 2006-02-01 2007-08-09 Hirata Corporation 気流搬送装置

Also Published As

Publication number Publication date
CN101643152B (zh) 2013-06-26
TW200925089A (en) 2009-06-16
CN101815662B (zh) 2013-02-20
KR20100054857A (ko) 2010-05-25
CN101643152A (zh) 2010-02-10
JP2009105377A (ja) 2009-05-14
JP5239606B2 (ja) 2013-07-17
CN101815662A (zh) 2010-08-25
TWI367193B (ja) 2012-07-01
KR20120003627U (ko) 2012-05-24

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